CN113301704B - Device and method for inhibiting inflation air flow effect of differential system - Google Patents
Device and method for inhibiting inflation air flow effect of differential system Download PDFInfo
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- CN113301704B CN113301704B CN202110533565.6A CN202110533565A CN113301704B CN 113301704 B CN113301704 B CN 113301704B CN 202110533565 A CN202110533565 A CN 202110533565A CN 113301704 B CN113301704 B CN 113301704B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/14—Vacuum chambers
- H05H7/18—Cavities; Resonators
- H05H7/20—Cavities; Resonators with superconductive walls
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/001—Arrangements for beam delivery or irradiation
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/22—Details of linear accelerators, e.g. drift tubes
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H9/00—Linear accelerators
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/001—Arrangements for beam delivery or irradiation
- H05H2007/002—Arrangements for beam delivery or irradiation for modifying beam trajectory, e.g. gantries
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H7/00—Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00
- H05H7/04—Magnet systems, e.g. undulators, wigglers; Energisation thereof
- H05H2007/046—Magnet systems, e.g. undulators, wigglers; Energisation thereof for beam deflection
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E30/00—Energy generation of nuclear origin
- Y02E30/10—Nuclear fusion reactors
Abstract
The application relates to a device for inhibiting the effect of inflation air flow of a differential system, which comprises a differential vacuum system, a deflection magnet and a vacuum chamber, wherein the output end of the differential vacuum system is connected with one end of the deflection magnet and one end of the vacuum chamber through a transmission pipeline; the other ends of the deflection magnet and the vacuum chamber are connected with the output end of the superconducting accelerator through a transmission pipeline; the superconducting accelerator is used for outputting charged particle beam; the extraction system is arranged above the deflection magnet and the vacuum chamber, and the input end of the extraction system is communicated with the upper middle parts of the deflection magnet and the vacuum chamber through a transmission pipeline. The application also relates to a method for inhibiting the effect of the inflation gas flow of the differential system, which comprises the following steps: setting the inclination angle of the spoiler to be an optimal inhibition angle; the beam output by the superconducting accelerator flows through the deflection magnet and the vacuum chamber to deflect and then enters the differential vacuum system, and the He gas output by the differential pipeline enters the collection vacuum chamber through the deflection magnet and the vacuum chamber; and after the He gas flow collected in the collection vacuum chamber is disturbed by the spoiler, the He gas flow is pumped by a tripolar sputtering ion pump.
Description
Technical Field
The application relates to the field of superconducting accelerators and nuclear physics, in particular to a device and a method for inhibiting the effect of inflation air flow of a differential system.
Background
A superconducting linac (coads) transmits the beam to a terminating gas filled recoil spectrometer (SHANS 2) for nuclear physics experiments. On the one hand, the SHANS2 was required to maintain a 80Pa He atmosphere at the end of the experiment, on the other hand, it was subjected to ultra-high vacuum (10 -7 Pa) is prohibited from entering a large amount of air load into the superconducting accelerator in order to avoid quench of the superconducting cavity. Therefore, a set of vacuum devices, differential vacuum systems, is required to accomplish the transition from low vacuum to ultra high vacuum. However, it is found by theory and experiment that in the differential vacuum system, the gas molecules near the axis of the low vacuum level can directly enter the front end of the direction of the inflating gas flow through the subsequent differential tube without collision, and the measure of increasing the differential level or pumping speed can not change the direction of the inflating gas flow to ultrahigh vacuum, and the experiment proves that the vacuum degree change caused by the air load is 10 -4 Pa magnitude, if the air load directly enters the superconducting cavity, the hidden danger of quench will be caused.
Disclosure of Invention
Aiming at the problems, the application aims to provide a device and a method for inhibiting the effect of the inflation air flow of a differential system, which can effectively solve the problems of connection and transition between an ultra-high vacuum particle accelerator and a physical terminal of a low vacuum inflation core.
In order to achieve the above purpose, the present application adopts the following technical scheme: a device for inhibiting the effect of the inflation air flow of a differential system comprises a differential vacuum system, a deflection magnet, a vacuum chamber, a superconducting accelerator and an extraction system; the output end of the differential vacuum system is connected with one end of the deflection magnet and one end of the vacuum chamber through a transmission pipeline; the other ends of the deflection magnet and the vacuum chamber are connected with the output end of the superconducting accelerator through a transmission pipeline; the superconducting accelerator is used for outputting charged particle beam; the extraction system is arranged above the deflection magnet and the vacuum chamber, and the input end of the extraction system is communicated with the upper middle parts of the deflection magnet and the vacuum chamber through a transmission pipeline.
