CN115855367A - Magnetic suspension rotor vacuum gauge calibration device and method - Google Patents
Magnetic suspension rotor vacuum gauge calibration device and method Download PDFInfo
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Abstract
The application relates to the technical field of vacuum gauge calibration, in particular to a magnetic suspension rotor vacuum gauge calibration device and method, the device comprises a calibration chamber, a preceding stage pressure chamber, a vacuum pump set and a gas cylinder, wherein: a reference standard vacuum gauge and a magnetic suspension rotor vacuum gauge to be calibrated are arranged on the calibration chamber; a backing standard vacuum gauge is arranged on the backing pressure chamber; the gas cylinder is connected with the preceding stage pressure chamber, and the preceding stage pressure chamber is connected with the calibration chamber; the vacuum pump set is respectively connected with the preceding stage pressure chamber and the calibration chamber. This application can realize the calibration of full range through 3 pressure points with the pressure correlation characteristic characterization magnetic suspension rotor vacuum gauge calibration result of tangential momentum transfer coefficient to effectively solved current calibrating device and can't respond to the problem of pressure correlation characteristic, calibration inefficiency, calibration result lack the real operability.
Description
Technical Field
The application relates to the technical field of vacuum gauge calibration, in particular to a device and a method for calibrating a magnetic suspension rotor vacuum gauge.
Background
Technical specification 'JJF 1962-2022 magnetic suspension rotor vacuum gauge calibration specification', introduces 1 x 10 -4 A method for calibrating a magnetic suspension rotor vacuum gauge in a Pa-1Pa range includes the steps of establishing at least 6 pressure calibration points (not less than 2 calibration points in each order of magnitude) in a calibration range by adopting a static expansion method vacuum standard device, sequentially recording indication values of the magnetic suspension rotor vacuum gauge to be calibrated and standard pressure from low to high, and obtaining an adaptive coefficient of the magnetic suspension rotor vacuum gauge to be calibrated most accurately.
The method has the advantage that the adaptive coefficient corresponding to each calibration point is obtained one by one. According to the measurement principle of the magnetic suspension rotor vacuum gauge and the research result of the measurement characteristic thereof, the pressure is increased to 10 -2 In the order of Pa and above, the adaptive coefficient deviates from constant and shows the characteristic of decreasing with the increasing pressure, so that the calibration result given by a single point in the metering specification cannot effectively reflect the pressure-related characteristic, and in addition, the calibration method is taken as an example and covers 1X 10 -4 The calibration time required by the Pa-1Pa range is at least 1 hour, and the time and the economic cost of calibration are high.
Disclosure of Invention
The application provides a device and a method for calibrating a magnetic suspension rotor vacuum gauge, and solves the problems that the conventional method for calibrating the magnetic suspension rotor vacuum gauge only can obtain corresponding calibration point adaptive coefficients, cannot reflect pressure-related characteristics, is low in calibration efficiency, lacks of practical operability of calibration results and the like.
In order to achieve the above object, the present application provides a magnetic suspension rotor vacuum gauge calibration apparatus, including a calibration chamber, a preceding stage pressure chamber, a vacuum pump set and a gas cylinder, wherein: a reference standard vacuum gauge and a magnetic suspension rotor vacuum gauge to be calibrated are arranged on the calibration chamber; a preceding stage standard vacuum gauge is arranged on the preceding stage pressure chamber; the gas cylinder is connected with the preceding stage pressure chamber, and the preceding stage pressure chamber is connected with the calibration chamber; the vacuum pump set is respectively connected with the preceding stage pressure chamber and the calibration chamber.
Furthermore, a first vacuum valve and a needle valve are arranged on a pipeline between the gas cylinder and the preceding stage pressure chamber.
Furthermore, a second vacuum valve is arranged on a pipeline between the foreline pressure chamber and the calibration chamber.
Furthermore, a third vacuum valve is arranged on a pipeline between the vacuum pump group and the preceding stage pressure chamber, and a fourth vacuum valve is arranged on a pipeline between the calibration chamber and the vacuum pump group.
