CN106406379A - Temperature control device used for directly heating vacuum gauge to be calibrated in vacuum chamber - Google Patents
Temperature control device used for directly heating vacuum gauge to be calibrated in vacuum chamber Download PDFInfo
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- CN106406379A CN106406379A CN201610784826.0A CN201610784826A CN106406379A CN 106406379 A CN106406379 A CN 106406379A CN 201610784826 A CN201610784826 A CN 201610784826A CN 106406379 A CN106406379 A CN 106406379A
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- calibrated
- vacuum
- heated
- vacuometer
- temperature
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Measuring Fluid Pressure (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The invention discloses a temperature control device used for directly heating a vacuum gauge to be calibrated in a vacuum chamber and belongs to the field of high vacuum metering calibration. The temperature control device mainly comprises a block-shaped heating unit, a temperature sensor, an electric control unit, a heating clamp and a heating clamp pedestal, wherein the temperature control device can be used for directly heating the vacuum gauge to be calibrated in the vacuum chamber, the temperature control device is large in heating temperature range and low in heating efficiency, geometric dimensions of a heating area of the heating clamp conform with two line field equipotential line distribution, temperature homogeneity can be realized, excellent temperature stability can be achieved due to vacuum insulation effect, no water circulation cooling system is needed, only small effects can be exerted on temperature of other parts of the vacuum chamber, and a foundation is provided for accurate calibration of a high vacuum measuring range vacuum gauge at high temperature.
Description
Technical field
The present invention relates to a kind of attemperating unit is and in particular to one kind is directly more than or equal to 10 to vacuum-5Pa, temperature is more than
It is calibrated, in high temperature fine vacuum calibration system equal to 100 DEG C, the attemperating unit that vacuometer is heated, belong to high vacuum measruement
Calibration field.
Background technology
Vacuumatic measuring requires vacuum value accurately to unify, and in order to reach this requirement, vacuometer is necessary for carrying out periodically
Calibration.Under laboratory temperature (23 DEG C) are carried out mostly for conventional vacuum gauge calibration work.But the actually used ring of vacuometer
Border is diversified, discounting for the impact to vacuum gauge calibration result for the temperature, can lead to the inaccurate of vacuum measurement.
So the research impact to vacuum gauge calibration for the temperature, propose rational temperature correction, improve vacuum under different temperatures environment
The accuracy of degree measurement, is an important research work, has stronger actual application value.And carry out this job demand
The matter of utmost importance that solves it is simply that design can vacuum indoor to being calibrated the temperature control system that vacuometer is accurately heated.
Because temperature change has direct impact to the accuracy of vacuum measurement.The temperature control system of existing vacuum system, its heating
Mode is mainly winding heating or heating tube outside vacuum system vacuum chamber and is heated, and heating power consumption is high, and heats temperature
Degree is usually no more than 200 DEG C, and some systems also need to be equipped with hydrologic cycle cooling system, the temperature homogeneity of internal vacuum chamber and steady
Qualitative all poor.
Content of the invention
In view of this, it is an object of the invention to provide a kind of be directly calibrated what vacuometer was heated to vacuum interior
Attemperating unit, described attemperating unit directly heats to being calibrated vacuometer in internal vacuum chamber, can heating temperature range big,
Heating power is low, and temperature homogeneity is good, and due to vacuum heat-preserving effect, temperature stability is good, without hydrologic cycle cooling system, right
The impact of vacuum chamber other parts temperature is little；Provide the foundation for accurate calibration being carried out to fine vacuum range vacuum gauge under high temperature.
The purpose of the present invention is realized by technical scheme below：
A kind of directly vacuum interior is calibrated with the attemperating unit that vacuometer is heated, described attemperating unit mainly includes
It is by block heating unit, temperature sensor, ECU, heated jig and heated jig base；
Wherein, described heated jig is made up of recessed heat block and convex heat block；Described recessed heat block and convex heat block are
Special-shaped column structure, is machined with semi-circular recesses on a side of described recessed heat block, in a side of described convex heat block
Semi-cylindrical hill is machined with face；
Described bulk heating unit is two pieces, closely connects with the recessed heat block of described heated jig and convex heat block respectively
Connect；Described heated jig is affixed with described heated jig base, the concave surface of recessed heat block of described heated jig and with convex plus
The upper convex surface of hot block is positioned opposite, and forms the heating chamber being calibrated vacuometer, described quilt between described concave surface and upper convex surface
Calibration vacuometer is located in described heating chamber, and the raised center of circle on described convex heat block is to described heated jig geometric center
Distance is equal to 1.2 times of described convex radius equal to the gap of described heating chamber；Described temperature sensor be arranged on described by school
On quasi- vacuometer, and described temperature sensor and described bulk heating unit all pass through to electrically connect with described ECU.