Further, the extraction system comprises a collection vacuum chamber, a tripolar sputtering ion pump and a spoiler; the input end of the collecting vacuum chamber is communicated with the deflection magnet and the vacuum chamber, the output end of the collecting vacuum chamber is connected with the tripolar sputtering ion pump, and the spoiler is obliquely arranged in the collecting vacuum chamber.
Further, the extraction system further comprises a spoiler driving motor; the spoiler driving motor is arranged on the outer side of the top of the collecting vacuum chamber, an output shaft of the spoiler driving motor is connected with the spoiler, and the inclined angle of the spoiler is set by the spoiler driving motor.
Further, the differential vacuum system comprises a differential vacuum chamber, a differential pipeline, a plenum chamber and a molecular pump bank; the differential vacuum chambers are provided with a plurality of differential pipelines, two adjacent differential vacuum chambers are communicated through the differential pipelines, and the differential pipelines are arranged at the central positions of the differential vacuum chambers;
the output end of the plenum chamber is connected with the differential vacuum chamber at the bottom through the differential pipeline, and the differential vacuum chamber at the top is connected with one end of the deflection magnet and one end of the vacuum chamber through the differential pipeline and the transmission pipeline in sequence; each differential vacuum chamber is connected with one molecular pump unit.
Further, the pipe diameter of the differential pipeline is arranged from top to bottom and from large to small.
Further, the method also comprises a monitoring vacuum gauge and a measuring vacuum gauge; the monitoring vacuum gauge is arranged on a transmission pipeline between the superconducting accelerator and the deflection magnet as well as between the vacuum chamber, and the measuring vacuum gauge is arranged at the end part of the collecting vacuum chamber in the air flow direction and used for detecting the vacuum degree value.
Further, the system also comprises a computer control system; the monitoring vacuum gauge, the measuring vacuum gauge and the spoiler driving motor are electrically connected with the computer control system; the monitoring vacuum gauge and the measuring vacuum gauge transmit the detected vacuum degree value into the computer control system, and the computer control system adjusts the action of the spoiler driving motor according to the received vacuum degree value, so that the setting of the inclination angle of the spoiler is realized.
Further, the inclination angle of the spoiler at the minimum vacuum value is the optimal suppression angle.
A method of suppressing the effects of differential system inflation gas flow, the method being implemented on the basis of the apparatus described above, comprising:
step 1, setting the inclination angle of a spoiler, so that the inclination angle of the spoiler is an optimal inhibition angle;
step 2, the beam output by the superconducting accelerator flows through a deflection magnet and a vacuum chamber to deflect and then enters a differential vacuum system; he gas output by a differential pipeline positioned at the central position in the differential vacuum system sequentially enters a collecting vacuum chamber along a linear direction through a deflection magnet, a vacuum chamber and a transmission pipeline;
and step 3, after the He gas flow collected in the collection vacuum chamber is disturbed by the spoiler, pumping by a tripolar sputtering ion pump.
Further, in the step 1, the setting method of the optimal suppression angle includes the following steps:
step 1.1, reading a reading of a monitoring vacuum gauge, and presetting an initial forward stepping rotation angle of a spoiler driving motor;
step 1.2, after the spoiler driving motor rotates, reading the reading of the monitoring vacuum gauge at the moment after the reading of the monitoring vacuum gauge and the reading of the measuring vacuum gauge are stable;
step 1.3, the reading of the monitoring vacuum gauge in the step 1.2 is differenced with the reading of the monitoring vacuum gauge before the rotation of the spoiler driving motor, and the steering of the spoiler driving motor is determined according to the difference;
if the difference is a positive value, the spoiler driving motor reverses the rotation direction; if the difference is negative, the spoiler driving motor rotates in the rotating direction of the previous step;
step 1.4, when the rotation direction is reversed for more than two times continuously, the vacuum degree value is minimum, and the spoiler angle at the moment is the optimal inhibition angle.
Due to the adoption of the technical scheme, the application has the following advantages:
the application can effectively solve the problem of vacuum span between the physical experiment terminal and the accelerator during inflation and can solve the air-borne problem caused by the inflation air flow effect of the differential system.
Drawings
FIG. 1 is a schematic view of the overall structure of the present application;
FIG. 2 is a schematic diagram of an optimization method for suppressing the effect of inflation gas flow according to the present application;
reference numerals: 1-deflection magnet, vacuum chamber, 2-superconducting accelerator, 3-collection vacuum chamber, 4-tripolar sputter ion pump, 5-spoiler, 6-spoiler driving motor, 7-differential vacuum chamber, 8-differential pipeline, 9-plenum chamber, 10-molecular pump unit, 11-monitoring vacuum gauge, 12-measurement vacuum gauge, 13-computer control system.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present application. It will be apparent that the described embodiments are some, but not all, embodiments of the application. All other embodiments, which are obtained by a person skilled in the art based on the described embodiments of the application, fall within the scope of protection of the application.
