CN107843391A - A kind of small leak rate Pressure Leak Calibration Apparatus and method - Google Patents
A kind of small leak rate Pressure Leak Calibration Apparatus and method Download PDFInfo
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- CN107843391A CN107843391A CN201710852196.0A CN201710852196A CN107843391A CN 107843391 A CN107843391 A CN 107843391A CN 201710852196 A CN201710852196 A CN 201710852196A CN 107843391 A CN107843391 A CN 107843391A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
- G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
Abstract
The invention discloses a kind of small leak rate Pressure Leak Calibration Apparatus and method.The accurate calibration for using constant-voltage method and quantitative gas Comparison Method calibration positive pressure leak hole, realizing small leak rate positive pressure leak hole can be realized using the present invention.The calibrating installation of the present invention can be realized on same device while using constant-voltage method and quantitative gas Comparison Method calibration positive pressure leak hole, positive pressure leak hole is from dismounting, environmental condition can be consistent substantially, the degree of closeness of time is also guaranteed, it ensure that the uniformity of two methods calibration result, by the comparison to two methods calibration result, the accurate calibration value of positive pressure leak hole can be obtained, can solve in the world can not accurate calibration 10‑8Pam3The problem of/s magnitude positive pressure leak holes.
Description
Technical field
The present invention relates to vacuum measurement technical field, and in particular to a kind of small leak rate Pressure Leak Calibration Apparatus and method.
Background technology
Positive pressure leak hole is in the more and more extensive application in the fields such as space flight, aviation, refrigeration, automobile making, to positive pressure leak hole school
The requirement of quasi- lower limit also improves constantly, and the calibration lower limit of positive pressure leak hole is 10 in the world-7Pam3/ s magnitudes, domestic positive pressure leak hole school
Quasi- lower limit can reach 10-8Pam3/ s magnitudes, but the positive pressure leak hole of the magnitude can not trace to the source, the accuracy of calibration can not obtain
Confirm.For 10-8Pam3The positive pressure leak hole of/s magnitudes, can typically select at present built constant-voltage method Pressure Leak Calibration Apparatus or
Pressure Leak Calibration Apparatus, constant-voltage method is respectively adopted compares same branch positive pressure leak hole with quantitative gas and calibrated, but use
Two kinds of calibration methods need to carry out in different devices, smoothly in the case of, calibration every time needs at least 6 groups of data, constant-voltage method
At least one hour is needed, quantitative gas Comparison Method needs at least three hour, centre will be dismantled to positive pressure leak hole, cleaned,
Installation, also wants constant temperature at least 8 hours after installation, calibration twice can not be completed on the same day, and experimental situation cannot be guaranteed complete phase
Together, and the minor variations of environment are for 10-8Pam3The positive pressure leak hole influence of/s magnitudes is very big, and even one can be differed in actual experiment
Individual magnitude, can not judge be any method calibration result it is accurate.
The content of the invention
In view of this, the invention provides a kind of small leak rate Pressure Leak Calibration Apparatus and method, can realize using permanent
Platen press and quantitative gas Comparison Method calibration positive pressure leak hole, realize the accurate calibration of small leak rate positive pressure leak hole.
The small leak rate Pressure Leak Calibration Apparatus of the present invention, including：Air supply system, extract system, temperature control system, survey
System and the positive pressure leak hole being sequentially connected in series, change room, reference chamber, expanding chamber, current limliting aperture and calibration chamber during away from system, survey；
Wherein, air supply system by vacuum valve for the both ends of positive pressure leak hole provide needed for pressure；Extract system passes through true
Empty valve extracts the gas in system；Temperature control system is used to control calibration positive pressure leak hole, becomes room, with specimen chamber, reference chamber
And the temperature of expanding chamber；Measure the pressure of positive pressure leak hole arrival end and the port of export respectively using two absolute pressure formula pressure vacuum gages
Power；Become room and be provided with piston, range-measurement system is for measuring piston displacement, and system is used for time of measuring during survey；Become room
Vacuum valve II, differential pressure type pressure vacuum gage connection vacuum valve II both ends, for measuring transfiguration are provided between reference chamber
The pressure change of room；Be provided between reference chamber and vacuum valve II vacuum valve III, vacuum valve II and vacuum valve III it
Between pipeline as matching somebody with somebody specimen chamber；Expanding chamber reduces gas pressure to being expanded with the gas that specimen chamber configures；Current limliting aperture with it is swollen
Vacuum valve IV is provided between swollen room；Gas ion stream in calibration chamber is measured using quadrupole mass spectrometer, read using extractor gauge
Vacuum in calibration chamber.
