CN111473833A - Vacuum cavity volume testing system and method by volume substitution method - Google Patents
Vacuum cavity volume testing system and method by volume substitution method Download PDFInfo
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- CN111473833A CN111473833A CN202010300278.6A CN202010300278A CN111473833A CN 111473833 A CN111473833 A CN 111473833A CN 202010300278 A CN202010300278 A CN 202010300278A CN 111473833 A CN111473833 A CN 111473833A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F17/00—Methods or apparatus for determining the capacity of containers or cavities, or the volume of solid bodies
Abstract
The invention discloses a vacuum cavity volume test system and a vacuum cavity volume test method by using a volume substitution method, belonging to the field of vacuum cavity volume test; the method for accurately measuring the volume of the nonstandard vacuum cavity by utilizing the built-in standard volume and two times of gas static expansion comprises the following steps: expanding the gas in the gas expansion chamber to the vacuum chamber to be measured to determine the volume ratio of the two vacuum chambers, and expanding the gas in the gas expansion chamber to the vacuum chamber to be measured to determine the accurate volume of the vacuum chamber to be measured under the condition that the gas expansion chamber is placed in the standard volume; the vacuum measurement system convenient to operate is provided, wherein the gas expansion chamber, the valve and the standard volume are subjected to special high-vacuum treatment, the material gas release rate is low, the device background gas release in the gas static expansion process is extremely low, and the measurement accuracy is ensured. The system and the method can quickly and conveniently measure the volume of each type of vacuum cavity.
Description
Technical Field
The invention belongs to the field of vacuum cavity volume testing, and particularly relates to a vacuum cavity volume testing system and a vacuum cavity volume testing method by using a volume substitution method.
Background
The gas flow control of the spraying equipment for the turbine production of the aircraft engine is a key process for improving the quality of an engine blade product, the reliability of the performance of the engine is directly influenced, and the flow calibration of the spraying equipment is a precondition for guaranteeing the spraying effect. The gas flow standard device based on the constant volume method is simple in structure and low in cost, is suitable for tracing the source of a small-flow gas detection device, and can meet the field calibration requirement of the existing turbine blade spraying equipment of the aero-engine. However, the flow calibration by the constant volume method is easily affected by factors such as ambient temperature, volume of the constant volume vacuum chamber, reference standard and the like, and since the constant volume vacuum chamber and the joint are generally non-standard and customized, and have different shapes and sizes, it is very difficult to accurately measure the volume.
Disclosure of Invention
The invention aims to solve the technical problems and aims at the requirement of high-precision testing of the volume of a vacuum chamber, the invention provides a volume substitution method vacuum chamber volume testing system and a testing method thereof, and the invention provides a method for accurately measuring the volume of a nonstandard vacuum chamber by using a built-in standard volume and two times of gas static expansion, and can quickly and conveniently accurately measure the volume of each type of vacuum chamber.
The invention adopts the following technical scheme to solve the technical problems
A volume substitution method vacuum cavity volume test system comprises two vacuum chambers, two vacuum meters, a mechanical pump (RP), a molecular pump, five vacuum valves, a gas flow controller, a decompression valve, a nitrogen bottle and a thermostat;
the mechanical pump is respectively connected with one end of the first vacuum valve and the air exhaust outlet of the molecular pump, the other end of the first vacuum valve is respectively connected with the first vacuum gauge and the first vacuum chamber, the air exhaust inlet of the molecular pump is connected with one end of the second vacuum valve, the other end of the second vacuum valve is connected with the first vacuum chamber, the nitrogen cylinder is connected with one end of the flow controller through the pressure reduction valve, the other end of the flow controller is connected with the first vacuum chamber through the third vacuum valve, the fourth vacuum valve is used for putting in and taking out standard volumes as the sample injection valve of the first vacuum chamber, one end of the second vacuum gauge and one end of the fifth vacuum valve are connected with the first vacuum chamber, and the other end of the fifth vacuum valve is connected with the second vacuum chamber.