In the description of the present application, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of description and simplification of the description, and do not indicate or imply that the apparatus or element in question must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present application.
The application comprises a differential vacuum system structure, and an inflation air flow effect suppression device and method. The application adopts the arrangement of the air flow disturbance plate and the sputtering ion pump in the direction of the air flow of the air inflation, and combines a differential vacuum system to realize the vacuum transition with the span of 8 orders of magnitude; the problems of connection and transition between the ultra-high vacuum particle accelerator and the physical terminal of the low vacuum gas filled core are effectively solved.
Example 1
In this embodiment, a device for suppressing the effect of the inflation gas flow of a differential system is provided, which is used for a differential vacuum system for transition from low vacuum to ultra-high vacuum, and the effect of the inflation gas flow is suppressed. As shown in fig. 1, the apparatus comprises a differential vacuum system, a deflection magnet and vacuum chamber 1, a superconducting accelerator 2, and an extraction system. The output end of the differential vacuum system is connected with one end of the deflection magnet and one end of the vacuum chamber 1 through a transmission pipeline; the other end of the deflection magnet and the vacuum chamber 1 is connected with the output end of the superconducting accelerator 2 through a transmission pipeline, and the superconducting accelerator 2 outputs charged particle beam. An extraction system is arranged above the deflection magnet and the vacuum chamber 1, and the input end of the extraction system is communicated with the upper middle part of the deflection magnet and the vacuum chamber 1 through a transmission pipeline.
In a preferred embodiment, the extraction system comprises a collection vacuum chamber 3, a three-pole sputter ion pump 4 and a spoiler 5. The input end of the collecting vacuum chamber 3 is communicated with the deflection magnet and the upper middle part of the vacuum chamber 1 through a transmission pipeline, the output end of the collecting vacuum chamber 3 is connected with the tripolar sputter ion pump 4, and the spoiler 5 is obliquely arranged in the collecting vacuum chamber 3. Preferably, the collecting vacuum chamber 3 is arranged beside the deflection magnet and the diode magnet of the vacuum chamber 1 and is positioned in the same straight line direction with the inflating air flow.
Wherein the extraction system further comprises a spoiler drive motor 6. The spoiler driving motor 6 is arranged on the outer side of the top of the collecting vacuum chamber 3, an output shaft of the spoiler driving motor is connected with the spoiler 5, and the inclined angle of the spoiler 5 is set by the spoiler driving motor 6.
In the above embodiment, the pumping speed of the three-pole sputter ion pump 4 is preferably set to 400L/s.
When the device is used, the collection vacuum chamber 3 is used for collecting gas flow molecules, and the collected gas flow is pumped out by the tripolar sputter ion pump 4 after being disturbed by the spoiler 5.
In a preferred embodiment, the differential vacuum system comprises a differential vacuum chamber 7, a differential conduit 8, a plenum 9, and a molecular pump bank 10; the differential vacuum chambers 7 are provided with a plurality of differential vacuum chambers, two adjacent differential vacuum chambers 7 are communicated through a differential pipeline 8, and the differential pipeline 8 is arranged at the center position of the differential vacuum chambers 7. In the present embodiment, the differential vacuum chambers 7 are preferably provided in five.
The output end of the plenum chamber 9 is connected with a differential vacuum chamber 7 (i.e. low vacuum level) at the bottom through a differential pipeline 8, and the differential vacuum chamber (i.e. high vacuum level) at the top is connected with one end of the deflection magnet and the vacuum chamber 1 through the differential pipeline 8 and a transmission pipeline in sequence. Each differential vacuum chamber 7 is connected to a molecular pump assembly 10.
When in use, he gas is continuously filled into the differential vacuum chamber 7 from the plenum chamber 9 and kept at 80Pa, and the vacuum degree reaches the limit after the differential pipeline 8, the differential vacuum chamber 7 and the molecular pump unit 10 act; the gas at the axle center of the differential pipeline 8 is directly filled into the collecting vacuum chamber 3.
In the above embodiment, the differential pipelines 8 are circular structure pipelines, and all the differential pipelines 8 have different pipe diameters, the pipe diameters are set from top to bottom, the beam current output by the superconducting accelerator 2 sequentially passes through the differential pipelines 8 with the pipe diameters from large to small, and the inflation air current output by the inflation chamber 9 sequentially passes through the differential pipelines 8 with the pipe diameters from small to large, and the inflation air current effect is formed. Preferably, when 5 differential vacuum chambers 7 are provided, the sizes of the 6 differential pipelines 8 are as follows from top to bottom: phi 24mm by 200mm, phi 21mm by 200mm, phi 17mm by 200mm, phi 14mm by 200mm, phi 12mm by 200mm, phi 10mm by 200.