Present invention also offers the calibration method of above-mentioned calibrating installation, comprise the following steps：
Step 1, all vacuum valves in calibrating installation in addition to the vacuum valve in air supply system exit are opened, are started
Extract system, when the vacuum system pressure in addition to calibration chamber is down to below 100Pa, the pressure of calibration chamber is down to 10-7During below Pa,
Close all vacuum valves in addition to vacuum valve II in calibrating installation；
Step 2, the vacuum valve at air supply system exit and positive pressure leak hole arrival end is opened, starts air supply system,
To gas pressure needed for the offer of positive pressure leak hole arrival end；
Step 3, the vacuum valve closed at positive pressure leak hole arrival end, the vacuum valve at the positive pressure leak hole port of export is opened,
Required gas pressure is filled with to the positive pressure leak hole port of export, it is desirable to which the pressure of the positive pressure leak hole port of export is the p of setting0；
Step 4, vacuum valve II is closed, system starts timing during survey, and note timing initial time is t0；With differential pressure type pressure
The pressure change that vacuum meter measurement becomes in room, become pressure in room and rise to setting value p first0+ Δ p, now piston movement,
Become the increase of room volume, pressure declines, and when becoming that pressure drops to p0-Δ p in room, piston stops movement, range-measurement system survey
Piston displacement is measured, after piston stops movement, becomes chamber pressure and finally gos up to p0；Systematic survey becomes chamber pressure most during survey
Go up eventually to p0When at the time of, be designated as t1；In t1Moment reads the background ions stream in calibration chamber using quadrupole mass spectrometer, is designated as
I0；Wherein, Δ p is setting value；
Step 5, vacuum valve II is opened, now the moment is t to record1', vacuum valve III is opened, by gas expansion to true
Empty valve III is to vacuum valve IV sections；
Step 6, vacuum valve IV is opened, gas enters calibration chamber by current limliting aperture, and school is read using quadrupole mass spectrometer
Probe gas ion stream in quasi- room, is designated as I1；
Step 7, repeat step 1, air supply system exit, the vacuum valve at the positive pressure leak hole port of export are then opened, with
And vacuum valve II；It is p to be filled with normal pressuresGas, close vacuum valve II, be configured to p using with specimen chambers× v's quantifies
Gas, v are with specimen chamber volume；
Step 8, open vacuum valve III, repeat step 6, now quadrupole mass spectrometer read calibration chamber in probe gas
Ion stream, it is designated as I2；
Step 9,1~step of repeat step 8n times, the leak rate Q that small leak rate positive pressure leak hole is calculated by formula (3) are：
Wherein, QiFor the measured value of constant-voltage method single leak rate, Q 'iFor the measured value of quantitative gas Comparison Method single leak rate, n
For pendulous frequency, not less than 6；Wherein,
Wherein, Q0For known background leak rate, d is piston diameter；Δ L is piston displacement；Δ t=t1-t0；Δt′
=t1′-t0。
Beneficial effect：
Calibrating installation can be realized on same device while using constant-voltage method and quantitative gas Comparison Method the present invention first
Positive pressure leak hole is calibrated, the uniformity of working environment and the degree of closeness of time have been effectively ensured using two methods calibration malleation
The uniformity of small opening result.Can solve in the world can not accurate calibration 10-8Pam3The problem of/s magnitude positive pressure leak holes.
