CN108593216A - A kind of portable dynamic compares Pressure Leak Calibration Apparatus and method - Google Patents
A kind of portable dynamic compares Pressure Leak Calibration Apparatus and method Download PDFInfo
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- CN108593216A CN108593216A CN201810257837.2A CN201810257837A CN108593216A CN 108593216 A CN108593216 A CN 108593216A CN 201810257837 A CN201810257837 A CN 201810257837A CN 108593216 A CN108593216 A CN 108593216A
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- valve
- pressure
- positive pressure
- leak hole
- pressure leak
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/207—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material calibration arrangements
Abstract
The present invention relates to a kind of portable dynamics to compare Pressure Leak Calibration Apparatus and method, belongs to fields of measurement.Described device includes ten valves, with reference to positive pressure leak hole, two temperature sensors, pressure stabilizing chamber, capillary, current limliting aperture, thermostatic chamber, positive pressure leak hole to be calibrated, mass spectrograph, mechanical pump, molecular pump, mass spectrometric analysis chamber and four vacuum meters；Middle part is equipped with current limliting aperture in mass spectral analysis room；Mechanical pump and molecular pump constitute pumped vacuum systems.Additionally provide a kind of calibration method based on described device.By designing thermostatic chamber, different time is reduced with reference to the positive pressure leak hole temperature different from when positive pressure leak hole gas buildup to be calibrated on the possible influence of PRESSURE LEAK CALIBRATION to be calibrated, ensures calibration accuracy；Pressure stabilizing chamber is small, and weight is low；With capillary decaying pressure after the gas expansion accumulated with reference to positive pressure leak hole and positive pressure leak hole to be calibrated, molecule flowable state sampling condition can be met, the field calibration of positive pressure leak hole may be implemented in described device and method.
Description
Technical field
The present invention relates to a kind of portable dynamics to compare Pressure Leak Calibration Apparatus and method, belongs to fields of measurement.
Background technology
Constant volume method, constant-voltage method, quantitative gas Comparison Method and dynamic comparison may be used in the calibration of positive pressure leak hole.Its
In, dynamic comparison is closer with positive positive pressure leak hole state to be calibrated using the referance leak of known leak rate as the standard of referring to,
Have the characteristics that calibrator quantity limit range is wide, calibration accuracy is high.But the calibrating installation of positive pressure leak hole is due to volume Pang at present
Greatly, not readily portable, therefore it is confined to laboratory use, positive pressure leak hole can not be calibrated in working site.
Invention content
For existing Pressure Leak Calibration Apparatus can not working site calibrate defect, it is an object of the present invention to
A kind of portable dynamic is provided and compares Pressure Leak Calibration Apparatus；The second object of the present invention is to provide a kind of portable dynamic
Compare PRESSURE LEAK CALIBRATION method.
To achieve the purpose of the present invention, following technical scheme is provided.
A kind of portable dynamic compares Pressure Leak Calibration Apparatus, and the main building block of described device includes：First valve,
Second valve, with reference to positive pressure leak hole, the first temperature sensor, third valve, the 4th valve, pressure stabilizing chamber, the 5th valve, capillary
Pipe, the 6th valve, current limliting aperture, thermostatic chamber, the 7th valve, positive pressure leak hole to be calibrated, second temperature sensor, the 8th valve,
9th valve, mass spectrograph, mechanical pump, molecular pump, the tenth valve, mass spectrometric analysis chamber, the first vacuum meter, the second vacuum meter, third
Vacuum meter and the 4th vacuum meter.
Wherein, preferably mass spectrum is calculated as four-stage mass spectrometer.
Middle part is equipped with current limliting aperture, the dynamic equilibrium for keeping mass spectrometric analysis chamber in mass spectral analysis room；It is preferred that current limliting is small
Hole aperture is 33mm.
Mechanical pump and molecular pump collectively form pumped vacuum systems.
Second valve, with reference to positive pressure leak hole, the first temperature sensor, third valve, the 7th valve, wait for the leakage of calibrated positive pressure
Hole, second temperature sensor and the 8th valve are located in thermostatic chamber, the first valve, the 4th valve, pressure stabilizing chamber, the 5th valve, hair
Tubule, the 6th valve, current limliting aperture, the 9th valve, mass spectrograph, mechanical pump, molecular pump, the tenth valve, mass spectrometric analysis chamber, first
Vacuum meter, the second vacuum meter, third vacuum meter and the 4th vacuum meter are located at outside thermostatic chamber.
