CN110553948A - dynamic gas permeability testing device and method based on mass spectrometry - Google Patents
dynamic gas permeability testing device and method based on mass spectrometry Download PDFInfo
- Publication number
- CN110553948A CN110553948A CN201910954419.3A CN201910954419A CN110553948A CN 110553948 A CN110553948 A CN 110553948A CN 201910954419 A CN201910954419 A CN 201910954419A CN 110553948 A CN110553948 A CN 110553948A
- Authority
- CN
- China
- Prior art keywords
- sample
- pressure pipeline
- temperature control
- vacuum
- test
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
- G01N15/08—Investigating permeability, pore-volume, or surface area of porous materials
- G01N15/082—Investigating permeability by forcing a fluid through a sample
- G01N15/0826—Investigating permeability by forcing a fluid through a sample and measuring fluid flow rate, i.e. permeation rate or pressure change
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N7/00—Analysing materials by measuring the pressure or volume of a gas or vapour
- G01N7/10—Analysing materials by measuring the pressure or volume of a gas or vapour by allowing diffusion of components through a porous wall and measuring a pressure or volume difference
Landscapes
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Dispersion Chemistry (AREA)
- Fluid Mechanics (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The invention discloses a dynamic gas permeability testing device and a method based on mass spectrometry, belonging to the technical field of material barrier property detection, wherein the device comprises a sample chamber, a temperature control system, an inflation system and a monitoring system; the sample chamber comprises a metal sealing device and an outer sleeve, wherein the metal sealing device is oppositely arranged by two VCR joints and is fixed by matching with a ferrule type bolt and a nut; the temperature control system comprises a heat preservation furnace chamber, a thermocouple and a temperature control instrument, and the outer sleeve is positioned in the heat preservation furnace chamber; the inflation system comprises air storage tanks, needle valves, high-pressure pipelines, a vacuum gauge and a vacuum unit, wherein the two air storage tank pipelines are connected with the needle valves in parallel, the needle valves are fixedly connected with one end of a VCR connector through the high-pressure pipelines, and the other end of the VCR connector is connected with the monitoring system through a low-pressure pipeline. The invention can realize the accurate test of the permeability of the penetration sample of various materials, and the sample is fixed by the metal ring gasket and the metal sealing device, so the installation is simple and convenient, and the repeated measurement is easy.
Description
Technical Field
The invention belongs to the technical field of material barrier property detection, and particularly relates to a dynamic gas permeability testing device and method based on mass spectrometry.
The invention relates to a device and a method for testing the gas permeability of a sheet-like material,
Background
The gas permeability of the solid material is one of the inherent characteristics of the material and one of the reasons for affecting the sealing performance of the closed container. With the increasing requirements on the aspects of service life, reliability and safety of key components in the aerospace field and the long-term vacuum acquisition and maintenance requirements in the advanced scientific research, material infiltration has become a main factor influencing pressure reduction and vacuum failure in many occasions. At present, most of gas permeability test methods adopt a static gas phase permeation method, such as a QJ2197-1991 metal and alloy gas permeability test method, a QJ 2196-1991 refractory oxide gas permeability coefficient test method, a QJ 2194-1991 organic material gas permeability coefficient test method and the like, the methods are limited by the method principle, the dynamic process of gas permeation cannot be represented, the difference between the test range and the test precision is large, an authoritative method and standard are lacked all the time, a standard test system and device are not seen, effective comparison and quantity transmission among different test methods and test results cannot be realized, and the accuracy of the test results can be influenced.
