CN101470065A - Method for measuring positive pressure leak hole full-leakage rate by quantitative gas method - Google Patents
Method for measuring positive pressure leak hole full-leakage rate by quantitative gas method Download PDFInfo
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- CN101470065A CN101470065A CNA2007103046115A CN200710304611A CN101470065A CN 101470065 A CN101470065 A CN 101470065A CN A2007103046115 A CNA2007103046115 A CN A2007103046115A CN 200710304611 A CN200710304611 A CN 200710304611A CN 101470065 A CN101470065 A CN 101470065A
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Abstract
The invention discloses a method for measuring the whole leak rate of pressure leak via quantitative gas method, which is characterized by comprising: arranging an object pressure leak into an accumulation room; evacuating the accumulation room to be filled with outlet gas of a certain pressure; after the time interval of delta<t>, opening the valve of the accumulation room, after gas expansion and pressure attenuation, leading gas into a mass spectrometry room to measure the ion flow of the leak gas as I<L>; preparing the leak gas of a pressure Ps via a small capacity V1 into a quantitative gas of PsxV1, to be mixed with the outlet gas prepared in the accumulation room; measuring the ion flow I<V> of the leak gas; leaking the outlet gas prepared in the accumulation room into the mass spectrometry room to measure its ion flow as I<A>, therefore, the whole leak rate of the tested pressure leak is expressed as: Q=(P<S>V1/delta<t>)(I<l>-I<A>/I<V>-I<A>). The method can measure the whole leak rate of pressure leaks and is applied for detecting and calibrating the whole leak rate of pressure leaks.
Description
Technical field
The present invention relates to a kind of method, belong to field of measuring technique with quantitative gas method measurement positive pressure leak hole full-leakage rate.
Background technology
Document " Pressure Leak Calibration Apparatus, " vacuum science and technology " the 21st volume, the 1st phase of calendar year 2001, the 55th～59 page " has been introduced the devices and methods therefor that positive pressure leak hole leak rate is measured.The method of measuring positive pressure leak hole leak rate with the quantitative gas method leak rate of energy measurement positive pressure leak hole outlet only wherein can't be measured the full-leakage rate of positive pressure leak hole.
Summary of the invention
The technical matters that the present invention solves is: solved a kind of method of measuring positive pressure leak hole full-leakage rate, this method is utilized the short-term stability and the linearity of mass spectrograph, and the measurement of positive pressure leak hole full-leakage rate is converted to the measurement of mass spectrograph to the probe gas ion flow.
Measure assembly by accumulation chamber 1, tested positive pressure leak hole 2, vacuum valve 3,5,11,12,15,16,18,20,21, micrometering valve 7, vacuum meter 4, expanding chamber 6, mass spectrum chamber 8, mass spectrograph 9, small size 10, gas cylinder 13,14, vacuum pump 17,19 is formed.
In the measurement mechanism, positive pressure leak hole 2 is installed in accumulation chamber 1, and valve 3 is connected with accumulation chamber 1, and vacuum meter 4 is connected with 5 with valve 3, and valve 5 is connected with expanding chamber 6, and valve 7 connects expanding chamber 6 and mass spectrum chamber 8, and mass spectrograph 9 is connected with mass spectrum chamber 8 with vacuum pump 19; Valve 20 is connected with standard volume and valve 11 with valve 3, valve 12 is connected with gas cylinder 13 with valve 11, valve 16 1 ends and vacuum meter 4, valve 3,5 connects, the other end is connected with valve 15 and gas cylinder 14, valve 21 1 ends are connected with valve 3,5, and the other end links to each other with vacuum pump 17 with valve 21, and valve 18 is connected with vacuum pump 17 with expanding chamber 6.
