CN102937467A - All-metal gas micro-flow meter - Google Patents
All-metal gas micro-flow meter Download PDFInfo
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- CN102937467A CN102937467A CN2012104518468A CN201210451846A CN102937467A CN 102937467 A CN102937467 A CN 102937467A CN 2012104518468 A CN2012104518468 A CN 2012104518468A CN 201210451846 A CN201210451846 A CN 201210451846A CN 102937467 A CN102937467 A CN 102937467A
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- vacuum valve
- chamber
- constant volume
- pressure
- volume chamber
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Abstract
The invention discloses an all-metal gas micro-flow meter, and belongs to the measurement field. The micro-flow meter comprises a first vacuum valve, an absolute pressure type pressure meter, a second vacuum valve, a first constant volume chamber, an isolating valve, a translation mechanism, a corrugated pipe, a third vacuum valve, a second constant volume chamber,, a fixed flow guide hole, a gas supply system, a gas pumping system, a fourth vacuum valve, a differential pressure type pressure meter, a variable volume chamber, a fifth vacuum valve and a sixth vacuum valve. Peripheral equipment comprises a calibration chamber and a heating device. Most of components in the micro-flow meter are made of stainless steel materials, so that degassing of a flow meter is facilitated, degassing of the gas flow meter wall is reduced, and the flux lower limit generated by the gas flow meter is extended effectively; and the micro-flow meter is simple in structure, small in size and light in weight, and reduces the cost simultaneously.
Description
Technical field
The present invention relates to a kind of all-metal gas micro-flowmeter, belong to fields of measurement.
Background technology
Gas micro-flowmeter is a kind of device of measuring and providing gas micro, is the basis of setting up gas micro metering standard, and accurately measurement gas micrometeor tool is of great significance.Along with the development of China's aerospace industry, the development of the technology such as manned spaceship, carrier rocket is more and more high to equipment and instrument accuracy grade, reliability requirement, therefore needs the gas micro-flowmeter that the development uncertainty of measurement is less, measurement lower limit is lower.Because the positions such as gas micro-flowmeter seal for pipe joints in the past adopt nonmetallic substance to cause baking temperature low, make the whole degasification of gas micro-flowmeter insufficient, when the measurement gas flow, the wall venting causes the gas meter flux lower limit to be difficult to extend.In addition, existing micro-flowmeter adopts and mostly adopts polytetrafluoroethylmaterial material, so that the transfiguration cell structure is complicated, volume is larger, has increased cost.
Summary of the invention
The object of the present invention is to provide a kind of all-metal gas micro-flowmeter, most of assembly adopts stainless steel material in the described micro-flowmeter, be conducive to the degasification of flowmeter, reduced the venting of gas meter wall, effectively extended the flux lower limit that gas meter produces; And so that described micro-flowmeter is simple in structure, volume is little, lightweight, reduced simultaneously cost.
Purpose of the present invention is realized by following technical scheme:
A kind of all-metal gas micro-flowmeter, described micro-flowmeter comprises: the first vacuum valve, absolute pressure formula pressure gauge, the second vacuum valve, the first constant volume chamber, isolating valve, parallel moving mechanism, corrugated tube, the 3rd vacuum valve, the second constant volume chamber, constant conductance aperture, air supply system, extract system, the 4th vacuum valve, differential pressure type pressure gauge, transfiguration chamber, the 5th vacuum valve, the 6th vacuum valve; Peripherals comprises calibration chamber and heating arrangement;
Air supply system, the first vacuum valve, the second vacuum valve, the first constant volume chamber, isolating valve, the transfiguration chamber, the 5th vacuum valve, the second constant volume chamber, the constant conductance aperture, the 6th vacuum valve, calibration chamber links to each other successively, differential pressure type pressure gauge one end links to each other with the constant volume chamber, the other end links to each other with the transfiguration chamber, the transfiguration chamber is by the 3rd vacuum valve and corrugated tube, parallel moving mechanism links to each other successively, absolute pressure formula pressure gauge, the 4th vacuum valve, extract system links to each other successively, and the pipeline between absolute pressure formula pressure gauge and the 4th vacuum valve intersects with pipeline between the first vacuum valve and the second vacuum valve and is communicated with;
All pipelines, vacuum valve, isolating valve, constant volume chamber, transfiguration chamber and parallel moving mechanism all adopt stainless steel material.
