CN109390204B - Wide-range adjustable movable vacuum mass spectrum measuring equipment - Google Patents
Wide-range adjustable movable vacuum mass spectrum measuring equipment Download PDFInfo
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- CN109390204B CN109390204B CN201811505426.7A CN201811505426A CN109390204B CN 109390204 B CN109390204 B CN 109390204B CN 201811505426 A CN201811505426 A CN 201811505426A CN 109390204 B CN109390204 B CN 109390204B
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- 238000001819 mass spectrum Methods 0.000 title claims description 7
- 238000000034 method Methods 0.000 claims description 11
- 238000004458 analytical method Methods 0.000 abstract description 13
- 238000005070 sampling Methods 0.000 abstract description 11
- 238000004949 mass spectrometry Methods 0.000 abstract description 9
- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 230000008901 benefit Effects 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 18
- 230000008859 change Effects 0.000 description 8
- 238000005259 measurement Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000005457 optimization Methods 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000002474 experimental method Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000009966 trimming Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
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- Chemical & Material Sciences (AREA)
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Abstract
The invention discloses a wide-range adjustable mobile vacuum mass spectrometry device which comprises a differential vacuum chamber, an air extractor group, a differential vacuum gauge, an air inlet vacuum gauge, a four-level rod mass spectrometer, a first gate valve, a second gate valve, a fine tuning valve, an angle valve and a vacuum pipeline, wherein the bottom of the differential vacuum chamber is connected with the air extractor group through the first gate valve, two interface flanges are arranged on the side surface of the differential vacuum chamber, and one interface flange is respectively connected with the differential vacuum gauge and the four-level rod mass spectrometer through a tee joint; the beneficial effects of the invention are as follows: the equipment can realize a wide range, b movable type, c automatic adjustment of sampling rate and d gas component analysis diversity, and can effectively analyze residual gas components in internal vacuum to help analyze main sources of the gas components, so that targeted measures are taken to improve the vacuum degree; the equipment has good social benefit and is suitable for popularization and use.
Description
Technical Field
The invention relates to measurement equipment, in particular to wide-range adjustable movable vacuum mass spectrometry equipment, and belongs to the technical field of vacuum mass spectrometry equipment application.
Background
In cyclotrons, the plasma is directionally deflected and accelerated under the combined action of an electric field and a magnetic field, and finally is transmitted to the treatment head through a transmission line. The high vacuum has the effect of improving the mean free path of the plasma and reducing the collision of the plasma with other particles in the vacuum during the deflection and acceleration processes, thereby leading to deviation from the deflection direction.
In the accelerating cavity vacuum of the existing cyclotron, residual gas is usually generated, the residual gas mainly comes from modes of surface gas release, vacuum leakage, gas permeation and the like of internal materials, the residual gas can reduce the vacuum degree in the accelerating cavity, so that errors occur in the directional deflection track of plasma, and the treatment quality of the plasma is reduced.
Disclosure of Invention
The invention aims to solve the problems that residual gas often exists in the vacuum in an accelerating cavity of the conventional cyclotron, the residual gas can reduce the vacuum degree in the accelerating cavity, so that the error occurs in the directional deflection track of plasma and the treatment quality of the plasma is reduced, and provides a large-range adjustable movable vacuum mass spectrometry measuring device.
The aim of the invention can be achieved by the following technical scheme: the utility model provides a portable vacuum mass spectrometry measurement equipment of wide range, includes differential vacuum chamber, air pump group, differential vacuum gauge PKR251, air inlet vacuum gauge, four-stage rod mass spectrometry RGA, CF100 push-pull valve I, CF35 push-pull valve II, VAT590 trim valve, KF40 angle valve and vacuum pipeline, differential vacuum chamber bottom is connected with the air pump group through CF100 push-pull valve I, through design differential pipeline, differential vacuum chamber and air pump group to main vacuum chamber gas sampling analysis, realizes expanding four-stage rod mass spectrometry's application range upper limit to 10 5 Pa (common four-level mass spectrometer is used in a range of 10 -2 ～10 -5 Pa), the whole process of effectively covering the accelerator vacuum operation by the measuring range of the mass spectrometer is realized, the pressure change in the differential vacuum chamber can be measured by the differential vacuum gauge, meanwhile, the internal pressure value can be fed back, the control of the opening and closing degree of the valve is realized by software judgment, and therefore, the automatic adjustment of the sampling proportion according to the pressure change in the differential vacuum chamber is realized, and the analysis precision is improved. The limitation of fixed flow guide on measurement precision is eliminated, and two interface flanges are arranged on the side surface of the differential vacuum chamber, wherein one interface flange is divided into three parts by a tee jointThe vacuum pipeline comprises a first CF40 corrugated pipe and a second CF16 corrugated pipe, the measuring equipment can be made into a movable measuring station by using stainless steel aluminum profiles, the movable measuring station does not need to be fixedly connected to an accelerator, and the interface position can be adjusted according to different measuring requirements. The application environment is more flexible, and the measuring equipment has more judgment basis in the field of cyclotrons compared with the traditional helium mass spectrometer leak detectors. Firstly, the type of the internal leakage and the external leakage can be clearly judged; secondly, in the high-power experiment process of the accelerator, judging the type of the gas outlet through mass spectrum detection; finally, whether the wall treatment effect before the cavity combination meets the requirement can be quantified, and more judgment basis is provided for the wall condition. The application field is wider;
the branch where the CF35 gate valve II is located is connected through a CF40 corrugated pipe I;
the branch where the VAT590 micro-tuning valve is located is connected through a CF16 corrugated pipe II, and the four-way valve is also connected with an air inlet vacuum gauge.