In addition, the application also provides a method for applying the magnetic suspension rotor vacuum gauge calibration device, which comprises the following steps: step 1: connecting a magnetic suspension rotor vacuum gauge to be calibrated with a calibration chamber; step 2: opening a vacuum pump group, a third vacuum valve and a fourth vacuum valve, and exhausting the fore pressure chamber and the calibration chamber; and step 3: when the pressure in the preceding stage pressure chamber is lower than the pressure in the preceding stage standard vacuum gauge, the pressure in the calibration chamber is lower than the pressure in the reference standard vacuum gauge and the upper limit of the measurement of the vacuum gauge to be calibrated, electrifying to start each vacuum gauge; and 4, step 4: continuously baking and exhausting to make the preceding stage pressure chamber and the calibration chamber reach the limit vacuum degree; and 5: preheating the magnetic suspension rotor vacuum gauge to be calibrated according to the use requirement, and closing the third vacuum valve and the fourth vacuum valve after the magnetic suspension rotor vacuum gauge to be calibrated is stabilized; and 6: opening a first vacuum valve and a needle valve, filling calibration gas into the front-stage pressure chamber through a gas cylinder, adjusting the gas inlet pressure according to the required calibration pressure range of the vacuum gauge, and recording the indicating value of the front-stage standard vacuum gauge at the moment; and 7: opening a second vacuum valve, expanding gas from the preceding stage pressure chamber to the calibration chamber, stabilizing for 1min, and measuring the indicating value of the magnetic suspension rotor vacuum gauge to be calibrated; and 8: calculating a standard pressure value in the calibration chamber; and step 9: at 8X 10 -2 Selecting a calibration pressure point within the range of Pa-1 Pa; step 10: calculating to obtain a tangential momentum transfer coefficient of the calibration pressure point; step 11: calculating a tangential momentum transfer coefficient irrelevant to the pressure by extrapolation to zero pressure;step 12: determining a slope according to the tangential momentum transfer coefficient, and determining a correction coefficient according to the slope; step 13: and calibrating and correcting the indicating value of the magnetic suspension rotor vacuum gauge to be calibrated according to the correction coefficient.
Furthermore, in step 7, when the indication value of the magnetic suspension rotor vacuum gauge to be calibrated is measured, the measurement needs to be repeated, the measurement frequency is more than or equal to 5 times, and the time interval of each measurement is less than or equal to 10s.
Further, in step 8, the standard pressure value in the calibration chamber can be obtained by referring to a standard vacuum gauge.
Further, in step 9, when the calibration pressure points are selected, the number of the calibration pressure points is not less than 3, and the ratio of the highest pressure to the lowest pressure in the calibration pressure points is not less than 10.
The magnetic suspension rotor vacuum gauge calibration device and method provided by the invention have the following beneficial effects:
this application can realize the calibration of full range through 3 pressure points with the pressure correlation characteristic characterization magnetic suspension rotor vacuum gauge calibration result of tangential momentum transfer coefficient to effectively solved current calibrating device and can't respond to the problem of pressure correlation characteristic, calibration inefficiency, calibration result lack the real operability.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, serve to provide a further understanding of the application and to enable other features, objects, and advantages of the application to be more apparent. The drawings and their description illustrate the embodiments of the invention and do not limit it. In the drawings:
FIG. 1 is a schematic structural diagram of a magnetic levitation rotor vacuum gauge calibration apparatus provided according to an embodiment of the present application;
in the figure: 1-a preceding stage standard vacuum gauge, 2-a preceding stage pressure chamber, 3-a second vacuum valve, 4-a reference standard vacuum gauge, 5-a magnetic suspension rotor vacuum gauge to be calibrated, 6-a calibration chamber, 7-a fourth vacuum valve, 8-a vacuum pump set, 9-a third vacuum valve, 10-a needle valve, 11-a first vacuum valve and 12-a gas cylinder.
Detailed Description
In order to make the technical solutions better understood by those skilled in the art, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only partial embodiments of the present application, but not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.
