CN109655372A - A kind of PdO getter inspiratory capacity test device and method - Google Patents

A kind of PdO getter inspiratory capacity test device and method Download PDF

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Publication number
CN109655372A
CN109655372A CN201811544404.1A CN201811544404A CN109655372A CN 109655372 A CN109655372 A CN 109655372A CN 201811544404 A CN201811544404 A CN 201811544404A CN 109655372 A CN109655372 A CN 109655372A
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China
Prior art keywords
valve
getter
pdo
chamber
pressure
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CN201811544404.1A
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Chinese (zh)
Inventor
冯天佑
陈联
成永军
习振华
李亚丽
孙冬花
丁栋
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Lanzhou Institute of Physics of Chinese Academy of Space Technology
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Lanzhou Institute of Physics of Chinese Academy of Space Technology
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Priority to CN201811544404.1A priority Critical patent/CN109655372A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N7/00Analysing materials by measuring the pressure or volume of a gas or vapour
    • G01N7/02Analysing materials by measuring the pressure or volume of a gas or vapour by absorption, adsorption, or combustion of components and measurement of the change in pressure or volume of the remainder
    • G01N7/04Analysing materials by measuring the pressure or volume of a gas or vapour by absorption, adsorption, or combustion of components and measurement of the change in pressure or volume of the remainder by absorption or adsorption alone

Abstract

The present invention provides a kind of PdO getter inspiratory capacity test device and methods, it is capable of the inspiratory capacity of validity test low-temperature (low temperature) vessel interlayer PdO getter, principle is simple and convenient to operate, data are reliable, and may be implemented to the isothermal measurement of PdO getter inspiratory capacity.The device of the invention reduces the uncertainty of test by each cavity volume of static expanding method precise measurement;Pressure is measured by magnetic suspension rotor gauge and Capacitance Diaphragm Gauge, obtains high-precision gas flow and balance pressure;The H generated using molecular sieve removal2O avoids its interference to test result.

