CN107677329B - A kind of the vacuum leak flow measurement device and method of more gas componants - Google Patents
A kind of the vacuum leak flow measurement device and method of more gas componants Download PDFInfo
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- CN107677329B CN107677329B CN201710805621.0A CN201710805621A CN107677329B CN 107677329 B CN107677329 B CN 107677329B CN 201710805621 A CN201710805621 A CN 201710805621A CN 107677329 B CN107677329 B CN 107677329B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
Abstract
The present invention provides a kind of vacuum leak flow measurement device of more gas componants and methods, can obtain any component gas normal flow, realize the accurate measurement of the vacuum leak flow of more gas componants.After the multichannel normal flow pipeline concatenated using current limiting element and reset valve is in parallel and measuring chamber forms gas circuit, and the accurate acquisition for realizing calibrating gas flow is adjusted by the multichannel joint of reset valve.The vacuum leak flow-measuring method of more gas componants of the invention, according to tested gas mass spectrogram, pass through the adjusting of reset valve, obtain corresponding pressure gauge and vacuum gauge measurement data, and then obtain the calibrating gas flow for flowing into measuring chamber mixing, the accurate offer of the calibrating gas flow of certain flow value and certain component ratio is provided, calibrating gas flow is simply accurately obtained, the problem of the inaccuracy of existing proving flowmeter calibrating gas flow as brought by flow consecutive variations, replacement or different types of structure leak rate component in parallel is overcome.
Description
Technical field
The present invention relates to vacuum leak field of measuring technique, and in particular to a kind of vacuum leak flow survey of more gas componants
Measure device and method.
Background technique
Currently, a basic skills for obtaining calibrating gas flow is to use gas leak rate component in vacuum system,
The canonical reference leak hole after metrological service measures is utilized to connect into corresponding vacuum system.This method is although can realize
The acquisition of calibrating gas flow, but since a leak rate component can only provide the calibrating gas flow an of flow value, it obtains
Calibrating gas flow be difficult to meet for calibrating gas flow consecutive variations or several different flow values are wanted in the short time
It asks.And in the device of calibrating gas flow at this stage, it generally can only all provide the flow of single component gas, component
Manufacturer generally is provided by gas cylinder to provide, and the gas flow with multicomponent calibrating gas flow cannot be provided.
Another method for providing calibrating gas flow is the leak rate component using channel-style by extremely limited
Change condition, so that extremely limited change occurs by its gas flow.Several leak rate components are in parallel, it can be in difference
The control of flow is realized in magnitude.But leak rate component working condition changes during use, causes finally to mention
There is biggish uncertainty in the calibrating gas flow of confession, it is difficult to standard gas flow under the accurate mixed proportion of multicomponent is obtained,
The calibrating gas flow that this method obtains also be difficult to meet for calibrating gas flow consecutive variations or in the short time it is several
The requirement of different flow value.
In the acquisition of existing normal flow, it is necessary to obtain continuous flow using the leak rate component combination of various different sizes
Amount, gaseous species are unique, the mixing of certain component gas can not be carried out on demand, thus can not be to the vacuum leak of more gas componants
Flow measures.Existing proving flowmeter is tied due to the demand of flow consecutive variations by using replacement or difference in parallel
Structure type leak rate component realizes flow measurement, brings the problem of the inaccuracy of calibrating gas flow.
Summary of the invention
In view of this, the present invention provides a kind of vacuum leak flow measurement device of more gas componants and method, it can
Any component gas normal flow is obtained, realizes the accurate measurement of the vacuum leak flow of more gas componants.
Technical scheme is as follows:
The vacuum leak flow measurement device of more gas componants of the invention, including multichannel normal flow pipeline, pressure gauge,
Mass spectrograph, measuring chamber, pumping unit and tested gas inlet valve；Peripheral equipment is tested vacuum leak, is tested vacuum leak
The gas of outflow is the mixed gas being made of more gas componants；
Wherein, normal flow pipeline includes the gas cylinder being sequentially connected in series, reset valve, mixed admission valve, current limiting element and goes out
The outlet valve parallel connection of air valve, each road standard flow line is followed by measuring chamber；Tested vacuum leak is by being tested gas inlet
Valve is connected with measuring chamber；
The corresponding each pure gas of each gas componant in mixed gas, as single standard gas filling in each road standard
In the gas cylinder of flow line；Reset valve is continuous pressure control valve；
Pressure gauge is used to measure the gas pressure between the reset valve and mixed admission valve in each road standard flow line,
And the indoor gas pressure of measurement；Mass spectrograph is used to measure the mass spectrogram and ion stream of measurement indoor gas；Unit is evacuated to use
It is evacuated in measuring chamber.
