CN102564696A - Portable vacuum gauge calibration system and method thereof - Google Patents
Portable vacuum gauge calibration system and method thereof Download PDFInfo
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- CN102564696A CN102564696A CN2012100279970A CN201210027997A CN102564696A CN 102564696 A CN102564696 A CN 102564696A CN 2012100279970 A CN2012100279970 A CN 2012100279970A CN 201210027997 A CN201210027997 A CN 201210027997A CN 102564696 A CN102564696 A CN 102564696A
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Abstract
The invention relates to a portable vacuum gauge calibration system and a method thereof and belongs to a measurement technology field. The system and the method are used to calibrate or test the vacuum gauge on site or in a laboratory with a wide measuring range. The system comprises: a mechanical pump, a first vacuum valve, a molecular pump, a second vacuum valve, a first vacuum gauge, a second vacuum gauge, a third vacuum gauge, a valve, a fourth vacuum gauge, a hole, a fine-tuning vacuum valve, a gas source, a vacuum chamber and a fifth vacuum gauge. The whole system adopts a pipeline to connect each other. According to the invention, a reference standard is used to directly compare and calibrate the vacuum gauge. When a calibrated scope is 10< minus 1> to 10 <5> Pa, a capacitance diaphragm gauge is used as the reference standard. When the calibration scope is 10 <minus 6> to 10 <minus 2>, a B-A type secondary standard ionization gauge is used as the reference standard. During a calibration process, the proper reference standard is selected according to the calibrated scope and a vacuum degree needed by the vacuum chamber is determined.
Description
Technical field
The present invention relates to portable vacuum gauge calibration system and method, be used for the calibration or the test of interior scene of broad range ability or laboratory vacuum gauge, belong to field of measuring technique.
Background technology
In numerous research and production processes; Adopt a large amount of vacuum gauge monitoring process of producing product; Its measurement result has material impact to the quality of product, but during the vacuum gauge that calibrated in the laboratory uses at the scene, because the measure of the change result of environmental baseline and the generation of laboratory calibration data are than large deviation; A large amount of vacuum gauge of while is sent to the laboratory calibration and will causes production line to stop to produce, and causes serious economy loss.Therefore this patent has proposed portable vacuum gauge calibration system and method, and the weight of system is less than 40 kilograms, and calibration range is 10
-6～10
5Pa.
Document " development of comparison method vacuumatic measuring standard set-up ", " aerospace instrumentation technology " the 66th phase, the 6th phase in 1992, the 70th～73 page ", introduced the calibration steps and the calibration system of comparison method vacuum gauge, but its calibration range is 10
-4～10
5Pa, and 10
-4～10
-1Measure through magnetic suspension rotor gauge in the Pa pressure limit; The lower limit of this measuring method is limited by the magnetic suspension rotor gauge measurement lower limit; The magnetic suspension rotor gauge cost is relatively more expensive simultaneously; It is huge to add this systematic comparison, only is adapted at the laboratory and uses, and can't satisfy the calibration requirements of on-the-spot vacuum gauge.This patent has proposed portable vacuum gauge calibration system and method, and through the on-the-spot comparison calibration of normative reference vacuum gauge, system has light weight (less than 40 kilograms), calibration range is wide by (10
-6～10
5Pa), advantage such as portable, thereby solved the calibration problem of on-the-spot various vacuum gauges.
Summary of the invention
The objective of the invention is in order to propose portable vacuum gauge calibration system and method.
The objective of the invention is to realize through following technical scheme.
Portable vacuum gauge calibration of the present invention system comprises mechanical pump 1, first vacuum valve 2, molecular pump 3, second vacuum valve 4, first vacuum gauge 5, second vacuum gauge 6, the 3rd vacuum gauge 7, valve 8, the 4th vacuum gauge 9, aperture 10, fine setting vacuum valve 11, source of the gas 12, vacuum chamber 13 and the 5th vacuum gauge 14;
When the scope that is calibrated 10
5～10
-1During Pa, adopt capacitor thin film to advise standard as a reference, when calibration range 10
-6～10
-2During Pa, adopt B-A type secondary standard ionization gauge standard as a reference, calibration process is selected suitable normative reference according to the scope that is calibrated and is confirmed the vacuum tightness of vacuum chamber needs;
The 3rd vacuum gauge 7 and the 4th vacuum gauge 9 adopt capacitor thin film rule (CDG) standard as a reference, and its full scale is respectively 1Torr, 1000Torr, and precision all is less than or equal to 0.12% of reading, must stablize more than 4 hours before using;
Selected the 5th vacuum gauge 14 is that the monitoring vacuum gauge is compound rule, and its measurement range is 10
-9～10
5Pa can directly open under an atmospheric pressure;
The weight of total system is less than 40 kilograms; Adopt pipeline to connect between the total system.