Disclosure of Invention
aiming at the problems in the prior art, the invention provides a dynamic gas permeability testing device based on mass spectrometry, which comprises a sample chamber, a temperature control system, an inflation system and a monitoring system, wherein the sample chamber is used for storing a sample gas;
The sample chamber comprises a metal sealing device and an outer sleeve, the metal sealing device is oppositely arranged by two vacuum connection radial sealing joints and is fixed by matching with a clamping sleeve type bolt and a nut, a permeation sample is clamped in the middle of the vacuum connection radial sealing joints, metal ring gaskets are respectively arranged on two sides of the permeation sample, and the metal sealing device is arranged in the outer sleeve;
The temperature control system comprises a heat preservation furnace cavity, a thermocouple and a temperature control instrument, the outer sleeve is positioned in the heat preservation furnace cavity, and the thermocouple is arranged outside the outer sleeve and connected with the temperature control instrument;
The inflation system comprises air storage tanks, needle valves, high-pressure pipelines, a vacuum gauge and a vacuum unit, wherein the two air storage tank pipelines are connected with the needle valves in parallel, the needle valves are fixedly connected with one ends of vacuum connection radial sealing joints through the high-pressure pipelines, and the air storage tanks I and II are respectively connected with an air bottle valve I, an air bottle valve II and a pressure reducing valve II of the pressure reducing valve I in series; the vacuum pump set is connected with the high-pressure pipeline through a pneumatic valve;
The other end of the vacuum connection radial sealing joint is connected with a monitoring system through a low-pressure pipeline, the monitoring system comprises a vacuum unit, an ionization gauge and a quadrupole mass spectrometer, the ionization gauge and the vacuum unit are arranged on the low-pressure pipeline, and the quadrupole mass spectrometer is arranged at the terminal of the low-pressure pipeline.
the high-pressure pipeline and the low-pressure pipeline are both made of metal materials with low air release rate, and surface passivation and hydrogen burning treatment are adopted in the manufacturing process.
The penetration sample is of a disc-shaped structure, and the diameter of the penetration sample is larger than the outer diameter of the vacuum connection radial sealing joint.
the metal ring gasket is of a circular ring sheet structure and is used for supporting a permeation sample.
the temperature control system realizes the temperature control of the permeation sample by adopting a radiation temperature control mode.
a dynamic gas permeability test method based on mass spectrometry using the test device of claim 1, comprising the following test methods:
1) installing a penetration sample to be tested in a metal sealing device;
2) Starting a vacuum unit to vacuumize the high-pressure pipeline and the low-pressure pipeline, finishing exhaust, and performing leak detection on each point of a sealing port;
3) After the tightness of the permeation sample is ensured, an outer sleeve is installed, the outer sleeve is placed in a heat preservation furnace cavity, a gas storage tank I and a gas storage tank II are opened, and the gas pressure is adjusted through a needle valve to complete gas inflation;
4) cleaning the test device by repeating the inflation and deflation;
5) starting a temperature control system, exhausting the permeation sample, and setting the temperature;
6) After the ultimate vacuum is reached, starting a four-stage mass spectrometer;
7) Stopping vacuumizing the high-pressure pipeline, and filling test gas into the high-pressure pipeline through an inflation system;
8) And starting test software to collect data, recording the data after the data are stable, and calculating the permeability of the measured permeation sample by using the measured data result.
9) And after the test is finished, closing the four-stage mass spectrometer, stopping the temperature control system, closing the vacuum unit when the temperature is reduced to 25 ℃, closing the gas storage tank and the needle valve, finally closing the main power supply of the equipment and taking out the permeation sample.
Prior to said step 1), the thickness and the effective permeation area of the permeated sample are determined.
the invention has the beneficial effects that:
1. the invention has wide test range, can test various gases, has accurate result and can realize the micro permeability test of metal and nonmetal. Firstly, a metal gasket and a metal joint are adopted for sealing, the sealing performance is good, the extremely high vacuum degree can be achieved during measurement, and the accuracy of permeability test is improved; secondly, the temperature control system adopts a radiation temperature control technology, so that the stability of the permeability of the permeation sample is improved, the precise permeability test of the permeation sample at a set temperature is realized, and the uncertainty of the permeability measurement result is reduced; moreover, the four-stage mass spectrometer has high sensitivity, and can measure small partial pressure change, so that the permeability improves the measurement precision.
2. The high-pressure pipeline and the low-pressure pipeline are both made of metal materials with low air release rate, and surface passivation and hydrogen burning treatment are adopted in the manufacturing process, so that the air release rate of the materials is further reduced, the influence of air release of the wall of the permeation cavity on a test result is reduced, and the lower limit of measurement is extended.
3. the invention has simple and convenient sample installation, can measure for many times without damaging the sample, and has simple and convenient test process.