Preferably, using absolute pressure formula pressure gauge between the reset valve and mixed admission valve in each road standard flow line
Gas pressure measure；It is measured using vacuum gauge to indoor gas pressure is measured.
Preferably, mixed admission valve, outlet valve and tested gas inlet valve are all-metal ultrahigh vacuum valve.
Further, current limiting element is current limliting aperture, proving flowmeter or referance leak.
The measurement method measured using the vacuum leak flow measurement device of more gas componants of the invention, including such as
Lower step:
Step 1, when initial, all valves are in off state；It opens pumping unit and measuring chamber is evacuated to background pressure, close
It is evacuated unit, the corresponding indoor ion stream I of device background is obtained by mass spectrograph measurement0；
Step 2, tested gas inlet valve is opened, the mixed gas being made of more gas componants is by being tested vacuum leak
It flows into measuring chamber, is obtained by mass spectrograph measurement by the corresponding indoor ion stream I of school vacuum leakL, and obtain mixed gas
Mass spectrogram；
Step 3, tested gas inlet valve is closed, pumping unit is again turned on by measuring chamber and is evacuated to background pressure, close
It is evacuated unit；
Step 4, any one road standard flow line is opened, the gas in corresponding gas cylinder flows into normal flow pipeline, according to
The reading of mass spectrograph adjusts the reset valve on the normal flow pipeline, so that the mass spectrum that mass spectrograph measures is mixed with what step 2 obtained
The mass spectrum that gas is corresponded in conjunction gas mass spectrogram is consistent, stops adjusting reset valve, records reset valve on normal flow pipeline at this time
Gas pressure P between mixed admission valve11, and the indoor gas pressure P of measurement12；According to P12With P11Difference, with
And the conductance of the normal flow pipeline upper limit fluid element, obtain the calibrating gas flow of the normal flow pipeline；
Step 5, other standards flow line is successively opened, the gas in corresponding gas cylinder successively flows into normal flow pipeline；
Wherein, every to open normal flow pipeline all the way, then it is adjusted on the normal flow pipeline according to the reading of mass spectrograph
Reset valve stops so that the mass spectrum for corresponding to gas in the mixed gas mass spectrogram that the mass spectrum that mass spectrograph measures is obtained with step 2 is consistent
Only adjust reset valve, gas pressure when record mass spectrum is consistent, on normal flow pipeline between reset valve and mixed admission valve
And the indoor gas pressure of measurement, it measures indoor gas pressure and the preceding indoor gas pressure work of measurement once recorded is poor
Measuring chamber pressure difference value is obtained, according on measuring chamber pressure difference value and normal flow pipeline between reset valve and mixed admission valve
Gas pressure difference and the normal flow pipeline upper limit fluid element conductance, obtain the Standard Gases of the normal flow pipeline
Body flow；
After the completion of the reset valve of each road standard flow line is adjusted, the mass spectrum and step 2 that mass spectrograph measures are obtained mixed
Conjunction gas mass spectrogram is consistent, the record ion stream that mass spectrograph measures at this time, that is, the ion stream I of the calibrating gas flow mixedS；
The sum of the calibrating gas flow of each normal flow pipeline, as the calibrating gas flow of inflow measuring chamber mixing
QS；
Step 5, the flow Q of tested vacuum leak is calculated according to formula (1)L:
The utility model has the advantages that
The vacuum leak flow measurement device of a kind of more gas componants of the invention, according to the mass spectrogram for being tested gas, choosing
Corresponding calibrating gas is selected, the gas suitable for any component；The multichannel normal flow concatenated using current limiting element and reset valve
After pipeline is in parallel and measuring chamber forms gas circuit, is adjusted by the multichannel joint of reset valve and realizes accurately obtaining for calibrating gas flow
It takes, so that the vacuum leak flow for obtaining more gas componants is accurate and effective.
