CN201314833Y - Measuring device for the size change of corrugated pipe in transfiguration chamber for constant pressure gas flow indicator - Google Patents
Measuring device for the size change of corrugated pipe in transfiguration chamber for constant pressure gas flow indicator Download PDFInfo
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- CN201314833Y CN201314833Y CNU2008201829036U CN200820182903U CN201314833Y CN 201314833 Y CN201314833 Y CN 201314833Y CN U2008201829036 U CNU2008201829036 U CN U2008201829036U CN 200820182903 U CN200820182903 U CN 200820182903U CN 201314833 Y CN201314833 Y CN 201314833Y
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Abstract
The utility model relates to a measuring device for the size change of corrugated pipe in transfiguration chamber for constant pressure gas flow indicator, which belongs to the technical field of vacuum measuring. The measuring device comprises a gas supply system, a transfiguration chamber, an isolation valve, a reference chamber pipeline, an absolute piezometer, a differential pressure type piezometer, a translational mechanism, a standard container, a vacuum valve and an extract system. The transfiguration chamber comprises a corrugated pipe and a transfiguration chamber pipeline. The gas supply system is connected with the reference chamber pipeline by one vacuum valve; the extract system is connected with the reference chamber pipeline by one vacuum valve; the absolute piezometer is connected with the reference chamber pipeline; one end of the differential pressure type piezometer is connected with the reference chamber pipeline, and the other end is connected with the transfiguration chamber pipeline; one end of the corrugated pipe is connected with the translational mechanism, and the other end of the corrugated pipe is connected with the transfiguration chamber pipeline by one vacuum valve; the transfiguration chamber pipeline is connected with the reference chamber pipeline by the isolation valve. The device can carry out onsite measurement and can repeatedly measure under the working state.
Description
Technical field
The utility model relates to the measurement mechanism that a kind of constant pressure type gas flow meter corrugated tube volume changes, and belongs to the vacuumatic measuring technical field.
Background technology
In document " German federal physical technique research institute (PTB) gas micro metering review; " vacuum science and technology "; 2003 the 4th phases, the 289th page~294 pages ", introduced a kind of assay method of PTB volume-changeable chamber bellows of constant pressure type gas flow meter volume change.This method is the weighing measurement method, method is as follows: charge into the water that distills and degas through 4 times after bellows component is vacuumized, place the container on the sensitive balance to be connected with one bellows component with a tubule, when corrugated tube is compressed, water is squeezed into container, after revising buoyancy of water and evaporation capacity, obtain corrugated tube volume variable quantity by quality and the density of measuring the water on the balance.
The weak point of this method is: in the measuring process, can not calibrate in situ, but the transfiguration chamber need be pulled down from vacuum plant, can cause vacuum system to be exposed to atmosphere like this, be unfavorable for keeping of vacuum system; Secondly, owing to use aqueous medium when measuring, need that corrugated tube is carried out PROCESS FOR TREATMENT after measurement finishes and just can reuse, this might cause between measured value and the actual use value and have error; Once more, the measuring process complexity, the Measuring Time cycle is long, and for example PTB has only carried out 3 measurements altogether in the period of 17.
Summary of the invention
The purpose of this utility model is in order to overcome the deficiency of prior art, to propose a kind of measurement mechanism of volume-changeable chamber bellows of constant pressure type gas flow meter volume change.
The purpose of this utility model is achieved through the following technical solutions.
The measurement mechanism of a kind of volume-changeable chamber bellows of constant pressure type gas flow meter volume change of the present utility model comprises air supply system, transfiguration chamber, cuts off valve, reference chamber pipeline, absolute type pressure gauge, differential pressure type pressure gauge, parallel moving mechanism, volumetric standard, first vacuum valve, second vacuum valve, the 3rd vacuum valve, the 4th vacuum valve and extract system.Wherein, the transfiguration chamber comprises corrugated tube and transfiguration chamber pipeline.
Air supply system is responsible for providing test gas.
The transfiguration chamber is used to hold gas.Wherein, corrugated tube is used for regulating the pressure of transfiguration chamber; Transfiguration chamber pipeline is used to connect corrugated tube and volumetric standard.
Cutting off valve is used for reference chamber pipeline and transfiguration chamber pipeline are separated.
The reference chamber pipeline is used to hold gas, keeps reference gas pressure constant.
The absolute type pressure gauge is used for the absolute pressure of witness mark chamber and transfiguration chamber.
The differential pressure type pressure gauge is used to write down the relative pressure that shutdown valve closes between back reference chamber pipeline and the transfiguration chamber pipeline to be changed.