Further, described heating unit is rectangular structure, and its Surface Machining flatness is less than 0.5mm.
Further, described heating unit material is oxygen-free copper.
Further, the temperature measurement accuracy of described temperature control sensor is 0.1 DEG C, and temperature change response time is less than
0.1 second.
Further, described ECU its 1% is less than to the control accuracy of heating unit power, response time is less than
0.1 second.
Further, the material of described heated jig is oxygen-free copper.
Further, described heated jig adopts integral processing method to prepare.
Further, the contact surface of described heated jig base and heated jig, with high temperature fine vacuum calibration system vacuum
The material of the contact surface of room is pottery.
Beneficial effect
(1) directly vacuometer being calibrated to vacuum interior and heat of attemperating unit of the present invention, and heat temperature
Degree scope is big, and power is low, and heating region temperature homogeneity and stability are high；
The heating region physical dimension of heated jig meets the distribution of " two line process " isopotential line；Vacuometer will be calibrated true
Plenum chamber is placed in the rectangle shade subregion in heating region in Fig. 3, and described heated jig geometric center be calibrated true
Empty meter vacuum chamber geometric center overlaps, and because this region is located in equipotential surface in " two line process ", temperature consistency is optimal,
May insure optimal temperature stability, temperature impact to external world is minimum simultaneously, so that it is guaranteed that heating to being calibrated vacuometer
Uniformity and stability；Provide the foundation for accurate calibration being carried out to the vacuometer of fine vacuum range under high temperature.
(2) heating unit of attemperating unit of the present invention is rectangular structure, and it is equivalent in " two line process "
State selection Magnet, provides thermal source by the heating unit of rectangular structure, further ensure that the heat of described attemperating unit uniformly
Property and stability.
(3) temperature control sensor of attemperating unit of the present invention, ECU are high precision instrument, and heated jig
Material is the oxygen-free copper of excellent thermal conductivity, is effectively reduced automatically controlled error,
(4) contact surface of the heated jig base of attemperating unit of the present invention and heated jig, with high temperature fine vacuum school
The material of the contact surface of Barebone vacuum chamber is pottery, is effectively reduced the heat biography of fixture and high temperature fine vacuum calibration system
Pass, and then improve the degree of accuracy of temperature control.
Brief description
Fig. 1 is the structural representation of high temperature fine vacuum calibration system of the present invention；
Fig. 2 is the structural representation of attemperating unit of the present invention；
Fig. 3 is the structural representation of described heated jig；
Fig. 4 is the isopotential line schematic diagram of described two line process；
Wherein, 1- reset valve, 2- gas cylinder, 3- the first fine vacuum stop valve, 4- attemperating unit, 5- calibration vacuum chamber, 6- the
Two fine vacuum stop valves, 7- standard vacuum gauge, 8- are calibrated vacuometer, 9- hot donut, 11- temperature sensor, 12- bulk
Heating unit, 13- heated jig base, the recessed heat block of 14-, the convex heat block of 15-.
Specific embodiment
With specific embodiment in detail the present invention to be described in detail below in conjunction with the accompanying drawings, but not limited to this.