As a further preferred scheme of the vacuum cavity volume test system adopting the volume substitution method, the first vacuum chamber and a flange joint connected with the first vacuum chamber are machined by a high-precision machine tool, ultrahigh vacuum treatment including cleaning, high-temperature annealing and film coating is adopted in the machining process, integral baking and degassing treatment is periodically carried out during the use period, the baking temperature is set to be 150 ℃, and the CTB temperature of a constant temperature box is set to be 23 +/-1.0 ℃ during sample measurement.
In a further preferred embodiment of the system for measuring the volume of a vacuum chamber according to the present invention, the first vacuum gauge is a full-scale vacuum gauge for monitoring the full-scale vacuum gauge of 1000Torr, and the second vacuum gauge is a 1000Torr high-precision capacitive thin film vacuum gauge.
As a further preferable scheme of the vacuum chamber volume test system adopting the volume substitution method, the standard volume is a precisely machined stainless steel metal rod, and the length and the diameter of the stainless steel metal rod are measured by the measuring mechanism to reach the volume value, and the uncertainty of the standard volume is less than 0.1%.
A test method of a vacuum cavity volume test system based on a volume substitution method specifically comprises the following steps:
step 2, keeping the temperature of the thermostat at 23 +/-1.0 ℃, and sequentially opening a first vacuum gauge, a mechanical pump, a first vacuum valve and a fifth vacuum valve for monitoring to vacuumize the system; when the reading of the first vacuum gauge is monitored to be less than 10Pa, the first vacuum valve is closed, the molecular pump and the second vacuum valve are sequentially opened, and the test system is vacuumized;
and 3, when the reading of the first vacuum meter is less than 1 × 10-4Pa, closing the second vacuum valve, the third vacuum valve and the fifth vacuum valve, filling a certain amount of nitrogen into the first vacuum chamber through the flow controller, closing the third vacuum valve, and measuring the vacuum degree of the first vacuum chamber by using the second vacuum meter, wherein the vacuum degree is p1(ii) a Opening the fifth vacuum valve to expand the gas into the second vacuum chamber, and reading the reading number after the reading number of the second vacuum meter is stable, wherein the reading number is p2；
Step 4, after the testing system is inflated, opening a sample introduction fourth vacuum valve, putting the standard volume after cleaning and drying treatment into a first vacuum chamber, and sequentially opening a monitoring first vacuum gauge, a mechanical pump, a first vacuum valve and a fifth vacuum valve to vacuumize the system; when the reading of the first vacuum gauge is monitored to be less than 10Pa, the first vacuum valve is closed, the molecular pump and the second vacuum valve are sequentially opened, and the test system is vacuumized;
and 5, when the number indicated by the first vacuum meter is less than 1 × 10-4Pa, closing the second vacuum valve, the third vacuum valve and the fifth vacuum valve, filling a certain amount of nitrogen into the first vacuum chamber through the flow controller, closing the third vacuum valve, and measuring the vacuum degree of the first vacuum chamber by using the second vacuum meter, wherein the vacuum degree is p3(ii) a Opening the fifth vacuum valve to expand the gas into the second vacuum chamber, and reading the reading number after the reading number of the second vacuum meter is stable, wherein the reading number is p4；
Step 6, calculating the volume V of the vacuum chamber to be measured according to the following formulatest：
Wherein, VstIs a standard volume.
And 7, repeating the steps 2 to 5, repeating the measurement for 5 times, and taking the average value as the true value to be measuredVolume V of empty chambertestIs measured.
Compared with the prior art, the invention adopting the technical scheme has the following technical effects:
the invention provides a system and a method for testing the volume of a vacuum cavity by using a volume substitution method, which is a method for accurately measuring the volume of a nonstandard vacuum cavity by using a built-in standard volume and two times of gas static expansion and comprises the following steps: firstly, under the condition that the gas expansion chamber is not placed in a standard volume, expanding gas in the gas expansion chamber to a vacuum chamber to be measured so as to measure the volume ratio of the two vacuum chambers, and then, under the condition that the gas expansion chamber is placed in the standard volume, expanding the gas in the gas expansion chamber to the vacuum chamber to be measured so as to measure the accurate volume of the vacuum chamber to be measured; the vacuum measurement system convenient to operate is provided, and comprises two vacuum chambers (a gas expansion chamber and a measured vacuum chamber) molecular pump air pumping systems, a high-precision capacitance film vacuum gauge, a vacuum valve, a gas flow controller, a high-purity nitrogen cylinder and a standard volume, wherein the gas expansion chamber, the valve and the standard volume are subjected to special high-vacuum treatment, so that the material gas release rate is low, the device background gas release in the gas static expansion process is extremely low, and the measurement accuracy is ensured; the system and the method can quickly and conveniently measure the volume of each type of vacuum cavity.