First valve inlet end is connect by pipeline with air source, and the pipeline of the outlet end connection of the first valve is divided into main branch
It is connected with the first vacuum meter on A and main branch B, main branch A, is divided into two times in the first vacuum meter rear main branch A arrival ends
Branch, a time branch are sequentially connected in series by the second valve, with reference to positive pressure leak hole and third valve, the first temperature sensor with
Connected with reference to positive pressure leak hole, another article of time branch by the 7th valve, wait for that calibrated positive pressure leak hole and the 8th valve are sequentially connected in series,
Second temperature sensor is connect with calibrated positive pressure leak hole is waited for, two secondary branches form the outlet end of main branch A, main branch after converging
The outlet end of A is converged with main branch B to be formed one article of pipeline and is connect with the 4th valve inlet end, after main branch A and main branch B converge
The pipeline of formation is equipped with the second vacuum meter, and the 4th valve export end is connect by pipeline with pressure stabilizing chamber arrival end, and pressure stabilizing chamber goes out
9th valve and mechanical pump are connected in series with by mouthful end by one article of pipeline, and voltage stabilizing chamber outlet end is by another article of pipeline successively by the
Five valves, capillary, the 6th valve, mass spectrometric analysis chamber, the tenth valve, molecular pump and mechanical pump are connected in series with, pressure stabilizing chamber outlet
Two pipelines of end connection converge before being connect with mechanical pump to be connect again with mechanical pump after a pipeline, capillary and the 6th valve
Door between pipeline on be connected with third vacuum meter, mass spectrograph and the 4th vacuum meter are located at outside mass spectral analysis room, and respectively with matter
Space in spectrum analysis chamber in front of current limliting aperture is connected.
A kind of portable dynamic compares PRESSURE LEAK CALIBRATION method, and the calibration method uses one kind provided by the present invention
Portable dynamic compares Pressure Leak Calibration Apparatus completion, the main building block of the calibrating installation：First valve, the second valve
Door, third valve, the 4th valve, the 5th valve, the 6th valve, the 7th valve, the 8th valve, the 9th valve, mass spectrograph, machinery
Pump, molecular pump and the tenth valve are in closed state before use, wherein thermostatic chamber keeps temperature constant 20 DEG C~26
℃；Calibration is had been subjected to as the reference positive pressure leak hole with reference to standard, with reference to the leak rate (Q of positive pressure leak holer) known；Source gas is
Probe gas or nitrogen (N2), wherein nitrogen pressure is an atmospheric pressure, is used for simulating atmospheric environment；Probe gas type root
According to positive pressure leak hole to be calibrated working site it needs to be determined that, the pressure of probe gas is more than an atmospheric pressure, and is less than or equal to ten
A atmospheric pressure；Steps are as follows for the calibration method：
(1) the second valve, third valve, the 4th valve, the 5th valve, the 6th valve, the 7th valve, the 8th valve are opened
Door, the 9th valve and the tenth valve, open mechanical pump and vacuumize, and the pressure in mass spectrometric analysis chamber is read using the 4th vacuum meter,
It when pressure reaches 50Pa, opens molecular pump and vacuumizes, the pressure in mass spectrometric analysis chamber is read using the 4th vacuum meter, waits for pressure
When reaching pressure needed for mass spectrograph work, mass spectrograph is opened, such as when pressure reaches 10-3When Pa magnitudes, mass spectrograph is opened；
(2) when the pressure magnitude that pumped vacuum systems is evacuated in the 4th vacuum meter reading mass spectrometric analysis chamber does not change
When, reach capacity in mass spectrometric analysis chamber pressure, and mass spectrograph measurement obtains the background ions stream of probe gas in mass spectrometric analysis chamber
(I0), close the second valve, third valve, the 4th valve, the 5th valve, the 6th valve, the 7th valve, the 8th valve, the 9th
Valve and the tenth valve；
(3) it is filled with probe gas：Source gas is probe gas, the first valve and the second valve is opened, to reference to positive pressure
The arrival end of leakage hole is filled with probe gas, and the first vacuum meter reads the pressure in pipeline, when what pressure reached air source offer shows leakage
When gas pressure, the first valve and the second valve are closed, the 4th valve is opened and the 9th valve, pumped vacuum systems vacuumizes, when
When the pressure that second vacuum meter reads in pipeline reaches 10Pa, the 4th valve is closed；