The present invention uses temperature control system, and calibration malleation is controlled by way of passive constant temperature is combined active constant temperature
The temperature of small opening, temperature controlling range can reach (23 ± 15) DEG C, and 10 are extended to for the calibration lower limit of positive pressure leak hole-8Pam3/s
Magnitude provides condition.Calibrate the positive pressure leak hole of small leak rate using distinct methods on same device, positive pressure leak hole from dismounting,
Environmental condition can be consistent substantially, ensure that the uniformity of two methods calibration result, be tied by being calibrated to two methods
The comparison of fruit, the accurate calibration value of positive pressure leak hole can be obtained.
Brief description of the drawings
Fig. 1 is calibrating installation composition schematic diagram of the present invention.
Wherein, 1,4-absolute pressure formula pressure vacuum gage I and II, 2,8,9,11,13,14,16,18,24-vacuum valve I~
IX, 3-positive pressure leak hole, 5-range-measurement system, 6-piston, 7-survey when system, 10-temperature control system, 12-current limliting aperture,
15-air supply system, 17-extract system, 19-become room, 20-differential pressure type pressure vacuum gage, 21-reference chamber, 22-expansion
Room, 23-quadrupole mass spectrometer, 25-calibration chamber, 26-extractor gauge.
Embodiment
The present invention will now be described in detail with reference to the accompanying drawings and examples.
The invention provides a kind of small leak rate Pressure Leak Calibration Apparatus and method.
As shown in figure 1, the calibrating installation of the present invention includes：Air supply system 15, extract system 17, temperature control system 10,
And be sequentially connected in series positive pressure leak hole 3, become room 19, reference chamber 21, expanding chamber 22, current limliting aperture 12, calibration chamber 25, ranging system
System 7 when system 5 and survey；
Wherein, air supply system 15 provides institute by vacuum valve access device pipeline for positive pressure leak hole arrival end, the port of export
Need the gas of pressure；Extract system 17 can extract the gas in system by vacuum valve access device pipeline；Absolute pressure formula pressure
Power vacuum meter is used for the absolute pressure for measuring gas；Differential pressure type pressure vacuum gage is used to measure reference chamber and becomes room relative pressure
Change；Temperature control system is used for the calibration temperature for controlling positive pressure leak hole；Range-measurement system, which is used to measure, becomes piston movement in room
Distance；System is used for the time and gas buildup time for measuring piston movement during survey, and quadrupole mass spectrometer is used to read calibration chamber
In ion stream, extractor gauge is used to read vacuum in calibration chamber, and expanding chamber is used for the pressure for reducing sample gas, and current limliting is small
Hole is used to limit the gas pressure flowed into calibration chamber, it is ensured that pressure meets the requirement of quadrupole mass spectrometer in calibration chamber.This
Invention calibrating installation can use constant-voltage method and quantitative gas Comparison Method calibration positive pressure leak hole, the calibration range of positive pressure leak hole main
It is (10-6~10-8)Pam3/s。
Specifically, air supply system 15 is malleation by vacuum valve VI 14, vacuum valve V 13 and vacuum valve VIII18
Pressure needed for the both ends offer of small opening 3, is provided with vacuum valve I 2 between the arrival end and vacuum valve V 13 of positive pressure leak hole 3；Adopt
The inlet port pressure of positive pressure leak hole 3 is measured with absolute pressure formula pressure vacuum gage I 1, absolute pressure formula pressure vacuum gage II 4 measures positive pressure leak hole
3 outlet pressures；Become room 19 and be provided with piston 6, by the mobile change volume size of piston 6 to keep change chamber pressure
Constant, range-measurement system 5 is connected with piston 6, and for measuring the displacement of piston 6, system 7 is used for time of measuring during survey；Become
Vacuum valve II 8 is provided between room 19 and reference chamber 21, differential pressure type pressure vacuum gage 20 connects the two of vacuum valve II 8
End, the relative pressure for measuring the both ends of vacuum valve II 8 change, i.e. measurement becomes the relative pressure of room 19 and reference chamber 21
Change, you can obtain becoming the pressure change of room；Vacuum valve III 9 is provided between reference chamber 21 and vacuum valve II 8；Limit
Vacuum valve IV 11 is provided between stream aperture 12 and expanding chamber 22；
Pipeline between vacuum valve II 8 and vacuum valve III 9 is as specimen chamber is matched somebody with somebody, and its volume v is, it is known that can be configured to
ps× v quantitative gas, wherein, psFor with specimen chamber air inlet gas pressure.
