CN201697751U - Vacuum gauge calibrating device - Google Patents
Vacuum gauge calibrating device Download PDFInfo
- Publication number
- CN201697751U CN201697751U CN2010201903116U CN201020190311U CN201697751U CN 201697751 U CN201697751 U CN 201697751U CN 2010201903116 U CN2010201903116 U CN 2010201903116U CN 201020190311 U CN201020190311 U CN 201020190311U CN 201697751 U CN201697751 U CN 201697751U
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- CN
- China
- Prior art keywords
- vacuum
- school
- vacuum gauge
- calibration device
- flowmeter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model provides a vacuum gauge calibrating device. The vacuum gauge calibrating device comprises a vacuum calibrating chamber, a standard vacuum gauge, a pumping system and a flow control system, wherein the flow control system comprises a coincidence pressure controller and a flowmeter, the coincidence pressure controller is respectively connected with the electric signal of the standard vacuum gauge and the flowmeter, the venting end of the flowmeter is communicated with the vacuum calibrating chamber, and the flow control system can control the pressure of the vacuum calibrating chamber. The utility model has the advantages that the utility model can calibrate the vacuum gauge within large range and has high calibrating precision, wherein limiting vacuum is superior to 3*10-7 Pa, calibration range is 2.0*10-4-1.0*105 Pa, and stability is less than 10%.
Description
Technical field
The utility model relates to a kind of calibrating installation, especially a kind of vacuum gauge calibration device.
Background technology
At present, the field calibration equipment of vacuum meter comprise standard vacuum gauge that a calibration chamber, micro-variable valve that is communicated with calibration chamber, one be communicated with calibration chamber by pipeline and interface, one by pipeline and interface be communicated with calibration chamber by the school vacuum meter, the road is drawn back on molecular pump, mechanical pump and a side.For example: the patent No. is the patent document of portable vacuum gauge calibration device for the ZL200620138384.4 patent name.
Existing on-the-spot vacuum gauge calibration device precision is very low, and calibration range is little, can't carry out the multiregion calibration; Can't under the multiple gases environment, calibrate.
The utility model content
The utility model provides a kind of vacuum gauge calibration device, the main vacuum meter environment for use of using simulation, and with this understanding the vacuum meter of being furnished with vacuum gauge is calibrated routinely.
The vacuum gauge calibration device that the utility model provides comprises amount chamber, vacuum school, standard vacuum gauge, extract system, flow control system.
Preferably, described flow control system comprises and meets pressure controller and flowmeter, meets the pressure controller and links to each other with the flowmeter electric signal with standard vacuum gauge respectively, and the outlet side of flowmeter communicates with amount chamber, vacuum school.Flow control system can be controlled the pressure of amount chamber, vacuum school.
Preferably, amount chamber, described vacuum school is a hemisphere; Extract system links to each other with hemispheroidal center.The vacuum school of this structure amount is indoor, and each is identical with pressure on the parallel circumference in bottom surface, the vacuum school can not occur and measure the indoor uneven problem of pressure.
Preferably, on the circumferential surface parallel of amount chamber, described vacuum school, be provided with a plurality of outside UNICOMs equipment, communicate with amount chamber, vacuum school with the bottom surface.
Preferably, described standard vacuum gauge is connected with amount chamber, vacuum school by described outside UNICOM equipment; Described flowmeter outlet side is connected with amount chamber, vacuum school by the outside UNICOM of another one equipment.
Preferably, the inlet end of described flowmeter connects gas cylinder or air.Can simulate the working environment of vacuum meter as required, the gas of the needs of packing in gas cylinder flows to amount chamber, vacuum school.
Preferably, be provided with flapper valve between described amount chamber, vacuum school and the extract system.Flapper valve can be stablized the air pressure in the amount chamber, vacuum school.
Preferably, the main scavenging pump of described extract system is a molecular pump.
