CN106406379B - A kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber - Google Patents
A kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber Download PDFInfo
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- CN106406379B CN106406379B CN201610784826.0A CN201610784826A CN106406379B CN 106406379 B CN106406379 B CN 106406379B CN 201610784826 A CN201610784826 A CN 201610784826A CN 106406379 B CN106406379 B CN 106406379B
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- temperature control
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/20—Control of temperature characterised by the use of electric means with sensing elements having variation of electric or magnetic properties with change of temperature
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- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
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Abstract
The invention discloses a kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber, belongs to high vacuum measruement calibration field.The temperature control device mainly includes it by block heating unit, temperature sensor, ECU, heated jig and heated jig base；The temperature control device can be heated directly in internal vacuum chamber to being calibrated vacuum meter, can heating temperature range it is big, heating power is low；The heating region physical dimension of heated jig meets the distribution of " two fields of line " equipotential lines, and temperature homogeneity is good, and because vacuum heat-preserving acts on, temperature stability is good, without hydrologic cycle cooling system, vacuum chamber other parts temperature is influenceed small；Provided the foundation to carry out accurate calibration to high vacuum range vacuum gauge under high temperature.
Description
Technical field
The present invention relates to a kind of temperature control device, and in particular to a kind of to be directly more than or equal to 10 to vacuum-5Pa, temperature are more than
The temperature control device that vacuum meter is heated is calibrated in high temperature high vacuum calibration system equal to 100 DEG C, belongs to high vacuum measruement
Calibration field.
Background technology
Vacuumatic measuring requires that vacuum value is accurately unified, and in order to reach this requirement, vacuum meter must just be carried out periodically
Calibration.Conventional vacuum gauge calibration work (23 DEG C) progress under laboratory temperature mostly.But the actual use ring of vacuum meter
Border is diversified, discounting for influence of the temperature to vacuum gauge calibration result, can cause the inaccuracy of vacuum measurement.
So influence of the research temperature to vacuum gauge calibration, proposes rational temperature correction, improves vacuum under different temperatures environment
The accuracy of measurement is spent, is an important research work, there is stronger actual application value.And carry out this need of work
The matter of utmost importance of solution, exactly design the temperature control system that can be accurately heated in vacuum chamber to being calibrated vacuum meter.
Because temperature change has direct influence to the accuracy of vacuum measurement.The temperature control system of existing vacuum system, it is heated
Mode winding heating or heating tube predominantly outside vacuum system vacuum chamber are heated, and heating power consumption is high, and heats temperature
Degree is usually no more than 200 DEG C, and some systems also need to be equipped with hydrologic cycle cooling system, the temperature homogeneity of internal vacuum chamber and steady
It is qualitative poor.
The content of the invention
In view of this, it is an object of the invention to provide a kind of directly to being calibrated what vacuum meter was heated in vacuum chamber
Temperature control device, the temperature control device directly heat in internal vacuum chamber to being calibrated vacuum meter, can heating temperature range it is big,
Heating power is low, and temperature homogeneity is good, and because vacuum heat-preserving acts on, temperature stability is good, right without hydrologic cycle cooling system
Vacuum chamber other parts temperature influences small；Provided the foundation to carry out accurate calibration to high vacuum range vacuum gauge under high temperature.
The purpose of the present invention is realized by following technical scheme：
A kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber, the temperature control device mainly include
It is by block heating unit, temperature sensor, ECU, heated jig and heated jig base；
Wherein, the heated jig is made up of recessed heat block and convex heat block；The recessed heat block and convex heat block are
Special-shaped column structure, semi-circular recesses are machined with a side of the recessed heat block, in a side of the convex heat block
Semi-cylindrical hill is machined with face；
The block heating unit is two pieces, is closely connected with the recessed heat block of the heated jig and convex heat block respectively
Connect；The heated jig and the heated jig base are affixed, the concave surface of the recessed heat block of the heated jig and with it is convex plus
The upper convex surface of hot block is positioned opposite, and the heating chamber for being calibrated vacuum meter, the quilt are formed between the concave surface and upper convex surface
Calibration vacuum meter is located in the heating chamber, and the center of circle raised on the convex heat block is to the heated jig geometric center
Distance is equal to 1.2 times of the convex radius equal to the gap of the heating chamber；The temperature sensor is arranged on described by school
On quasi- vacuum meter, and the temperature sensor and the block heating unit pass through with the ECU and electrically connected.