Portable vacuum gauge calibration method of the present invention, concrete steps are:
1) will be calibrated second vacuum gauge 6 and be installed on the vacuum chamber 13, and the inspection sealing;
2) open mechanical pump 1, open first vacuum valve 2 and 4 pairs of vacuum chambers 13 of second vacuum valve and valve pipe then and bleed, open the 5th vacuum gauge 14,, open molecular pump 3 and vacuumize when the 5th vacuum gauge 14 measured values during less than 10Pa;
3) when vacuum tightness is less than 0.1Pa in the vacuum chamber 13, open valve 8, if calibration range is 10
-6～10
-2During Pa, open first vacuum gauge 5 and second vacuum gauge 6, and get into the 4th) step; If calibration range is 10
-1～10
5Open second vacuum gauge 6, the 3rd vacuum gauge 7 and the 4th vacuum gauge 9 during Pa, and get into the 5th) step;
4) if calibration range 10
-6～10
-2During Pa, vacuum tightness is less than 1 * 10 in vacuum chamber 13
-7During Pa (indicated value of the 5th vacuum gauge 14), introduce gases to vacuum chamber 13 through fine setting vacuum valve 11, in vacuum chamber 13 after the pressure stability as a calibration point, record is calibrated the indicated value of second vacuum gauge 6 and normative reference first vacuum gauge 5;
5) if 10
-1～10
5During Pa, vacuum tightness is less than 1 * 10 in vacuum chamber 13
-4During Pa (indicated value of the 5th vacuum gauge 14); After closing second vacuum valve 4; Introduce gas through fine setting vacuum valve 11 to vacuum chamber 13, after the pressure stability, record is calibrated the indicated value of second vacuum gauge 6 and normative reference the 3rd vacuum gauge 7 or the 4th vacuum gauge 9 in vacuum chamber 13;
6) close all vacuum valves; Close vacuum meter, molecular pump, mechanical pump and all working instrument; And in vacuum chamber 13, introduce nitrogen and protect, provide calibration result at last, be linear if be calibrated vacuum gauge; Provide modifying factor C=Ps/Pm (Ps normative reference gaging pressure, Pm is for being calibrated the vacuum gauge gaging pressure); If be calibrated vacuum gauge is non-linear, provides calibration data or diagram.
Above-mentioned steps 1) sealing after second vacuum gauge 6 is installed in will be got well, and needs vacuum chamber to reach the desired vacuum tightness of calibration;
Above-mentioned steps 3) select to open normative reference according to the calibration needs in, the calibration range of the 4th vacuum gauge 9 is 10
5～10
2Pa; The calibration range of the 3rd vacuum gauge 7 is 100～0.1Pa; The calibration range of first vacuum gauge 5 is 10
-6～10
-2Pa.
Above-mentioned steps 4) if in calibrate 10
-6During Pa, vacuum chamber need obtain less than 1 * 10
-7The vacuum tightness of Pa is less than 10
-6The calibration range of Pa, the vacuum tightness during the vacuum chamber calibration need be lower than calibration range two one magnitude and get final product.
Above-mentioned steps 4) one magnitude is got 3 calibration points at least and in the step 5), calibration point be respectively the order of magnitude 30%, 60% and 90% near, each point is got repeatedly average value measured as a result of.
Above-mentioned steps 5) when vacuum chamber 13 pressure during greater than 130Pa, 8 pairs the 3rd vacuum gauges 7 of valve-off are protected in.
