CN217765351U - Ionization vacuum transmitter detection device - Google Patents
Ionization vacuum transmitter detection device Download PDFInfo
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- CN217765351U CN217765351U CN202221461668.2U CN202221461668U CN217765351U CN 217765351 U CN217765351 U CN 217765351U CN 202221461668 U CN202221461668 U CN 202221461668U CN 217765351 U CN217765351 U CN 217765351U
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Abstract
The utility model relates to an ionization vacuum transmitter detection device, which comprises a nitrogen source, a voltage stabilizing chamber, a calibration chamber and a detected ionization vacuum transmitter which are connected in sequence; the pressure stabilizing chamber is also respectively connected with the first mechanical pump and the capacitance film vacuum gauge; the calibration chamber is also connected with a monitoring ionization vacuum gauge; the calibration chamber, the magnetic suspension molecular pump, the resistance vacuum gauge, the molecular pump and the second mechanical pump are sequentially connected; the vacuum transmitter for the detected ionization is also connected with a power supply and a voltmeter respectively. The utility model directly obtains the voltage value of the ionization vacuum transmitter under the corresponding environmental parameters without using a vacuum instrument, thereby simplifying the calibration work of the ionization vacuum transmitter; by the relationship between the output voltage of the ionization vacuum transmitter and the corresponding vacuum degree, the uncertainty is evaluated, and the accuracy and the effectiveness of the verification are ensured.
Description
Technical Field
The utility model relates to an ionization vacuum transmitter detection device belongs to ionization vacuum transmitter calibration technical field.
Background
A vacuum transducer refers to a gauge that converts a pressure variable into a standardized output signal that can be transmitted. The principle of the ionization vacuum transmitter is based on the fact that the pressure of gas to be measured and current generated by gas ionization are in a direct proportion relation, output signals are generally voltage signals, and the ionization vacuum transmitter is mainly applied to high vacuum and ultrahigh vacuum measurement. The transmitter can be connected with a display to display vacuum pressure, and can also realize automatic control by outputting a voltage signal to the PLC system, so that the defect that the vacuum pressure can be read only by connecting the traditional vacuum gauge with the display is overcome, and the complexity of installation, setting and integration is effectively reduced. The device is widely applied to pressure measurement and control of high vacuum systems of various manufacturing devices such as semiconductors, electronic components, vacuum furnaces, freeze drying, vacuum smelting, vacuum coating and the like.
At present, ionization vacuum transmitters are matched with vacuum instruments for calibration, the independent ionization vacuum transmitters cannot trace the source of the measurement value, and instruments of a plurality of vacuum systems cannot be disassembled, so that the calibration work of the ionization vacuum transmitters is inconvenient.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing an ionization vacuum transmitter detection device need not to use vacuum instrument, directly acquires ionization vacuum transmitter voltage value under corresponding environmental parameter to in relation between the output voltage through ionization vacuum transmitter and the vacuum that corresponds, having carried out the evaluation to the uncertainty.
The utility model adopts the following technical proposal:
a detection device of an ionization vacuum transmitter comprises a nitrogen source 1, a voltage stabilizing chamber 3, a calibration chamber 8 and a detected ionization vacuum transmitter 20 which are connected in sequence; the pressure stabilizing chamber 3 is also respectively connected with a first mechanical pump 5 and a capacitance film vacuum gauge 6; the calibration chamber 8 is also connected with a monitoring ionization vacuum gauge 10; the calibration chamber 8, the magnetic suspension molecular pump 11, the resistance vacuum gauge 13, the molecular pump 14 and the second mechanical pump 17 are connected in sequence; the vacuum transducer 20 for measuring ionization is also connected with a power supply 21 and a voltmeter respectively.
Preferably, the voltmeter is a digital multimeter 22.
Further, a first manual valve 4 is arranged between the first mechanical pump 5 and the pressure stabilizing chamber 3; a second manual valve 12 is arranged between the magnetic suspension molecular pump 11 and the molecular pump 14; a third manual valve 16 is arranged between the molecular pump 14 and the second mechanical pump 17; a fourth manual valve 19 is arranged between the calibration chamber 8 and the measured ionization vacuum transducer 20.