Expanding chamber 22 reduces gas pressure, then entered by current limliting aperture 12 to being expanded with the gas that specimen chamber configures
Enter calibration chamber 25；In calibration chamber 25, the gas ion stream in calibration chamber 25 is measured using quadrupole mass spectrometer 23, using extractor gauge 26
Read the vacuum in calibration chamber 25.
Extract system 17 realizes the pumping to calibrating installation；Temperature control system 10 passes through active constant temperature and passive constant temperature phase
With reference to mode control calibration positive pressure leak hole 3, become room 19, the temperature with specimen chamber, reference chamber 21 and expanding chamber 22.
The method that PRESSURE LEAK CALIBRATION is carried out using above-mentioned calibrating installation is as follows：When initial, all valves, which are in, closes shape
State；
(1) vacuum valve VI 14 is closed, opens vacuum valve I 2, vacuum valve II 8, vacuum valve III 9, vacuum
Valve IV 11；Vacuum valve VII 16, vacuum valve V 13, vacuum valve VIII 18, vacuum valve IX 24 are opened, is started
Extract system 16, align leakage empty hole 3, variodenser 19, reference chamber 21, expanding chamber 22 and calibration chamber 25 and carry out gas extraction, absolutely
The pressure that pressure type pressure vacuum gage II 4 is read is down to below 100Pa, and (the vacuum system pressure i.e. in addition to calibration chamber is down to 100Pa
Below), the pressure that extractor gauge 26 is read is down to 10-7(i.e. the pressure of calibration chamber is down to 10 to below Pa-7Below Pa), close vacuum
Valve VII16, vacuum valve V 13, vacuum valve VIII 18, vacuum valve IX 24, vacuum valve I 2, vacuum valve III
9th, vacuum valve IV 11.
(2) vacuum valve VI 14, vacuum valve V 13 and vacuum valve I 2 are opened, starts air supply system 15, to malleation
Gas pressure needed for the offer of the arrival end of small opening 3, is measured using absolute pressure formula pressure vacuum gage I 1.
(3) close vacuum valve V 13, open vacuum valve VIII 18, required gas is filled with to the port of export of positive pressure leak hole 3
Pressure, pressure is measured using absolute pressure formula pressure vacuum gage II 4, it is desirable to which the pressure that absolute pressure formula pressure vacuum gage II 4 is measured is to set
Fixed p0。
(4) vacuum valve II 8 is closed, system 5 starts timing during survey, and note timing initial time is t0；With differential pressure type pressure
The measurement of vacuum meter 20 becomes pressure change in room 19, and setting value p is risen to when becoming pressure in room 170During+Δ p, piston 6 moves
It is dynamic, become the increase of room volume, drop to p when becoming pressure in room 170During-Δ p, piston 6 stops movement, and range-measurement system 5 measures
Piston displacement；After piston 6 stops movement, become chamber pressure and continue to rise, when pressure rises to p0When, now the moment is note
t1, note time of measuring interval of delta t=t1—t0, in t1Moment reads the background ions in calibration chamber 25 using quadrupole mass spectrometer 23
Flow I0；
(5) vacuum valve II 8 is opened, now the moment is t to record1', vacuum valve III 9 is opened, by gas expansion extremely
11 sections of vacuum valve III 8 to vacuum valve IV.
(6) vacuum valve IV 11 is opened, gas enters calibration chamber 25 by current limliting aperture 12.