Preferably, the main scavenging pump of described extract system connects a vacuum body, and the other end of vacuum body links to each other with the forepump pipeline.The vacuum body plays the effect of protection main scavenging pump; when extract system leaks gas; outside air enters main scavenging pump can damage main scavenging pump; if connect a vacuum body on main scavenging pump, during gas leakage, outside air can enter the vacuum body; play buffer action; also can on the vacuum body, warning device be installed, will report to the police during gas leakage, protect whole extract system.
Description of drawings
Fig. 1 is an embodiment synoptic diagram of a kind of vacuum gauge calibration device of the present utility model.
Embodiment
As shown in Figure 1, vacuum gauge calibration device of the present utility model comprises amount chamber, vacuum school, standard vacuum gauge, extract system, flow control system.
Further, described flow control system comprises and meets pressure controller and flowmeter, meets the pressure controller and links to each other with the flowmeter electric signal with standard vacuum gauge respectively, and the outlet side of flowmeter communicates with amount chamber, vacuum school.Flow control system can be controlled the pressure of amount chamber, vacuum school.Amount chamber, described vacuum school is a hemisphere; Extract system links to each other with hemispheroidal center.The vacuum school of this structure amount is indoor, and each is identical with pressure on the parallel circumference in bottom surface, the vacuum school can not occur and measure the indoor uneven problem of pressure.
Amount chamber, described semisphere vacuum school is provided with 8 outside UNICOM equipment, and be positioned on the same circumferential surface parallel to the ground, communicate with amount chamber, vacuum school, outside UNICOM's equipment and spherical vacuum chamber seal welding, the end of outside UNICOM equipment is provided with fixedly vacuum gauge of locknut, one of them outside UNICOM equipment fixed standard vacuum meter: FZh-2B meets vacuum meter, another outside UNICOM equipment tape splicing has the gas handling system that meets pressure control system, and 6 remaining outside UNICOM equipment can be fixed the vacuum gauge or the blind plugging of vacuum meter to be calibrated.
The bottom is an extract system, comprises forepump, molecular pump, vacuum body.Forepump is direct-connected pump; Molecular pump and amount junction, chamber, vacuum school are provided with flapper valve, and flapper valve can be stablized the air pressure in the amount chamber, vacuum school; The vacuum body with link to each other with forepump with molecular pump respectively; the vacuum body plays the effect of protection main scavenging pump; when extract system leaked gas, outside air enters main scavenging pump can damage main scavenging pump, if connect a vacuum body on main scavenging pump; during gas leakage; outside air can enter the vacuum body, plays buffer action, also can on the vacuum body warning device be installed; will report to the police during gas leakage, protect whole extract system.
Principle of work:
Standard vacuum measures the indoor pressure of vacuum school amount, sends a signal to meet the pressure controller, meets the pressure controller according to required pressure difference, sends a signal to flowmeter, and flowmeter enters the gas flow of amount chamber, vacuum school by the valve adjustment; Because the extract system rate of air sucked in required is constant, the amount that enters gas reduces, and the vacuum school indoor pressure of amount will diminish, otherwise, then increase.According to the measured value of standard vacuum gauge, vacuum meter to be calibrated is measured in the school again.
The utility model has the advantages that and in a big way, to measure vacuum meter in the school, and the school accuracy of measurement is higher. Wherein final vacuum is better than 3 * 10-7Pa, calibration range is 2.0 * 10-4-1.0×10
5Pa, stability is less than 10%.
Claims (9)
1. a vacuum gauge calibration device comprises amount chamber, vacuum school, standard vacuum gauge, extract system, it is characterized in that: also comprise flow control system.
2. vacuum gauge calibration device according to claim 1, it is characterized in that: described flow control system comprises and meets pressure controller and flowmeter, meet the pressure controller and link to each other with the flowmeter electric signal with standard vacuum gauge respectively, the outlet side of flowmeter communicates with amount chamber, vacuum school.