It is filled with nitrogen：Source gas is nitrogen, opens the first valve and third valve, to the outlet end with reference to positive pressure leak hole
It is filled with the nitrogen of an atmospheric pressure, the pressure in the second vacuum meter reading pipeline, when pressure reaches the nitrogen pressure of air source offer
When power, the first valve and third valve are closed；
The sequencing that is filled with of probe gas and nitrogen does not require, and can first be filled with probe gas, after be filled with nitrogen,
Nitrogen can be first filled with, after be filled with probe gas；
After probe gas and nitrogen are filled with, start to accumulate；
(4) it when the second vacuum meter reading is more than 1000Pa, is determined with reference to just according to the difference with reference to positive pressure leak hole magnitude
Press accumulated time (the Δ t of leakage holer), temperature is recorded with the first temperature sensor in accumulation, is averaged to obtain with reference to just
Press mean temperature (T when Leak calibrationr), after accumulated time reaches, the 9th valve is closed, the 4th valve is opened, will accumulate
Gas expansion to pressure stabilizing chamber in；
(5) when the second vacuum meter, which reads the pressure in pipeline, is less than or equal to the 5% of the second vacuum meter reading, the 5th is opened
Valve, the gas after expanding in pressure stabilizing chamber are less than or equal to 10 by capillary when third vacuum meter reads the pressure in pipeline-3Pa
When, mass spectrograph is closed, the 6th valve is opened, gas enters mass spectrometric analysis chamber, is read in mass spectrometric analysis chamber using the 4th vacuum meter
Pressure, when pressure reach mass spectrograph work needed for pressure when, open mass spectrograph, with mass spectrograph measurement obtain refer to positive pressure leak hole
Probe gas ion stream (the I generated in mass spectrometric analysis chamberr), close the 5th valve and the 6th valve；
(6) step (3)~(5) are repeated, the second valve is replaced with into the 7th valve, is replaced with reference to positive pressure leak hole to be calibrated
Positive pressure leak hole, the first temperature sensor replace with second temperature sensor, and third valve replaces with the 8th valve, obtains to be calibrated
(mean temperature (T) and positive pressure leak hole to be calibrated when Δ t), PRESSURE LEAK CALIBRATION to be calibrated are in matter for the accumulated time of positive pressure leak hole
The probe gas ion stream (I) generated in spectrum analysis chamber；
(7) calculation formula of the leak rate (Q) of positive pressure leak hole to be calibrated is as follows：
In formula：
Q --- the leak rate of positive pressure leak hole to be calibrated, unit be：Pam3/s；
Qr--- the leak rate of positive pressure leak hole is referred to, unit is：Pam3/s；
Δ t --- the accumulated time of positive pressure leak hole to be calibrated, unit be：s；
Δtr--- the accumulated time of positive pressure leak hole is referred to, unit is：s；
The probe gas ion stream that I --- positive pressure leak hole to be calibrated generates in mass spectrometric analysis chamber, unit are：A；
Ir--- with reference to the probe gas ion stream that positive pressure leak hole generates in mass spectrometric analysis chamber, unit is：A；
I0--- probe gas background ions stream, unit are in mass spectrometric analysis chamber：A；
T --- mean temperature when PRESSURE LEAK CALIBRATION to be calibrated, unit be：K；
Tr--- mean temperature when PRESSURE LEAK CALIBRATION is referred to, unit is：K.
Advantageous effect
The present invention provides a kind of portable dynamics to compare Pressure Leak Calibration Apparatus and method, and described device and method are set
Thermostatic chamber has been counted, different time has been reduced and is treated with reference to the positive pressure leak hole temperature different from when positive pressure leak hole gas buildup to be calibrated
The possible influence of PRESSURE LEAK CALIBRATION is calibrated, the accuracy of PRESSURE LEAK CALIBRATION to be calibrated has been effectively ensured；The volume of pressure stabilizing chamber
It is small, the requirement of mancarried device small size, low weight can be met, the gas accumulated with reference to positive pressure leak hole and positive pressure leak hole to be calibrated
Minimum several kPas after being expanded, if using aperture sample introduction, exists and require small aperture small, it is big that there are manufacture difficulty,
And the problem of involving great expense, therefore further decline of pressure is carried out using capillary, molecule flowable state sample introduction can be met
The field calibration of positive pressure leak hole may be implemented in condition, described device and method, more with the calibration environment of positive pressure leak hole to be calibrated
Close to.
Description of the drawings
Fig. 1 compares the structural schematic diagram of Pressure Leak Calibration Apparatus for a kind of portable dynamic in embodiment.