The invention further technically improves that: the inner diameter of the first CF40 corrugated pipe is phi 35mm, and the inner diameter of the second CF16 corrugated pipe is phi 16mm.
The invention further technically improves that: the air inlet vacuum gauge is connected with a KF40 angle valve through a four-way joint, and the air inlet vacuum gauge is arranged between the KF40 angle valve and a CF35 gate valve II.
The invention further technically improves that: the differential vacuum chamber, the CF35 gate valve II, the air inlet vacuum gauge and the KF40 angle valve are mutually communicated.
The invention further technically improves that: and the CF35 gate valve is connected with a VAT590 fine tuning valve through a four-way valve.
The invention further technically improves that: the control precision of the VAT590 fine-tuning valve is extremely high, dynamic effective change of 0-100.000% of opening and closing degree can be realized, and the change time is shorter.
The invention further technically improves that: the vacuum degree feedback of the vacuum pipeline is carried out by the air inlet vacuum gauge and the differential vacuum gauge, and the opening and closing of the VAT590 micro-adjustment valve and the CF35 gate valve are controlled after the software judgment, so that the sampling rate is improved under the condition of ensuring the normal operation of the four-level rod mass spectrometer, and the optimization of the test precision is further realized.
The working method of the measuring equipment specifically comprises the following steps:
step one: before the measuring equipment is communicated with the main vacuum chamber, the air extractor group of the equipment is required to operate, so that the inside of the internal differential vacuum chamber reaches the limit vacuum (-10) -5 Pa), at this time, the valves on the two differential branches are in a closed state;
step two: the measuring equipment is communicated with the main vacuum chamber, the vacuum at the joint of the air inlet vacuum gauge and the main vacuum chamber is read, and the opening and closing of the valve are realized through software judgment, so that the working range of the valve is generally as follows:
a) In the case where the main vacuum is at a low vacuum or even atmospheric pressure (10 5 ～10 -1 Pa), the opening and closing degree of the VAT590 trim valve can be controlled by software, and the dynamic maintenance of the vacuum degree in the differential vacuum chamber at 10 can be realized -2 ～10 -3 Pa. The mass spectrometer is guaranteed to work normally, and meanwhile, the mass spectrometer is always in a working interval with highest analysis precision.
b) In the case of a main vacuum in medium vacuum or even high vacuum (10 -2 ～10 -5 Pa), at this time, even if the fine tuning valve is completely opened, the precision cannot be ensured, and the CF35 gate valve needs to be controlled to be opened by software so as to improve the system conductance and obtain a higher sampling rate.
The analysis process of the mass spectrometer can be continuously monitored. The control of the valve is always in the dynamic regulation of software, and the judgment of the software is obtained by double feedback of the air inlet vacuum gauge and the differential vacuum gauge.
Compared with the prior art, the invention has the beneficial effects that: the device can realize a wide range, compared with the traditional four-level rod mass spectrometer (working range: 10 -2 ～10 -5 Pa), the mass spectrometry device can realize a four-level rod mass spectrometer of 10 5 ～10 -5 Normally working under Pa condition, expandingThe working range is enlarged; b, the mobile measuring equipment can be made into a mobile measuring station by using stainless steel aluminum profiles, is not required to be fixedly connected to an accelerator, can adjust the position of an interface according to different measuring requirements, and is more flexible to use; c, automatically adjusting the sampling rate, measuring the internal pressure change of the differential vacuum chamber through a differential vacuum gauge, feeding back the internal pressure value, and controlling the opening and closing degree of the valve through software judgment, so that the automatic adjustment of the sampling rate according to the internal pressure change of the differential vacuum chamber is realized, and the analysis precision is improved; d, the gas component analysis diversity can analyze the gas partial pressure and content conditions of the gaseous molecules with the relative molecular mass number of 1-100, and the analysis result is more abundant than that of the leak detector. The device can effectively analyze the residual gas components in the internal vacuum, which is helpful for analyzing the main sources of the gas components, so that the vacuum degree is improved by adopting targeted measures; the equipment has good social benefit and is suitable for popularization and use.