The vacuum leak flow-measuring method of more gas componants of the invention passes through fine tuning according to gas mass spectrogram is tested
The adjusting of valve obtains corresponding pressure gauge and vacuum gauge measurement data, and then obtains the calibrating gas stream for flowing into measuring chamber mixing
Amount realizes the accurate offer of the calibrating gas flow of certain flow value and certain component ratio, enables calibrating gas flow
It is simple accurately to obtain, it overcomes calibrating gas flow in the prior art and the problem of inaccuracy is provided.
Detailed description of the invention
Fig. 1 is that the vacuum standard gas flow of the more gas componants of the present invention obtains schematic device.
Wherein, the first gas cylinder of 1-, the second gas cylinder of 2-, 3- third gas cylinder, the first reset valve of 4-, the second reset valve of 5-, 6-
Three reset valves, 9- the first mixed admission valve, 10- the second mixed admission valve, 11- third mixed admission valve, 15- first go out
Air valve, the second outlet valve of 16-, 17- third outlet valve, 22- are tested gas inlet valve, 8- absolute pressure formula pressure gauge, 12-
First current limiting element, the second current limiting element of 13-, 14- third current limiting element, 18- mass spectrograph, 19- vacuum gauge, 20- measuring chamber,
21- is evacuated unit, and 23- is tested vacuum leak.
Specific embodiment
The present invention will now be described in detail with reference to the accompanying drawings and examples.
The vacuum leak flow measurement device of more gas componants of the invention, including multichannel normal flow pipeline, pressure gauge,
Mass spectrograph 18, measuring chamber 20, pumping unit 21 and tested gas inlet valve 22；
Peripheral equipment is tested vacuum leak 23, and the gas of tested vacuum leak outflow is mixed to be made of more gas componants
Close gas；
Wherein, normal flow pipeline includes the gas cylinder being sequentially connected in series, reset valve, mixed admission valve, current limiting element and goes out
The outlet valve parallel connection of air valve, each road standard flow line is followed by measuring chamber 20；Tested vacuum leak 23 is by being tested gas
Air intake valve 22 is connected with measuring chamber 20；
The corresponding each pure gas of each gas componant in mixed gas, as single standard gas filling in each road standard
In the gas cylinder of flow line；Reset valve is continuous pressure control valve；
Pressure gauge is used to measure the gas pressure between the reset valve and mixed admission valve in each road standard flow line,
And the indoor gas pressure of measurement；Mass spectrograph is used to measure the mass spectrogram and ion stream of measurement indoor gas；Unit is evacuated to use
It is evacuated in measuring chamber.Current limiting element is current limliting aperture, proving flowmeter or referance leak, and admittance ability is determining and conductance
It is known.
In the present embodiment, mixed gas includes gas componant, corresponding 3 pure gas, by taking 3 gas cylinders as an example, such as Fig. 1 institute
Show, measuring device includes the first normal flow pipeline, the second normal flow pipeline and third normal flow pipeline and absolute pressure formula
Pressure gauge 8, mass spectrograph 18, vacuum gauge 19, measuring chamber 20, pumping unit 21, tested gas inlet valve 22 and tested vacuum
Leak hole 23；
It include the first gas cylinder 1, the second gas cylinder 2, the third gas cylinder 3, the first current limliting of reference numeral on each normal flow pipeline
Element 12, the second current limiting element 13, third current limiting element 14, the first reset valve 4, the second reset valve 5, third reset valve 6, first
Mixed admission valve 9, the second mixed admission valve 10, third mixed admission valve 11, the first outlet valve 15, the second air outlet valve
Door 16 and third outlet valve 17.
Tested gas inlet valve 22 is opened, and the mixed gas for more gas componants that tested vacuum leak 23 flows out is introduced into
In measuring chamber 20.
The calibrating gas for flowing through the first current limiting element 12, the second current limiting element 13 or third current limiting element 14, passes through respectively
First mixed admission valve 15, the second mixed admission valve 16 or third mixed admission valve 17 flow into measuring chamber 20；It is each
It is mixed calibrating gas in measuring chamber 20 when all valves are opened on normal flow pipeline.
The gas between reset valve and mixed admission valve in each road standard flow line is measured using absolute pressure formula pressure gauge 8
Body pressure measures the gas pressure in measuring chamber 20 using vacuum gauge 19, and mass spectrograph 18 measures the ion stream in measuring chamber 20.It is mixed
Closing air intake valve, outlet valve and tested gas inlet valve is all-metal ultrahigh vacuum valve.