Description

A kind of PdO getter inspiratory capacity test device and method
Technical field
The invention belongs to vacuum acquirement and maintain technical field, and in particular to a kind of PdO getter inspiratory capacity test device And method.
Background technique
The acquisition of laminated vacuum and maintenance are extremely important in low-temperature (low temperature) vessel, and the influence to insulation effect is very big.Vacuum interlayer Interior residual gas is mainly H2, CO, CH4 and Ar, wherein H2Average content reach 80.93%, and with the change of standing time It is long, H2Partial pressure increasing always.It is important for effectively keeping the vacuum degree of interlayer space to have that getter is set in interlayer Effect, the vacuum life of interlayer is heavily dependent on the characteristic and charge weight of getter.Existing low-temperature (low temperature) vessel interlayer Molecular sieve and active carbon are often used as getter, can effectively maintain vacuum, but they are to H2Adsorption capacity it is poor;For H2The higher problem of partial pressure effectively extracts H using the method for placing PdO getter at present2, the PdO getter of different inspiratory capacities Product extracts H2Effect it is different, thus need to test its inspiratory capacity.Existing PdO getter inspiratory capacity test device test Uncertainty is big, pressure measurement is inaccurate, and the precision of amounts of hydrogen and balance pressure is lower, and often generates in testing H2O interferes test result.
Summary of the invention
The present invention provides a kind of PdO getter inspiratory capacity test device and methods, being capable of validity test low-temperature (low temperature) vessel folder The layer inspiratory capacity of PdO getter, principle is simple and convenient to operate, data are reliable, and may be implemented to PdO getter air-breathing Measure isothermal measurement.
To achieve the above object, a kind of PdO getter inspiratory capacity test device of the invention, including gas distributing chamber, air exhauster Group, gas source and air-breathing chamber;
Wherein gas distributing chamber is connected by being provided with the pipeline of valve B with pumping unit;By be provided with the pipeline of valve C with Gas source is connected, and the pipeline by being provided with valve D is connected with air-breathing chamber;Capacitance Diaphragm Gauge, capacitor are also connected in gas distributing chamber Film is advised for measuring the indoor pressure of distribution;
Gas source is the gas cylinder equipped with hydrogen, is used for gas distributing chamber's distribution;
Air-breathing chamber includes reaction chamber and auxiliary pumping room, wherein reaction chamber by be provided with the pipeline of valve E respectively with valve D Place pipeline is connected to auxiliary pumping room, and reaction chamber is for holding PdO getter, and reaction chamber is by being provided with the piping connection of valve F There is magnetic suspension rotor gauge, magnetic suspension rotor gauge reacts indoor pressure for measuring;Auxiliary pumping interior is placed with molecular sieve, and molecular sieve is used The H generated after removing PdO getter air-breathing2O。
Wherein, distribution cell structure is cylinder.
Wherein, the pumping unit includes mechanical pump and molecular pump, and mechanical pump is by being provided with valve A, pipeline and dividing Son pump is connected, molecular pump, by being provided with valve B, pipeline and gas distributing chamber, connecting.
Wherein, the gas distributing chamber is made of stainless steel material.
Wherein, the air-breathing chamber is made of stainless steel material.
A kind of PdO getter air-breathing weight testing method of the invention is included the following steps: using above-mentioned test device
Step 1, gas distributing chamber, reaction chamber and the auxiliary volume for taking out room are measured by static expanding method;
Step 2, PdO getter to be tested is put into reaction chamber, opens all valves in addition to valve C, start air exhauster Group vacuumizes whole device;
Step 3, after the vacuum degree of Capacitance Diaphragm Gauge detection reaches setting value, valve E is closed, molecular sieve is heated Activationary temperature is reached, while continuing to be evacuated, the gas that removal molecular sieve has adsorbed;