Described micro-flowmeter provides the method step of micrometeor as follows:
1. open all valves except the first vacuum valve, start extract system, extract the gas in the described micro-flowmeter;
2. start heating arrangement, all pipelines, vacuum valve, isolating valve, constant volume chamber, transfiguration chamber and parallel moving mechanism in the described micro-flowmeter are toasted, baking temperature rises to 150 ℃ with the uniform rate of (15 ~ 30) ℃/h, flowmeter is carried out degasification, then close the second vacuum valve, isolating valve, the 4th vacuum valve and extract system;
3. open the first vacuum valve, start air supply system, open simultaneously the second vacuum valve, isolating valve, be filled with the gas of set amount after, close air supply system, be filled with the pressure p of gas, the i.e. pressure of the first constant volume chamber by the manometry of absolute pressure formula;
4. after the first constant volume chamber and transfiguration chamber pressure balance, be that differential pressure type pressure gauge registration is when being zero, close the second vacuum valve, isolating valve, pressure differential by differential pressure type manometry the first constant volume chamber and transfiguration chamber, when pressure reduction reached system's preset value, parallel moving mechanism drove corrugated tube and moves, and corrugated tube moves and causes the transfiguration chamber pressure to change, when the first constant volume chamber equates with the transfiguration chamber pressure, calculate the gas flow that flows out the transfiguration chamber according to formula (I);
Wherein, Q-gas flow, unit: Pam
3/ s;
The pressure of gas in the p-first constant volume chamber, unit: Pa;
A
Eff-expression corrugated tube effective cross section is long-pending, unit: m
2
Δ t-used time of transfiguration chamber stereomutation, unit: s;
The distance of Δ L-move at the time of Δ t inner corrugated pipe, unit: m.
Beneficial effect
(1) all pipelines, vacuum valve, isolating valve, constant volume chamber, transfiguration chamber, parallel moving mechanism adopt stainless steel material in the micro-flowmeter of the present invention, baking temperature can reach 150 ℃, be conducive to the degasification of flowmeter, reduce the venting of gas meter wall, effectively extended the flux lower limit that gas meter produces.
(2) most of assembly adopts stainless steel material in the micro-flowmeter of the present invention so that simple in structure, volume is little, lightweight, reduced simultaneously cost.
(3) in the micro-flowmeter of the present invention, by parallel moving mechanism, compression displacement that can the Measurement accuracy corrugated tube is determined zero point (initial point) easily, and can carry out easily spacing, to avoid damaging corrugated tube owing to the misoperation of motor.
Description of drawings
Fig. 1 is the synoptic diagram of all-metal gas micro-flowmeter of the present invention;
Wherein, the 1-the first vacuum valve, 2-absolute pressure formula pressure gauge, the 3-the second vacuum valve, the 4-the first constant volume chamber, 5-isolating valve, 6-parallel moving mechanism, 7-corrugated tube, the 8-the three vacuum valve, the 9-the second constant volume chamber, 10-constant conductance aperture, 11-air supply system, 12-extract system, the 13-the four vacuum valve, 14-differential pressure type pressure gauge, 15-transfiguration chamber, the 16-the five vacuum valve, the 17-the six vacuum valve.
Embodiment
Below in conjunction with the drawings and specific embodiments in detail the present invention is described in detail, but is not limited to this.
Embodiment 1
As shown in Figure 1, a kind of all-metal gas micro-flowmeter, described micro-flowmeter comprises: the first vacuum valve 1, absolute pressure formula pressure gauge 2, the second vacuum valve 3, the first constant volume chamber 4, isolating valve 5, parallel moving mechanism 6, corrugated tube 7, the 3rd vacuum valve 8, the second constant volume chamber 9, constant conductance aperture 10, air supply system 11, extract system 12, the 4th vacuum valve 13, differential pressure type pressure gauge 14, transfiguration chamber 15, the 5th vacuum valve 16, the 6th vacuum valve 17; Peripherals comprises calibration chamber and heating arrangement;
Air supply system 11, the first vacuum valve 1, the second vacuum valve 3, the first constant volume chamber 4, isolating valve 5, transfiguration chamber 15, the 5th vacuum valve 16, the second constant volume chamber 9, constant conductance aperture 10, the 6th vacuum valve 17, calibration chamber links to each other successively, differential pressure type pressure gauge 14 1 ends link to each other with the constant volume chamber, the other end links to each other with transfiguration chamber 15, transfiguration chamber 15 is by the 3rd vacuum valve 8 and corrugated tube 7, parallel moving mechanism 6 links to each other successively, absolute pressure formula pressure gauge 2, the 4th vacuum valve 13, extract system 12 links to each other successively, and the pipeline between absolute pressure formula pressure gauge 2 and the 4th vacuum valve 13 intersects with pipeline between the first vacuum valve 1 and the second vacuum valve 3 and is communicated with;
All pipelines, vacuum valve, isolating valve 5, constant volume chamber, transfiguration chamber 15 and parallel moving mechanism 6 all adopt stainless steel material.