4. The testing device has the advantages of small volume, compact structure and convenient use.
5. The invention is suitable for various materials, has high test precision, and can meet the permeability test requirements of novel materials in technical researches of aviation, aerospace, nuclear fusion, MEMS, seawater desalination, air filtration and the like.
drawings
FIG. 1 is a schematic view of a test apparatus according to the present invention;
FIG. 2 is a cross-sectional view of a permeate sample, metal ring gasket, vacuum bonded radial seal joint installation of the present invention;
FIG. 3 is an enlarged view of the ferrule type bolt of the present invention;
Fig. 4 is an enlarged view of the ferrule nut of the present invention.
Wherein:
1-a gas storage tank I, 2-a gas storage tank II, 3-a gas cylinder valve I, 4-a gas cylinder valve II, 5-a pressure reducing valve I, 6-a pressure reducing valve II, 7-a needle valve, 8-a vacuum gauge, 9-a pneumatic valve, 10-a molecular pump, 11-a mechanical pump, 12-a high-pressure pipeline, 13-a low-pressure pipeline, 14-a temperature control system, 15-an outer sleeve, 16-a metal sealing device, 17-an ionization gauge, 18-a four-stage mass spectrometer, 19-a permeation sample and 20-a metal ring gasket 21-a vacuum connection radial sealing joint.
Detailed Description
The invention is described in further detail below with reference to the following figures and specific examples:
The invention provides a dynamic gas permeability testing device based on mass spectrometry, which comprises a sample chamber, a temperature control system, an inflation system and a monitoring system.
as shown in fig. 1, the sample chamber includes a metal sealing device 16 and an outer sleeve 15, the metal sealing device is installed oppositely by two vacuum connection radial sealing joints 21 (VCR joints for short) according to fig. 2, and is fixed by a ferrule type bolt and a nut shown in fig. 3 and 4, a permeation sample 19 is clamped in the middle of the VCR joints, the permeation sample 19 is a disk-shaped structure, and is made of metal materials such as stainless steel, copper and the like or non-metal materials such as ceramic, glass and the like; metal ring gaskets are respectively arranged on two sides of the permeation sample 19, the metal sealing device 16 and the metal ring gasket 20 are used for sealing the permeation sample 19, the permeation sample 19 can be supported, effective permeation of gas can be realized, and meanwhile, the influence of material deflation on the lower limit of permeability measurement can be effectively avoided. The metal sealing device 16 is arranged inside the outer sleeve 15;
the temperature control system 14 comprises a heat preservation furnace chamber, a thermocouple and a temperature control instrument, the outer sleeve 15 is positioned in the heat preservation furnace chamber, and the thermocouple is arranged outside the outer sleeve and connected with the temperature control instrument;
The inflation system comprises an air storage tank, a needle valve 7, a high-pressure pipeline 12, a vacuum gauge 8 and a vacuum unit, wherein two air storage tank pipelines are connected with the needle valve 7 in parallel, the needle valve 7 is fixedly connected with one end of a VCR connector through the high-pressure pipeline 12, and an air storage tank I1 and an air storage tank II 2 are respectively connected with an air bottle valve I3, an air bottle valve II 4 and a pressure reducing valve I5 and a pressure reducing valve II 6 in series in sequence; the high-pressure pipeline 12 is provided with a vacuum gauge 8 and a vacuum unit, the vacuum unit is formed by serially connecting a molecular pump 10 with a mechanical pump 11 serving as a backing pump, and the vacuum unit is connected with the high-pressure pipeline 12 through a pneumatic valve 9;
the other end of the VCR connector is connected with a monitoring system through a low-pressure pipeline 13, the monitoring system comprises a vacuum unit, an ionization gauge 17 and a quadrupole mass spectrometer 18, the ionization gauge 17 and the vacuum unit are arranged on the low-pressure pipeline 13, and the quadrupole mass spectrometer 18 is arranged at the terminal of the low-pressure pipeline 13.
The high-pressure pipeline 12 and the low-pressure pipeline 13 are fixedly connected to two ends of a VCR joint and keep vacuum sealing, the high-pressure pipeline 12 and the low-pressure pipeline 13 are both made of metal materials with low air release rate, surface passivation and hydrogen burning treatment are adopted in the manufacturing process, the air release rate of the materials is further reduced, the influence of air release of the wall of the permeation cavity on a measurement result is reduced, and the lower limit of measurement is extended.
the specific test method of dynamic gas permeability based on mass spectrometry is as follows:
before conducting the permeability test, the thickness and effective permeation area of the permeation sample need to be determined.