Above-mentioned steps 6) close the instrument erection sequence and carry out, in vacuum chamber 13, introducing nitrogen must be slowly to carry out; If be calibrated second vacuum gauge 6 are linear vacuum rule, provide modifying factor, if nonlinear, provide measurement result comparison sheet or figure.
Above-mentioned steps 6) the synthetic uncertainty of measurement of the measurement standard of system is in: when calibration range 10
-6～10
-2Pa is less than 10%; When calibration range 10
-1～10
5Pa is less than 2%.
Beneficial effect
The present invention adopts normative reference directly to compare the calibration vacuum gauge, when the scope that is calibrated 10
-1～10
5During Pa, adopt capacitor thin film to advise standard as a reference, when calibration range 10
-6～10
-2During Pa, adopt B-A type secondary standard ionization gauge standard as a reference, calibration process is selected suitable normative reference according to the scope that is calibrated and is confirmed the vacuum tightness of vacuum chamber needs.If be calibrated vacuum gauge is linear, provides modifying factor; If be calibrated vacuum gauge is non-linear, provides calibration data or diagram.
Description of drawings
Fig. 1 is a system architecture synoptic diagram of the present invention;
Wherein, 1-mechanical pump, 2-first vacuum valve, 3-molecular pump, 4-second vacuum valve; 5-first vacuum gauge, 6-second vacuum gauge, 7-the 3rd vacuum gauge, 8-valve, 9-the 4th vacuum gauge; The 10-aperture, 11-finely tunes vacuum valve, 12-source of the gas, 13-vacuum chamber, 14-the 5th vacuum gauge.
Embodiment
Below in conjunction with accompanying drawing and embodiment, specific embodiments of the invention describes in further detail.Following examples are used to explain the present invention, but are not restriction scopes of the present invention.
Embodiment
Portable vacuum gauge calibration system comprises mechanical pump 1, first vacuum valve 2, molecular pump 3, second vacuum valve 4, first vacuum gauge 5, second vacuum gauge 6, the 3rd vacuum gauge 7, valve 8, the 4th vacuum gauge 9, aperture 10, fine setting vacuum valve 11, source of the gas 12, vacuum chamber 13 and the 5th vacuum gauge 14;
When the scope that is calibrated 10
5～10
-1During Pa, adopt capacitor thin film to advise standard as a reference, when calibration range 10
-6～10
-2During Pa, adopt B-A type secondary standard ionization gauge standard as a reference, calibration process is selected suitable normative reference according to the scope that is calibrated and is confirmed the vacuum tightness of vacuum chamber needs;
The 3rd vacuum gauge 7 and the 4th vacuum gauge 9 adopt capacitor thin film rule (CDG) standard as a reference, and its full scale is respectively 1Torr, 1000Torr, and precision all is less than or equal to 0.12% of reading, must stablize more than 4 hours before using;
Selected the 5th vacuum gauge 14 is that the monitoring vacuum gauge is compound rule, and its measurement range is 10
-9～10
5Pa can directly open under an atmospheric pressure;
The weight of total system is less than 40 kilograms; Adopt pipeline to connect between the total system.
Portable vacuum gauge calibration method of the present invention, concrete steps are:
1) will be calibrated second vacuum gauge 6 and be installed on the vacuum chamber 13, and the inspection sealing;
2) open mechanical pump 1, open first vacuum valve 2 and 4 pairs of vacuum chambers 13 of second vacuum valve and valve pipe then and bleed, open the 5th vacuum gauge 14,, open molecular pump 3 and vacuumize when the 5th vacuum gauge 14 measured values during less than 10Pa;
3) when vacuum tightness is less than 0.1Pa in the vacuum chamber 13, open valve 8, needing calibration range is 10
-6～10
-2During Pa, open first vacuum gauge 5 and second vacuum gauge 6;
4) in vacuum chamber 13 vacuum tightness less than 1 * 10
-7During Pa, the indicated value of the 5th vacuum gauge 14 is 9.2 * 10
-8Pa introduces gases through fine setting vacuum valve 11 to vacuum chamber 13, in vacuum chamber 13 after the pressure stability as a calibration point; Measure and adopt pressure order from low to high; Each order of magnitude is selected 3 calibration points, and (being respectively 30%, 60%, 90%), for example working as base measuring pressure is 10
-6During the Pa magnitude, calibration point is chosen 3*10
-6Pa, 6*10
-6Pa, 9*10
-6Pa; Record is calibrated the indicated value of second vacuum gauge 6 and normative reference first vacuum gauge 5, for example 10
-5The Pa magnitude is respectively 2.8 * 10
-5Pa, 2.9 * 10
-5Pa;
5) after calibration finishes, close all vacuum valves, close vacuum meter, molecular pump, mechanical pump and all working instrument; And in vacuum chamber 13, introduce nitrogen and protect; Pressure is 10098Pa, and it is linear being calibrated vacuum gauge, and the modifying factor in the gamut scope is 0.97.