Technical solution of the present invention is: the method with quantitative gas method measurement positive pressure leak hole full-leakage rate comprises the following steps:
(1) positive pressure leak hole 2 is packed into the accumulation chamber 1 in;
(2) with 17,19 pairs in vacuum pump accumulation chamber 1, expanding chamber 6, mass spectrum chamber 8, and connecting tube vacuumize, make accumulation chamber, expanding chamber and connecting tube vacuum tightness less than 0.5Pa, make mass spectrum chamber vacuum tightness less than 1 * 10
-3Pa;
(3) charged pressure is the gas of p in accumulation chamber 1, and the variation of top hole pressure is no more than 5%, closes the valve 3 of accumulation chamber;
(4) positive pressure leak hole accumulation Δ t is after the time, and keeping environment temperature be (23 ± 3) ℃, opens and accumulates chamber valve 3, and gas is carried out pressure attenuation, introduces mass spectrum chamber 8 then, measures the ion flow I of probe gas with mass spectrograph 9
LThe background pressure of mass spectrum chamber is less than 1 * 10
-5Pa, and mass spectrograph was stablized more than 3 hours.
(5) will accumulate chamber 1, expanding chamber 6 and pipeline and vacuumize after, make its vacuum tightness less than 0.5Pa, exit gas to accumulation chamber 1 charged pressure p, the variation of top hole pressure is no more than 5%, close accumulation chamber valve 3, after other pipeline and expanding chamber 6 vacuumized, make its vacuum tightness less than 0.5Pa, by small size V
1Pressure power is the probe gas of Ps, standard configuration probe gas and exit gas are mixed after, introduce mass spectrum chamber 8 through overexpansion, the ion flow that records probe gas is I
v
(6) will accumulate chamber 1, expanding chamber 6 and pipeline and vacuumize after, make its vacuum tightness less than 0.5Pa, 1 charged pressure is the gas of p to the accumulation chamber, close accumulation chamber valve 3, after pipeline and expanding chamber 6 vacuumized, make its vacuum tightness less than 0.5Pa, will accumulate and introduce mass spectrum chamber 8 after gas expands in the chamber 1, the background ions stream that records probe gas is I
A
(7) full-leakage rate of positive pressure leak hole 2 is:
After gas was introduced mass spectrum chamber, the pressure of gas should be less than 1 * 10 in the mass spectrum chamber in described step (4), (5), (6)
-3Pa.
Get repeatedly the measurement result of the mean value of ion flow in described step (5), (6) as ion flow.
The full-leakage rate of positive pressure leak hole is represented by the mean value of repeatedly measuring in the described step (7).
The present invention's beneficial effect compared with prior art is:
Solved the problems of measurement of the full-leakage rate of positive pressure leak hole.The standard uncertainty that this method is measured the positive pressure leak hole full-leakage rate device is 15%.
Description of drawings
Fig. 1 measures the structural principle synoptic diagram of positive pressure leak hole full-leakage rate device with quantitative gas method for the present invention.
Fig. 2 is a measurement process flow diagram of the present invention.
Embodiment
As shown in Figure 1, the present invention adopts quantitative gas method to measure the device of positive pressure leak hole full-leakage rate by accumulation chamber 1, tested positive pressure leak hole 2, vacuum valve 3,5,11,12,15,16,18,20,21, micrometering valve 7, vacuum meter 4, expanding chamber 6, mass spectrum chamber 8, mass spectrograph 9, small size 10, gas cylinder 13,14, vacuum pump 17,19 is formed.
Embodiment 1
(1) tested positive pressure leak hole 2 is packed in the accumulation chamber 1, good seal also is connected with measurement mechanism.
(2) open vacuum pump 17,19, open vacuum valve 3,5,7,11,16,18,20,21, will accumulate chamber, expanding chamber and each connecting tube and be evacuated that (vacuum tightness is 2.1 * 10 to state
-1Pa), in mass spectrum chamber 8 pressure less than 1 * 10
-3During Pa, open mass spectrograph.
(3) valve-off 5,20,21, open valve 15, charge into N by valve 3 to the accumulation chamber
2After (pressure is 100.23KPa), valve-off 3,15.Opening 5,21 pairs of pipelines of valve and expanding chamber vacuumizes.