In figure：1-the first valve, the 2-the second valve, 3-refer to positive pressure leak hole, the 4-the first temperature sensor, 5-the
Three valves, the 6-the four valve, 7-pressure stabilizing chambers, the 8-the five valve, 9-capillaries, the 10-the six valve, 11-current limliting apertures,
12-thermostatic chambers, the 13-the seven valve, 14-positive pressure leak holes to be calibrated, 15-second temperature sensors, the 16-the eight valve,
17-the nine valve, 18-mass spectrographs, 19-mechanical pumps, 20-molecular pumps, the tenth valves of 21-, 22-mass spectrometric analysis chambers,
23-the first vacuum meter, the 24-the second vacuum meter, 25-third vacuum meters, the 26-the four vacuum meter
Specific implementation mode
Embodiment 1
A kind of portable dynamic compares Pressure Leak Calibration Apparatus, and the main building block of described device includes：First valve
1, the second valve 2, with reference to positive pressure leak hole 3, the first temperature sensor 4, third valve 5, the 4th valve 6, pressure stabilizing chamber 7, the 5th valve
Door 8, capillary 9, the 6th valve 10, current limliting aperture 11, thermostatic chamber 12, the 7th valve 13,14, second temperature of positive pressure leak hole to be calibrated
Spend sensor 15, the 8th valve 16, the 9th valve 17, mass spectrograph 18, mechanical pump 19, molecular pump 20, the tenth valve 21, mass spectrum point
Analyse room 22, the first vacuum meter 23, the second vacuum meter 24, third vacuum meter 25 and the 4th vacuum meter 26.
Wherein, mass spectrograph 18 is four-stage mass spectrometer 18.
Middle part is equipped with baffle in mass spectrometric analysis chamber 22, and baffle is equipped with the current limliting aperture 11 that aperture is 33mm, for keeping
The dynamic equilibrium of mass spectrometric analysis chamber 22.
Mechanical pump 19 and molecular pump 20 collectively form pumped vacuum systems.
Second valve 2, with reference to positive pressure leak hole 3, the first temperature sensor 4, third valve 5, the 7th valve 13, wait for it is calibrated just
Pressure leakage hole 14, second temperature sensor 15 and the 8th valve 16 are located in thermostatic chamber 12, the first valve 1, the 4th valve 6, voltage stabilizing
Room 7, the 5th valve 8, capillary 9, the 6th valve 10, current limliting aperture 11, the 9th valve 17, mass spectrograph 18, mechanical pump 19, molecule
Pump the 20, the tenth valve 21, mass spectrometric analysis chamber 22, the first vacuum meter 23, the second vacuum meter 24, third vacuum meter 25 and the 4th vacuum
Meter 26 is located at outside thermostatic chamber 12.
First valve, 1 arrival end is connect by pipeline with air source, and the pipeline of the outlet end connection of the first valve 1 is divided into main branch
It is connected with the first vacuum meter 23 on road A and main branch B, main branch A, is divided into 23 rear main branch A arrival ends of the first vacuum meter
Two branches, one time branch is sequentially connected in series by the second valve 2, with reference to positive pressure leak hole 3 and third valve 5, the first temperature
Degree sensor 4 is connect with reference to positive pressure leak hole 3, another article of secondary branch by the 7th valve 13, wait for calibrated positive pressure leak hole 14 and the 8th
Valve 16 is sequentially connected in series, and second temperature sensor 15 is connect with calibrated positive pressure leak hole 14 is waited for, two times branch converges rear shape
At the outlet end of main branch A, outlet end and the main branch B of main branch A converge to form one article of pipeline and 6 arrival end of the 4th valve company
It connects, the pipeline that main branch A and main branch B are formed after converging is equipped with the second vacuum meter 24, and 6 outlet end of the 4th valve passes through pipeline
It being connect with 7 arrival end of pressure stabilizing chamber, the 9th valve 17 and mechanical pump 19 are connected in series with by 7 outlet end of pressure stabilizing chamber by one article of pipeline,
7 outlet end of pressure stabilizing chamber is by another article of pipeline successively by the 5th valve 8, capillary 9, the 6th valve 10, mass spectrometric analysis chamber 22,
Ten valves 21, molecular pump 20 and mechanical pump 19 are connected in series with, and two pipelines of 7 outlet end of pressure stabilizing chamber connection connect with mechanical pump 19
Converge before connecing to be connect again with mechanical pump 19 after a pipeline, is connected on the pipeline between capillary 9 and the 6th valve 10
Three vacuum meters 25, mass spectrograph 18 and the 4th vacuum meter 26 are located at outside mass spectrometric analysis chamber 22, and are limited respectively with mass spectrometric analysis chamber 22
The space for flowing 11 front of aperture is connected.