It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It should be understood that the data so used may be interchanged under appropriate circumstances such that embodiments of the application described herein may be used. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In the present application, the terms "upper", "lower", "left", "right", "front", "rear", "top", "bottom", "inner", "outer", "middle", "vertical", "horizontal", "lateral", "longitudinal", and the like indicate an orientation or positional relationship based on the orientation or positional relationship shown in the drawings. These terms are used primarily to better describe the present application and its embodiments, and are not used to limit the indicated devices, elements or components to a particular orientation or to be constructed and operated in a particular orientation.
Moreover, some of the above terms may be used to indicate other meanings besides the orientation or positional relationship, for example, the term "on" may also be used to indicate some kind of attachment or connection relationship in some cases. The specific meaning of these terms in this application will be understood by those of ordinary skill in the art as appropriate.
In addition, the term "plurality" shall mean two as well as more than two.
It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present application will be described in detail below with reference to the embodiments with reference to the attached drawings.
As shown in fig. 1, the present application provides a magnetic levitation rotor vacuum gauge calibration apparatus, comprising a calibration chamber 6, a pre-stage pressure chamber 2, a vacuum pump set 8, and a gas cylinder 12, wherein: a reference standard vacuum gauge 4 and a magnetic suspension rotor vacuum gauge 5 to be calibrated are arranged on the calibration chamber 6; a preceding stage standard vacuum gauge 1 is arranged on the preceding stage pressure chamber 2; the gas cylinder 12 is connected with the fore pressure chamber 2, and the fore pressure chamber 2 is connected with the calibration chamber 6; a vacuum pump group 8 is connected to the preceding pressure chamber 2 and the calibration chamber 6, respectively.
Specifically, the calibration device for the magnetic suspension rotor vacuum gauge provided by the embodiment of the application can represent the correlation of the transmission coefficient pressure, so that the calibration of the magnetic suspension rotor vacuum gauge is realized. The calibration chamber 6 is used to form a standard pressure for calibration (static expansion method), the reference standard vacuum gauge 4 is used to measure the standard pressure for calibration (direct comparison method), the preceding stage pressure chamber 2 is used to prepare for inflation before expansion when establishing each standard pressure point, the preceding stage standard vacuum gauge 1 is used to measure the preceding stage pressure, the gas cylinder 12 is used to store calibration gas, and the vacuum pump group 8 is used to evacuate.
Further, a first vacuum valve 11 and a needle valve 10 are provided on a pipe between the gas cylinder 12 and the preceding stage pressure chamber 2. First vacuum valve 11 is used to open and close the conduit between gas cylinder 12 and foreline pressure chamber 2.
Further, a second vacuum valve 3 is provided in a pipe between the pre-stage pressure chamber 2 and the calibration chamber 6. The second vacuum valve 3 is used for controlling the on-off of the pipeline between the foreline pressure chamber 2 and the calibration chamber 6.
Furthermore, a third vacuum valve 9 is arranged on a pipeline between the vacuum pump group 8 and the foreline pressure chamber 2, and a fourth vacuum valve 7 is arranged on a pipeline between the calibration chamber 6. The third vacuum valve 9 is used for controlling the connection and disconnection of a pipeline between the vacuum pump set 8 and the foreline pressure chamber 2, and the fourth vacuum valve 7 is used for controlling the connection and disconnection of a pipeline between the vacuum pump set 8 and the calibration chamber 6.
