CN105043489B - A kind of high-precision volume measuring method for multiple order of magnitude PRESSURE LEAK CALIBRATION - Google Patents
A kind of high-precision volume measuring method for multiple order of magnitude PRESSURE LEAK CALIBRATION Download PDFInfo
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- CN105043489B CN105043489B CN201510410456.XA CN201510410456A CN105043489B CN 105043489 B CN105043489 B CN 105043489B CN 201510410456 A CN201510410456 A CN 201510410456A CN 105043489 B CN105043489 B CN 105043489B
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Abstract
The invention discloses a kind of high-precision volume measuring method for multiple order of magnitude PRESSURE LEAK CALIBRATION, the external container that installation can be opened and closed to valve accesses PRESSURE LEAK CALIBRATION system;According to the order of magnitude of tested volume, the normal volume of selection same number level;Normal volume is not first put into external container, using gas expansion method, measures the pressure and temperature under tested volume vacuum state, and be expanded into the pressure and temperature after gas;After normal volume is put into external container, measurement is expanded into tested volume pressure and temperature before and after gas;Using above-mentioned data and according to the relational expression built according to perfect condition equation, tested volume is calculated.The present invention can change normal volume according to tested volume, volume is avoided to have big difference the uncertainty of measurement brought, and tested volume is calculated using gas expansion method and perfect condition equation, contain temperature adjustmemt in calculation formula, further increase the accuracy of cubing.
Description
Technical field
The present invention relates to a kind of high-precision volume measuring method for multiple order of magnitude PRESSURE LEAK CALIBRATION, belongs to measurement neck
Domain.
Background technology
During multiple order of magnitude PRESSURE LEAK CALIBRATION, according to the difference from calibration method, selection is using constant volume chamber or becomes room,
According to the difference of calibration leak magnitude, from different size of normal volume, maximum differs thousands of times with minimum volume, such as selects
Same normal volume measures, and will certainly influence the accuracy of cubing, normal volume and volume to be measured (constant volume chamber or
Become room) it is closer, the degree of accuracy of cubing is higher, therefore from the measurement multiple order of magnitude malleation leakage of different size of normal volume
The constant volume chamber and transfiguration building volume of hole calibration are highly desirable.Because gas flow needed for the calibration of multiple order of magnitude positive pressure leak hole is larger,
Influence to increase therewith caused by temperature, therefore carry out temperature adjustmemt in cubing can further ensure the standard of cubing
True property.
The content of the invention
In view of this, the invention provides a kind of high-precision volume measuring method for multiple order of magnitude PRESSURE LEAK CALIBRATION,
Normal volume can be changed according to tested volume, avoid volume and have big difference the uncertainty of measurement brought, and use gas
Volume thermodilatometry and perfect condition equation calculate tested volume, contain temperature adjustmemt in calculation formula, further increase volume survey
The accuracy of amount.
In order to solve the above-mentioned technical problem, the present invention is realized in:
A kind of high-precision volume measuring method for multiple order of magnitude PRESSURE LEAK CALIBRATION, for measuring PRESSURE LEAK CALIBRATION system
Unknown volume in system, the unknown volume are positive pressure leak hole, constant volume chamber, change room, pipeline or its any combination;This method bag
Include following steps:
Step 1: external container is accessed into PRESSURE LEAK CALIBRATION system by vacuum valve X, it is not put into first in external container
Normal volume, on external container installation can be opened and closed valve;
Measurement point is selected on pipeline between external container and tested volume, absolute pressure formula pressure is installed in measurement point
Meter;Vacuum valve A is provided between measurement point and tested volume;Keep the pipeline connection in tested volume;According to tested volume
The order of magnitude, select the normal volume of same number level;First temperature measuring point is set in external container, set in tested volume
Put second temperature measurement point;
Step 2: during measurement, vacuum valve A is opened, whole PRESSURE LEAK CALIBRATION system is vacuumized using extract system;
Step 3: closing extract system, vacuum valve A is closed, using air supply system to inside and outside PRESSURE LEAK CALIBRATION system
Connect container and be filled with gas with the pipeline before vacuum valve A, the pressure P for being filled with gas is measured by absolute pressure formula pressure gauge1, pass through
One temperature measuring point reads the temperature T in external container1;
Step 4: opening vacuum valve A, gas expansion enters tested volume, and now pipeline is measured by absolute pressure formula pressure gauge
In gas pressure P2, the temperature T in tested volume is read by second temperature measurement point2;
Step 5: closing vacuum valve X, opening can be opened and closed valve, and step 1 is put into external container and is selected and through meter
The normal volume of amount, the size of the normal volume is Vd, valve can be opened and closed by turning off;Repeat step two~tetra-, in step 2
The pressure and temperature of acquisition is designated as P respectively3And T3, the pressure and temperature obtained in step 4 is designated as P respectively4And T4;
Step 6: carrying out abbreviation using the equation group according to constructed by perfect condition equation, unknown quantity is eliminated, obtains formula
(1) the tested volume size V and V shown indRelational expression;The data that step 2~five is obtained substitute into formula (1) be calculated by
Survey volume size V:
Wherein, the V for the tested volume size for being computed obtaining is the result by temperature-compensating.