Drawings
FIG. 1 is a schematic diagram of a test system according to the present invention.
Detailed Description
The technical scheme of the invention is further explained in detail by combining the attached drawings:
a volume substitution method vacuum chamber volume test system is shown in figure 1 and comprises a first vacuum chamber Vch, a second vacuum chamber Vtest, a first vacuum gauge G1, a second vacuum gauge G2, a mechanical pump RP, a molecular pump TMP, a first vacuum valve V1, a second vacuum valve V2, a third vacuum valve V3, a fourth vacuum valve V4, a fifth vacuum valve V5, a gas flow controller MFM, a decompression valve V6, a nitrogen bottle and a constant temperature box CTB;
the mechanical pump RP is respectively connected with one end of a first vacuum valve V1 and a pumping outlet of a molecular pump TMP, the other end of the first vacuum valve V1 is respectively connected with a first vacuum gauge G1 and a first vacuum chamber Vch, a pumping inlet of the molecular pump TMP is connected with one end of a second vacuum valve V2, the other end of the second vacuum valve V2 is connected with the first vacuum chamber Vch, a nitrogen cylinder is connected with one end of a flow controller MFM through a decompression valve V6, the other end of the flow controller MFM is connected with the first vacuum chamber Vch through a third vacuum valve V3, a fourth vacuum valve V4 is used as a sampling valve of the first vacuum chamber Vch for putting in and taking out a standard volume Vst, one ends of the second vacuum gauge G2 and a fifth vacuum valve V5 are connected with the first vacuum chamber Vch, and the other end of the fifth vacuum valve V5 is connected with a second Vtest.
As a further preferable scheme of the vacuum cavity volume testing system adopting the volume substitution method, the first vacuum chamber Vch and a flange joint connected with the first vacuum chamber Vch are machined by a high-precision machine tool, ultrahigh vacuum treatment including cleaning, high-temperature annealing and film coating is adopted in the machining process, integral baking and degassing treatment is periodically carried out during the use period, the baking temperature is set to be 150 ℃, and the CTB temperature of a constant temperature box is set to be 23 +/-1.0 ℃ during sample measurement.
In a further preferred embodiment of the system for measuring the volume of a vacuum chamber according to the present invention, the first vacuum gauge G1 is a full-scale vacuum gauge for monitoring the full-scale vacuum gauge at 1000Torr, and the second vacuum gauge G2 is a 1000Torr high-precision capacitance thin film vacuum gauge.
As a further preferable aspect of the vacuum chamber volume test system using the volume substitution method according to the present invention, the standard volume Vst is a precisely machined stainless steel metal rod, and is measured by a measuring mechanism, and the length and the diameter of the stainless steel metal rod are measured to the volume value, and the uncertainty of the standard volume is less than 0.1%.
A test method of a vacuum cavity volume test system based on a volume substitution method specifically comprises the following steps:
step 2, keeping the temperature of the incubator at 23 +/-1.0 ℃, and sequentially opening a monitoring first vacuum gauge G1, a mechanical pump RP1, a first vacuum valve V1 and a fifth vacuum valve V5 to vacuumize the system; when the reading of the first vacuum gauge G1 is monitored to be less than 10Pa, the first vacuum valve V1 is closed, the molecular pump TMP and the second vacuum valve V2 are opened in sequence, and the test system is vacuumized;
step 3, when the indication number of the first vacuum gauge G1 is monitored to be less than 1 × 10-4Pa, the second vacuum valve V2, the third vacuum valve V3 and the fifth vacuum valve V5 are closed, a certain amount of nitrogen is filled into the first vacuum chamber Vch through the flow controller MFM, then the third vacuum valve V3 is closed, the second vacuum gauge G2 is used for measuring the vacuum degree of the first vacuum chamber Vch, and the vacuum degree is measured as p1(ii) a Opening a fifth vacuum valve V5 to make the gas expand to the second vacuum chamber Vtest, reading the reading number after the reading number of the second vacuum meter G2 is stable, and counting as p2；
Step 4, after the testing system is inflated, opening a sample introduction fourth vacuum valve V4, putting the cleaned and dried standard volume Vst into a first vacuum chamber Vch, and sequentially opening a monitoring first vacuum gauge G1, a mechanical pump RP1, a first vacuum valve V1 and a fifth vacuum valve V5 to vacuumize the system; when the reading of the first vacuum gauge G1 is monitored to be less than 10Pa, the first vacuum valve V1 is closed, the molecular pump TMP and the second vacuum valve V2 are opened in sequence, and the test system is vacuumized;
Step 6, calculating the volume V of the vacuum chamber to be measured according to the following formulatest：
Wherein, VstIs a standard volume.