In addition, the embodiment of the application also provides a method for applying the magnetic suspension rotor vacuum gauge calibration device, which comprises the following steps:
step 1: connecting a magnetic suspension rotor vacuum gauge 5 to be calibrated with a calibration chamber 6;
step 2: opening a vacuum pump group 8, a third vacuum valve 9 and a fourth vacuum valve 7, and pumping the fore-stage pressure chamber 2 and the calibration chamber 6;
and step 3: when the pressure in the preceding stage pressure chamber 2 is lower than that of the preceding stage standard vacuum gauge 1, the pressure in the calibration chamber 6 is lower than that of the reference standard vacuum gauge 4 and the measured upper limit of the vacuum gauge to be calibrated, each vacuum gauge is electrified and started, each vacuum gauge has a certain working range, and the pressure is started when the pressure is lower than that of the measured upper limit of the vacuum gauge, so that the protection effect can be realized;
and 4, step 4: continuously baking and exhausting to enable the preceding stage pressure chamber 2 and the calibration chamber 6 to reach the limit vacuum degree;
and 5: preheating the magnetic suspension rotor vacuum gauge 5 to be calibrated according to the use requirement, and closing the third vacuum valve 9 and the fourth vacuum valve 7 after stabilization;
step 6: opening a first vacuum valve 11 and a needle valve 10, filling calibration gas into the front-stage pressure chamber 2 through a gas bottle 12, adjusting the inlet pressure according to the required calibration pressure range of the vacuum gauge, and recording the indicating value of the front-stage standard vacuum gauge 1 at the moment;
and 7: opening the second vacuum valve 3, expanding the gas from the pressure chamber 2 to the calibration chamber 6, stabilizing for 1min, and indicating the value P of the magnetic suspension rotor vacuum gauge 5 to be calibrated ind The measurement is carried out repeatedly, the measurement times are more than or equal to 5 times, and the time interval of each measurement is less than or equal to 10s;
and 8: the standard pressure value in the calibration chamber 6 is calculated, and the standard pressure P in the calibration chamber 6 can be calculated according to the following formula std :
In the formula, P 0 The inflation pressure value Pa of the preceding stage pressure chamber 2; v 1 Volume m of the preceding pressure chamber 2 3 ；V 2 To calibrate the volume in the chamber 6, m 3 ；
Furthermore, the standard pressure value P in the calibration chamber 6 std It can also be obtained by reference to a standard vacuum gauge 4, namely:
p std ＝p cal
P cal is an indication, pa, of a reference standard vacuum gauge 4;
and step 9: at 8X 10 -2 Selecting calibration pressure points within Pa-1Pa range, and obtaining the calibration pressure points covering 8 × 10 according to multiple tests -2 When the pressure is in the range of Pa-1Pa, the calibration result of the magnetic suspension rotor vacuum gauge can meet the requirement of 1 multiplied by 10 -4 The method comprises the following steps of (1) the full-range calibration requirement of Pa-1Pa, wherein the number of calibration pressure points is more than or equal to 3, and the ratio of the highest pressure to the lowest pressure in the calibration pressure points is more than or equal to 10;
step 10: calculating the tangential momentum transfer coefficient of each calibration pressure point:
σ eff the magnetic suspension rotor vacuum gauge is a tangential momentum transfer coefficient which is a fit coefficient of the magnetic suspension rotor vacuum gauge 5 to be calibrated and is dimensionless;
step 11: calculating pressure independent σ by extrapolating to zero pressure eff ，0：
σ eff，0 ＝σ eff (p std )；p std →0
Step 12: determining a slope m according to the tangential momentum transfer coefficient, and determining a correction coefficient f according to the slope m corr Wherein:
σ eff ＝σ eff，0 +mp std
step 13: according to the correction coefficient f corr And calibrating and correcting the indicating value of the magnetic suspension rotor vacuum gauge 5 to be calibrated, wherein the indicating value of the magnetic suspension rotor vacuum gauge after calibration and correction is as follows:
the method for using the magnetic suspension rotor vacuum gauge calibration device is specifically described in the following with the detailed embodiments:
step 1: connecting a magnetic suspension rotor vacuum gauge 5 to be calibrated with a calibration chamber 6;
step 2: opening a vacuum pump group 8, a third vacuum valve 9 and a fourth vacuum valve 7, and pumping the fore-stage pressure chamber 2 and the calibration chamber 6;