1) a penetration sample 19 to be tested is arranged in the middle of a VCR joint, and is fixed and sealed by matching a metal ring gasket 20 with a ferrule type bolt and a nut;
2) Sequentially opening the front-end mechanical pump 11 and the molecular pump 10, adjusting the pneumatic valve 9, and waiting for the vacuum degree<5×10-3After Pa, carrying out leak detection on each point of the sealing port; if a leakage point exists, repeating the step 1) to install the penetration sample 19 again or fastening the metal sealing joint 16 again;
3) After the tightness of the sample chamber is ensured, an outer sleeve 15 is installed and is installed in a heat preservation furnace cavity of a temperature control system 14, a gas cylinder valve I3 and a pressure reducing valve I5 of a gas storage tank I1 and a gas cylinder valve II 4 and a pressure reducing valve II 6 of a gas storage tank II 2 are opened, a needle valve 7 is adjusted, a pneumatic valve 9 is closed, high-purity deuterium gas is introduced to enable a vacuum gauge 8 to display 80-110Pa, and the gas filling is completed.
4) Opening the pneumatic valve 9, the molecular pump 10 and the mechanical pump 11, vacuumizing and finishing air release; repeating the steps 3) and 4) for 3 times, and cleaning the pipeline; after the cleaning is finished, keeping the pneumatic valve 9, the molecular pump 10 and the mechanical pump 11 open;
5) adjusting the temperature control system 14, and degassing the permeation sample 19 at the temperature of 500 ℃ for 1.5 hours;
6) adjusting the temperature control system 14 to the testing temperature of the permeation sample 19;
7) The gauge 17 displays the vacuum degree<10-4after Pa, the pneumatic valve 9, the molecular pump 10 and the mechanical pump 11 are closed, the four-stage mass spectrometer 18 and corresponding test software are opened, and test parameters are set;
8) adjusting deuterium pressure to test pressure through a needle valve 7, starting data acquisition to obtain a change curve of deuterium permeation flux along with time until a stable state is reached, recording the permeation flux value after stabilization, and calculating the gas permeability by using a formula (1):
In the formula:Sample gas permeability, unit: mol/m.s.Pan(ii) a J-sample gas steady state permeation flux, unit: mol/m2s; d-sample thickness, unit: m; p-high pressure line pressure, unit: pa; n — a constant of the form of the gas present in the sample, n being 1/2 when present in atomic form and n being 1 when present in molecular form;
9) after the data of one pressure intensity is finished, the deuterium pressure intensity is adjusted, and the data acquisition of the next pressure intensity is carried out;
10) And after the data collection of the test points is finished, stopping the test software, storing the test data and closing the mass spectrometer 18.
11) The ionization gauge 17 is closed, and the pneumatic valve 9, the molecular pump 10 and the mechanical pump 11 are opened;
12) adjusting the temperature control system 14 to the next testing temperature, keeping the temperature for 1.5 hours, degassing the permeation sample 19, then continuing the test, and repeating the steps 6) to 11);
13) And after the test is finished, saving the data. Stopping temperature control, starting cooling, and stopping the molecular pump 10 and the mechanical pump 11 in sequence after the temperature is reduced to room temperature; and closing a cylinder valve I3 and a pressure reducing valve I5 of the air storage tank I1 and a cylinder valve II 4, a pressure reducing valve II 6 and a needle valve 7 of the air storage tank II 2.