Furthermore, a first needle valve 2 is arranged between the nitrogen source 1 and the pressure stabilizing chamber 3; and a second needle valve 7 is arranged between the pressure stabilizing chamber 3 and the calibration chamber 8.
The beneficial effects of the utility model reside in that:
1) The voltage value of the ionization vacuum transmitter under the corresponding environmental parameter is directly obtained without using a vacuum instrument, so that the calibration work of the ionization vacuum transmitter is simplified;
2) The ionization vacuum transmitter can be calibrated, uncertainty is evaluated through the relation between the output voltage of the ionization vacuum transmitter and the corresponding vacuum degree, and the accuracy and the effectiveness of verification are ensured.
3) Taking an ionization vacuum transducer of some kind as an example, the extended uncertainty of the measurement result is 0.02V (k = 2). The results show that the device can well complete the calibration of the ionization vacuum transmitter.
Drawings
FIG. 1 is a schematic diagram of the configuration of an ionization vacuum transmitter calibration apparatus.
In the figure, 1. Nitrogen source; 2 a first needle valve; 7. a second needle valve; 3. a plenum; 4. a first manual valve; 12. a second manual valve; 16. a third manual valve; 19. a fourth manual valve; 5. a first mechanical pump; 17. a second mechanical pump; 6. a capacitive thin film vacuum gauge; 8. a calibration chamber; 9. a downstream chamber; 10. monitoring an ionization gauge; 11. a magnetic suspension molecular pump; 13. a resistance vacuum gauge; 14. a molecular pump; 15. a gas storage tank; a magnetic levitation rotor vacuum gauge; 20. a calibrated ionization vacuum transducer; 21. a power source; 22. digital multimeter.
Detailed Description
The present invention will be further described with reference to the accompanying drawings and specific embodiments.
FIG. 1 is an ionization vacuum transducer calibration apparatus. The input part of the calibration device adopts a dynamic comparison method and mainly comprises a nitrogen source 1, a pressure stabilizing chamber 3, a molecular pump 14, a mechanical pump 5/17, a calibration chamber 8, a downstream chamber 9, an ionization vacuum gauge 13, a capacitance film vacuum gauge 6, a magnetic suspension rotor vacuum gauge 18 and a magnetic suspension molecular pump 11, wherein the magnetic suspension rotor vacuum gauge 18 displays the standard pressure of the calibration chamber, and the measurement range is (10) -4 -10 -1 ) Pa; the output section consists of a power supply that provides voltage to the ionization vacuum transducer 20 and a digital multimeter 22 that collects the dc voltage signal of the transducer at the calibration chamber standard pressure.
1. The method comprises the following operation steps:
the transmitter to be calibrated can be calibrated only after being placed in a laboratory for more than 2h, the transmitter to be calibrated 20 is installed on a calibration room of the device shown in fig. 1 according to the suggestion of a manufacturer or the direction (vertical, horizontal or arbitrary, default vertical installation) required by a customer, a transition pipeline connected with the transmitter to be calibrated is as short as possible, the transmitter to be calibrated is correctly connected with a direct current power supply according to a product specification, and the output end of the transmitter is connected with a voltmeter.
The ionization vacuum transducer calibration is totally divided into three steps, wherein in the first step, the pressure in the calibration chamber is less than 1 multiplied by 10 by controlling the mechanical pump, the molecular pump and the magnetic suspension molecular pump -6 Pa, i.e., less than 1% of Cheng Xiaxian measured; secondly, providing a vacuum degree with certain pressure to the calibration chamber through the pressure stabilizing chamber; and thirdly, measuring the output voltage of the transmitter under the vacuum degree. The specific operation steps are as follows:
1) The calibration chamber is first rough pumped by opening valve 19 between the transmitter 20 being calibrated and the calibration chamber 8, starting mechanical pump 17 and valves 16, 12. In the step, the calibrated transducer is communicated with the calibration chamber, the calibration chamber is pre-pumped, and preparation is made for starting the molecular pump to obtain high vacuum.