And 7, repeating the steps 2 to 5, repeating the measurement for 5 times, and taking an average value as the volume V of the vacuum chamber to be measuredtestIs measured.
In summary, the invention provides a system and a method for measuring the volume of a vacuum chamber by a volume substitution method, which can quickly and conveniently measure the volume of each type of vacuum chamber accurately, and has the following technical key points:
the invention discloses a method for accurately measuring the volume of a nonstandard vacuum cavity by utilizing a built-in standard volume and two times of gas static expansion, which comprises the following steps: firstly, under the condition that the gas expansion chamber is not placed in a standard volume, expanding gas in the gas expansion chamber to a vacuum chamber to be measured so as to measure the volume ratio of the two vacuum chambers, and then, under the condition that the gas expansion chamber is placed in the standard volume, expanding the gas in the gas expansion chamber to the vacuum chamber to be measured so as to measure the accurate volume of the vacuum chamber to be measured;
the invention provides a vacuum measurement system convenient to operate, which comprises two vacuum chambers (a gas expansion chamber and a measured vacuum chamber) molecular pump pumping systems, a high-precision capacitance film vacuum gauge, a vacuum valve, a gas flow controller, a high-purity nitrogen cylinder and a standard volume, and is simple in structure and convenient to operate;
the gas expansion chamber, the valve and the standard volume of the system are subjected to special high vacuum treatment, and vacuum deflation of component materials is inhibited, so that the bottom deflation of the device in the gas static expansion process is extremely small, and the measurement accuracy is ensured.
Claims (5)
1. A volume substitution method vacuum chamber volume test system is characterized by comprising two vacuum chambers (Vch and Vtest), two vacuum gauges (G1 and G2), a mechanical pump (RP), a molecular pump (TMP), five vacuum valves (V1, V2, V3, V4 and V5), a gas flow controller (MFM), a pressure reducing valve (V6), a nitrogen cylinder and a Constant Temperature Box (CTB);
wherein, the mechanical pump (RP) is respectively connected with one end of a first vacuum valve (V1) and the exhaust outlet of a molecular pump (TMP), the other end of the first vacuum valve (V1) is respectively connected with a first vacuum meter (G1) and a first vacuum chamber (Vch), the exhaust inlet of the TMP is connected with one end of a second vacuum valve (V2), the other end of the second vacuum valve (V2) is connected with the first vacuum chamber (Vch), a nitrogen bottle is connected with one end of a flow controller (MFM) through a decompression valve (V6), the other end of the flow controller (MFM) is connected with the first vacuum chamber (Vch) through a third vacuum valve (V3), a fourth vacuum valve (V4) is used as the sample injection valve of the first vacuum chamber (Vch) for putting in and taking out a standard volume (Vst), one end of the second vacuum meter (G2) and a fifth vacuum valve (V5) is connected with the first vacuum chamber (Vch), the other end of the fifth vacuum valve (V5) is connected to the second vacuum chamber (Vtest).
2. A system for testing the volume of a vacuum chamber by volume substitution method according to claim 1, characterized in that the first vacuum chamber (Vch) and the flange joint connected with the first vacuum chamber are all machined by a high-precision machine tool, the machining process adopts ultra-high vacuum treatment comprising cleaning, high-temperature annealing and film coating, the whole baking and degassing treatment is periodically carried out during the use period, the baking temperature is set to 150 ℃, and the CTB temperature of a constant temperature box is set to 23 +/-1.0 ℃ during the sample measurement.
