CN103644947A - Gas micro-flow measuring device - Google Patents
Gas micro-flow measuring device Download PDFInfo
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- CN103644947A CN103644947A CN201310694925.6A CN201310694925A CN103644947A CN 103644947 A CN103644947 A CN 103644947A CN 201310694925 A CN201310694925 A CN 201310694925A CN 103644947 A CN103644947 A CN 103644947A
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Abstract
The invention discloses a gas micro-flow measuring device. The device comprises an inlet pressure-stabilizing container, a to-be-measured micro-nano channel or device, a two-channel volume indication unit, an outlet pressure-stabilizing container and an image type position recording unit, wherein the pressure in the pressure-stabilizing containers is matched with a gas supply flowmeter through throttle valves for continuous high-resolution regulation; then one channel of the two-channel volume indication unit is used for building stable flow in the to-be-measured micro-nano channel or device with the inlet pressure-stabilizing container and the outlet pressure-stabilizing container; and the other channel for presetting liquid drops is switched on, and the image type position recording unit consisting of a microscope objective and a CCD (charge coupled device) camera is used for tracking the movement of the liquid drops. The measuring device has the advantages of high measuring accuracy and resolution and proneness to implementation.
Description
Technical field
The present invention relates to a kind of measurement mechanism, belong to field of measuring technique, particularly a kind of gas micro-flow measurement device, for the experiment measuring of gas flow in micro/nano-scale passage or components and parts.
Background technology
At present, micro-electromechanical system (MEMS) processing and manufacturing and application have become the forward position of development in Hi-Tech, some yardstick in this field has entered the category of nanometer technology, gas flowing in micro-nano machinery can enter into even zone of transition of slipstream, impact due to thin effect and pinch effect, its dynamics, there is a great difference with conventional flowing in thermodynamic behaviour, although extensive work has been carried out in the research for Characteristics of Micro Scale Flow, but also ripe far away to the understanding of its flow mechanism, some research conclusions are also not yet unified, therefore, no matter from studying angle, be still based on the detection of industrial field micro-nano device, all be necessary that development is for the measurement mechanism of micrometeor gas flow.
In theory, for perfect gas, the mass rate of temporal evolution system is decided by the variation of volume, pressure and temperature, if temperature approximately constant temperature in control survey process and ignore its impact, the measurement of Tiny Mass flow can be converted into that the pressure of measuring under constant volume changes or constant pressure under volume-variation, because under the impact that exists leakage to exit and low-pressure, precision and the real-time of gaging pressure are poor indirectly, the measurement that slight pressure is changed is more difficult, and the small volume-variation under constant pressure is measured and had difficulties equally.
Summary of the invention
The problem existing for prior art, the invention provides a kind of measuring accuracy and resolution gas micro-flow measurement device high and easy to implement, to meet the demand of micro-nano mechanical field to gas flow measurement, the present invention realizes according to following technical scheme: a kind of gas micro-flow measurement device, comprise entrance voltage-stabilizing system 1, tested micro-nano passage or device 2, volume indicating member, outlet voltage-stabilizing system 4, vacuum-pumping system 13 and image recording unit 5, wherein entrance voltage-stabilizing system 1, tested micro-nano passage or device 2, volume indicating member and outlet pressurizing vessel 4, be composed in series successively in order closed system, it is characterized in that: described volume indicating member is binary channels volume indicating member 3, described binary channels volume indicating member 3 is formed in parallel by binary channels, one of them passage connects the 5th valve 21 successively by conduit, the first calibrating tube 22 and the 6th valve 23 are in series, another passage connects the 7th valve 27 successively by conduit, the second calibrating tube 25 and the 8th valve 24 are in series, at the first calibrating tube 22 or the interior injection drop 26 of the second calibrating tube 25, described image recording unit 5 is arranged on before the calibrating tube that injects drop 26, the motion of drop 26 followed the tracks of in record.