Described micro-flowmeter provides the method step of micrometeor as follows:
1. open all valves except the first vacuum valve 1, start extract system 12, extract the gas in the described micro-flowmeter;
2. start heating arrangement, all pipelines, vacuum valve, isolating valve 5, constant volume chamber, transfiguration chamber 15 and parallel moving mechanism 6 in the described micro-flowmeter are toasted, baking temperature rises to 150 ℃ with the uniform rate of (15 ~ 30) ℃/h, flowmeter is carried out degasification, then close the second vacuum valve 3, isolating valve 5, the 4th vacuum valve 13 and extract system 12;
3. open the first vacuum valve 1, start air supply system 11, open simultaneously the second vacuum valve 3, isolating valve 5, be filled with the gas of set amount after, close air supply system 11, measure the pressure p that is filled with gas, the i.e. pressure of the first constant volume chamber 4 by absolute pressure formula pressure gauge 2;
4. after the first constant volume chamber 4 and 15 pressure equilibriums of transfiguration chamber, be that differential pressure type pressure gauge 14 registrations are when being zero, close the second vacuum valve 3, isolating valve 5, measure the pressure differential of the first constant volume chamber 4 and transfiguration chamber 15 by differential pressure type pressure gauge 14, when pressure reduction reaches system's preset value, parallel moving mechanism 6 drives corrugated tube 7 and moves, corrugated tube 7 moves and causes transfiguration chamber 15 pressure to change, when the first constant volume chamber 4 equates with transfiguration chamber 15 pressure, calculate the gas flow that flows out transfiguration chamber 15 according to formula (I);
Wherein, Q-gas flow, unit: Pam
3/ s;
The pressure of gas in p-the first constant volume chamber 4, unit: Pa;
A
Eff-expression corrugated tube 7 effective cross sections are long-pending, unit: m
2
The Δ t-transfiguration chamber used time of 15 stereomutations, unit: s;
The distance that Δ L-moves at the time of Δ t inner corrugated pipe 7, unit: m.
The pressure of transfiguration chamber 15 from 20Pa, according to the principle that each magnitude is got three points, is inflated to about 8 * 10
4Pa, and under different pressures the Calculation of Gas flow, flow measurement range is (3.840 * 10
-4～3.42 * 10
-8) Pam
3/ s, uncertainty of measurement is 0.89%.
The present invention includes but be not limited to above embodiment, every any being equal to of carrying out under the principle of spirit of the present invention, replace or local improvement, all will be considered as within protection scope of the present invention.
Claims (2)
1. all-metal gas micro-flowmeter, it is characterized in that: described micro-flowmeter comprises: the first vacuum valve (1), absolute pressure formula pressure gauge (2), the second vacuum valve (3), the first constant volume chamber (4), isolating valve (5), parallel moving mechanism (6), corrugated tube (7), the 3rd vacuum valve (8), the second constant volume chamber (9), constant conductance aperture (10), air supply system (11), extract system (12), the 4th vacuum valve (13), differential pressure type pressure gauge (14), transfiguration chamber (15), the 5th vacuum valve (16), the 6th vacuum valve (17); Peripherals comprises calibration chamber and heating arrangement;
Air supply system (11), the first vacuum valve (1), the second vacuum valve (3), the first constant volume chamber (4), isolating valve (5), transfiguration chamber (15), the 5th vacuum valve (16), the second constant volume chamber (9), constant conductance aperture (10), the 6th vacuum valve (17), calibration chamber links to each other successively, differential pressure type pressure gauge (14) one ends link to each other with the constant volume chamber, the other end links to each other with transfiguration chamber (15), transfiguration chamber (15) is by the 3rd vacuum valve (8) and corrugated tube (7), parallel moving mechanism (6) links to each other successively, absolute pressure formula pressure gauge (2), the 4th vacuum valve (13), extract system (12) links to each other successively, and the pipeline between absolute pressure formula pressure gauge (2) and the 4th vacuum valve (13) intersects with pipeline between the first vacuum valve (1) and the second vacuum valve (3) and is communicated with;
All pipelines, vacuum valve, isolating valve (5), constant volume chamber, transfiguration chamber (15) and parallel moving mechanism (6) all adopt stainless steel material.