Drawings
The present invention is further described below with reference to the accompanying drawings for the convenience of understanding by those skilled in the art.
FIG. 1 is a schematic diagram of the overall structure connection of the present invention.
Detailed Description
The technical solutions of the present invention will be clearly and completely described in connection with the embodiments, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1, a wide-range adjustable mobile vacuum mass spectrometry device comprises a differential vacuum chamber, an air extractor, a differential vacuum gauge PKR251, an air inlet vacuum gauge, a four-level rod mass spectrometer RGA, a CF100 gate valve I, a CF35 gate valve II, a VAT590 trimming valve, a KF40 angle valve and a vacuum pipeline, wherein the bottom of the differential vacuum chamber is connected with the air extractor through the CF100 gate valve I, and the gas sampling analysis of the main vacuum chamber is realized by designing the differential pipeline, the differential vacuum chamber and the air extractorThe upper limit of the use range of the four-level rod mass spectrometer is enlarged to 10 5 Pa (common four-level mass spectrometer is used in a range of 10 -2 ～10 -5 Pa), the whole process of effectively covering the accelerator vacuum operation by the measuring range of the mass spectrometer is realized, the pressure change in the differential vacuum chamber can be measured by the differential vacuum gauge, meanwhile, the internal pressure value can be fed back, the control of the opening and closing degree of the valve is realized by software judgment, and therefore, the automatic adjustment of the sampling proportion according to the pressure change in the differential vacuum chamber is realized, and the analysis precision is improved. The method is free from the limitation of fixed conductance to measurement precision, two interface flanges are arranged on the side face of the differential vacuum chamber, one interface flange is respectively connected with a differential vacuum gauge PKR251 and a four-level rod mass spectrometer RGA through a tee joint, the other interface flange is respectively connected with two differential branches through a tee joint, the two differential branches are connected through a tee joint and a four-way joint, the vacuum pipeline comprises a CF40 corrugated pipe I and a CF16 corrugated pipe II, the measurement equipment can be made into a movable measurement station by utilizing stainless steel aluminum profiles, the interface flanges do not need to be fixedly connected on an accelerator, and the interface positions can be adjusted according to different measurement requirements. The application environment is more flexible, and the measuring equipment has more judgment basis in the field of cyclotrons compared with the traditional helium mass spectrometer leak detectors. Firstly, the type of the internal leakage and the external leakage can be clearly judged; secondly, in the high-power experiment process of the accelerator, judging the type of the gas outlet through mass spectrum detection; finally, whether the wall treatment effect before the cavity combination meets the requirement can be quantified, and more judgment basis is provided for the wall condition. The application field is wider;
the branch where the CF35 gate valve II is located is connected through a CF40 corrugated pipe I;
the branch where the VAT590 micro-tuning valve is located is connected through a CF16 corrugated pipe II, and the four-way valve is also connected with an air inlet vacuum gauge.
As a technical optimization scheme of the invention, the inner diameter of the first CF40 corrugated pipe is phi 35mm, and the inner diameter of the second CF16 corrugated pipe is phi 16mm.
As a technical optimization scheme of the invention, the air inlet vacuum gauge is connected with the KF40 angle valve through a four-way joint, and the air inlet vacuum gauge is arranged between the KF40 angle valve and the CF35 gate valve II.
As a technical optimization scheme of the invention, the differential vacuum chamber, the CF35 gate valve II, the air inlet vacuum gauge and the KF40 angle valve are mutually communicated.
As a technical optimization scheme of the invention, the CF35 gate valve is connected with a VAT590 fine tuning valve through a four-way joint.
The working method of the measuring equipment specifically comprises the following steps:
step one: before the measuring equipment is communicated with the main vacuum chamber, the air extractor group of the equipment is required to operate, so that the inside of the internal differential vacuum chamber reaches the limit vacuum (-10) -5 Pa), at this time, the valves on the two differential branches are in a closed state;
step two: the measuring equipment is communicated with the main vacuum chamber, the vacuum at the joint of the air inlet vacuum gauge and the main vacuum chamber is read, and the opening and closing of the valve are realized through software judgment, so that the working range of the valve is generally as follows:
a) In the case where the main vacuum is at a low vacuum or even atmospheric pressure (10 5 ～10 -1 Pa), the opening and closing degree of the VAT590 trim valve can be controlled by software, and the dynamic maintenance of the vacuum degree in the differential vacuum chamber at 10 can be realized -2 ～10 -3 Pa. The mass spectrometer is guaranteed to work normally, and meanwhile, the mass spectrometer is always in a working interval with highest analysis precision.
b) In the case of a main vacuum in medium vacuum or even high vacuum (10 -2 ～10 -5 Pa), at this time, even if the fine tuning valve is completely opened, the precision cannot be ensured, and the CF35 gate valve needs to be controlled to be opened by software so as to improve the system conductance and obtain a higher sampling rate.