The method measured using the vacuum leak flow measurement device of more gas componants of the invention, including walk as follows
It is rapid:
Step 1, when initial, all valves are in off state；It opens pumping unit and measuring chamber 20 is evacuated to background pressure, close
Pumping unit is closed, the corresponding indoor ion stream I of device background is obtained by the measurement of mass spectrograph 180；
Step 2, tested gas inlet valve is opened, the mixed gas being made of more gas componants is by being tested vacuum leak
23 flow into measuring chamber 20, are obtained by the measurement of mass spectrograph 18 by the corresponding indoor ion stream I of school vacuum leakL, and mixed
Close gas mass spectrogram；
Step 3, tested gas inlet valve is closed, pumping unit is again turned on by measuring chamber 20 and is evacuated to background pressure, close
Close pumping unit；
Step 4, any one road standard flow line is opened, the gas in corresponding gas cylinder flows into normal flow pipeline, according to
The reading of mass spectrograph adjusts the reset valve on the normal flow pipeline, so that mass spectrum and step 2 that mass spectrograph 18 measures obtained
The mass spectrum that gas is corresponded in mixed gas mass spectrogram is consistent, stops adjusting reset valve, records and finely tune on normal flow pipeline at this time
Gas pressure P between valve and mixed admission valve11, and the indoor gas pressure P of measurement12；According to P12With P11Difference
(P12-P11) and the normal flow pipeline upper limit fluid element conductance, obtain the calibrating gas flow of the normal flow pipeline；
Step 5, other standards flow line is successively opened, the gas in corresponding gas cylinder successively flows into normal flow pipeline；
Wherein, every to open normal flow pipeline all the way, then it is adjusted on the normal flow pipeline according to the reading of mass spectrograph
Reset valve, so that the mass spectrum that gas is corresponded in the mixed gas mass spectrogram that the mass spectrum that mass spectrograph 18 measures is obtained with step 2 is consistent,
Stop adjusting reset valve, gas pressure when record mass spectrum is consistent, on normal flow pipeline between reset valve and mixed admission valve
Power and the indoor gas pressure of measurement, measure indoor gas pressure and the preceding indoor gas pressure of measurement once recorded is made
Difference obtains measuring chamber pressure difference value, according to reset valve on measuring chamber pressure difference value and normal flow pipeline and mixed admission valve it
Between gas pressure difference and the normal flow pipeline upper limit fluid element conductance, obtain the standard of the normal flow pipeline
Gas flow；
After the completion of the reset valve of each road standard flow line is adjusted, what the mass spectrum and step 2 that mass spectrograph 18 measures obtained
Mixed gas mass spectrogram is consistent, the record ion stream that mass spectrograph measures at this time, that is, the ion stream I of the calibrating gas flow mixedS；
The sum of the calibrating gas flow of each normal flow pipeline, as the calibrating gas flow of inflow measuring chamber mixing
QS；
Step 5, the flow Q of tested vacuum leak is calculated according to formula (1)L:
In formula: QLThe flow of-tested vacuum leak, unit Pam3/s；
QS- flow into the calibrating gas flow that measuring chamber mixes, unit Pam3/s；
I0The corresponding indoor ion stream of-device background, unit A；
IL- by the corresponding indoor ion stream of school vacuum leak, unit A；
ISThe ion stream of the calibrating gas flow of-mixing, unit A.