2. method that adopts all-metal gas micro-flowmeter as claimed in claim 1 that micrometeor is provided, it is characterized in that: described method step is as follows:
1. open all valves except the first vacuum valve (1), start extract system (12), extract the gas in the described micro-flowmeter;
2. start heating arrangement, all pipelines, vacuum valve, isolating valve (5), constant volume chamber, transfiguration chamber (15) and parallel moving mechanism (6) in the described micro-flowmeter are toasted, baking temperature rises to 150 ℃ with the uniform rate of (15 ~ 30) ℃/h, flowmeter is carried out degasification, then close the second vacuum valve (3), isolating valve (5), the 4th vacuum valve (13) and extract system (12);
3. open the first vacuum valve (1), start air supply system (11), open simultaneously the second vacuum valve (3), isolating valve (5), after being filled with the gas of set amount, close air supply system (11), measure the pressure p that is filled with gas, the i.e. pressure of the first constant volume chamber (4) by absolute pressure formula pressure gauge (2);
4. after the first constant volume chamber (4) and transfiguration chamber (15) pressure equilibrium, be that differential pressure type pressure gauge (14) registration is when being zero, close the second vacuum valve (3), isolating valve (5), measure the pressure differential of the first constant volume chamber (4) and transfiguration chamber (15) by differential pressure type pressure gauge (14), when pressure reduction reaches system's preset value, it is mobile that parallel moving mechanism (6) drives corrugated tube (7), mobile transfiguration chamber (15) pressure that causes of corrugated tube (7) changes, when the first constant volume chamber (4) and transfiguration chamber (15) when pressure equates, calculate the gas flow that flows out transfiguration chamber (15) according to formula (I);
Wherein, Q-gas flow, unit: Pam
3/ s;
The pressure of gas in the p-first constant volume chamber (4), unit: Pa;
A
Eff-expression corrugated tube (7) effective cross section is long-pending, unit: m
2
Δ t-transfiguration chamber (15) used time of stereomutation, unit: s;
Δ L-in the mobile distance of the time of Δ t inner corrugated pipe (7), unit: m.
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|---|---|---|---|
| CN2012104518468A CN102937467A (en) | 2012-11-12 | 2012-11-12 | All-metal gas micro-flow meter |
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|---|---|---|---|
| CN2012104518468A CN102937467A (en) | 2012-11-12 | 2012-11-12 | All-metal gas micro-flow meter |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103644947A (en) * | 2013-12-17 | 2014-03-19 | 东北大学 | Gas micro-flow measuring device |
| CN103791962A (en) * | 2013-12-24 | 2014-05-14 | 兰州空间技术物理研究所 | Multi-working-mode gas flowmeter and gas flow measuring method |
| CN104236641A (en) * | 2014-09-19 | 2014-12-24 | 兰州空间技术物理研究所 | Multi-medium gas prepared sample standard flow meter based on constant-pressure method and flow providing method |
| CN104434039A (en) * | 2014-12-17 | 2015-03-25 | 吉林大学 | Trichobothria air micro-flow sensing on-line testing system for arthropod |
| CN110411519A (en) * | 2019-09-04 | 2019-11-05 | 上海乐研电气有限公司 | A kind of device and monitoring system of on-line monitoring gas micro water content |
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| US4002067A (en) * | 1974-05-22 | 1977-01-11 | The Singer Company | Low friction absolute pressure continuous integrator |
| CN101458109A (en) * | 2008-12-22 | 2009-06-17 | 中国航天科技集团公司第五研究院第五一○研究所 | Constant pressure type gas flowmeter transfiguration chamber bellows volume change measuring set |
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2012
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Patent Citations (4)
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| US4002067A (en) * | 1974-05-22 | 1977-01-11 | The Singer Company | Low friction absolute pressure continuous integrator |
| CN101458109A (en) * | 2008-12-22 | 2009-06-17 | 中国航天科技集团公司第五研究院第五一○研究所 | Constant pressure type gas flowmeter transfiguration chamber bellows volume change measuring set |
| CN102042852A (en) * | 2010-10-26 | 2011-05-04 | 中国航天科技集团公司第五研究院第五一○研究所 | Method for measuring minimum gas flow |
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Non-Patent Citations (2)
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|---|
| 张涤新等: "小孔流导测量方法的研究", 《真空与低温》 * |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103644947A (en) * | 2013-12-17 | 2014-03-19 | 东北大学 | Gas micro-flow measuring device |
| CN103644947B (en) * | 2013-12-17 | 2017-01-18 | 东北大学 | Gas micro-flow measuring device |
| CN103791962A (en) * | 2013-12-24 | 2014-05-14 | 兰州空间技术物理研究所 | Multi-working-mode gas flowmeter and gas flow measuring method |
| CN104236641A (en) * | 2014-09-19 | 2014-12-24 | 兰州空间技术物理研究所 | Multi-medium gas prepared sample standard flow meter based on constant-pressure method and flow providing method |
| CN104434039A (en) * | 2014-12-17 | 2015-03-25 | 吉林大学 | Trichobothria air micro-flow sensing on-line testing system for arthropod |
| CN110411519A (en) * | 2019-09-04 | 2019-11-05 | 上海乐研电气有限公司 | A kind of device and monitoring system of on-line monitoring gas micro water content |
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Application publication date: 20130220 |