Further, described heating unit is rectangular parallelepiped structure, and its Surface Machining flatness is less than 0.5mm.
Further, described heating unit material is oxygen-free copper.
Further, the temperature measurement accuracy of described temperature control sensor is 0.1 DEG C, and the temperature change response time is less than
0.1 second.
Further, its control accuracy to heating unit power of described ECU is less than 1%, and the response time is less than
0.1 second.
Further, the material of described heated jig is oxygen-free copper.
Further, described heated jig is prepared using integral processing method.
Further, the contact surface of the heated jig base and heated jig, with high temperature high vacuum calibration system vacuum
The material of the contact surface of room is ceramics.
Beneficial effect
(1) temperature control device of the present invention can directly heat to being calibrated vacuum meter in vacuum chamber, and heat temperature
Degree scope is big, and power is low, and heating region temperature homogeneity and stability are high；
The heating region physical dimension of heated jig meets the distribution of " two line process " equipotential lines；It is true vacuum meter will to be calibrated
The rectangle shade subregion that plenum chamber is placed in Fig. 3 in heating region, and the heated jig geometric center is true with being calibrated
Sky meter vacuum chamber geometric center overlaps, and because the region is located in " two line process " in equipotential surface, temperature consistency is optimal,
Optimal temperature stability is may insure, while minimum is influenceed on the temperature in the external world, so that it is guaranteed that to being calibrated vacuum meter heating
Uniformity and stability；To be provided the foundation under high temperature to the vacuum meter progress accurate calibration of high vacuum range.
(2) heating unit of temperature control device of the present invention is rectangular parallelepiped structure, and it is equivalent in " two line process "
State selection magnet, thermal source is provided by the heating unit of rectangular parallelepiped structure, further ensure that the heat of the temperature control device uniformly
Property and stability.
(3) temperature control sensor of temperature control device of the present invention, ECU are high precision instrument, and heated jig
Material is the oxygen-free copper of excellent thermal conductivity, can effectively reduce automatically controlled error,
(4) the heated jig base of temperature control device of the present invention and the contact surface of heated jig, with high temperature high vacuum school
The material of the contact surface of Barebone vacuum chamber is ceramics, can effectively reduce fixture and the heat biography of high temperature high vacuum calibration system
Pass, and then improve the accuracy of temperature control.
Brief description of the drawings
Fig. 1 is the structural representation of high temperature high vacuum calibration system of the present invention；
Fig. 2 is the structural representation of temperature control device of the present invention；
Fig. 3 is the structural representation of the heated jig；
Fig. 4 is the equipotential lines schematic diagram of two line process；
Wherein, 1- reset valves, 2- gas cylinders, the first high vacuum of 3- stop valve, 4- temperature control devices, 5- calibrations vacuum chamber, 6- the
It is block that two high vacuum stop valves, 7- standard vacuum gauges, 8- are calibrated vacuum meter, 9- hot donuts, 11- temperature sensors, 12-
Heating unit, 13- heated jigs base, the recessed heat blocks of 14-, the convex heat blocks of 15-.
Embodiment
The present invention, but not limited to this are described in detail with specific embodiment below in conjunction with the accompanying drawings.