and step 3: the pressure in the front pressure chamber 2 is lower than that of the front standard vacuum gauge 1 (1 x 10) 5 Pa), when the pressure in the calibration chamber 6 is lower than the reference standard vacuum gauge 4 (1 Pa) and the upper measurement limit (1 Pa) of the vacuum gauge to be calibrated, electrifying to open each vacuum gauge;
and 4, step 4: baking at 200 deg.C, exhausting air for 48 hr to make the forepressure chamber 2 and calibration chamber 6 to the limit vacuum degree of 1.25 × 10 -6 Pa；
And 5: preheating the magnetic suspension rotor vacuum gauge 5 to be calibrated according to the use requirement, and closing the third vacuum valve 9 and the fourth vacuum valve 7 after stabilizing for 4 hours;
and 6: opening a first vacuum valve 11 and a needle valve 10, filling a calibration gas into the front stage pressure chamber 2 through a gas cylinder 12, adjusting the inlet pressure according to the calibration pressure range required by the vacuum gauge, and recording the indication value, P, of the front stage standard vacuum gauge 1 at the time 0 ＝7.51Pa；
And 7: opening the second vacuum valve 3, expanding the gas from the pressure chamber 2 to the calibration chamber 6, stabilizing for 1min, and indicating the value P of the magnetic suspension rotor vacuum gauge 5 to be calibrated ind The measurement is carried out, the measurement result is shown in table 1, the measurement needs to be carried out repeatedly, the measurement times are more than or equal to 5 times, the time interval of each measurement is less than or equal to 10s, and the measurement results of multiple times can be averaged in the subsequent calculation processA value;
and step 8: calculating a standard pressure value P in the calibration chamber 6 std Wherein P is 0 ＝7.51Pa；V 1 ＝1.293×10 -3 m 3 ；V 2 ＝1.006×10 -1 m 3 (ii) a Then P can be calculated std ＝9.5305×10 -2 Pa；
Furthermore, a standard pressure value P is provided in the calibration chamber 6 std It can also be obtained by reference to a standard vacuum gauge 4, the reading P of which is referenced to the standard vacuum gauge 4 cal ＝9.5312×10 -2 Pa；
And step 9: at 9.5305 × 10 -2 Pa-9.6701×10 -1 Selecting 4 calibration pressure points within the Pa range, wherein the ratio of the highest pressure to the lowest pressure is 10.15;
step 10: calculating the tangential momentum transfer coefficient of each calibration pressure point, and arranging and recording data, wherein the data is shown in table 1:
TABLE 1 calibration data sheet
Step 11: calculating pressure independent σ by extrapolating to zero pressure eff ，0＝0.9719
Step 12: determining a slope m = -0.0143 according to the tangential momentum transfer coefficient, and determining a correction coefficient f according to the slope m corr ＝0.0147；
Step 13: according to the correction coefficient f corr And calibrating and correcting the indicating value of the magnetic suspension rotor vacuum gauge 5 to be calibrated, wherein the calibrated and corrected indicating value of the magnetic suspension rotor vacuum gauge is as follows:
the above description is only a preferred embodiment of the present application and is not intended to limit the present application, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, improvement and the like made within the spirit and principle of the present application shall be included in the protection scope of the present application.
Claims (8)
1. The utility model provides a magnetic suspension rotor vacuum gauge calibrating device which characterized in that, includes calibration chamber, preceding stage pressure chamber, vacuum pump package and gas cylinder, wherein:
a reference standard vacuum gauge and a magnetic suspension rotor vacuum gauge to be calibrated are arranged on the calibration chamber;
a backing standard vacuum gauge is arranged on the backing pressure chamber;
the gas cylinder is connected with the preceding stage pressure chamber, and the preceding stage pressure chamber is connected with the calibration chamber;
the vacuum pump set is respectively connected with the preceding stage pressure chamber and the calibration chamber.
2. The magnetic levitation rotor vacuum gauge calibration apparatus as recited in claim 1, wherein a first vacuum valve and a needle valve are provided on a conduit between the gas cylinder and the pre-stage pressure chamber.
3. The magnetic levitation rotor vacuum gauge calibration apparatus as recited in claim 1, wherein a second vacuum valve is provided on a conduit between the pre-stage pressure chamber and the calibration chamber.
4. The magnetic levitation rotor vacuum gauge calibration apparatus as recited in claim 1, wherein a third vacuum valve is disposed on a conduit between the vacuum pump set and the backing pressure chamber, and a fourth vacuum valve is disposed on a conduit between the calibration chamber and the vacuum pump set.