The above only is a preferred implementation of the present invention; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from know-why of the present invention; Can also make some improvement and replacement, these improvement and replacement also should be regarded as protection scope of the present invention.
Claims (7)
1. portable vacuum gauge calibration system is characterized in that: comprise mechanical pump (1), first vacuum valve (2), molecular pump (3), second vacuum valve (4), first vacuum gauge (5), second vacuum gauge (6), the 3rd vacuum gauge (7), valve (8), the 4th vacuum gauge (9), aperture (10), fine setting vacuum valve (11), source of the gas (12), vacuum chamber (13) and the 5th vacuum gauge (14);
Mechanical pump (1) is connected with an end of first vacuum valve (2); The other end of first vacuum valve (2) is connected with an end of molecular pump (3); The other end of molecular pump (3) is connected with an end of second vacuum valve (4), and the other end of second vacuum valve (4) is connected with vacuum chamber (13); Vacuum chamber (13) also is connected with an end of an end, the 5th vacuum gauge (14) and the aperture (10) of first vacuum gauge (5), second vacuum gauge (6), the 4th vacuum gauge (9); The other end of the 4th vacuum gauge (9) is connected with an end of valve (8), and the other end of valve (8) is connected with the 3rd vacuum gauge (7); The other end of aperture (10) is connected with an end of fine setting vacuum valve (11), and the other end of fine setting vacuum valve (11) is connected with source of the gas (12); The weight of total system is less than 40 kilograms; Adopt pipeline to connect between the total system.
2. portable vacuum gauge calibration method is characterized in that concrete steps are:
1) will be calibrated second vacuum gauge (6) and be installed on the vacuum chamber (13), and the inspection sealing;
2) open mechanical pump (1), open first vacuum valve (2) then and second vacuum valve (4) is bled to vacuum chamber (13) and valve pipe, open the 5th vacuum gauge (14),, open molecular pump (3) and vacuumize when the 5th vacuum gauge (14) measured value during less than 10Pa;
3) when vacuum tightness is less than 0.1Pa in the vacuum chamber (13), open valve (8), if calibration range is 10
-6～10
-2During Pa, open first vacuum gauge (5) and second vacuum gauge (6), and get into the 4th) step; If calibration range is 10
-1～10
5Open second vacuum gauge (6), the 3rd vacuum gauge (7) and the 4th vacuum gauge (9) during Pa, and get into the 5th) step;
4) if calibration range 10
-6～10
-2During Pa, vacuum tightness is less than 1 * 10 in vacuum chamber (13)
-7The indicated value of the 5th vacuum gauge (14) during Pa; Introduce gas through fine setting vacuum valve (11) to vacuum chamber (13); In vacuum chamber (13) after the pressure stability as a calibration point, record is calibrated the indicated value of second vacuum gauge (6) and normative reference first vacuum gauge (5);
5) if 10
-1～10
5During Pa, vacuum tightness is less than 1 * 10 in vacuum chamber (13)
-4The indicated value of the 5th vacuum gauge (14) during Pa; After closing second vacuum valve (4); Introduce gas through fine setting vacuum valve (11) to vacuum chamber (13); After the pressure stability, record is calibrated the indicated value of second vacuum gauge (6) and normative reference the 3rd vacuum gauge (7) or the 4th vacuum gauge (9) in vacuum chamber (13);
6) close all vacuum valves; Close vacuum meter, molecular pump, mechanical pump and all working instrument, and in vacuum chamber (13), introduce nitrogen and protect, provide calibration result at last; If be calibrated vacuum gauge is linear; Provide modifying factor C=Ps/Pm, Ps normative reference gaging pressure wherein, Pm is for being calibrated the vacuum gauge gaging pressure; If be calibrated vacuum gauge is non-linear, provides calibration data or diagram.