Preferably, during measuring, PRESSURE LEAK CALIBRATION system is kept to be in temperature using temperature control system
Spend in constant environment.
Preferably, before step 5, step 2~step 4 is performed repeatedly, obtains multigroup P1、T1、P2、T2;Step
Five also perform repeatedly, obtain multigroup P3、T3、P4、T4;Using one group of P1、T1、P2、T2、P3、T3、P4、T4Substitution formula (1) calculates one
V, multi-group data calculate the multiple V of acquisition and take average as end product.
Beneficial effect:
(1) it is of the invention to pass through the difference for the temperature and pressure for not adding normal volume and adding normal volume, 2 sides of simultaneous
Journey group is solved, and can obtain the volume of tested volume.And added by the calculating formula constructed by perfect condition equation
The consideration of temperature adjustmemt, improve the accuracy of cubing.In addition, the inventive method is implemented simply, according to tested volume
Approximate volume selection standard volume, it can avoid normal volume selection is improper from causing measurement inaccuracy.
(2) by the way that replacing valve normal volume can be opened and closed, it is possible to reduce the dismounting frequency of external container.Described standard body
Product is the normal volume accurately measured by metrological service.It can be ensure that according to the different conversion normal volumes of measurement volume
The degree of accuracy of cubing.
(3) temperature control system is added in a preferred embodiment, reduces the change of temperature, so as to reduce temperature
Influence to pressure measxurement.
Brief description of the drawings
Fig. 1 is a kind of schematic diagram of high-precision volume measuring method for multiple order of magnitude PRESSURE LEAK CALIBRATION of the invention.
Wherein, 1- can be opened and closed valve, the temp measuring systems of 2- first, 3- vacuum valves X, 4- multiple order of magnitude positive pressure leak hole group, and 5,15,
18,23- vacuum valves, 6- reference chambers, 7- isolating valves, 8- become room, 9- absolute pressure formula pressure gauges, 10- pistons, the surveys of 11- the 3rd
Warm system, 12- temperature-controlling systems, 13- external containers, 14- normal volumes, 16- air supply systems, 17- extract systems, 19- differential pressure types
Pressure gauge, the temp measuring system of 20- vacuum valves A, 21- second, 22- constant volume chambers, change rooms of the 24- with piston, 25- range-measurement systems.
Embodiment
The present invention will now be described in detail with reference to the accompanying drawings and examples.
The present invention is used to measure the unknown volume in PRESSURE LEAK CALIBRATION system, and the unknown volume is positive pressure leak hole, constant volume
Room, become room, pipeline or its any combination.Fig. 1 is that device needed for present invention measurement is added in PRESSURE LEAK CALIBRATION system
Theory of constitution figure afterwards.As shown in figure 1, PRESSURE LEAK CALIBRATION system includes air supply system 16, extract system 17, multiple order of magnitude malleation
Small opening group 4, reference chamber 6, become room 8, differential pressure type pressure gauge 19, range-measurement system 25.Air supply system 16 and extract system 17 are respective
Main pipeline is connected into by a vacuum valve 15,18, multiple order of magnitude positive pressure leak hole group 4 is connected in parallel on main pipeline, reference chamber 6, transfiguration
Room 8 and change room 24 with piston are connected on main pipeline, the both ends of differential pressure type pressure gauge 19 connection reference chamber 6 and become room 8,
Range-measurement system 25 is used for the displacement for measuring piston 10.The left end of reference chamber 6 is provided with a vacuum valve 5, reference chamber 6 and transfiguration
It is provided with isolating valve 7 between room 8, becomes between room 8 and change room 24 with piston and be provided with a vacuum valve 23.Constant volume chamber 22
It is connected into main line.
Being opened and closed valve 1, external container 13, being opened and closed valve 1, normal volume 24, true on external container 13 in Fig. 1
Empty valve X 3, vacuum valve A 20, the first temp measuring system 2, the second temp measuring system 21, the 3rd temp measuring system 11, absolute pressure formula pressure
Meter 9 is for measuring the device of addition system, if having these devices in original system certainly, can also directly use.