Parallel moving mechanism is used at axial compression or stretching corrugated tube, and the gaseous tension that transfiguration chamber volume changes, transfiguration is indoor is changed.
Volumetric standard is used for transfiguration chamber gas and expands, and produces pressure differential, measures transfiguration chamber volume.
Extract system is responsible for finishing the vacuum pumping to reference chamber pipeline, transfiguration chamber and volumetric standard.
Annexation between above-mentioned each ingredient is:
Air supply system links to each other with the reference chamber pipeline by first vacuum valve, and extract system links to each other with the reference chamber pipeline by second vacuum valve, and absolute pressure formula pressure gauge links to each other with the reference chamber pipeline; Differential pressure type pressure gauge one end links to each other with the reference chamber pipeline, and the other end links to each other with transfiguration chamber pipeline; Corrugated tube one end links to each other with parallel moving mechanism, and the corrugated tube other end links to each other with transfiguration chamber pipeline by the 3rd vacuum valve; Volumetric standard links to each other with transfiguration chamber pipeline by the 4th vacuum valve; Transfiguration chamber pipeline links to each other by cutting off valve with the reference chamber pipeline enclosure.
The principle of work of above-mentioned measurement mechanism is:
In the transfiguration chamber, charge into the gas of certain known pressure, and gas is expand in the volumetric standard, record corrugated tube at the state of nature transfiguration chamber volume in following time.Then, at corrugated tube in the raw the time, to the indoor feeding known pressure of transfiguration gas, and compress bellows, make it produce corrugated tube volume and change, at this moment, the transfiguration room pressure will rise, and measure corrugated tube volume variable quantity.
Beneficial effect
1, adopts the isothermal expansion technology,, obtain the volume-changeable chamber bellows volume change, avoided volume-changeable chamber bellows to measure the back and used PROCESS FOR TREATMENT such as preceding degasification, baking processing, simplified measuring process by measurement gas pressure and standard volume parameter.
2, measuring process is simple, adopts in site measurement, has avoided the dismounting of transfiguration chamber, helps the maintenance and the maintenance of vacuum system.
3, the Measuring Time cycle lacks, and has removed the motive seal switching performance of piston and grease chamber, has reduced leakage, venting, helps the raising of measuring accuracy.
The instrument that uses when 4, measuring all utilizes the existing instrument of constant pressure type gas flow meter, does not need additional designs to use other instruments.
Description of drawings
Fig. 1 is the structural representation of the utility model device preferred implementation.
Wherein, 1-air supply system, 2-first vacuum valve, 3-reference chamber pipeline, 4-absolute type pressure gauge, 5-cuts off valve, the 6-parallel moving mechanism, 7-corrugated tube, 8-the 3rd vacuum valve, 9-transfiguration chamber pipeline, the 10-volumetric standard, 11-the 4th vacuum valve, 12-differential pressure type pressure gauge, the 13-extract system, 14-second vacuum valve.
Embodiment
Below in conjunction with Figure of description, the preferred implementation of the utility model device is elaborated.
As shown in Figure 1, the measurement mechanism of preferred constant pressure type gas flow meter corrugated tube volume variation of the present utility model comprises air supply system 1, the first vacuum valve 2, the 3rd vacuum valve 8, the four vacuum valves 11, the second vacuum valves 14, cut off valve 5, reference chamber pipeline 3, absolute type pressure gauge 4, parallel moving mechanism 6, corrugated tube 7, transfiguration chamber pipeline 9, volumetric standard 10, differential pressure type pressure gauge 12 and extract system 13 are formed.
First vacuum valve 2 is in closed condition, and second vacuum valve 8, the 3rd vacuum valve 11, the 4th vacuum valve 14 all are in open mode, cuts off valve 5 and is in open mode.
Air supply system 1 links to each other with reference chamber pipeline 3 by first vacuum valve 2, and extract system 13 links to each other with reference chamber pipeline 3 by second vacuum valve 14, and absolute pressure formula pressure gauge 4 links to each other with reference chamber pipeline 3; Differential pressure type pressure gauge 12 1 ends link to each other with reference chamber pipeline 3, and the other end links to each other with transfiguration chamber pipeline 9; Corrugated tube 7 one ends link to each other with parallel moving mechanism 6, and the other end links to each other with transfiguration chamber pipeline 9 by the 3rd vacuum valve 8; Volumetric standard 10 links to each other with transfiguration chamber pipeline 9 by the 4th vacuum valve 11; 3 in transfiguration chamber pipeline 9 and reference chamber pipeline link to each other by cutting off valve 5.