3. portable vacuum gauge calibration method according to claim 2 is characterized in that: the calibration range of the 4th vacuum gauge (9) is 10 in the step 3)
5～10
2Pa; The calibration range of the 3rd vacuum gauge (7) is 100～0.1Pa; The calibration range of first vacuum gauge (5) is 10
-6～10
-2Pa.
4. portable vacuum gauge calibration method according to claim 2 is characterized in that: when vacuum chamber (13) pressure during greater than 130Pa, valve-off (8) is protected the 3rd vacuum gauge (7) in the step 5).
5. portable vacuum gauge calibration method according to claim 2 is characterized in that: first vacuum gauge (5) is a B-A type secondary standard ionization gauge, and its measurement range is 10
-9～10
-1Pa, necessary steady operation is more than 1 hour before using.
6. portable vacuum gauge calibration method according to claim 2; It is characterized in that: the 3rd vacuum gauge (7) and the 4th vacuum gauge (9) adopt capacitor thin film to advise standard as a reference; Its full scale is respectively 1Torr, 1000Torr; Precision all is less than or equal to 0.12% of reading, must stablize more than 4 hours before using.
7. portable vacuum gauge calibration method according to claim 2 is characterized in that: the 5th vacuum gauge (14) is that the monitoring vacuum gauge is compound rule, and its measurement range is 10
-9～10
5Pa can directly open under an atmospheric pressure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100279970A CN102564696A (en) | 2012-02-09 | 2012-02-09 | Portable vacuum gauge calibration system and method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2012100279970A CN102564696A (en) | 2012-02-09 | 2012-02-09 | Portable vacuum gauge calibration system and method thereof |
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Family
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|---|---|---|---|
| CN2012100279970A Pending CN102564696A (en) | 2012-02-09 | 2012-02-09 | Portable vacuum gauge calibration system and method thereof |
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103439050A (en) * | 2013-08-30 | 2013-12-11 | 国家电网公司 | Simple Liquid-column type measuring device for calibrating vacuum |
| CN105004479A (en) * | 2015-07-10 | 2015-10-28 | 兰州空间技术物理研究所 | Ionization vacuum gauge and mass spectrometer calibration device and method based on standard pressure measurement |
| CN106406379A (en) * | 2016-08-31 | 2017-02-15 | 兰州空间技术物理研究所 | Temperature control device used for directly heating vacuum gauge to be calibrated in vacuum chamber |
| CN106500910A (en) * | 2016-12-02 | 2017-03-15 | 山东中检高科检测技术有限公司 | A kind of vacuometer dynamic contrast calibrating installation |
| CN108061619A (en) * | 2018-01-17 | 2018-05-22 | 深圳世格赛思医疗科技有限公司 | A kind of method that new Medical Devices pressure calibration system and the system are calibrated |
| CN109519407A (en) * | 2018-12-06 | 2019-03-26 | 北京东方计量测试研究所 | A kind of wide-range high-precision molecule pump compression ratio test device and method |
| CN113820069A (en) * | 2021-11-25 | 2021-12-21 | 北京晨晶电子有限公司 | Auxiliary device and method for testing stability of capacitive vacuum gauge |
| CN114018474A (en) * | 2021-09-16 | 2022-02-08 | 兰州空间技术物理研究所 | Capacitance signal adjusting and measuring device before packaging of capacitance film vacuum gauge |
| CN114323421A (en) * | 2021-12-08 | 2022-04-12 | 兰州空间技术物理研究所 | Device and method for protecting IE514 separation rule from humidity |