(7) probe gas ion stream I is read using quadrupole mass spectrometer 231。
(8) repeat step (1), vacuum valve VI 14, vacuum valve VIII 18, vacuum valve II 8 is then opened, is filled
It is p to enter normal pressuresGas, close vacuum valve II 8, the pipeline between vacuum valve II 8 and vacuum valve III 9 is made
For with specimen chamber, with specimen chamber volume v, it is known that being configured to ps× v quantitative gas.
(9) vacuum valve III 9 is opened, repeat step (6), probe gas ion stream is read using quadrupole mass spectrometer 23
I2。
(10) constant-voltage method calculates leak rate and calculated by formula (1)：
Wherein,
QiFor the measured value of constant-voltage method single leak rate, Pam3/s；Q0For known background leak rate；p0To become gas in room
Pressure, Pa；D is piston diameter, m；Δ L is piston displacement, m；Δ t is time of measuring interval, Δ t=t1-t0, s.
(11) quantitative gas Comparison Method calculates leak rate and calculated by formula (2)：
Wherein, Q 'iFor the measured value of quantitative gas Comparison Method single leak rate, Pam3/s；psFor the standard pressure of quantitative gas
Power, Pa；The orthobaric volume that v samples for quantitative gas, Pa；Δ t ' is positive pressure leak hole accumulated time, Δ t '=t1′-t0, s；I1For
The probe gas ion stream that positive pressure leak hole is flowed into calibration chamber, A；I2The probe gas ion flowed into for quantitative gas in calibration chamber
Stream, A；I0For device background probe gas ion stream, A.
(13) (1)~(12) are repeated n times, the calculation of leak rate of small leak rate positive pressure leak hole accurate calibration is calculated by formula (3)：
Wherein, Q is leak rate precise measurements, Pam3/s；N is pendulous frequency, typically no less than 6.
The present invention uses temperature control system, and active constant temperature is combined with the mode of passive constant temperature, adds the control of temperature
Scope processed and the temperature controlled degree of accuracy, effectively reduce the dummy discharge come due to temperature band, and perseverance can be used by devising one kind
Platen press carries out the device of PRESSURE LEAK CALIBRATION with quantitative gas Comparison Method simultaneously, small using distinct methods calibration on same device
The positive pressure leak hole of leak rate, positive pressure leak hole can be consistent substantially from dismounting, environmental condition, ensure that two methods calibration knot
The uniformity of fruit, by the comparison to two methods calibration result, the accurate calibration value of positive pressure leak hole can be obtained, meanwhile, have
Effect has saved the prover time of positive pressure leak hole, improves the calibration efficiency of positive pressure leak hole.
In summary, presently preferred embodiments of the present invention is these are only, is not intended to limit the scope of the present invention.
Within the spirit and principles of the invention, any modification, equivalent substitution and improvements made etc., it should be included in the present invention's
Within protection domain.
Claims (2)
- A kind of 1. small leak rate Pressure Leak Calibration Apparatus, it is characterised in that including：Air supply system (15), extract system (17), temperature Degree control system (10), range-measurement system (5), survey when system (7) and be sequentially connected in series positive pressure leak hole (3), become room (19), Reference chamber (21), expanding chamber (22), current limliting aperture (12) and calibration chamber (25)；Wherein, air supply system (15) by vacuum valve for the both ends of positive pressure leak hole (3) provide needed for pressure；Extract system (17) The gas in system is extracted by vacuum valve；Temperature control system (10) is used to control calibration positive pressure leak hole (3), becomes room (19) temperature, with specimen chamber, reference chamber (21) and expanding chamber (22)；Measured respectively just using two absolute pressure formula pressure vacuum gages Press the pressure of small opening (3) arrival end and the port of export；Become room (19) and be provided with piston (6), range-measurement system (5) is used to measure piston Displacement, system (7) is used for time of measuring during survey；Become between room (19) and reference chamber (21) and be provided with vacuum valve II (8), Differential pressure type pressure vacuum gage (20) connection vacuum valve II (8) both ends, become the pressure change of room for measuring；Reference chamber (21) vacuum valve III (9) is provided between vacuum valve II (8), between vacuum valve II (8) and vacuum valve III (9) Pipeline, which is used as, matches somebody with somebody specimen chamber；Expanding chamber (22) reduces gas pressure to being expanded with the gas that specimen chamber configures；Current limliting aperture (12) Vacuum valve IV (11) is provided between expanding chamber (22)；Using the gas in quadrupole mass spectrometer (23) measurement calibration chamber (25) from Subflow, the vacuum in calibration chamber (25) is read using extractor gauge (26).