2) When the indication value of the resistance vacuum gauge 13 is less than or equal to 10Pa, the molecular pump 14 is started, and when the molecular pump 14 is in full rotation, the magnetic suspension molecular pump 11 is started. This step starts the molecular pump and the magnetic suspension molecular pump to let the calibration chamber get a high vacuum.
3) The mechanical pump 5 is started, the valve 4 is opened, and the gas in the pressure stabilizing chamber 3 is exhausted. And when the indication value of the capacitance film vacuum gauge 6 is less than 10Pa, closing the valve 4, opening the nitrogen source 1, and adjusting the needle valve 2 to stabilize the pressure of the pressure stabilizing chamber 3 at about 2000 Pa. This step provides for providing a stable nitrogen source to the calibration chamber.
4) The 10 indication value of the ionization vacuum gauge to be monitored is less than or equal to 1 multiplied by 10 -6 When Pa is needed, the needle valve 7 is adjusted to enable the pressure of the calibration chamber to establish required calibration points one by one from low to high, 18 indication values and 22 indication values of the magnetic suspension rotor vacuum gauge are recorded respectively, 10 is recorded -4 Pa～10 -1 And selecting not less than 3 calibration points in each of the four orders of magnitude of Pa. The step is to stably adjust the pressure in the calibration chamber from low to high and record the voltage output values of the ionization vacuum transmitter under different vacuum degrees.
5) After calibration is finished, the needle valve 7, the valve 4 and the mechanical pump 5 are closed, the magnetic suspension rotor pump 11, the valve 12, the molecular pump 14, the valve 16 and the mechanical pump 17 are closed in sequence, and the power supply is turned off.
2. And (3) uncertainty analysis:
it should be noted that the uncertainty analysis in the below has been adopted for illustration the utility model discloses this characteristic of the voltage value of ionization vacuum transmitter under corresponding environmental parameter is directly obtained, the calibration work of the ionization vacuum transmitter of completion. Unnecessary correspondence between the specific analysis process and the hardware configuration of the present invention.
Claims (4)
1. The utility model provides an ionization vacuum transmitter detection device which characterized in that:
comprises a nitrogen source (1), a pressure stabilizing chamber (3), a calibration chamber (8) and a tested ionization vacuum transmitter (20) which are connected in sequence;
the pressure stabilizing chamber (3) is also respectively connected with a first mechanical pump (5) and a capacitance film vacuum gauge (6);
the calibration chamber (8) is also connected with a monitoring ionization vacuum gauge (10); the calibration chamber (8), the magnetic suspension molecular pump (11), the resistance vacuum gauge (13), the molecular pump (14) and the second mechanical pump (17) are sequentially connected;
the vacuum transmitter (20) for the detected ionization is also connected with a power supply (21) and a voltmeter respectively.
2. The ionization vacuum transducer detecting device according to claim 1, wherein: the voltmeter is a digital multi-purpose meter (22).
3. The ionization vacuum transducer detecting device according to claim 2, wherein: a first manual valve (4) is arranged between the first mechanical pump (5) and the pressure stabilizing chamber (3); a second manual valve (12) is arranged between the magnetic suspension molecular pump (11) and the molecular pump (14); a third manual valve (16) is arranged between the molecular pump (14) and the second mechanical pump (17); a fourth manual valve (19) is arranged between the calibration chamber (8) and the tested ionization vacuum transducer (20).
4. The ionization vacuum transducer detecting device according to claim 3, wherein: a first needle valve (2) is arranged between the nitrogen source (1) and the pressure stabilizing chamber (3); and a second needle valve (7) is arranged between the pressure stabilizing chamber (3) and the calibration chamber (8).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221461668.2U CN217765351U (en) | 2022-06-13 | 2022-06-13 | Ionization vacuum transmitter detection device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221461668.2U CN217765351U (en) | 2022-06-13 | 2022-06-13 | Ionization vacuum transmitter detection device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217765351U true CN217765351U (en) | 2022-11-08 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221461668.2U Active CN217765351U (en) | 2022-06-13 | 2022-06-13 | Ionization vacuum transmitter detection device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217765351U (en) |
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2022
- 2022-06-13 CN CN202221461668.2U patent/CN217765351U/en active Active
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