A kind of portable dynamic compares PRESSURE LEAK CALIBRATION method, and the calibration method uses one that the present embodiment is provided
Kind portable dynamic compares Pressure Leak Calibration Apparatus completion, the main building block of the calibrating installation：First valve 1,
Two valves 2, third valve 5, the 4th valve 6, the 5th valve 8, the 6th valve 10, the 7th valve 13, the 8th valve 16, the 9th valve
Door 17, mass spectrograph 18, mechanical pump 19, molecular pump 20 and the tenth valve 21 are in closed state before use, wherein thermostatic chamber
12 keep temperature constant at 20 DEG C~26 DEG C；Calibration is had been subjected to as the reference positive pressure leak hole 3 with reference to standard, with reference to positive pressure leak hole
3 leak rate (Qr) known；Source gas is probe gas, nitrogen (N2), wherein nitrogen pressure is an atmospheric pressure, for simulating
Atmospheric environment；Probe gas type according to the working site of positive pressure leak hole 14 to be calibrated it needs to be determined that, the pressure of probe gas is big
In an atmospheric pressure, and it is less than or equal to ten atmospheric pressure；Steps are as follows for the calibration method：
(1) open the second valve 2, third valve 5, the 4th valve 6, the 5th valve 8, the 6th valve 10, the 7th valve 13,
8th valve 16, the 9th valve 17 and the tenth valve 21, open mechanical pump 19 and vacuumize, and mass spectrum is read using the 4th vacuum meter 26
Pressure in analysis room 22 is opened molecular pump 20 and is vacuumized when pressure reaches 50Pa, and mass spectrum is read using the 4th vacuum meter 26
Pressure in analysis room 22, when pressure reaches 10-3When Pa magnitudes, quadrupole mass spectrometer 18 is opened；
(2) when the pressure magnitude that pumped vacuum systems is evacuated in the 4th vacuum meter 26 reading mass spectrometric analysis chamber 22 does not occur
When variation, reach capacity pressure in mass spectrometric analysis chamber 22, and the measurement of mass spectrograph 18 obtains the sheet of probe gas in mass spectrometric analysis chamber 22
Bottom ion stream (I0), close the second valve 2, third valve 5, the 4th valve 6, the 5th valve 8, the 6th valve 10, the 7th valve
13, the 8th valve 16, the 9th valve 17 and the tenth valve 21；
(3) it is filled with probe gas：Source gas is probe gas, opens the first valve 1 and the second valve 2, to reference to just
The arrival end of pressure leakage hole 3 is filled with probe gas, and the first vacuum meter 23 reads the pressure in pipeline, when pressure reaches air source offer
When probe gas pressure, the first valve 1 and the second valve 2 are closed, opens the 4th valve 6 and the 9th valve 17, pumped vacuum systems
It vacuumizes, when the second vacuum meter 24, which reads the pressure in pipeline, reaches 10Pa, closes the 4th valve 6；
It is filled with nitrogen：Source gas is nitrogen, opens the first valve 1 and third valve 5, to going out with reference to positive pressure leak hole 3
Mouth end is filled with the nitrogen of an atmospheric pressure, the pressure in the second vacuum meter 24 reading pipeline, when pressure reaches air source offer
When nitrogen pressure, the first valve 1 and third valve 5 are closed；
The sequencing that is filled with of probe gas and nitrogen does not require, and can first be filled with probe gas, after be filled with nitrogen,
Nitrogen can be first filled with, after be filled with probe gas；
After probe gas and nitrogen are filled with, start to accumulate；
(4) when the second vacuum meter 24 reading is more than 1000Pa, reference is determined according to the difference with reference to 3 magnitude of positive pressure leak hole
Accumulated time (the Δ t of positive pressure leak holer), temperature is recorded with the first temperature sensor 4 in accumulation, is averaged and is referred to
Mean temperature (T when positive pressure leak hole 3 is calibratedr), after accumulated time reaches, the 9th valve 17 is closed, opens the 4th valve 6,
It will be in the gas expansion of accumulation to pressure stabilizing chamber 7；
(5) it when the second vacuum meter 24, which reads the pressure in pipeline, is less than or equal to the 5% of the second vacuum meter 24 reading, opens
5th valve 8, the gas after expanding in pressure stabilizing chamber 7 are less than by capillary 9 when third vacuum meter 25 reads the pressure in pipeline
Equal to 10-3When Pa, mass spectrograph 18 is closed, opens the 6th valve 10, gas enters mass spectrometric analysis chamber 22, using the 4th vacuum meter 26