- 2. the calibration method of small leak rate Pressure Leak Calibration Apparatus as claimed in claim 1, it is characterised in that including following step Suddenly：Step 1, all vacuum valves in calibrating installation in addition to the vacuum valve in air supply system exit are opened, start pumping System (16), when the vacuum system pressure in addition to calibration chamber is down to below 100Pa, the pressure of calibration chamber is down to 10-7During below Pa, Close all vacuum valves in addition to vacuum valve II (8) in calibrating installation；Step 2, the vacuum valve at air supply system exit and positive pressure leak hole (3) arrival end is opened, starts air supply system (15), to gas pressure needed for the offer of positive pressure leak hole (3) arrival end；Step 3, the vacuum valve closed at positive pressure leak hole (3) arrival end, the vacuum valve at positive pressure leak hole (3) port of export is opened Door, required gas pressure is filled with to positive pressure leak hole (3) port of export, it is desirable to which the pressure of positive pressure leak hole (3) port of export is the p of setting0；Step 4, vacuum valve II (8) is closed, system (5) starts timing during survey, and note timing initial time is t0；With differential pressure type pressure The pressure change that power vacuum meter (20) measurement becomes in room (19), become pressure in room (17) and rise to setting value p first0+Δ P, now piston (6) is mobile, becomes the increase of room (17) volume, and pressure declines, and drops to p when becoming pressure in room (17)0—Δp When, piston (6) stops movement, range-measurement system (5) measurement piston displacement, after piston (6) stops movement, becomes room (17) pressure Power is finally gone up to p0；Systematic survey becomes the final rise of chamber pressure to p during survey0When at the time of, be designated as t1；In t1Moment uses Quadrupole mass spectrometer (23) reads the background ions stream in calibration chamber (25), is designated as I0；Wherein, Δ p is setting value；Step 5, vacuum valve II (8) is opened, now the moment is t to record1', vacuum valve III (9) is opened, by gas expansion extremely Vacuum valve III (8) to vacuum valve IV (11) section；Step 6, vacuum valve IV (11) is opened, gas enters calibration chamber (25) by current limliting aperture (12), using four-electrode spectrum The probe gas ion stream in (23) reading calibration chamber (25) is counted, is designated as I1；Step 7, repeat step 1, air supply system exit, the vacuum valve at positive pressure leak hole (3) port of export are then opened, and Vacuum valve II (8)；It is p to be filled with normal pressuresGas, close vacuum valve II (8), be configured to p using with specimen chambers× v's Quantitative gas, v are with specimen chamber volume；Step 8, open vacuum valve III (9), repeat step 6, now quadrupole mass spectrometer (23) read showing in calibration chamber (25) Gas leakage body ion stream, is designated as I2；Step 9,1~step of repeat step 8n times, the leak rate Q that small leak rate positive pressure leak hole is calculated by formula (3) are：<mrow> <mi>Q</mi> <mo>=</mo> <mfrac> <mrow> <munderover> <mo>&Sigma;</mo> <mrow> <mi>i</mi> <mo>=</mo> <mn>1</mn> </mrow> <mi>n</mi> </munderover> <msub> <mi>Q</mi> <mi>i</mi> </msub> <mo>+</mo> <munderover> <mo>&Sigma;</mo> <mrow> <mi>i</mi> <mo>=</mo> <mn>1</mn> </mrow> <mi>n</mi> </munderover> <msubsup> <mi>Q</mi> <mi>i</mi> <mo>&prime;</mo> </msubsup> </mrow> <mn>2</mn> </mfrac> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>3</mn> <mo>)</mo> </mrow> </mrow>Wherein, QiFor