The analysis process of the mass spectrometer can be continuously monitored. The control of the valve is always in the dynamic regulation of software, and the judgment of the software is obtained by double feedback of the air inlet vacuum gauge and the differential vacuum gauge.
The beneficial effects of the invention are as follows: the equipment can realize a wide range, b movable type, c automatic adjustment of sampling rate and d gas component analysis diversity, and can effectively analyze residual gas components in internal vacuum to help analyze main sources of the gas components, so that targeted measures are taken to improve the vacuum degree; the equipment has good social benefit and is suitable for popularization and use.
The preferred embodiments of the invention disclosed above are intended only to assist in the explanation of the invention. The preferred embodiments are not exhaustive or to limit the invention to the precise form disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and the practical application, to thereby enable others skilled in the art to best understand and utilize the invention. The invention is limited only by the claims and the full scope and equivalents thereof.
Claims (1)
1. A movable vacuum mass spectrum measuring equipment with adjustable wide range is characterized in that: the device comprises a differential vacuum chamber, an air extractor group, a differential vacuum gauge, an air inlet vacuum gauge, a four-level rod mass spectrometer, a first gate valve, a second gate valve, a fine tuning valve, an angle valve and a vacuum pipeline, wherein the bottom of the differential vacuum chamber is connected with the air extractor group through the first gate valve, two interface flanges are arranged on the side face of the differential vacuum chamber, one interface flange is respectively connected with the differential vacuum gauge and the four-level rod mass spectrometer through a tee joint, the other interface flange is respectively connected with two differential branches through a tee joint, the two differential branches are connected through a tee joint and a four-way joint, and the vacuum pipeline comprises a corrugated pipe I and a corrugated pipe II; the inner diameter of the first corrugated pipe is phi 35mm, and the inner diameter of the second corrugated pipe is phi 16mm;
the branch where the second gate valve is located is connected through a first corrugated pipe;
the branch circuit where the fine tuning valve is located is connected through a second corrugated pipe, and the four-way valve is also connected with an air inlet vacuum gauge;
the air inlet vacuum gauge is connected with an angle valve through a four-way joint, and is arranged between the angle valve and a second gate valve; the differential vacuum chamber, the second gate valve, the air inlet vacuum gauge and the inside of the angle valve are communicated with each other; the second gate valve is connected with a fine tuning valve through a four-way joint;
the working method comprises the following steps:
step one: the air extractor set of the wide-range adjustable mobile vacuum mass spectrum measuring equipment is operated to lead the inside of the internal differential vacuum chamber to reach 10 -5 The valve on the differential branch is in a closed state under the ultimate vacuum of Pa;
step two: the large-range adjustable movable vacuum mass spectrum measuring equipment is communicated with the main vacuum chamber, the vacuum at the joint of the air inlet vacuum gauge and the main vacuum is read, and the opening and closing of the valve are realized through software judgment;
the working range of the valve is as follows:
a) At a main vacuum of 10 5 ～10 -1 Under the condition of Pa, the opening and closing degree of the micro-adjustment valve is controlled by software to maintain the vacuum degree in the differential vacuum chamber at 10 -2 ～10 -3 Pa；
b) At a main vacuum of 10 -2 ～10 -5 Under the condition of Pa, the fine tuning valve and the second gate valve are controlled to be opened through software.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811505426.7A CN109390204B (en) | 2018-12-10 | 2018-12-10 | Wide-range adjustable movable vacuum mass spectrum measuring equipment |
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| CN201811505426.7A CN109390204B (en) | 2018-12-10 | 2018-12-10 | Wide-range adjustable movable vacuum mass spectrum measuring equipment |
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| CN109390204B true CN109390204B (en) | 2024-03-12 |
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| CN113301704B (en) * | 2021-05-17 | 2023-08-22 | 中国科学院近代物理研究所 | Device and method for inhibiting inflation air flow effect of differential system |
| CN113740552B (en) * | 2021-09-03 | 2023-08-22 | 中国工程物理研究院材料研究所 | Sample injection system with gas distribution function |
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