Step 4, so that it is naturally cooled to environment temperature after completing the activation of molecular sieve, open valve E, while continuing to take out Gas evacuates degasification to PdO getter, after completing degassing procedure, closes the valve B (4) and valve D of pumping unit;
Step 5, valve C is opened, valve C is closed after the hydrogen of set amount is filled with to gas distributing chamber, records the inflation of gas distributing chamber Pressure, and at this time then it is anti-to open connection as reaction chamber and the auxiliary initial pressure for taking out room for reaction chamber and the auxiliary pressure for taking out room The valve D and valve E for answering room, adsorb hydrogen by PdO getter, and after distribution chamber pressure is stablized, record is at this time in gas distributing chamber Pressure balances pressure as air-breathing, and the gas distributing chamber obtained based on step 1, reaction chamber and the auxiliary volume calculations for taking out room are obtained accordingly Adsorbance;The wherein inspiratory capacity Q of unit mass getter are as follows:
Wherein, p0For the blowing pressure of gas distributing chamber 6, p1For reaction chamber and the auxiliary initial pressure for taking out room, pEFor air-breathing balance pressure Power, VGFor the volume of gas distributing chamber, VR1And VR2Respectively reaction chamber and the auxiliary volume for taking out room, m are the quality of tested PdO getter.
It further, further include step 6, step 6 are as follows: turn off valve D, repeat step 5 more than twice, obtain two or more The corresponding points of adsorbance and balance pressure draw out the adsorption isobar of PdO getter by each corresponding points.
The utility model has the advantages that
The device of the invention reduces the uncertainty of test by each cavity volume of static expanding method precise measurement;Pass through Magnetic suspension rotor gauge and Capacitance Diaphragm Gauge measure pressure, obtain high-precision gas flow and balance pressure;It is removed using molecular sieve The H of generation2O avoids its interference to test result.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of apparatus of the present invention.
Wherein, 1- mechanical pump;2- valve A, 4- valve B, 7- valve C, 9- valve D, 10- valve E, 12- valve F;3- points Son pump;5- Capacitance Diaphragm Gauge;6- gas distributing chamber;8- gas source;11- reaction chamber;13- magnetic suspension rotor gauge;The auxiliary pumping room 14-.
Fig. 2 is PdO of embodiment of the present invention getter adsorption isotherm schematic diagram.
Specific embodiment
With reference to the accompanying drawing, develop simultaneously embodiment, and the present invention will be described in further detail.
PdO inspiratory capacity test device provided in this embodiment is mainly used for vacuum tank interlayer PdO getter inspiratory capacity Test.The structural schematic diagram of device is as shown in Figure 1, include gas distributing chamber 6, pumping unit, gas source 8 and air-breathing chamber.
Wherein gas distributing chamber 6 is connected by being provided with the pipeline of valve B4 with pumping unit;By the pipe for being provided with valve C7 Road is connected with gas source 8, and the pipeline by being provided with valve D9 is connected with air-breathing chamber;Capacitor thin film is also connected in gas distributing chamber 6 Rule 5, Capacitance Diaphragm Gauge 5 are used to measure the pressure of gas distributing chamber 6;Gas distributing chamber 6 is made of stainless steel material, can be designed as cylinder Structure realizes distribution more evenly.
Pumping unit includes mechanical pump 1 and molecular pump 3, and mechanical pump 1 is by being provided with the pipeline and 3 phase of molecular pump of valve A2 Even, molecular pump 3 is connect by being provided with the pipeline of valve B4 with gas distributing chamber 6, and mechanical pump 1 and molecular pump 3 are used for whole device It is vacuumized.
Gas source 8 is the gas cylinder equipped with hydrogen, is used for 6 air inlet of gas distributing chamber.