3. A volume substitution vacuum chamber volume test system as claimed in claim 1, wherein the first vacuum gauge (G1) is a full scale gauge for 1000Torr full scale monitoring gauge and the second vacuum gauge (G2) is a 1000Torr high precision capacitive thin film gauge.
4. A volume-displacement vacuum chamber volume test system as claimed in claim 1, wherein the standard volume (Vst) is a precision-machined stainless steel metal rod and is metered by a metering mechanism to a length and diameter that is less than 0.1% uncertainty of the standard volume to its volume value.
5. A method for testing a vacuum chamber volume test system based on the volume substitution method of any one of claims 1 to 4, comprising the following steps:
step 1, connecting a second vacuum chamber (Vtest) to be tested with a first vacuum chamber (Vch) through a fifth vacuum valve (V5), opening a second vacuum gauge (G2), and preheating for 12 hours;
step 2, keeping the temperature of the incubator at 23 +/-1.0 ℃, and sequentially opening a first vacuum gauge (G1), a mechanical pump (RP1), a first vacuum valve (V1) and a fifth vacuum valve (V5) to vacuumize the system; when the reading of the first vacuum gauge (G1) is monitored to be less than 10Pa, the first vacuum valve V1 is closed, The Molecular Pump (TMP) and the second vacuum valve (V2) are opened in sequence, and the test system is vacuumized;
and 3, when the reading of the first vacuum meter (G1) is monitored to be less than 1 × 10-4Pa, closing the second vacuum valve (V2), the third vacuum valve (V3) and the fifth vacuum valve (V5), filling a certain amount of nitrogen into the first vacuum chamber (Vch) through a flow controller (MFM), closing the third vacuum valve (V3), and measuring the vacuum degree of the first vacuum chamber (Vch) by using a second vacuum meter (G2) to obtain the value p1(ii) a Opening a fifth vacuum valve (V5) to expand the gas into the second vacuum chamber (Vtest), reading the reading after the reading of the second vacuum gauge (G2) is stable, and counting as p2；
Step 4, after the testing system is inflated, opening a sample introduction fourth vacuum valve (V4), putting the standard volume (Vst) after cleaning and drying treatment into a first vacuum chamber (Vch), and sequentially opening a monitoring first vacuum gauge (G1), a mechanical pump (RP1), a first vacuum valve (V1) and a fifth vacuum valve (V5) to vacuumize the system; when the reading of the first vacuum gauge (G1) is monitored to be less than 10Pa, the first vacuum valve (V1) is closed, The Molecular Pump (TMP) and the second vacuum valve (V2) are opened in sequence, and the test system is vacuumized;
step 5, when the number of readings of the first vacuum meter (G1) is monitored to be less than 1 × 10-4Pa, the second vacuum valve (V2), the third vacuum valve (V3) and the fifth vacuum valve (V5) are closed, a certain amount of nitrogen is filled into the first vacuum chamber (Vch) through the flow controller (MFM), then the third vacuum valve (V3) is closed, and the vacuum degree of the first vacuum chamber (Vch) is measured by the second vacuum meter (G2) and is counted as p3；
Opening the fifth vacuumA valve (V5) for expanding the gas into a second vacuum chamber (Vtest) to be measured, reading the reading after the reading of the second vacuum gauge (G2) is stabilized, and counting as p4；
Step 6, calculating the volume V of the vacuum chamber to be measured according to the following formulatest：
Wherein, VstIs a standard volume.
And 7, repeating the steps 2 to 5, repeating the measurement for 5 times, and taking an average value as the volume V of the vacuum chamber to be measuredtestIs measured.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112304804A (en) * | 2020-10-28 | 2021-02-02 | 北京东方计量测试研究所 | Material outgassing rate testing system and testing method thereof |
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| DE10016114C1 (en) * | 2000-03-31 | 2001-11-22 | Werner Heinz | Density meter for fine grain material determines displacement of hydrogen filler gas by weighed specimen of substance, has specimen and reference chambers in metal housing |
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