Embodiment 1
As shown in Fig. 1～2, a kind of directly vacuum interior is calibrated with the attemperating unit that vacuometer is heated, described temperature
Control device mainly includes it by block heating unit 12, temperature sensor 11, ECU, heated jig and heated jig base
13；
Wherein, described heated jig is made up of recessed heat block 14 and convex heat block 15；Described recessed heat block 14 and convex heating
Block 15 is special-shaped column structure, is machined with semi-circular recesses, in described convex heating on a side of described recessed heat block 14
It is machined with semi-cylindrical hill on one side of block 15；
Described bulk heating unit 12 is two pieces, tight with the recessed heat block 14 of described heated jig and convex heat block 15 respectively
Close connection；Described heated jig is affixed with described heated jig base 13, the concave surface of the recessed heat block 14 of described heated jig
And positioned opposite with the upper convex surface of convex heat block 15, and between described concave surface and upper convex surface, formation is calibrated adding of vacuometer 8
Hot chamber, the described vacuometer 8 that is calibrated is located in described heating chamber, and the raised center of circle on described convex heat block 15 is to described heating
The distance of fixture geometric center is equal to 1.2 times of described convex radius equal to the gap of described heating chamber；Described temperature sensor
11 be arranged on described in be calibrated on vacuometer 8, and described temperature sensor 11 and described bulk heating unit 12 all with described electricity
Control unit passes through electrical connection.
Wherein, described heating unit is rectangular structure, and its Surface Machining flatness is less than 0.5mm.
Described heating unit material is oxygen-free copper.
The temperature measurement accuracy of described temperature control sensor is 0.1 DEG C, and temperature change response time is less than 0.1 second.
Described ECU its 1% is less than to the control accuracy of heating unit power, response time is less than 0.1 second.
The material of described heated jig is oxygen-free copper.
Described heated jig adopts integral processing method to prepare.
Described heated jig base 13 and the contact surface of heated jig, the contact with high temperature fine vacuum calibration system vacuum chamber
The material in face is pottery.
Operation principle：
As shown in Figures 3 and 4, the size relationship of the heating region of described heated jig is as follows：AO=BO=CO=a, OM=
CD=1.2a, that is, described heated jig heating region physical dimension meet " two line process " isopotential line distribution；To be calibrated true
Empty meter 8 vacuum chambers are placed in the rectangle shade subregion in heating region in Fig. 3, and described heated jig geometric center and quilt
Calibration vacuometer 8 vacuum chamber geometric center overlaps, and because this region is located in equipotential surface in " two line process ", temperature is consistent
Property optimal it can be ensured that optimal temperature stability, temperature impact to external world is minimum simultaneously；
Described ECU be used for according to temperature sensor 11 measurement be calibrated the temperature of vacuometer 8 and heating instructions Lai
Control the output of heating unit, block heating unit 12 heats to heated jig, and then to being placed on heated jig
The vacuometer 8 that is calibrated in vacuum chamber is heated；
Wherein, described a all represents institute for AO, BO and CO described in 1/2nd of the current separation of two line process in Fig. 4
State convex radius, described OM represents the distance in the center of circle of projection on described convex heat block 15 to described heated jig geometric center,
Described CD represents the gap of described heating chamber.
The present invention includes but is not limited to above example, and carry out under every principle in spirit of the present invention is any equivalent
Replace or local improvement, all will be regarded as within protection scope of the present invention.
Claims (8)
1. a kind of directly vacuum interior is calibrated with the attemperating unit that vacuometer heated it is characterised in that：Described temperature control dress
Put the block heating unit (12) of main inclusion, temperature sensor (11), ECU, heated jig and heated jig base
(13)；
Wherein, described heated jig is made up of recessed heat block (14) and convex heat block (15)；Described recessed heat block (14) and convex plus
Hot block (15) is special-shaped column structure, is machined with semi-circular recesses, described on a side of described recessed heat block (14)
It is machined with semi-cylindrical hill on one side of convex heat block (15)；
Described bulk heating unit (12) is two pieces, recessed heat block (14) and the convex heat block (15) with described heated jig respectively
Closely connect；Described heated jig is affixed with described heated jig base (13), the recessed heat block (14) of described heated jig
Concave surface and positioned opposite with the upper convex surface of convex heat block (15), and formed between described concave surface and upper convex surface and be calibrated vacuum
The heating chamber of meter (8), the described vacuometer (8) that is calibrated is located in described heating chamber, and the upper projection of described convex heat block (15)
The distance of the center of circle to described heated jig geometric center is equal to the gap of described heating chamber and is equal to 1.2 times of described convex radius；
Described temperature sensor (11) is calibrated on vacuometer (8) described in being arranged on, and described temperature sensor (11) and described bulk
Heating unit (12) all passes through to electrically connect with described ECU.