Air-breathing chamber includes reaction chamber 11 and auxiliary pumping room 14, and reaction chamber 11 and auxiliary pumping room 14 are all made of stainless steel material system Make, wherein reaction chamber 11 is connected to pipeline where valve D9 and auxiliary pumping room 14 respectively by being provided with the pipeline of valve E10, is reacted Room 11 is for holding PdO getter, and reaction chamber 11 is by being provided with the piping connection magnetic suspension rotor gauge 13 of valve F12, magnetcisuspension Floating rotor gauge 13 is used to measure the pressure in reaction chamber 11;Molecular sieve is placed in auxiliary pumping room 14, molecular sieve is for removing PdO air-breathing The H generated after agent air-breathing2O。
Gas distributing chamber 6, reaction chamber 11 and the auxiliary volume for taking out room 14 are measured by static expanding method first when device works, so Make device be in high vacuum environment by being evacuated unit afterwards, heat activation is carried out to molecular sieve later, removes the gas adsorbed Body;Evacuation degasification is carried out to PdO getter later, it is made to have gettering ability;Then one is filled with to gas distributing chamber 6 by gas source 8 Then quantitative hydrogen opens the valve D9 and valve E10 of connection reaction chamber 11, makes hydrogen by the PdO air-breathing in reaction chamber 11 Agent absorption;Continue distribution, air-breathing after reaching balance, to obtain a series of adsorbances and balance the corresponding points of pressure, Jin Erhui Produce the adsorption isotherm of PdO getter.Specifically, the workflow of apparatus of the present invention includes the following steps:
Step 1, gas distributing chamber 6, reaction chamber 11 and the auxiliary volume for taking out room 14 are measured by static expanding method;
Step 2, PdO getter to be tested is put into reaction chamber 11, connects test device, open the institute in addition to valve C7 There is valve, opens mechanical pump 1 and molecular pump 3 vacuumizes whole device;
Step 3, when the vacuum degree of the detection of Capacitance Diaphragm Gauge 5 is less than 1 × 10-2After Pa, valve E10 is closed, to auxiliary pumping room 14 Interior molecular sieve carries out heating and reaches activationary temperature, while continuing to be evacuated, the gas that removal molecular sieve has adsorbed;
Step 4, so that it is naturally cooled to environment temperature after completing the activation of molecular sieve, open valve E10, while continuing to take out Gas evacuates degasification to PdO getter, after completing degassing procedure, closes the valve B4 and valve D9 of pumping unit;
Step 5, it opens and closes valve C7 after valve C7 is filled with the hydrogen of set amount to gas distributing chamber 6, record gas distributing chamber 6 fills Atmospheric pressure, and reaction chamber 11 and the auxiliary pressure for taking out room 14 are as reaction chamber 11 and the auxiliary initial pressure for taking out room 14 at this time, then The valve D9 and valve E10 for opening connection reaction chamber 11, adsorb hydrogen by PdO getter, after 6 pressure of gas distributing chamber is stablized, note The pressure recorded in gas distributing chamber 6 at this time balances pressure as air-breathing, obtains gas distributing chamber 6, reaction chamber 11 and auxiliary pumping room based on step 1 14 volume calculations obtain corresponding adsorbance;
The inspiratory capacity Q of unit mass getter is calculated as follows:
Wherein, p0For the blowing pressure of gas distributing chamber 6, p1For reaction chamber 11 and the auxiliary initial pressure for taking out room 14, pEIt is flat for air-breathing Weigh pressure, VGFor the volume of gas distributing chamber 6, VR1And VR2Respectively reaction chamber 11 and the auxiliary volume for taking out room 14, m are tested PdO air-breathing The quality of agent.
Step 6, valve D9 is closed, repeats step 5 more than twice, it is corresponding with balance pressure to obtain more than two adsorbances Point draws out the adsorption isotherm of PdO getter by each corresponding points.
Total air-breathing amountWherein QiFor the inspiratory capacity for the unit mass getter that i-th measurement obtains, i= 1,2 ... n, n are overall measurement number, and one group of experimental data is as shown in table 1:
1 experimental data of table
Total air-breathing amount when measuring every time is horizontal axis as the longitudinal axis, balance pressure, is depicted shown in adsorption isotherm Fig. 2.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.