Claims (7)
1. a dynamic gas permeability testing device based on mass spectrometry is characterized by comprising a sample chamber, a temperature control system, an inflation system and a monitoring system;
the sample chamber comprises a metal sealing device (16) and an outer sleeve (15), the metal sealing device is oppositely arranged by two vacuum connection radial sealing joints (21) and is fixed by matching with a clamping sleeve type bolt and a nut, a penetration sample (19) is clamped in the middle of the vacuum connection radial sealing joints (21), metal ring gaskets (20) are respectively placed on two sides of the penetration sample (19), and the metal sealing device (16) is arranged inside the outer sleeve (15);
the temperature control system (14) comprises a heat preservation furnace chamber, a thermocouple and a temperature control instrument, the outer sleeve (15) is positioned in the heat preservation furnace chamber, and the thermocouple is arranged outside the outer sleeve and connected with the temperature control instrument;
the inflation system comprises an air storage tank, a needle valve (7), a high-pressure pipeline (12), a vacuum gauge (8) and a vacuum unit, wherein two air storage tank pipelines are connected with the needle valve (7) in parallel, the needle valve (7) is fixedly connected with one end of a vacuum connection radial sealing joint (21) through the high-pressure pipeline (12), and the air storage tank I (1) and the air storage tank II (2) are respectively connected with an air bottle valve I (3), an air bottle valve II (4) and a pressure reducing valve I (5) and a pressure reducing valve II (6) in series in sequence; a vacuum gauge (8) and a vacuum unit are arranged on the high-pressure pipeline (12), the vacuum unit is formed by serially connecting a molecular pump (10) and a mechanical pump (11) serving as a backing pump, and the vacuum unit is connected with the high-pressure pipeline (12) through a pneumatic valve (9);
the other end of the vacuum connection radial sealing joint (21) is connected with a monitoring system through a low-pressure pipeline (13), the monitoring system comprises a vacuum unit, an ionization gauge (17) and a quadrupole mass spectrometer (18), the ionization gauge (17) and the vacuum unit are arranged on the low-pressure pipeline (13), and the quadrupole mass spectrometer (18) is arranged at the terminal of the low-pressure pipeline (13).
2. the testing device according to claim 1, wherein the high-pressure pipeline (12) and the low-pressure pipeline (13) are made of metal materials with low outgassing rate, and surface passivation and hydrogen burning treatment are adopted in the manufacturing process.
3. The testing device according to claim 1, characterized in that the penetration sample (19) is a disk-shaped structure, and the diameter of the penetration sample (19) is larger than the outer diameter of the vacuum connection radial sealing joint (21).
4. the test device according to claim 1, characterized in that the metal ring gasket (20) is a circular ring sheet structure for supporting a permeate sample (19).
5. The testing device according to claim 1, wherein the temperature control system controls the temperature of the permeated sample (19) by radiation temperature control.
6. the method for dynamic gas permeability test based on mass spectrometry as claimed in claim 1, wherein the test device of claim 1 comprises the following test methods:
1) installing a penetration sample (19) to be tested in a metal sealing device (16);
2) starting a vacuum unit to vacuumize the high-pressure pipeline (12) and the low-pressure pipeline (13) to complete exhaust and perform leak detection of each point of a sealing port;
3) After the tightness of the permeation sample (19) is ensured, an outer sleeve (15) is installed, the outer sleeve (15) is placed in a heat preservation furnace cavity, a gas storage tank I (1) and a gas storage tank II (2) are opened, the air pressure is adjusted through a needle valve (7), and then the inflation is completed;
4) cleaning the test device by repeating the inflation and deflation;
5) starting a temperature control system, exhausting the permeation sample (19), and setting the temperature;
6) after the ultimate vacuum is reached, starting a four-stage mass spectrometer (18);
7) stopping vacuumizing the high-pressure pipeline (12), and filling test gas into the high-pressure pipeline through an inflation system;
8) and starting test software to collect data, recording the data after the data are stable, and calculating the permeability of the measured permeation sample by using the measured data result.
9) And after the test is finished, closing the four-stage mass spectrometer (18), stopping the temperature control system, closing the vacuum unit when the temperature is reduced to 25 ℃, closing the gas storage tank and the needle valve (7), and finally closing the main power supply of the equipment and taking out the permeation sample (19).