| CN114354062A (en) * | 2021-12-17 | 2022-04-15 | 兰州空间技术物理研究所 | Device and method for calibrating vacuum gauge by using rising rate method |
| CN115855367A (en) * | 2022-12-01 | 2023-03-28 | 兰州空间技术物理研究所 | Magnetic suspension rotor vacuum gauge calibration device and method |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60177235A (en) * | 1984-02-24 | 1985-09-11 | Hitachi Ltd | Calibrating device of vacuum gauge |
| KR100805926B1 (en) * | 2006-08-22 | 2008-02-21 | 한국표준과학연구원 | Integral calibration apparatus for low vacuum gauge and high vacuum gauge |
| CN202442842U (en) * | 2012-02-09 | 2012-09-19 | 江苏东方航天校准检测有限公司 | Portable vacuum gauge calibrating device |
-
2012
- 2012-02-09 CN CN2012100279970A patent/CN102564696A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60177235A (en) * | 1984-02-24 | 1985-09-11 | Hitachi Ltd | Calibrating device of vacuum gauge |
| KR100805926B1 (en) * | 2006-08-22 | 2008-02-21 | 한국표준과학연구원 | Integral calibration apparatus for low vacuum gauge and high vacuum gauge |
| CN202442842U (en) * | 2012-02-09 | 2012-09-19 | 江苏东方航天校准检测有限公司 | Portable vacuum gauge calibrating device |
Non-Patent Citations (2)
| Title |
|---|
| 宋瑞海等: "《真空比对法校准装置的研究》", 《真空》 * |
| 李正海: "《真空规原位置校准装置》", 《真空与低温》 * |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103439050A (en) * | 2013-08-30 | 2013-12-11 | 国家电网公司 | Simple Liquid-column type measuring device for calibrating vacuum |
| CN105004479A (en) * | 2015-07-10 | 2015-10-28 | 兰州空间技术物理研究所 | Ionization vacuum gauge and mass spectrometer calibration device and method based on standard pressure measurement |
| CN106406379A (en) * | 2016-08-31 | 2017-02-15 | 兰州空间技术物理研究所 | Temperature control device used for directly heating vacuum gauge to be calibrated in vacuum chamber |
| CN106406379B (en) * | 2016-08-31 | 2018-04-10 | 兰州空间技术物理研究所 | A kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber |
| CN106500910A (en) * | 2016-12-02 | 2017-03-15 | 山东中检高科检测技术有限公司 | A kind of vacuometer dynamic contrast calibrating installation |
| CN108061619A (en) * | 2018-01-17 | 2018-05-22 | 深圳世格赛思医疗科技有限公司 | A kind of method that new Medical Devices pressure calibration system and the system are calibrated |
| CN109519407A (en) * | 2018-12-06 | 2019-03-26 | 北京东方计量测试研究所 | A kind of wide-range high-precision molecule pump compression ratio test device and method |
| CN114018474A (en) * | 2021-09-16 | 2022-02-08 | 兰州空间技术物理研究所 | Capacitance signal adjusting and measuring device before packaging of capacitance film vacuum gauge |
| CN113820069A (en) * | 2021-11-25 | 2021-12-21 | 北京晨晶电子有限公司 | Auxiliary device and method for testing stability of capacitive vacuum gauge |
| CN113820069B (en) * | 2021-11-25 | 2022-03-11 | 北京晨晶电子有限公司 | Auxiliary device and method for testing stability of capacitive vacuum gauge |
| CN114323421A (en) * | 2021-12-08 | 2022-04-12 | 兰州空间技术物理研究所 | Device and method for protecting IE514 separation rule from humidity |
| CN114323421B (en) * | 2021-12-08 | 2023-07-21 | 兰州空间技术物理研究所 | Device and method for protecting IE514 separating gauge from humidity |
| CN114354062A (en) * | 2021-12-17 | 2022-04-15 | 兰州空间技术物理研究所 | Device and method for calibrating vacuum gauge by using rising rate method |
| CN114354062B (en) * | 2021-12-17 | 2024-04-09 | 兰州空间技术物理研究所 | Device and method for calibrating vacuum gauge by ascending rate method |
| CN115855367A (en) * | 2022-12-01 | 2023-03-28 | 兰州空间技术物理研究所 | Magnetic suspension rotor vacuum gauge calibration device and method |
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Application publication date: 20120711 |