Read mass spectrometric analysis chamber 22 in pressure, when pressure reach mass spectrograph 18 work required pressure when, open mass spectrograph 18, measure
To the probe gas ion stream (I generated in mass spectrometric analysis chamber 22 with reference to positive pressure leak hole 3r), close the 5th valve 8 and the 6th valve
Door 10；
(6) step (3)~(5) are repeated, the second valve 2 is replaced with into the 7th valve 13, replaces with and waits for reference to positive pressure leak hole 3
Positive pressure leak hole 14 is calibrated, the first temperature sensor 4 replaces with second temperature sensor 15, and third valve 5 replaces with the 8th valve
16, obtain positive pressure leak hole 14 to be calibrated accumulated time (Δ t), positive pressure leak hole to be calibrated 14 calibrate when mean temperature (T) and
The probe gas ion stream (I) that positive pressure leak hole 14 to be calibrated generates in mass spectrometric analysis chamber 22；
(7) calculation formula of the leak rate (Q) of positive pressure leak hole 14 to be calibrated is as follows：
In formula：
Q --- the leak rate of positive pressure leak hole 14 to be calibrated, unit be：Pam3/s；
Qr--- the leak rate of positive pressure leak hole 3 is referred to, unit is：Pam3/s；
Δ t --- the accumulated time of positive pressure leak hole 14 to be calibrated, unit be：s；
Δtr--- the accumulated time of positive pressure leak hole 3 is referred to, unit is：s；
I --- the probe gas ion stream that positive pressure leak hole 14 to be calibrated generates in mass spectrometric analysis chamber 22, unit be：A；
Ir--- with reference to the probe gas ion stream that positive pressure leak hole 3 generates in mass spectrometric analysis chamber 22, unit is：A；
I0--- probe gas background ions stream, unit are in mass spectrometric analysis chamber 22：A；
Mean temperature when T --- positive pressure leak hole 14 to be calibrated is calibrated, unit are：K；
Tr--- mean temperature when being calibrated with reference to positive pressure leak hole 3, unit are：K；
Data：Qr=2.39 × 10-3Pam3/ s, Δ t=1360s, Δ tr=1200s, I=2.38 × 10-9A, Ir=2.36
×10-9A, I0=1.55 × 10-9A, T=300.1K, Tr=300.2K substitutes into formula (1), Q=2.21 × 10 is calculated- 3Pam3/s。
Claims (5)
1. a kind of portable dynamic compares Pressure Leak Calibration Apparatus, it is characterised in that：The main building block of described device includes
First valve (1), the second valve (2), with reference to positive pressure leak hole (3), the first temperature sensor (4), third valve (5), the 4th valve
Door (6), pressure stabilizing chamber (7), the 5th valve (8), capillary (9), the 6th valve (10), current limliting aperture (11), thermostatic chamber (12), the
Seven valves (13), positive pressure leak hole to be calibrated (14), second temperature sensor (15), the 8th valve (16), the 9th valve (17), matter
Spectrum meter (18), mechanical pump (19), molecular pump (20), the tenth valve (21), mass spectrometric analysis chamber (22), the first vacuum meter (23), the
Two vacuum meters (24), third vacuum meter (25) and the 4th vacuum meter (26)；
Middle part is equipped with current limliting aperture (11) in mass spectrometric analysis chamber (22)；
Mechanical pump (19) and molecular pump (20) collectively form pumped vacuum systems；
Second valve (2), with reference to positive pressure leak hole (3), the first temperature sensor (4), third valve (5), the 7th valve (13), wait for
Calibrated positive pressure leak hole, second temperature sensor (15) and the 8th valve (16) are located in thermostatic chamber (12), the first valve (1), the
Four valves (6), pressure stabilizing chamber (7), the 5th valve (8), capillary (9), the 6th valve (10), current limliting aperture (11), the 9th valve
(17), mass spectrograph (18), mechanical pump (19), molecular pump (20), the tenth valve (21), mass spectrometric analysis chamber (22), the first vacuum meter
(23), the second vacuum meter (24), third vacuum meter (25) and the 4th vacuum meter (26) are located at thermostatic chamber (12) outside；
First valve (1) arrival end is connect by pipeline with air source, and the pipeline of the outlet end connection of the first valve (1) is divided into main branch
The first vacuum meter (23) is connected on road A and main branch B, main branch A, in the first vacuum meter (23) rear main branch A arrival ends
Be divided into two time branches, one branch by the second valve (2), with reference to positive pressure leak hole (3) and third valve (5) company of being sequentially connected in series