Claims (7)

1. a kind of PdO getter inspiratory capacity test device, which is characterized in that including gas distributing chamber (6), pumping unit, gas source (8) with And air-breathing chamber;
Wherein gas distributing chamber (6) is connected by being provided with the pipeline of valve B (4) with pumping unit;By being provided with valve C's (7) Pipeline is connected with gas source (8), and the pipeline by being provided with valve D (9) is connected with air-breathing chamber;Gas distributing chamber is also connected on (6) Capacitance Diaphragm Gauge (5), Capacitance Diaphragm Gauge (5) are used to measure the pressure in gas distributing chamber (6);
Gas source (8) is the gas cylinder equipped with hydrogen, is used for gas distributing chamber (6) distribution;
Air-breathing chamber includes reaction chamber (11) and auxiliary pumping room (14), and wherein reaction chamber (11) is by being provided with the pipes of (10) valve E Road is connected to pipeline where valve D (9) and auxiliary pumping room (14) respectively, and reaction chamber (11) is for holding PdO getter, reaction chamber (11) have magnetic suspension rotor gauge (13) by being provided with the piping connection of valve F (12), magnetic suspension rotor gauge (13) is for measuring Pressure in reaction chamber (11);It is placed with molecular sieve in auxiliary pumping room (14), molecular sieve, which is used to remove, to be generated after PdO getter air-breathing H2O。
2. PdO getter inspiratory capacity test device according to claim 1, which is characterized in that gas distributing chamber's (6) structure is circle Cylindricality.
3. PdO getter inspiratory capacity test device according to claim 1, which is characterized in that the pumping unit includes Mechanical pump (1) and molecular pump (3), mechanical pump (1) are connected by being provided with the pipeline of valve A (2) with molecular pump (3), molecular pump (3) it is connect by being provided with the pipeline of valve B (4) with gas distributing chamber (6).
4. high-pressure air source device according to claim 1, which is characterized in that the gas distributing chamber (6) uses stainless steel material Production.
5. high-pressure air source device according to claim 1, which is characterized in that the air-breathing chamber uses stainless steel material system Make.
6. a kind of PdO getter air-breathing weight testing method, using test device as described in claim 1, which is characterized in that packet Include following steps:
Step 1, pass through static expanding method measurement gas distributing chamber (6), reaction chamber (11) and the auxiliary volume for taking out room (14);
Step 2, PdO getter to be tested is put into reaction chamber (11), opens all valves in addition to valve C (7), starting pumping Unit vacuumizes whole device;
Step 3, it after the vacuum degree of Capacitance Diaphragm Gauge (5) detection reaches setting value, closes valve E (10), molecular sieve is carried out Heating reaches activationary temperature, while continuing to be evacuated, the gas that removal molecular sieve has adsorbed;
Step 4, so that it is naturally cooled to environment temperature after completing the activation of molecular sieve, open valve E (10), while continuing to take out Gas evacuates degasification to PdO getter, after completing degassing procedure, closes the valve B (4) and valve D (9) of pumping unit;
Step 5, valve C (7) are opened, closes valve C (7) after being filled with the hydrogen of set amount to gas distributing chamber (6), record gas distributing chamber (6) the blowing pressure, and at this time reaction chamber (11) and it is auxiliary take out room (14) pressure as reaction chamber (11) and auxiliary pumping room (14) Initial pressure, then open connection reaction chamber (11) valve D (9) and valve E (10), adsorb hydrogen by PdO getter, After gas distributing chamber's (6) pressure is stablized, the pressure recorded in gas distributing chamber (6) at this time balances pressure as air-breathing, is obtained based on step 1 Gas distributing chamber (6), reaction chamber (11) and the auxiliary volume calculations for taking out room (14) obtain corresponding adsorbance;Wherein unit mass air-breathing The inspiratory capacity Q of agent are as follows:
Wherein, p0For the blowing pressure of gas distributing chamber 6, p1For reaction chamber (11) and the auxiliary initial pressure for taking out room (14), pEIt is flat for air-breathing Weigh pressure, VGFor the volume of gas distributing chamber (6), VR1And VR2Respectively reaction chamber (11) and the auxiliary volume for taking out room (14), m is tested The quality of PdO getter.
7. PdO getter air-breathing weight testing method as claimed in claim 6, which is characterized in that further include step 6, step 6 Are as follows: turn off valve D (9), repeat step 5 more than twice, obtains more than two adsorbances and balance the corresponding points of pressure, by each A corresponding points draw out the adsorption isobar of PdO getter.
CN201811544404.1A 2018-12-17 2018-12-17 A kind of PdO getter inspiratory capacity test device and method Pending CN109655372A (en)

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CN110907151A (en) * 2019-10-23 2020-03-24 张家港富瑞特种装备股份有限公司 Method for measuring and calculating relationship between vacuum degree of low-temperature gas cylinder and daily evaporation rate and adsorption capacity
CN113295575A (en) * 2021-05-24 2021-08-24 合肥工业大学 Getter air suction performance test integrated device based on differential pressure method
CN113917080A (en) * 2021-10-08 2022-01-11 北京航空航天大学 Molecular sieve attenuation performance test equipment
CN113917080B (en) * 2021-10-08 2024-04-19 北京航空航天大学 Molecular sieve decay performance test equipment

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CN113295575A (en) * 2021-05-24 2021-08-24 合肥工业大学 Getter air suction performance test integrated device based on differential pressure method
CN113917080A (en) * 2021-10-08 2022-01-11 北京航空航天大学 Molecular sieve attenuation performance test equipment
CN113917080B (en) * 2021-10-08 2024-04-19 北京航空航天大学 Molecular sieve decay performance test equipment

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