The course of work of this measurement mechanism is:
At first, carry out vacuum pumping by 13 pairs of corrugated tubes 7 of extract system, transfiguration chamber pipeline 9, reference chamber pipeline 3 and volumetric standard 10;
Then, close second vacuum valve 14, in the raw the time, open first vacuum valve 2, in corrugated tube 7, transfiguration chamber pipeline 9 and reference chamber pipeline 3, feed the N of certain pressure by air supply system 1 at corrugated tube 7
2Gas, its force value is measured by absolute pressure formula pressure gauge 4.
Afterwards, close and cut off valve 5, behind the balance transfiguration chamber pressure,, open the 4th vacuum valve 11 then, N by the force value of this chamber of transfiguration constantly of differential pressure type pressure gauge 12 records
2Expand in the volumetric standard 10, after the balance, measure the force value of this chamber of transfiguration constantly by differential pressure type pressure gauge 12 once more;
Subsequently, close first vacuum valve 2, open second vacuum valve 14 and cut off valve 5, carry out vacuum pumping by 13 pairs of transfiguration chambers of extract system, reference chamber pipeline 3;
Afterwards, in the raw the time, open first vacuum valve 2, in transfiguration chamber and reference chamber pipeline 3, feed the N of certain pressure by air supply system 1 at corrugated tube
2Gas, its force value is measured by absolute pressure formula pressure gauge 4.Then, close partition valve 5, N in the balance transfiguration chamber
2Behind the pressure, by the force value of this chamber of transfiguration constantly of differential pressure type pressure gauge 12 records.Subsequently, by parallel moving mechanism 6 compress bellows 7, decrement is 8mm, produces the corrugated tube volume and changes, behind the equalized pressure, by the force value of this chamber of transfiguration constantly of differential pressure type pressure gauge 12 records.
Claims (1)
1, a kind of measurement mechanism of volume-changeable chamber bellows of constant pressure type gas flow meter volume change is characterized in that: comprise air supply system, transfiguration chamber, cut off valve, reference chamber pipeline, absolute type pressure gauge, differential pressure type pressure gauge, parallel moving mechanism, volumetric standard, vacuum valve and extract system; Wherein, the transfiguration chamber comprises corrugated tube and transfiguration chamber pipeline;
Its annexation is: air supply system links to each other with the reference chamber pipeline by first vacuum valve, and extract system links to each other with the reference chamber pipeline by second vacuum valve, and absolute pressure formula pressure gauge links to each other with the reference chamber pipeline; Differential pressure type pressure gauge one end links to each other with the reference chamber pipeline, and the other end links to each other with transfiguration chamber pipeline; Corrugated tube one end links to each other with parallel moving mechanism, and the other end links to each other with transfiguration chamber pipeline by the 3rd vacuum valve; Volumetric standard links to each other with transfiguration chamber pipeline by the 4th vacuum valve; Transfiguration chamber pipeline links to each other by cutting off valve with the reference chamber pipeline enclosure;
First vacuum valve is in closed condition, and second vacuum valve, the 3rd vacuum valve, the 4th vacuum valve all are in open mode; Cut off valve and be in open mode.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNU2008201829036U CN201314833Y (en) | 2008-12-22 | 2008-12-22 | Measuring device for the size change of corrugated pipe in transfiguration chamber for constant pressure gas flow indicator |
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CNU2008201829036U CN201314833Y (en) | 2008-12-22 | 2008-12-22 | Measuring device for the size change of corrugated pipe in transfiguration chamber for constant pressure gas flow indicator |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102042852A (en) * | 2010-10-26 | 2011-05-04 | 中国航天科技集团公司第五研究院第五一○研究所 | Method for measuring minimum gas flow |
CN106802220A (en) * | 2017-03-10 | 2017-06-06 | 中国电子科技集团公司第三十八研究所 | A kind of measurement apparatus for flexible container entirety leak rate detection |
CN109976402A (en) * | 2019-04-26 | 2019-07-05 | 太原理工大学 | A kind of pressure difference automatic control device and control method |
-
2008
- 2008-12-22 CN CNU2008201829036U patent/CN201314833Y/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102042852A (en) * | 2010-10-26 | 2011-05-04 | 中国航天科技集团公司第五研究院第五一○研究所 | Method for measuring minimum gas flow |
CN102042852B (en) * | 2010-10-26 | 2011-12-21 | 中国航天科技集团公司第五研究院第五一○研究所 | Method for measuring minimum gas flow |
CN106802220A (en) * | 2017-03-10 | 2017-06-06 | 中国电子科技集团公司第三十八研究所 | A kind of measurement apparatus for flexible container entirety leak rate detection |
CN109976402A (en) * | 2019-04-26 | 2019-07-05 | 太原理工大学 | A kind of pressure difference automatic control device and control method |
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090923 Termination date: 20161222 |