Connect, the first temperature sensor (4) connect with reference to positive pressure leak hole (3), another article of secondary branch by the 7th valve (13), wait for it is calibrated just
Pressure leakage hole and the 8th valve (16) are sequentially connected in series, and second temperature sensor (15) is connect with calibrated positive pressure leak hole is waited for, two
Secondary branch forms the outlet end of main branch A after converging, outlet end and the main branch B of main branch A converge to form one article of pipeline and the
Four valves (6) arrival end connects, and the pipeline that main branch A and main branch B are formed after converging is equipped with the second vacuum meter (24), and the 4th
Valve (6) outlet end is connect by pipeline with pressure stabilizing chamber (7) arrival end, and pressure stabilizing chamber (7) outlet end is by one article of pipeline by the 9th
Valve (17) and mechanical pump (19) are connected in series with, pressure stabilizing chamber (7) outlet end by another article of pipeline successively by the 5th valve (8),
Capillary (9), the 6th valve (10), mass spectrometric analysis chamber (22), the tenth valve (21), molecular pump (20) and mechanical pump (19) series connection
Connection, pressure stabilizing chamber (7) outlet end connection two pipelines after converging for a pipeline before being connect with mechanical pump (19) again with machine
Tool pumps (19) connection, and third vacuum meter (25), mass spectrograph are connected on the pipeline between capillary (9) and the 6th valve (10)
(18) and the 4th vacuum meter (26) is located at mass spectrometric analysis chamber (22) outside, and respectively with current limliting aperture (11) in mass spectrometric analysis chamber (22)
The space in front is connected.
2. a kind of portable dynamic according to claim 1 compares Pressure Leak Calibration Apparatus, it is characterised in that：Mass spectrograph
(18) it is four-stage mass spectrometer.
3. a kind of portable dynamic according to claim 1 compares Pressure Leak Calibration Apparatus, it is characterised in that：Current limliting is small
Hole (11) aperture is 33mm.
4. a kind of portable dynamic according to claim 2 compares Pressure Leak Calibration Apparatus, it is characterised in that：Current limliting is small
Hole (11) aperture is 33mm.
5. a kind of portable dynamic compares PRESSURE LEAK CALIBRATION method, it is characterised in that：The calibration method is used as right is wanted
It asks a kind of portable dynamic described in any one of 1~4 to compare Pressure Leak Calibration Apparatus to complete, the first of the calibrating installation
Valve (1), the second valve (2), third valve (5), the 4th valve (6), the 5th valve (8), the 6th valve (10), the 7th valve
(13), the 8th valve (16), the 9th valve (17), mass spectrograph (18), mechanical pump (19), molecular pump (20) and the tenth valve (21)
Closed state is in before use, it is 20 DEG C~26 DEG C that thermostatic chamber (12), which keeps temperature,；As the reference positive pressure with reference to standard
Leakage hole (3) has been subjected to calibration, with reference to known to the leak rate of positive pressure leak hole (3)；Source gas is probe gas or nitrogen, nitrogen pressure
Pressure for an atmospheric pressure, probe gas is more than an atmospheric pressure, and is less than or equal to ten atmospheric pressure；The calibration method step
It is rapid as follows：
(1) the second valve (2), third valve (5), the 4th valve (6), the 5th valve (8), the 6th valve (10), the 7th are opened
Valve (13), the 8th valve (16), the 9th valve (17) and the tenth valve (21) are opened mechanical pump (19) and are vacuumized, using the
Four vacuum meters (26) read the pressure in mass spectrometric analysis chamber (22), when pressure reaches 50Pa, open molecular pump (20) and vacuumize,
Pressure in mass spectrometric analysis chamber (22) is read using the 4th vacuum meter (26), waits for that pressure reaches pressure needed for mass spectrograph (18) work
10-3When Pa magnitudes, mass spectrograph (18) is opened；
(2) when the pressure magnitude that pumped vacuum systems is evacuated in the 4th vacuum meter (26) reading mass spectrometric analysis chamber (22) does not occur
When variation, reach capacity pressure in mass spectrometric analysis chamber (22), and mass spectrograph (18) measurement obtains showing gas leakage in mass spectrometric analysis chamber (22)