7. The test method according to claim 6, characterized in that prior to step 1) the thickness and the effective permeation area of the permeation sample (19) are determined.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910954419.3A CN110553948A (en) | 2019-10-09 | 2019-10-09 | dynamic gas permeability testing device and method based on mass spectrometry |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910954419.3A CN110553948A (en) | 2019-10-09 | 2019-10-09 | dynamic gas permeability testing device and method based on mass spectrometry |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110553948A true CN110553948A (en) | 2019-12-10 |
Family
ID=68742417
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910954419.3A Pending CN110553948A (en) | 2019-10-09 | 2019-10-09 | dynamic gas permeability testing device and method based on mass spectrometry |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110553948A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113188974A (en) * | 2021-04-30 | 2021-07-30 | 中国特种设备检测研究院 | High-pressure hydrogen permeation test device and method for liner material of IV-type gas cylinder |
| CN114624319A (en) * | 2022-04-02 | 2022-06-14 | 中国工程物理研究院材料研究所 | Method for quantitatively obtaining ppm-level hydrogen isotope content in material based on thermal analysis-quadrupole mass spectrometry measurement principle |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107817200A (en) * | 2017-09-19 | 2018-03-20 | 兰州空间技术物理研究所 | A kind of mixed gas permeability measuring apparatus and method based on mass spectral analysis |
-
2019
- 2019-10-09 CN CN201910954419.3A patent/CN110553948A/en active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107817200A (en) * | 2017-09-19 | 2018-03-20 | 兰州空间技术物理研究所 | A kind of mixed gas permeability measuring apparatus and method based on mass spectral analysis |
Non-Patent Citations (1)
| Title |
|---|
| 周德惠等: "《金属的环境氢脆及其试验技术》", 31 December 1998 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113188974A (en) * | 2021-04-30 | 2021-07-30 | 中国特种设备检测研究院 | High-pressure hydrogen permeation test device and method for liner material of IV-type gas cylinder |
| CN114624319A (en) * | 2022-04-02 | 2022-06-14 | 中国工程物理研究院材料研究所 | Method for quantitatively obtaining ppm-level hydrogen isotope content in material based on thermal analysis-quadrupole mass spectrometry measurement principle |
| CN114624319B (en) * | 2022-04-02 | 2023-09-01 | 中国工程物理研究院材料研究所 | Method for quantitatively obtaining ppm-level hydrogen isotope content in material based on thermal analysis-quadrupole mass spectrometry measurement principle |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Gorman et al. | Hydrogen permeation through metals | |
| CN108151961B (en) | Extreme high vacuum calibration device and method | |
| WO2020224632A1 (en) | Method for testing leakage performance of aerospace composite material member in low temperature environment | |
| CN107036769A (en) | A kind of system and method for being used to calibrate different probe gas vacuum leak leak rates | |
| CN102445312B (en) | Testing apparatus for plastic airtightness and method thereof | |
| CN107817200B (en) | mixed gas permeability measuring device and method based on mass spectrometry | |
| CN110553948A (en) | dynamic gas permeability testing device and method based on mass spectrometry | |
| CN101718666B (en) | Metal system for testing outgassing property of low-temperature material | |
| WO2010117012A1 (en) | Permeability evaluation device and evaluation method | |
| CN102494741A (en) | Static sampling introduction device and method of calibrating pressure leak hole | |
| CN108204938B (en) | Hydrogen diffusion permeability measuring device in tritium-resistant coating | |
| CN116398421B (en) | High vacuum pump pumping speed testing device and using method thereof | |
| CN110927039A (en) | Device for detecting leakage performance of material in high-low temperature cycle mode and detection method thereof | |
| CN110068431A (en) | A kind of leakage test method of aerospace composite tank at low ambient temperatures | |
| CN103592206A (en) | Method for testing hydrogen diffusivity or permeability in metal and specific device therefor | |
| CN106289666B (en) | Calibration device and method for vacuum leak at ambient temperature | |
| CN109655372A (en) | A kind of PdO getter inspiratory capacity test device and method | |
| CN110865002A (en) | High-precision material outgassing rate testing system and testing method thereof | |
| CN114034604A (en) | Hydrogen-involved material comprehensive reaction system and test method thereof | |
| CN113252529B (en) | High-temperature gas-driven penetration testing system and method for metal pipe fitting | |
| CN107741452B (en) | method for testing volume fraction of martensite in austenitic stainless steel | |
| CN114396817B (en) | Liquid metal heat pipe packaging device and method | |
| Zapfe | Leak detection | |
| CN209802606U (en) | Valve low-temperature leakage detection system | |
| CN110987718A (en) | Test system for testing air suction performance of air suction material by constant pressure method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20191210 |
|
| WD01 | Invention patent application deemed withdrawn after publication |