(4) behind positive pressure leak hole accumulation Δ t (11540s), and mass spectrograph has been when having worked more than 3 hours, and shut-off valve 7,16,18,20,21 is opened valve 3 and 5 then successively, slowly opens needle-valve 7, and gaseous tension (8.1 * 10 in mass spectrum chamber
-4Pa) after stable, the mean value of getting the ion flow of repeatedly measuring is as IL (6.34 * 10
-12A).
(5) open valve 18,21, will accumulate chamber, expanding chamber and each connecting tube and be evacuated that (vacuum tightness is 2.2 * 10 to state
-1Pa).
(6) valve-off 5,20,21, open valve 15, charge into N by valve 3 to the accumulation chamber
2After (pressure is 100.38KPa), valve-off 3,7,15,16 is opened valve 11,20,21, after pipeline vacuumized, valve-off 21 was got a certain amount of probe gas (119900Pa) with small size 10 (10.389mL), valve-off 11,12 is opened 21 pairs of pipelines of valve and is vacuumized.
(7) valve-off 18,21, open valve 3,20,5 respectively, slowly open needle-valve 7, and gaseous tension (9.2 * 10 in mass spectrum chamber
-1Pa) after stable, the mean value of getting the ion flow of repeatedly measuring is as IV (2.5 * 10
-11A).
(8) open vacuum valve 18,21, will accumulate chamber, expanding chamber and each connecting tube and be evacuated that (vacuum tightness is 2.0 * 10 to state
-1Pa).
(9) valve-off 5,20,21, open valve 15, charge into N by valve 3 to the accumulation chamber
2(gaseous tension of accumulation chamber is 100.38KPa).
(10) valve-off 7,15,16,18, open valve 3,5, slowly open needle-valve 7, and gaseous tension (6.8 * 10 in mass spectrum chamber
-1Pa) after stable, the mean value of getting the ion flow of repeatedly measuring is as IA (2.0 * 10
-15A).
(11) full-leakage rate of positive pressure leak hole 2 to be measured is:
(2.77×10
-6Pam
3s
-1)。
(12) standard uncertainty of tested positive pressure leak hole is 13%.
Claims (4)
1, measures the method for positive pressure leak hole full-leakage rate with quantitative gas method, measure assembly and comprise accumulation chamber 1, tested positive pressure leak hole 2, vacuum valve 3,5,11,12,15,16,18,20,21, micrometering valve 7, vacuum meter 4, expanding chamber 6, mass spectrum chamber 8, mass spectrograph 9, small size 10, gas cylinder 13,14, vacuum pump 17,19;
It is characterized in that comprising following measuring process:
Step 1: with positive pressure leak hole 2 pack into the accumulation chamber 1 in;
Step 2: with 17,19 pairs in vacuum pump accumulation chamber 1, expanding chamber 6, mass spectrum chamber 8, and connecting tube vacuumize;
Step 3: charged pressure is the gas of p in accumulation chamber 1, and the variation of top hole pressure is no more than 5%, closes the valve 3 of accumulation chamber;
Step 4: positive pressure leak hole accumulation Δ t is after the time, and keeping environment temperature be (23 ± 3) ℃, opens and accumulates chamber valve 3, and gas is carried out pressure attenuation, introduces mass spectrum chamber 8 then, measures the ion flow I of probe gas with mass spectrograph 9
L
Step 5: after will accumulating chamber 1, expanding chamber 6 and pipeline and vacuumizing, make its vacuum tightness less than 0.5Pa, exit gas to accumulation chamber 1 charged pressure p, the variation of top hole pressure is no more than 5%, close accumulation chamber valve 3, after other pipeline and expanding chamber 6 vacuumized, make its vacuum tightness less than 0.5Pa, by small size V
1Pressure power is the probe gas of Ps, standard configuration probe gas and exit gas are mixed after, introduce mass spectrum chamber 8 through overexpansion, the ion flow that records probe gas is I
v
Step 6: after will accumulating chamber 1, expanding chamber 6 and pipeline and vacuumizing, make its vacuum tightness less than 0.5Pa, 1 charged pressure is the gas of p to the accumulation chamber, close accumulation chamber valve 3, after pipeline and expanding chamber 6 vacuumized, make its vacuum tightness less than 0.5Pa, will accumulate and introduce mass spectrum chamber 8 after gas expands in the chamber 1, the background ions stream that records probe gas is I
A
Step 7: the full-leakage rate of positive pressure leak hole 2 is:
Get repeatedly the measurement result of the mean value of ion flow in the described step 5,6 as ion flow;
The full-leakage rate of positive pressure leak hole is represented by the mean value of repeatedly measuring in the described step 7.