the measured value of constant-voltage method single leak rate, Qi' be quantitative gas Comparison Method single leak rate measured value, n for survey Number is measured, not less than 6；Wherein,<mrow> <msub> <mi>Q</mi> <mi>i</mi> </msub> <mo>=</mo> <msub> <mi>p</mi> <mn>0</mn> </msub> <mo>&times;</mo> <mfrac> <mrow> <mi>&pi;</mi> <msup> <mrow> <mo>(</mo> <mfrac> <mi>d</mi> <mn>2</mn> </mfrac> <mo>)</mo> </mrow> <mn>2</mn> </msup> <mo>&times;</mo> <mi>&Delta;</mi> <mi>L</mi> </mrow> <mrow> <mi>&Delta;</mi> <mi>t</mi> </mrow> </mfrac> <mo>-</mo> <msub> <mi>Q</mi> <mn>0</mn> </msub> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </mrow><mrow> <msubsup> <mi>Q</mi> <mi>i</mi> <mo>&prime;</mo> </msubsup> <mo>=</mo> <mfrac> <mrow> <msub> <mi>p</mi> <mi>s</mi> </msub> <mo>&times;</mo> <mi>v</mi> </mrow> <mrow> <msup> <mi>&Delta;t</mi> <mo>&prime;</mo> </msup> </mrow> </mfrac> <mo>&CenterDot;</mo> <mfrac> <mrow> <msub> <mi>I</mi> <mn>1</mn> </msub> <mo>-</mo> <msub> <mi>I</mi> <mn>0</mn> </msub> </mrow> <mrow> <msub> <mi>I</mi> <mn>2</mn> </msub> <mo>-</mo> <msub> <mi>I</mi> <mn>0</mn> </msub> </mrow> </mfrac> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>2</mn> <mo>)</mo> </mrow> </mrow>Wherein, Q0For known background leak rate, d is piston diameter；Δ L is piston displacement；Δ t=t1-t0；Δ t '=t1′- t0。
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| CN108981866A (en) * | 2018-07-13 | 2018-12-11 | 北京东方计量测试研究所 | A kind of gas flow calibration system and method based on aero-turbine production spraying equipment |
| CN109443653A (en) * | 2018-11-28 | 2019-03-08 | 北京东方计量测试研究所 | A kind of gas sampling system and method for small leak rate PRESSURE LEAK CALIBRATION |
| CN109459192A (en) * | 2018-12-06 | 2019-03-12 | 北京东方计量测试研究所 | A kind of molecular flow sampling system and control method based on comparison method calibration positive pressure leak hole |
| CN112051009A (en) * | 2020-09-24 | 2020-12-08 | 北京卫星环境工程研究所 | Positive pressure standard leak hole calibration device and method for satellite single-point leak rate test |
| CN114636516A (en) * | 2021-04-06 | 2022-06-17 | 上海东贝真空设备有限公司 | Positive sample calibration device and method for checking sealing integrity of medicine packaging container |
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| CN108981866A (en) * | 2018-07-13 | 2018-12-11 | 北京东方计量测试研究所 | A kind of gas flow calibration system and method based on aero-turbine production spraying equipment |
| CN109443653A (en) * | 2018-11-28 | 2019-03-08 | 北京东方计量测试研究所 | A kind of gas sampling system and method for small leak rate PRESSURE LEAK CALIBRATION |
| CN109459192A (en) * | 2018-12-06 | 2019-03-12 | 北京东方计量测试研究所 | A kind of molecular flow sampling system and control method based on comparison method calibration positive pressure leak hole |
| CN112051009A (en) * | 2020-09-24 | 2020-12-08 | 北京卫星环境工程研究所 | Positive pressure standard leak hole calibration device and method for satellite single-point leak rate test |
| CN114636516A (en) * | 2021-04-06 | 2022-06-17 | 上海东贝真空设备有限公司 | Positive sample calibration device and method for checking sealing integrity of medicine packaging container |
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