Preferably, described entrance voltage-stabilizing system comprises and utilizes conduit to connect successively in order the first valve 8, entrance container 7, an interface of described entrance container 7 utilize conduit to pick out and connect successively first throttle valve 10, the main described entrance container 7 of the 3rd valve 12 is fixedly connected with respectively the first pressure transducer 11 and entrance container joint 6; Described outlet voltage-stabilizing system 4 comprises and utilizes conduit to connect successively in order the second valve 18, exit vessel 19, an interface of described exit vessel 7 utilizes conduit to pick out and connects successively the second throttling valve 16, the 4th valve 14, at exit vessel 19, be fixedly connected with respectively the second pressure transducer 15 and exit vessel interface 20, the 3rd valve 12 in described entrance voltage-stabilizing system 1 is connected with vacuum-pumping system 13 respectively with the 4th valve 14 of outlet voltage-stabilizing system 4; At the first valve 8 of entrance voltage-stabilizing system 1, be connected respectively the first gas supply flow meter 9 and the second gas supply flow meter 17 with the second valve 18 of outlet voltage-stabilizing system 4, the pressure in adjusting container that coordinates by first throttle valve 10 and the second throttling valve 16 with the first gas supply flow meter 9 and the second gas supply flow meter 17.
Further preferably, described image recording unit 5 consists of microcobjective 28 and CCD camera 29.
Beneficial effect of the present invention: adopt throttling valve to coordinate the pressure of adjusting micro/nano-scale passage or device 2 two ends with mass flowmeter, because gas supply flow meter has continuous high-resolution adjustment capability, pressure is controlled more stable, be conducive to improve measuring accuracy; Adopt symmetrical twin-channel volume indicating member, can be in a passage preset drop, reduced while measuring and added drop on the mobile impact of stabilizing gas; And when calculation of pressure, get droplet position and linear data of time, and eliminated interchannel conversion to the impact of measuring, be conducive to improve measuring accuracy; The microcobjective that image recording unit adopts has improved the resolution to droplet position, and that the real time record of CCD camera is picked up data is more convenient more accurate, is also conducive to improve resolution and the order of accuarcy of measuring.
Accompanying drawing explanation
Below in conjunction with accompanying drawing, technical scheme of the present invention is described further:
Fig. 1 gas micro-flow measurement device forms schematic diagram;
Fig. 2 entrance pressurizing vessel and outlet pressurizing vessel form schematic diagram;
Fig. 3 binary channels Volume rendering cell formation schematic diagram;
Fig. 4 image recording unit forms schematic diagram;
In figure: 1, entrance pressurizing vessel; 2, micro-nano passage or device; 3 binary channels volume indicating members; 4, outlet pressurizing vessel; 5, image recording unit; 6, entrance container joint; 7, entrance container; 8, the first valve; 9, the first gas supply flow meter; 10, first throttle valve; 11, the first pressure transducer; 12, the 3rd valve; 13, vacuum-pumping system; 14, the 4th valve; 15, the second pressure transducer; 16, the second throttling valve; 17, the second gas supply flow meter; 18, the second valve; 19, exit vessel; 20, exit vessel interface; 21, the 5th valve; 22, the first calibrating tube; 23, the 6th valve; 24, the 8th valve; 25, the first calibrating tube; 26, drop; 27, the 7th valve; 28, microcobjective; 29, CCD camera.
Embodiment
A kind of gas micro-flow measurement device as shown in Figure 1, comprise entrance pressurizing vessel 1, tested micro-nano passage or device 2, binary channels volume indicating member 3, outlet voltage-stabilizing system 4, vacuum-pumping system 13 and image recording unit 5, wherein the tested micro-nano passage of entrance voltage-stabilizing system 1 or device 2, binary channels volume indicating member 3, outlet pressurizing vessel 4 connect and are composed in series the confining gas flowing space successively in order, as shown in Figure 2, described entrance voltage-stabilizing system 1 comprises and utilizes conduit to connect successively in order the first valve 8, entrance container 7, an interface of described entrance container 7 utilize conduit to pick out and connect successively first throttle valve 10, the main described entrance container 7 of the 3rd valve 12 is fixedly connected with respectively the first pressure transducer 11 and entrance container joint 6, described outlet voltage-stabilizing system 4 comprises and utilizes conduit to connect successively in order the second valve 18, exit vessel 19, an interface of described exit vessel 7 utilizes conduit to pick out and connects successively the second throttling valve 16, the 4th valve 14, at exit vessel 19, be fixedly