Embodiment 1
As shown in Fig. 1~2, a kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber, the temperature
Controlling device mainly includes it by block heating unit 12, temperature sensor 11, ECU, heated jig and heated jig base
13；
Wherein, the heated jig is made up of recessed heat block 14 and convex heat block 15；The recessed heat block 14 and convex heating
Block 15 is special-shaped column structure, semi-circular recesses is machined with a side of the recessed heat block 14, in the convex heating
Semi-cylindrical hill is machined with one side of block 15；
The block heating unit 12 is two pieces, tight with the recessed heat block 14 and convex heat block 15 of the heated jig respectively
Close connection；The heated jig and the heated jig base 13 are affixed, the concave surface of the recessed heat block 14 of the heated jig
With it is positioned opposite with the upper convex surface of convex heat block 15, and between the concave surface and upper convex surface formed be calibrated vacuum meter 8 plus
Hot chamber, the vacuum meter 8 that is calibrated are located in the heating chamber, and the center of circle raised on the convex heat block 15 is to the heating
The distance of fixture geometric center is equal to 1.2 times of the convex radius equal to the gap of the heating chamber；The temperature sensor
11 be arranged on it is described be calibrated on vacuum meter 8, and the temperature sensor 11 and the block heating unit 12 with the electricity
Control unit passes through electrical connection.
Wherein, described heating unit is rectangular parallelepiped structure, and its Surface Machining flatness is less than 0.5mm.
Described heating unit material is oxygen-free copper.
The temperature measurement accuracy of described temperature control sensor is 0.1 DEG C, and the temperature change response time is less than 0.1 second.
Its control accuracy to heating unit power of described ECU is less than 1%, and the response time is less than 0.1 second.
The material of described heated jig is oxygen-free copper.
Described heated jig is prepared using integral processing method.
The contact surface of the heated jig base 13 and heated jig, the contact with high temperature high vacuum calibration system vacuum chamber
The material in face is ceramics.
Operation principle：
As shown in Figures 3 and 4, the size relationship of the heating region of the heated jig is as follows：AO=BO=CO=a, OM=
CD=1.2a, i.e., described heated jig heating region physical dimension meet the distribution of " two line process " equipotential lines；It will be calibrated true
The rectangle shade subregion that sky 8 vacuum chambers of meter are placed in Fig. 3 in heating region, and the heated jig geometric center and quilt
Calibrate the vacuum chamber geometric center of vacuum meter 8 to overlap, because the region is located in " two line process " in equipotential surface, temperature is consistent
Property it is optimal, it can be ensured that optimal temperature stability, while influenceed on the temperature in the external world minimum；
The ECU be used for according to temperature sensor 11 measure be calibrated temperature and the heating instructions of vacuum meter 8 come
The power output of heating unit is controlled, block heating unit 12 heats to heated jig, and then to being placed on heated jig
The vacuum meter 8 that is calibrated in vacuum chamber is heated；
Wherein, a represents institute for AO, BO and CO described in the half of the electric current spacing of two line process in Fig. 4
Stating convex radius, the OM represents the center of circle raised on the convex heat block 15 to the distance of the heated jig geometric center,
The CD represents the gap of the heating chamber.
The present invention include but is not limited to above example, it is every carried out under the principle of spirit of the present invention it is any equivalent
Replacement or local improvement, all will be regarded as within protection scope of the present invention.
Claims (8)
- A kind of 1. temperature control device directly heated to being calibrated vacuum meter in vacuum chamber, it is characterised in that：The temperature control dress Putting mainly includes block heating unit (12), temperature sensor (11), ECU, heated jig and heated jig base (13)；Wherein, the heated jig is made up of recessed heat block (14) and convex heat block (15)；The recessed heat block (14) and it is convex plus Hot block (15) is special-shaped column structure, semi-circular recesses is machined with a side of the recessed heat block (14), described Semi-cylindrical hill is machined with one side of convex heat block (15)；The block heating unit (12) be two pieces, respectively with the recessed heat block (14) and convex heat block (15) of the heated jig Close connection；The heated jig and the heated jig base (13) are affixed, the recessed heat block (14) of the heated jig Concave surface and positioned opposite with the upper convex surface of convex heat block (15), and formed between the concave surface and upper convex surface and be calibrated vacuum The heating chamber of (8) is counted, the vacuum meter (8) that is calibrated is located in the heating chamber, and raised on the convex heat block (15) The gap that the center of circle is equal to the heating chamber to the distance of the heated jig geometric center is equal to 1.2 times of the convex radius； The temperature sensor (11) is calibrated on vacuum meter (8) described in being arranged on, and the temperature sensor (11) and the bulk Heating unit (12) passes through with the ECU to be electrically connected.