By taking 3 gas cylinders as an example, measured using the vacuum leak flow measurement device of more gas componants of the invention
The step of method are as follows:
Step 1, when initial, all valves are in off state；It opens pumping unit and measuring chamber 20 is evacuated to background pressure, close
Pumping unit is closed, the corresponding indoor ion stream of device background is obtained by the measurement of mass spectrograph 18；
Step 2, tested gas inlet valve is opened, the mixed gas being made of more gas componants is by being tested vacuum leak
23 flow into measuring chamber 20, are obtained by the measurement of mass spectrograph 18 by the corresponding indoor ion stream I of school vacuum leakL, and mixed
Close gas mass spectrogram；
Step 3, tested gas inlet valve is closed, pumping unit is again turned on by measuring chamber 20 and is evacuated to background pressure, close
Close pumping unit；
Step 4, the first normal flow pipeline is opened, the gas in the first gas cylinder flows into normal flow pipeline, according to mass spectrum
The reading of meter adjusts the first reset valve, and observes the measurement data of mass spectrograph in real time, so that mass spectrum and step that mass spectrograph 18 measures
The mass spectrum that gas is corresponded in rapid 2 obtained mixed gas mass spectrograms is consistent, stops adjusting the first reset valve, record is first micro- at this time
Adjust the gas pressure P between valve and the first mixed admission valve11, and the indoor gas pressure P of measurement12；According to P12With P11's
Difference DELTA P1And first current limiting element conductance C1, obtain the calibrating gas flow Q of the first normal flow pipelines1；
Step 5, the second normal flow pipeline is opened, the gas in the second gas cylinder flows into the second normal flow pipeline；
The second reset valve is adjusted according to the reading of mass spectrograph, and observes the measurement data of mass spectrograph in real time, so that mass spectrograph
The mass spectrum that gas is corresponded in the mixed gas mass spectrogram that 18 mass spectrums measured are obtained with step 2 is consistent, stops adjusting the second fine tuning
Valve, the gas pressure P on record standard flow line between the second reset valve and the second mixed admission valve21And in measuring chamber
Gas pressure P2, measure indoor gas pressure P2With the indoor gas pressure P of the preceding measurement once recorded12It is surveyed as difference
Measure chamber pressure difference P22, according to measuring chamber pressure difference value P22With gas pressure P21Difference DELTA P2And second current limiting element
Conductance C2, obtain the calibrating gas flow Q of the second normal flow pipelines2
Third normal flow pipeline is opened, the gas in third gas cylinder flows into third normal flow pipeline；
Third reset valve is adjusted according to the reading of mass spectrograph, and observes the measurement data of mass spectrograph in real time, so that mass spectrograph
The mass spectrum that gas is corresponded in the mixed gas mass spectrogram that 18 mass spectrums measured are obtained with step 2 is consistent, stops adjusting third fine tuning
Valve, gas pressure P when record mass spectrum is consistent, on normal flow pipeline between third reset valve and third mixed admission valve31
And the indoor gas pressure P of measurement3, measure indoor gas pressure P3With the preceding indoor gas pressure of the measurement once recorded
P2Measuring chamber pressure difference value P is obtained as difference32, according to measuring chamber pressure difference value P32With gas pressure P31Difference DELTA P3, Yi Ji
The conductance C of three current limiting elements3, obtain the calibrating gas flow Q of third normal flow pipelines3；
After the completion of first, second, and third reset valve is adjusted, mass spectrum that mass spectrograph 18 measures and the mixing that step 2 obtains
Gas mass spectrogram is consistent, the record ion stream that mass spectrograph measures at this time, that is, the ion stream I of the calibrating gas flow mixedS；
The sum of the calibrating gas flow of each normal flow pipeline, as the calibrating gas flow of inflow measuring chamber mixing
QS, Qs=Qs1+Qs2+Qs3；
Step 5, the flow Q of tested vacuum leak is calculated according to formula (1)L:
Obtained QS、I0、IL、ISRespectively 1.54 × 10-8Pa·m3/ s, 3.35 × 10-15A, 1.08 × 10-11A, 3.18
×10-11A substitutes into the flow Q that tested vacuum leak is calculated in formula (1)LIt is 7.92 × 10-9Pa·m3/ s, using of the invention real
The vacuum leak flow measurement to more gas componants is showed.
In conclusion the above is merely preferred embodiments of the present invention, being not intended to limit the scope of the present invention.
All within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in of the invention
Within protection scope.
Claims (5)
1. a kind of vacuum leak flow measurement device of more gas componants, which is characterized in that including multichannel normal flow pipeline, pressure
Power meter, mass spectrograph (18), measuring chamber (20), pumping unit (21) and tested gas inlet valve (22)；Peripheral equipment is tested
Vacuum leak (23), the gas for being tested vacuum leak outflow is the mixed gas being made of more gas componants；
Wherein, normal flow pipeline includes the gas cylinder being sequentially connected in series, reset valve, mixed admission valve, current limiting element and air outlet valve
Door, the outlet valve parallel connection of each road standard flow line are followed by measuring chamber (20)；Tested vacuum leak (23) are by being tested gas
Air intake valve (22) is connected with measuring chamber (20)；
The corresponding each pure gas of each gas componant in mixed gas, as single standard gas filling in each road normal flow
In the gas cylinder of pipeline；Reset valve is continuous pressure control valve；
Pressure gauge is used to measure the gas pressure between the reset valve and mixed admission valve in each road standard flow line, and
Measure indoor gas pressure；Mass spectrograph is used to measure the mass spectrogram and ion stream of measurement indoor gas；Be evacuated unit for pair
Measuring chamber is evacuated.