connected with respectively the second pressure transducer 15 and exit vessel interface 20, the first valve 8 at entrance voltage-stabilizing system 1 is connected respectively the first gas supply flow meter 9 and the second gas supply flow meter 17 with the second valve 18 of outlet voltage-stabilizing system 4, and gas supply flow meter can regulate and have high resolution continuously, the 3rd valve 12 in described entrance voltage-stabilizing system 1 is connected with vacuum-pumping system 13 respectively with the 4th valve 14 of outlet voltage-stabilizing system 4, as shown in Figure 3, described binary channels volume indicating member 3 is formed in parallel by binary channels, one of them passage connects the 5th valve 21 successively by conduit, the first calibrating tube 22 and the 6th valve 23 are in series, another passage connects the 7th valve 27 successively by conduit, the second calibrating tube 25 and the 8th valve 24 are in series, at the second calibrating tube 25, inject drop 26, two passages of described binary channels volume indicating member 3 should have identical physical dimension, internal diameter is selected and should have high precision and consistance according to measurement range, the entrance and exit of two passages consists of in parallel threeway, in two symmetric channels, one for adjusting measuring system to steady state (SS), another preset drop, after system stability, carries out the measurement of volume-variation by the switching of valve, as shown in Figure 4, described image recording unit 5 is arranged on the relevant position of the second calibrating tube 25, by microcobjective 28 and CCD camera, formed, CCD camera should be selected at a high speed and high pixel product, the enlargement factor of microcobjective should coordinate with the pixel of CCD camera selection, and the motion of drop 26 followed the tracks of in record.
After system connects, in order to guarantee that the system that the impermeability reply of system connects hunts leak, leak rate should be less than 10
-9pam
3/ s; Then start to measure, first, system is vacuumized, in vacuum, the first valve 8, the second valve 18 are closed all the time, the 5th valve 21, the 6th valve 23, the 8th valve 24, the 7th valve 27 are opened all the time, start after vacuum-pumping system 13, open successively the 3rd valve 12, the 4th valve 14, first throttle valve 10, the second throttling valve 16, the final vacuum of system should reach 1 * 10
-3pa.
System reaches capacity after vacuum, close the 7th valve 27, open afterwards valve the first valve 8, the second valve 18, by gas supply flow meter 9, gas supply flow meter 17, in system, be filled with experimental gas, then by regulating the aperture of gas supply flow meter 9, gas supply flow meter 17 and first throttle valve 10, the second throttling valve 16 to control pressure in entrance voltage-stabilizing system 1 and outlet voltage-stabilizing system 4, reach and be stabilized in experimental pressure, now, gas flows through micro-nano passage or device 2 and flows in exit vessel 7 by the first calibrating tube 22 place passages from entrance voltage-stabilizing system 1; After reaching steady pressure, start preset drop; Now, only have the 7th valve 27 to close in binary channels volume indicating member 3, the 5th valve 21, the 6th valve 23, the 8th valve 24 are all open mode.By syringe, at the interior injection drop 26 of the second calibrating tube 25, because the 7th valve 27 is closed, drop 26 can be in the interior maintenance stationary state of the second calibrating tube 25; At microcobjective 28 and CCD camera 29, install and calibrate after startup, close the 5th valve 21 simultaneously, open the 7th valve 27, drop is setting in motion gradually, movement position and the temporal information of CCD cameras record drop.The 8th valve 24 can be closed when drop approaches, to prevent that it from entering in exit vessel 19.
After measurement finishes, carry out data processing, get linear data of droplet position and time, and calculate gas tiny flow quantity by 1 formula;
Wherein: Q
m---gas flow, unit: Kg/s;
P---the pressure of gas in outlet pressurizing vessel, unit: Pa;
M---tested gas molal weight, unit: Kg/mol;
R---mol gas constant, unit: 8.31441J/mol K;
T---temperature, unit: K;
A---volume indicating member passage calibrating tube sectional area, unit: m
2;
Δ L---by the liquid drop movement distance of calibration standard, microcobjective enlargement factor and the conversion of CCD pixel, unit, m;
Δ t---the time that liquid drop movement Δ L distance experiences, s;
Known in sum, according to a kind of gas micro-flow measurement device provided by the present invention, there is measuring accuracy and the high good effect of resolution, the minimum mass flow of this measurement device can reach 1 * 10-
11kg/s.
Embodiment in the present invention is to write according to the mode of going forward one by one, and mainly highlights the difference in each embodiment, and its similar part can cross-references.