External container 13 is accessed into PRESSURE LEAK CALIBRATION system by vacuum valve X 3, is not put into first in external container 13
Normal volume 14, on external container 13 installation can be opened and closed valve 1.Can be opened and closed valve 1 be used for open after normal volume 14 is put into
External container 13, KF valves can be used, are quickly and conveniently opened and closed so as to realize.
, it is necessary to which tested volume is constant volume chamber 22 in the present embodiment, therefore measurement point is selected in the entrance of constant volume chamber 22, measurement point
Place's installation absolute pressure formula pressure gauge 9;Vacuum valve A 20 is provided between measurement point and constant volume chamber 22.There is no other pipes in constant volume chamber
Road, therefore meet the condition for keeping the pipeline connection in tested volume, without specially treated.According to the order of magnitude of constant volume chamber 22,
Select the normal volume 14 of same number level.First temperature measuring point is set in external container 13, it is negative by the first temp measuring system 2
Blame temperature detection.Second temperature measurement point is set in constant volume chamber 22, temperature detection is responsible for by the second temp measuring system 21.If by
Survey volume is the change room 24 with piston, then temperature measuring point is arranged in the change room 24 with piston, by putting the 3rd thermometric system
System 11 is responsible for temperature detection.
Based on above-mentioned composition, measurement process of the invention is as follows:
When step 1, measurement, vacuum valve 15 is closed, starts extract system 17, opens vacuum valve X 3, vacuum valve A
20, and vacuum valve 18,5,23 is opened, open isolating valve 7;
Step 2, extract system 17 is closed, closes vacuum valve X 3, vacuum valve A 20 and vacuum valve 18,5,23,
Extract system 17 is closed, opens vacuum valve 15, starts air supply system 16, gas is filled with into system, the gas being filled with enters
Enter in the pipeline before test point, the pressure P for being filled with gas is measured by absolute pressure formula pressure gauge 91, read by the first temp measuring system 2
Temperature T in external container 141。
Step 3, vacuum valve 5, vacuum valve A 20 are opened, make gas expansion enter the constant volume chamber in vacuum state
22, the pressure P of now gas is measured by absolute pressure formula pressure gauge 92, the temperature T in constant volume chamber 22 is read by the second temp measuring system 212;
Step 4, repeat step 1~3 six time;Six groups of data are obtained, every group includes (P1, P2, T1, T2);P1、P2Unit is
Pa, T1, T2Unit is DEG C;
Step 5, vacuum valve X 3 is closed, opening can be opened and closed valve 1, be put into and select and through metering in external container 13
Normal volume 14, the size of the normal volume 14 is Vd, valve 1 can be opened and closed by turning off.Then repeat step 1~4.In step
The pressure and temperature obtained in rapid 1 is designated as P respectively3And T3, the pressure and temperature obtained in step 3 is designated as P respectively4And T4。
Step 6, repeat step 5,6 groups of data are obtained, every group includes (P3, P4, T3, T4)。
Step 7, utilize the equation group according to constructed by perfect condition equation:
Wherein, V1For the volume of pipeline+external container before vacuum valve 23, m3.Wherein, formula is right in above-mentioned formula
Side selects T2And T4The reason for be:In order to obtain the temperature of precise volume setting room as far as possible.
Arranged by simultaneous, eliminate unknown quantity V1, obtain the tested volume size V and V shown in formula (1)dRelational expression;Will
The data that abovementioned steps obtain substitute into formula (1) and tested volume size V are calculated:
Above 6 groups of data calculate 6 V, are averaged, obtain tested volume to the end.The tested volume size has been added to
Temperature-compensating.
It is preferred that during measuring, PRESSURE LEAK CALIBRATION system is kept to be in temperature using temperature control system
Spend in constant environment.So as to reduce the change of temperature, so as to reduce influence of the temperature to pressure measxurement.
In summary, presently preferred embodiments of the present invention is these are only, is not intended to limit the scope of the present invention.
Within the spirit and principles of the invention, any modification, equivalent substitution and improvements made etc., it should be included in the present invention's
Within protection domain.