2. according to claim 1 a kind of directly the attemperating unit that vacuometer is heated is calibrated to vacuum interior, its
It is characterised by：Described bulk heating unit (12) is rectangular structure, and its Surface Machining flatness is less than 0.5mm.
3. according to claim 2 a kind of directly the attemperating unit that vacuometer is heated is calibrated to vacuum interior, its
It is characterised by：Described heating unit material is oxygen-free copper.
4. according to claim 1 a kind of directly the attemperating unit that vacuometer is heated is calibrated to vacuum interior, its
It is characterised by：The temperature measurement accuracy of described temperature control sensor is 0.1 DEG C, and temperature change response time is less than 0.1 second.
5. according to claim 1 a kind of directly the attemperating unit that vacuometer is heated is calibrated to vacuum interior, its
It is characterised by：Described ECU its 1% is less than to the control accuracy of heating unit power, response time is less than 0.1 second.
6. according to claim 1 a kind of directly the attemperating unit that vacuometer is heated is calibrated to vacuum interior, its
It is characterised by：The material of described heated jig is oxygen-free copper.
7. according to claim 1 a kind of directly the attemperating unit that vacuometer is heated is calibrated to vacuum interior, its
It is characterised by：Described heated jig adopts integral processing method to prepare.
8. according to claim 1 a kind of directly the attemperating unit that vacuometer is heated is calibrated to vacuum interior, its
It is characterised by：Described heated jig base (13) and the contact surface of heated jig, with high temperature fine vacuum calibration system vacuum chamber
The material of contact surface is pottery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610784826.0A CN106406379B (en) | 2016-08-31 | 2016-08-31 | A kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610784826.0A CN106406379B (en) | 2016-08-31 | 2016-08-31 | A kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106406379A true CN106406379A (en) | 2017-02-15 |
| CN106406379B CN106406379B (en) | 2018-04-10 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201610784826.0A Active CN106406379B (en) | 2016-08-31 | 2016-08-31 | A kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200955987Y (en) * | 2006-09-27 | 2007-10-03 | 西安航空发动机（集团）有限公司 | Portable vacuum gauge calibrating device |
| CN101755061A (en) * | 2007-07-21 | 2010-06-23 | 感应加热有限公司 | Electro-induction thermal treatment |
| US20100178120A1 (en) * | 2009-01-09 | 2010-07-15 | Packard Richard O | Machine tool high pressure fluid distribution system and method of operation thereof |
| CN201697751U (en) * | 2010-05-10 | 2011-01-05 | 北京天普太阳能工业有限公司 | Vacuum gauge calibrating device |
| CN102575310A (en) * | 2009-10-16 | 2012-07-11 | 丰田自动车株式会社 | Energization heating method and energization heating device |
| CN102564696A (en) * | 2012-02-09 | 2012-07-11 | 江苏东方航天校准检测有限公司 | Portable vacuum gauge calibration system and method thereof |
| CN104919892A (en) * | 2012-12-20 | 2015-09-16 | 法国圣戈班玻璃厂 | Pane having an electric heating layer |
-
2016
- 2016-08-31 CN CN201610784826.0A patent/CN106406379B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200955987Y (en) * | 2006-09-27 | 2007-10-03 | 西安航空发动机（集团）有限公司 | Portable vacuum gauge calibrating device |
| CN101755061A (en) * | 2007-07-21 | 2010-06-23 | 感应加热有限公司 | Electro-induction thermal treatment |
| US20100178120A1 (en) * | 2009-01-09 | 2010-07-15 | Packard Richard O | Machine tool high pressure fluid distribution system and method of operation thereof |
| CN102575310A (en) * | 2009-10-16 | 2012-07-11 | 丰田自动车株式会社 | Energization heating method and energization heating device |
| CN201697751U (en) * | 2010-05-10 | 2011-01-05 | 北京天普太阳能工业有限公司 | Vacuum gauge calibrating device |
| CN102564696A (en) * | 2012-02-09 | 2012-07-11 | 江苏东方航天校准检测有限公司 | Portable vacuum gauge calibration system and method thereof |
| CN104919892A (en) * | 2012-12-20 | 2015-09-16 | 法国圣戈班玻璃厂 | Pane having an electric heating layer |
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| Publication number | Publication date |
|---|---|
| CN106406379B (en) | 2018-04-10 |
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