2. a kind of vacuum leak flow measurement device of more gas componants as described in claim 1, which is characterized in that using absolutely
Pressure type pressure gauge measures the gas pressure between the reset valve and mixed admission valve in each road standard flow line.
3. a kind of vacuum leak flow measurement device of more gas componants as described in claim 1, which is characterized in that described mixed
Closing air intake valve, outlet valve and tested gas inlet valve is all-metal ultrahigh vacuum valve.
4. a kind of vacuum leak flow measurement device of more gas componants as described in claim 1, which is characterized in that the limit
Fluid element is current limliting aperture, proving flowmeter or referance leak.
5. a kind of vacuum leak flow-measuring method of more gas componants, which is characterized in that use any right of claim 1-4
It is required that the vacuum leak flow measurement device of more gas componants measures, include the following steps:
Step 1, when initial, all valves are in off state；It opens pumping unit and measuring chamber (20) is evacuated to background pressure, close
It is evacuated unit, the corresponding indoor ion stream I of device background is obtained by mass spectrograph (18) measurement0；
Step 2, tested gas inlet valve is opened, the mixed gas being made of more gas componants is by being tested vacuum leak (23)
It flows into measuring chamber (20), the corresponding indoor ion stream I of tested vacuum leak is obtained by mass spectrograph (18) measurementL, and obtain
Mixed gas mass spectrogram；
Step 3, tested gas inlet valve is closed, pumping unit is again turned on by measuring chamber (20) and is evacuated to background pressure, close
It is evacuated unit；
Step 4, any one road standard flow line is opened, the gas in corresponding gas cylinder flows into normal flow pipeline, according to mass spectrum
The reading of meter adjusts the reset valve on the normal flow pipeline, so that the mass spectrum that mass spectrograph (18) measures is mixed with what step 2 obtained
The mass spectrum that gas is corresponded in conjunction gas mass spectrogram is consistent, stops adjusting reset valve, records reset valve on normal flow pipeline at this time
Gas pressure P between mixed admission valve11, and the indoor gas pressure P of measurement12；According to P12With P11Difference, with
And the conductance of the normal flow pipeline upper limit fluid element, obtain the calibrating gas flow of the normal flow pipeline；
Step 5, other standards flow line is successively opened, the gas in corresponding gas cylinder successively flows into normal flow pipeline；
Wherein, every to open normal flow pipeline all the way, then the fine tuning on the normal flow pipeline is adjusted according to the reading of mass spectrograph
Valve stops so that the mass spectrum for corresponding to gas in the mixed gas mass spectrogram that the mass spectrum that mass spectrograph (18) measures is obtained with step 2 is consistent
Only adjust reset valve, gas pressure when record mass spectrum is consistent, on normal flow pipeline between reset valve and mixed admission valve
And the indoor gas pressure of measurement, it measures indoor gas pressure and the preceding indoor gas pressure work of measurement once recorded is poor
Measuring chamber pressure difference value is obtained, according on measuring chamber pressure difference value and normal flow pipeline between reset valve and mixed admission valve
Gas pressure difference and the normal flow pipeline upper limit fluid element conductance, obtain the Standard Gases of the normal flow pipeline
Body flow；
After the completion of the reset valve of each road standard flow line is adjusted, the mass spectrum and step 2 that mass spectrograph (18) measures are obtained mixed
Conjunction gas mass spectrogram is consistent, the record ion stream that mass spectrograph measures at this time, that is, the ion stream I of the calibrating gas flow mixedS；
The sum of the calibrating gas flow of each normal flow pipeline, as the calibrating gas flow Q of inflow measuring chamber mixingS；
Step 5, the flow Q of tested vacuum leak is calculated according to formula (1)L:
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| CN109390204B (en) * | 2018-12-10 | 2024-03-12 | 合肥中科离子医学技术装备有限公司 | Wide-range adjustable movable vacuum mass spectrum measuring equipment |
| CN112781804B (en) * | 2020-12-16 | 2023-12-26 | 兰州空间技术物理研究所 | SF6 leak rate calibration stepless adjusting device and method |
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