Claims (3)
- A kind of 1. high-precision volume measuring method for multiple order of magnitude PRESSURE LEAK CALIBRATION, for measuring PRESSURE LEAK CALIBRATION system In unknown volume, the unknown volume be positive pressure leak hole, constant volume chamber, become room, pipeline or its any combination;Its feature exists In this method comprises the following steps:Step 1: external container (13) is accessed into PRESSURE LEAK CALIBRATION system by vacuum valve X (3), external container (13) is interior Normal volume (14) it is not put into first, valve (1) can be opened and closed by being installed on external container (13);Measurement point is selected on pipeline between external container (13) and tested volume, absolute pressure formula pressure gauge is installed in measurement point (9);Vacuum valve A (20) is provided between measurement point and tested volume;Keep the pipeline connection in tested volume;According to tested appearance The long-pending order of magnitude, select the normal volume (14) of same number level;First temperature measuring point is set in external container (13), Second temperature measurement point is set in tested volume;Step 2: during measurement, vacuum valve A (20) is opened, whole PRESSURE LEAK CALIBRATION system is taken out using extract system (17) Vacuum;Step 3: closing extract system (17), vacuum valve A (20) is closed, using air supply system (16) to PRESSURE LEAK CALIBRATION External container (13) is filled with gas with the pipeline before vacuum valve A (20) in system, is measured and is filled with by absolute pressure formula pressure gauge (9) The pressure P of gas1, the temperature T in external container (13) is read by the first temperature measuring point1;Step 4: opening vacuum valve A (20), gas expansion enters tested volume, is measured by absolute pressure formula pressure gauge (9) and now managed Gas pressure P in road2, the temperature T in tested volume is read by second temperature measurement point2;Step 5: closing vacuum valve X (3), opening can be opened and closed valve (1), and being put into step 1 in external container (13) selectes And the normal volume (14) through metering, the size of the normal volume (14) is Vd, valve (1) can be opened and closed by turning off;Repeat step Two~tetra-, the pressure and temperature obtained in step 2 is designated as P respectively3And T3, obtained in step 4 pressure and temperature difference It is designated as P4And T4;Step 6: carrying out abbreviation using the equation group according to constructed by perfect condition equation, unknown quantity is eliminated, obtains formula (1) institute The tested volume size V and V showndRelational expression;The data that step 2~five are obtained substitute into formula (1) and tested volume are calculated Size V:<mrow> <mi>V</mi> <mo>=</mo> <mfrac> <mrow> <msub> <mi>P</mi> <mn>2</mn> </msub> <msub> <mi>P</mi> <mn>3</mn> </msub> <msub> <mi>T</mi> <mn>1</mn> </msub> <msub> <mi>T</mi> <mn>4</mn> </msub> <mo>-</mo> <msub> <mi>P</mi> <mn>1</mn> </msub> <msub> <mi>P</mi> <mn>4</mn> </msub> <msub> <mi>T</mi> <mn>2</mn> </msub> <msub> <mi>T</mi> <mn>3</mn> </msub> </mrow> <mrow> <mo>(</mo> <msub> <mi>P</mi> <mn>1</mn> </msub> <msub> <mi>T</mi> <mn>2</mn> </msub> <mo>-</mo> <msub> <mi>P</mi> <mn>2</mn> </msub> <msub> <mi>T</mi> <mn>1</mn> </msub> <mo>)</mo> <mo>(</mo> <msub> <mi>P</mi> <mn>3</mn> </msub> <msub> <mi>T</mi> <mn>4</mn> </msub> <mo>-</mo> <msub> <mi>P</mi> <mn>4</mn> </msub> <msub> <mi>T</mi> <mn>3</mn> </msub> <mo>)</mo> </mrow> </mfrac> <msub> <mi>V</mi> <mi>d</mi> </msub> <mo>-</mo> <mo>-</mo> <mo>-</mo> <mrow> <mo>(</mo> <mn>1</mn> <mo>)</mo> </mrow> </mrow>Wherein, the V for the tested volume size for being computed obtaining is the result by temperature-compensating.
- 2. the method as described in claim 1, it is characterised in that during measuring, protected using temperature control system PRESSURE LEAK CALIBRATION system is held to be in the constant environment of temperature.
- 3. the method as described in claim 1, it is characterised in that before step 5, step 2~step 4 is performed repeatedly, Obtain multigroup P1、T1、P2、T2;Step 5 also performs repeatedly, obtains multigroup P3、T3、P4、T4;Using one group of P1、T1、P2、T2、P3、 T3、P4、T4Substitution formula (1) calculates a V, and multi-group data calculates the multiple V of acquisition and takes average as end product.
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CN106802220A (en) * | 2017-03-10 | 2017-06-06 | 中国电子科技集团公司第三十八研究所 | A kind of measurement apparatus for flexible container entirety leak rate detection |
CN107830914B (en) * | 2017-09-19 | 2020-02-14 | 兰州空间技术物理研究所 | Micro-flow calibration device and method with double-channel symmetrical structure |
CN107884022A (en) * | 2017-10-31 | 2018-04-06 | 上海卫星装备研究所 | Container volume measurement apparatus and method based on differential pressure method |
CN111473833A (en) * | 2020-04-16 | 2020-07-31 | 北京东方计量测试研究所 | Vacuum cavity volume testing system and method by volume substitution method |
CN114636517A (en) * | 2021-04-06 | 2022-06-17 | 上海东贝真空设备有限公司 | Constant-pressure positive-pressure leak hole calibration device and test method thereof |
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