- 2. a kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber according to claim 1, its It is characterised by：The block heating unit (12) is rectangular parallelepiped structure, and its Surface Machining flatness is less than 0.5mm.
- 3. a kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber according to claim 2, its It is characterised by：Described heating unit material is oxygen-free copper.
- 4. a kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber according to claim 1, its It is characterised by：The temperature measurement accuracy of described temperature control sensor is 0.1 DEG C, and the temperature change response time is less than 0.1 second.
- 5. a kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber according to claim 1, its It is characterised by：Its control accuracy to heating unit power of described ECU is less than 1%, and the response time is less than 0.1 second.
- 6. a kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber according to claim 1, its It is characterised by：The material of described heated jig is oxygen-free copper.
- 7. a kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber according to claim 1, its It is characterised by：Described heated jig is prepared using integral processing method.
- 8. a kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber according to claim 1, its It is characterised by：The heated jig base (13) and the contact surface of heated jig, with high temperature high vacuum calibration system vacuum chamber The material of contact surface is ceramics.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610784826.0A CN106406379B (en) | 2016-08-31 | 2016-08-31 | A kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201610784826.0A CN106406379B (en) | 2016-08-31 | 2016-08-31 | A kind of temperature control device directly heated to being calibrated vacuum meter in vacuum chamber |
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| Publication Number | Publication Date |
|---|---|
| CN106406379A CN106406379A (en) | 2017-02-15 |
| CN106406379B true CN106406379B (en) | 2018-04-10 |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200955987Y (en) * | 2006-09-27 | 2007-10-03 | 西安航空发动机（集团）有限公司 | Portable vacuum gauge calibrating device |
| CN101755061A (en) * | 2007-07-21 | 2010-06-23 | 感应加热有限公司 | Electro-induction thermal treatment |
| CN201697751U (en) * | 2010-05-10 | 2011-01-05 | 北京天普太阳能工业有限公司 | Vacuum gauge calibrating device |
| CN102575310A (en) * | 2009-10-16 | 2012-07-11 | 丰田自动车株式会社 | Energization heating method and energization heating device |
| CN102564696A (en) * | 2012-02-09 | 2012-07-11 | 江苏东方航天校准检测有限公司 | Portable vacuum gauge calibration system and method thereof |
| CN104919892A (en) * | 2012-12-20 | 2015-09-16 | 法国圣戈班玻璃厂 | Pane having an electric heating layer |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100178120A1 (en) * | 2009-01-09 | 2010-07-15 | Packard Richard O | Machine tool high pressure fluid distribution system and method of operation thereof |
-
2016
- 2016-08-31 CN CN201610784826.0A patent/CN106406379B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN200955987Y (en) * | 2006-09-27 | 2007-10-03 | 西安航空发动机（集团）有限公司 | Portable vacuum gauge calibrating device |
| CN101755061A (en) * | 2007-07-21 | 2010-06-23 | 感应加热有限公司 | Electro-induction thermal treatment |
| CN102575310A (en) * | 2009-10-16 | 2012-07-11 | 丰田自动车株式会社 | Energization heating method and energization heating device |
| CN201697751U (en) * | 2010-05-10 | 2011-01-05 | 北京天普太阳能工业有限公司 | Vacuum gauge calibrating device |
| CN102564696A (en) * | 2012-02-09 | 2012-07-11 | 江苏东方航天校准检测有限公司 | Portable vacuum gauge calibration system and method thereof |
| CN104919892A (en) * | 2012-12-20 | 2015-09-16 | 法国圣戈班玻璃厂 | Pane having an electric heating layer |
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| Publication number | Publication date |
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| CN106406379A (en) | 2017-02-15 |
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