The background ions stream of body closes the second valve (2), third valve (5), the 4th valve (6), the 5th valve (8), the 6th valve
(10), the 7th valve (13), the 8th valve (16), the 9th valve (17) and the tenth valve (21)；
(3) it is filled with probe gas：Source gas is probe gas, opens the first valve (1) and the second valve (2), to reference to just
The arrival end of pressure leakage hole (3) is filled with probe gas, and the first vacuum meter (23) reads the pressure in pipeline, carried when pressure reaches air source
When the probe gas pressure of confession, the first valve (1) and the second valve (2) are closed, opens the 4th valve (6) and the 9th valve
(17), pumped vacuum systems vacuumizes, and when the second vacuum meter (24), which reads the pressure in pipeline, reaches 10Pa, closes the 4th valve
(6)；
It is filled with nitrogen：Source gas is nitrogen, opens the first valve (1) and third valve (5), to reference to positive pressure leak hole (3)
Outlet end is filled with the nitrogen of an atmospheric pressure, and the pressure in the second vacuum meter (24) reading pipeline is carried when pressure reaches air source
When the nitrogen pressure of confession, the first valve (1) and third valve (5) are closed；
After probe gas and nitrogen are filled with, start to accumulate；
(4) when the second vacuum meter (24) reading is more than 1000Pa, reference is determined according to the difference with reference to positive pressure leak hole (3) magnitude
The accumulated time of positive pressure leak hole (3) records temperature with the first temperature sensor (4) in accumulation, is averaged and is referred to
Mean temperature when positive pressure leak hole (3) is calibrated closes the 9th valve (17) after accumulated time reaches, and opens the 4th valve
It (6), will be in the gas expansion of accumulation to pressure stabilizing chamber (7)；
(5) it when the second vacuum meter (24), which reads the pressure in pipeline, is less than or equal to the 5% of the second vacuum meter (24) reading, opens
5th valve (8), the gas after the middle expansion of pressure stabilizing chamber (7) is by capillary (9), when third vacuum meter (25) is read in pipeline
Pressure is less than or equal to 10-3When Pa, mass spectrograph (18) is closed, opens the 6th valve (10), gas enters mass spectrometric analysis chamber (22), adopts
The pressure in mass spectrometric analysis chamber (22) is read with the 4th vacuum meter (26), waits for that pressure reaches pressure needed for mass spectrograph (18) work
When, mass spectrograph (18) is opened, is measured with mass spectrograph (18) and obtains the generation in mass spectrometric analysis chamber (22) with reference to positive pressure leak hole (3)
Probe gas ion stream closes the 5th valve (8) and the 6th valve (10)；
(6) step (3)~(5) are repeated, the second valve (2) is replaced with into the 7th valve (13), is replaced with reference to positive pressure leak hole (3)
Positive pressure leak hole (14) to be calibrated, the first temperature sensor (4) replace with second temperature sensor (15), and third valve (5) is replaced
For the 8th valve (16), putting down when obtaining accumulated time, positive pressure leak hole to be calibrated (14) calibration of positive pressure leak hole to be calibrated (14)
The probe gas ion stream that equal temperature and positive pressure leak hole to be calibrated (14) generate in mass spectrometric analysis chamber (22)；
(7) calculation formula of the leak rate of positive pressure leak hole (14) to be calibrated is as follows：
In formula：
Q --- the leak rate of positive pressure leak hole (14) to be calibrated, unit be：Pam3/s；
Qr--- the leak rate of positive pressure leak hole (3) is referred to, unit is：Pam3/s；
Δ t --- the accumulated time of positive pressure leak hole (14) to be calibrated, unit be：s；
Δtr--- the accumulated time of positive pressure leak hole (3) is referred to, unit is：s；
The probe gas ion stream that I --- positive pressure leak hole (14) to be calibrated generates in mass spectrometric analysis chamber (22), unit are：A；
Ir--- with reference to the probe gas ion stream that positive pressure leak hole (3) generates in mass spectrometric analysis chamber (22), unit is：A；
I0--- probe gas background ions stream, unit are in mass spectrometric analysis chamber (22)：A；
T --- mean temperature when positive pressure leak hole (14) to be calibrated calibration, unit be：K；
Tr--- mean temperature when with reference to positive pressure leak hole (3) calibration, unit are：K.
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