3. vacuum gauge calibration device according to claim 2 is characterized in that: the inlet end of described flowmeter connects gas cylinder or air.
4. vacuum gauge calibration device according to claim 1 is characterized in that: be provided with flapper valve between amount chamber, described vacuum school and the extract system.
5. vacuum gauge calibration device according to claim 1 is characterized in that: the main scavenging pump of described extract system is a molecular pump.
6. vacuum gauge calibration device according to claim 1 is characterized in that: the main scavenging pump of described extract system connects a vacuum body, and the other end of vacuum body links to each other with the forepump pipeline.
7. vacuum gauge calibration device according to claim 1 is characterized in that: amount chamber, described vacuum school is a hemisphere; Extract system links to each other with hemispheroidal center.
8. according to the arbitrary described vacuum gauge calibration device of claim 1～7, it is characterized in that: the circumferential surface parallel with the bottom surface of amount chamber, described vacuum school is provided with a plurality of outside UNICOMs equipment, communicates with amount chamber, vacuum school.
9. vacuum gauge calibration device according to claim 8 is characterized in that: described standard vacuum gauge is connected with amount chamber, vacuum school by described outside UNICOM equipment; Described flowmeter outlet side is connected with amount chamber, vacuum school by the outside UNICOM of another one equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201903116U CN201697751U (en) | 2010-05-10 | 2010-05-10 | Vacuum gauge calibrating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2010201903116U CN201697751U (en) | 2010-05-10 | 2010-05-10 | Vacuum gauge calibrating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201697751U true CN201697751U (en) | 2011-01-05 |
Family
ID=43398998
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2010201903116U Expired - Fee Related CN201697751U (en) | 2010-05-10 | 2010-05-10 | Vacuum gauge calibrating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201697751U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104132776A (en) * | 2014-08-15 | 2014-11-05 | 武汉市天虹仪表有限责任公司 | Gas pressure generating device for pressure calibration |
| CN105136388A (en) * | 2015-05-26 | 2015-12-09 | 芜湖致通汽车电子有限公司 | Batch debugging system for vacuum pressure sensors |
| CN106406379A (en) * | 2016-08-31 | 2017-02-15 | 兰州空间技术物理研究所 | Temperature control device used for directly heating vacuum gauge to be calibrated in vacuum chamber |
| CN108613719A (en) * | 2018-04-19 | 2018-10-02 | 徐州鑫宇光伏科技有限公司 | The calibration method and device of flowmeter |
| CN111220326A (en) * | 2019-12-27 | 2020-06-02 | 兰州空间技术物理研究所 | Calibration device and method for calibrating vacuum gauge by using vacuum leak hole |
-
2010
- 2010-05-10 CN CN2010201903116U patent/CN201697751U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104132776A (en) * | 2014-08-15 | 2014-11-05 | 武汉市天虹仪表有限责任公司 | Gas pressure generating device for pressure calibration |
| CN104132776B (en) * | 2014-08-15 | 2016-08-31 | 武汉市天虹仪表有限责任公司 | A kind of gas pressure generating means for pressure calibration |
| CN105136388A (en) * | 2015-05-26 | 2015-12-09 | 芜湖致通汽车电子有限公司 | Batch debugging system for vacuum pressure sensors |
| CN106406379A (en) * | 2016-08-31 | 2017-02-15 | 兰州空间技术物理研究所 | Temperature control device used for directly heating vacuum gauge to be calibrated in vacuum chamber |
| CN106406379B (en) * | 2016-08-31 | 2018-04-10 | 兰州空间技术物理研究所 | A kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber |
| CN108613719A (en) * | 2018-04-19 | 2018-10-02 | 徐州鑫宇光伏科技有限公司 | The calibration method and device of flowmeter |
| CN111220326A (en) * | 2019-12-27 | 2020-06-02 | 兰州空间技术物理研究所 | Calibration device and method for calibrating vacuum gauge by using vacuum leak hole |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20110105 Termination date: 20140510 |