5. A method of using the magnetic levitation rotor vacuum gauge calibration apparatus as claimed in any one of claims 1 to 4, comprising the steps of:
step 1: connecting a magnetic suspension rotor vacuum gauge to be calibrated with a calibration chamber;
step 2: opening a vacuum pump group, a third vacuum valve and a fourth vacuum valve, and exhausting the fore pressure chamber and the calibration chamber;
and step 3: when the pressure in the preceding stage pressure chamber is lower than the pressure in the preceding stage standard vacuum gauge, the pressure in the calibration chamber is lower than the pressure in the reference standard vacuum gauge and the upper limit of the measurement of the vacuum gauge to be calibrated, electrifying to start each vacuum gauge;
and 4, step 4: continuously baking and exhausting to make the preceding stage pressure chamber and the calibration chamber reach the limit vacuum degree;
and 5: preheating a magnetic suspension rotor vacuum gauge to be calibrated according to the use requirement, and closing a third vacuum valve and a fourth vacuum valve after the magnetic suspension rotor vacuum gauge to be calibrated is stabilized;
step 6: opening a first vacuum valve and a needle valve, filling calibration gas into the front-stage pressure chamber through a gas cylinder, adjusting the gas inlet pressure according to the required calibration pressure range of the vacuum gauge, and recording the indicating value of the front-stage standard vacuum gauge at the moment;
and 7: opening a second vacuum valve, expanding gas from the preceding stage pressure chamber to the calibration chamber, stabilizing for 1min, and measuring the indicating value of the magnetic suspension rotor vacuum gauge to be calibrated;
and 8: calculating a standard pressure value in the calibration chamber;
and step 9: at 8X 10 -2 Selecting a calibration pressure point within the range of Pa-1 Pa;
step 10: calculating to obtain a tangential momentum transfer coefficient of the calibration pressure point;
step 11: calculating a tangential momentum transfer coefficient irrelevant to the pressure by extrapolation to zero pressure;
step 12: determining a slope according to the tangential momentum transfer coefficient, and determining a correction coefficient according to the slope;
step 13: and calibrating and correcting the indicating value of the magnetic suspension rotor vacuum gauge to be calibrated according to the correction coefficient.
6. The method for calibrating a magnetic suspension rotor vacuum gauge according to claim 5, wherein in step 7, the indication value of the magnetic suspension rotor vacuum gauge to be calibrated is measured repeatedly, the number of measurements is greater than or equal to 5, and the time interval for each measurement is less than or equal to 10s.
7. The method for calibrating a magnetic levitation rotor vacuum gauge as recited in claim 5, wherein the standard pressure value in the calibration chamber in step 8 can be obtained by referring to a standard vacuum gauge.
8. The method for calibrating a magnetic suspension rotor vacuum gauge according to claim 5, wherein in step 9, when the calibration pressure points are selected, the number of the calibration pressure points is greater than or equal to 3, and the ratio of the highest pressure to the lowest pressure in the calibration pressure points is greater than or equal to 10.
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| CN102393275A (en) * | 2011-09-27 | 2012-03-28 | 江苏东方航天校准检测有限公司 | Calibration apparatus of on-site wide-range vacuum gauge and method thereof |
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| CN102589803A (en) * | 2012-02-06 | 2012-07-18 | 江苏东方航天校准检测有限公司 | Portable multifunctional vacuum calibration system and method |
| CN109341946A (en) * | 2018-11-28 | 2019-02-15 | 北京东方计量测试研究所 | A kind of compound comparison method vacuum calibration system and method |
| CN114354062A (en) * | 2021-12-17 | 2022-04-15 | 兰州空间技术物理研究所 | Device and method for calibrating vacuum gauge by using rising rate method |
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2022
- 2022-12-01 CN CN202211533739.XA patent/CN115855367B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102393275A (en) * | 2011-09-27 | 2012-03-28 | 江苏东方航天校准检测有限公司 | Calibration apparatus of on-site wide-range vacuum gauge and method thereof |
| CN102589803A (en) * | 2012-02-06 | 2012-07-18 | 江苏东方航天校准检测有限公司 | Portable multifunctional vacuum calibration system and method |
| CN102564696A (en) * | 2012-02-09 | 2012-07-11 | 江苏东方航天校准检测有限公司 | Portable vacuum gauge calibration system and method thereof |
| CN109341946A (en) * | 2018-11-28 | 2019-02-15 | 北京东方计量测试研究所 | A kind of compound comparison method vacuum calibration system and method |
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