2, the method with quantitative gas method measurement positive pressure leak hole full-leakage rate according to claim 1 is characterized in that: in the described step 1, make accumulation chamber, expanding chamber and connecting tube vacuum tightness less than 0.5Pa, make mass spectrum chamber vacuum tightness less than 1 * 10
-3Pa.
3, the method with quantitative gas method measurement positive pressure leak hole full-leakage rate according to claim 1, it is characterized in that: the background pressure of the mass spectrum chamber of described step 4 is less than 1 * 10
-5Pa, and mass spectrograph was stablized more than 3 hours.
4, the method with quantitative gas method measurement positive pressure leak hole full-leakage rate according to claim 1, it is characterized in that: after gas was introduced mass spectrum chamber, the pressure of gas should be less than 1 * 10 in the mass spectrum chamber in the described step 4,5,6
-3Pa.
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| CNA2007103046115A CN101470065A (en) | 2007-12-28 | 2007-12-28 | Method for measuring positive pressure leak hole full-leakage rate by quantitative gas method |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104280199A (en) * | 2014-09-12 | 2015-01-14 | 兰州空间技术物理研究所 | Mass spectrograph linear section testing method |
| CN105675208A (en) * | 2015-02-03 | 2016-06-15 | 中国航天员科研训练中心 | Vacuum and leakage rate multifunctional calibrating device |
| CN107843391A (en) * | 2017-09-19 | 2018-03-27 | 兰州空间技术物理研究所 | A kind of small leak rate Pressure Leak Calibration Apparatus and method |
| CN108225972A (en) * | 2012-12-21 | 2018-06-29 | 安尼奥利亚公司 | For determining the device and method of the size of leakage hole in sample |
| CN109443653A (en) * | 2018-11-28 | 2019-03-08 | 北京东方计量测试研究所 | A kind of gas sampling system and method for small leak rate PRESSURE LEAK CALIBRATION |
-
2007
- 2007-12-28 CN CNA2007103046115A patent/CN101470065A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108225972A (en) * | 2012-12-21 | 2018-06-29 | 安尼奥利亚公司 | For determining the device and method of the size of leakage hole in sample |
| CN108225972B (en) * | 2012-12-21 | 2021-04-09 | 安尼奥利亚公司 | Apparatus and method for determining the size of a leak in a sample |
| CN104280199A (en) * | 2014-09-12 | 2015-01-14 | 兰州空间技术物理研究所 | Mass spectrograph linear section testing method |
| CN105675208A (en) * | 2015-02-03 | 2016-06-15 | 中国航天员科研训练中心 | Vacuum and leakage rate multifunctional calibrating device |
| CN105675208B (en) * | 2015-02-03 | 2018-01-12 | 中国航天员科研训练中心 | Vacuum and leak rate Multifunctional school standard apparatus |
| CN107843391A (en) * | 2017-09-19 | 2018-03-27 | 兰州空间技术物理研究所 | A kind of small leak rate Pressure Leak Calibration Apparatus and method |
| CN109443653A (en) * | 2018-11-28 | 2019-03-08 | 北京东方计量测试研究所 | A kind of gas sampling system and method for small leak rate PRESSURE LEAK CALIBRATION |
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Open date: 20090701 |