By reference to the accompanying drawings embodiments of the present invention are described in detail above, but the present invention is not limited to above-mentioned embodiment, in the ken possessing those of ordinary skills, can also under the prerequisite that does not depart from aim of the present invention, makes a variety of changes.
Claims (3)
1. a gas micro-flow measurement device, comprise entrance voltage-stabilizing system (1), tested micro-nano passage or device (2), volume indicating member, outlet voltage-stabilizing system (4), vacuum-pumping system (13) and image recording unit (5), entrance voltage-stabilizing system (1) wherein, tested micro-nano passage or device (2), passage indicating member and outlet pressurizing vessel (4) are composed in series closed system in order successively, it is characterized in that: described volume indicating member is binary channels volume indicating member (3), described binary channels volume indicating member (3) is formed in parallel by binary channels, one of them passage connects the 5th valve (21) successively by conduit, the first calibrating tube (22) and the 6th valve (23) are in series, another passage connects the 7th valve (27) successively by conduit, the second calibrating tube (25) and the 8th valve (24) are in series, at the first calibrating tube (22) or the second calibrating tube (25), inject drop (26), described image recording unit (5) is arranged on before the calibrating tube that injects drop (26), the motion of drop (26) followed the tracks of in record.
2. a kind of gas micro-flow measurement device according to claim 1, it is characterized in that: described entrance voltage-stabilizing system comprises and utilizes conduit to connect successively in order the first valve (8), entrance container (7), an interface of described entrance container (7) utilizes conduit to pick out and connects successively first throttle valve (10), the 3rd valve (12), and described entrance container (7) is fixedly connected with respectively the first pressure transducer (11) and entrance container joint (6); Described outlet voltage-stabilizing system (4) comprises and utilizes conduit to connect successively in order the second valve (18), exit vessel (19), an interface of described exit vessel (7) utilizes conduit to pick out and connects successively the second throttling valve (16), the 4th valve (14), at exit vessel (19), is fixedly connected with respectively the second pressure transducer (15) and exit vessel interface (20); The 3rd valve (12) in described entrance voltage-stabilizing system (1) is connected with vacuum-pumping system (13) respectively with the 4th valve (14) of outlet voltage-stabilizing system (4); First valve (8) of described entrance voltage-stabilizing system (1) is fixedly connected with the first gas supply flow meter (9); Second valve (18) of described outlet voltage-stabilizing system (4) is fixedly connected with the second gas supply flow meter (17).
3. a kind of gas micro-flow measurement device according to claim 1, is characterized in that: described image recording unit (5) consists of microcobjective (28) and CCD camera (29).
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|---|---|---|---|
| CN201310694925.6A CN103644947B (en) | 2013-12-17 | 2013-12-17 | Gas micro-flow measuring device |
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| CN201310694925.6A CN103644947B (en) | 2013-12-17 | 2013-12-17 | Gas micro-flow measuring device |
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| WO2016095297A1 (en) * | 2014-12-19 | 2016-06-23 | 昂纳自动化技术（深圳）有限公司 | Electronic cigarette smoke concentration detection system |
| CN106323393A (en) * | 2016-08-31 | 2017-01-11 | 电子科技大学 | Dual mode micro liquid flowmeter based on light manipulation |
| CN110095275A (en) * | 2019-05-31 | 2019-08-06 | 北京长城华冠汽车技术开发有限公司 | The table apparatus and brake oil weight testing method of analogue measurement brake-pedal travel |
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| US20040139785A1 (en) * | 2002-11-18 | 2004-07-22 | Abdul-Khalek Imad Said | Apparatus and method for real-time measurement of mass, size and number of solid particles of particulate matter in engine exhaust |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| WO2016095297A1 (en) * | 2014-12-19 | 2016-06-23 | 昂纳自动化技术（深圳）有限公司 | Electronic cigarette smoke concentration detection system |
| CN106323393A (en) * | 2016-08-31 | 2017-01-11 | 电子科技大学 | Dual mode micro liquid flowmeter based on light manipulation |
| CN106323393B (en) * | 2016-08-31 | 2018-12-18 | 电子科技大学 | A kind of double mode micro liquid flowmeter based on light manipulation |
| CN110095275A (en) * | 2019-05-31 | 2019-08-06 | 北京长城华冠汽车技术开发有限公司 | The table apparatus and brake oil weight testing method of analogue measurement brake-pedal travel |
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