In the above embodiment, the molecular pump units 10 are all 700L/s turbo molecular pump units; preferably, the rotation speed of one molecular pump at the low vacuum level is set to 60%.
In a preferred embodiment, the means for suppressing the effects of differential system inflation gas flow further comprises a monitoring vacuum gauge 11 and a measuring vacuum gauge 12. The monitoring vacuum gauge 11 is provided on the transmission line between the superconducting accelerator 2 and the deflection magnet and vacuum chamber 1, and the measuring vacuum gauge 12 is provided at the end of the collecting vacuum chamber 3 in the air flow direction, all for detecting the vacuum degree value.
In a preferred embodiment, the means for suppressing the effects of differential system inflation gas flow further comprises a computer control system 13. The monitoring vacuum gauge 11, the measuring vacuum gauge 12 and the spoiler driving motor 6 are all electrically connected with the computer control system 13; the monitoring vacuum gauge 11 and the measuring vacuum gauge 12 transmit the detected vacuum degree value into the computer control system 13, and the computer control system 13 adjusts the action of the spoiler driving motor 6 according to the received vacuum degree value, so as to set the inclination angle of the spoiler 5. Preferably, the inclination angle of the spoiler 5 at which the vacuum level value is minimized is the optimal suppression angle.
In the above embodiment, the measuring vacuum gauge 12 and the monitoring vacuum gauge 11 are all full-range vacuum gauges, and the measuring range is 1atm to 10 -7 Pa。
Example 2
In this embodiment, a method for suppressing the effect of the inflation gas flow of the differential system is provided, which is implemented based on the apparatus in embodiment 1, and includes the following steps:
step 1, setting the inclination angle of the spoiler 5, so that the inclination angle of the spoiler 5 is an optimal inhibition angle;
the method comprises the following steps: the computer control system 13 adjusts the action of the spoiler driving motor 6 according to the vacuum degree values transmitted by the monitoring vacuum gauge 11 and the measuring vacuum gauge 12, so as to achieve the optimal inhibition angle of the spoiler 5. The adjusting method comprises the following steps:
step 1.1, reading a reading of a monitoring vacuum gauge 11, and presetting an initial forward (defining a clockwise direction along the direction of the inflation air flow as a forward direction) stepping rotation angle of a spoiler driving motor 6;
in the present embodiment, the step rotation angle θ=1°.
Step 1.2, after the spoiler driving motor 6 rotates, reading the reading of the monitoring vacuum gauge 11 at the moment after the reading of the monitoring vacuum gauge 11 and the reading of the measuring vacuum gauge 12 are stable;
step 1.3, the reading of the monitoring vacuum gauge 11 in the step 1.2 is differenced with the reading of the monitoring vacuum gauge 11 before the rotation of the spoiler driving motor 6, and the steering of the spoiler driving motor 6 is determined according to the difference;
if the difference is positive, the spoiler driving motor 6 reverses the rotation direction; if the difference is negative, the spoiler driving motor 6 rotates in the direction of the previous rotation;
wherein, the vacuum degree value of the two times is a value before and after rotating by 1 DEG;
step 1.4, when the rotation direction is reversed for more than two times continuously, the vacuum degree value is minimum, and the spoiler angle at the moment is the optimal inhibition angle; wherein, the optimal suppression angle is in the range of 0 DEG to 45 DEG of the direction perpendicular to the paper surface of the spoiler.
Step 2, the beam output by the superconducting accelerator 2 flows through a deflection magnet and the vacuum chamber 1 to deflect and then enters a differential vacuum system; in the differential vacuum system, he gas output by a differential pipeline 8 positioned at the central position sequentially enters a collection vacuum chamber 3 along a linear direction through a deflection magnet, a vacuum chamber 1 and a transmission pipeline;
the deflection magnet and the vacuum chamber 1 only deflect the beam output by the superconducting accelerator 2, and no acting force is generated on He gas flow molecules.
And 3, after the He gas flow collected in the collection vacuum chamber 3 is disturbed by the spoiler 5, pumping by the tripolar sputtering ion pump 4.
In the step 2, from the 2 nd stage (i.e. from the lower stage to the upper stage) differential vacuum chamber 7 of the differential vacuum system, gas molecules near the axis of the differential pipeline 8 directly enter the ultrahigh vacuum without any collision, thereby forming an inflation gas flow effect. In the effect of the inflation gas flow, the gas molecules scatter according to the cosine law if they hit the wall of the pipe or other obstacle in front of the movement.
The foregoing embodiments are only illustrative of the present application, and the structure, dimensions, placement and shape of the components may vary, and all modifications and equivalents of the individual components based on the teachings of the present application should not be excluded from the scope of protection of the present application.
It will be appreciated by those skilled in the art that embodiments of the present application may be provided as a method, system, or computer program product. Accordingly, the present application may take the form of an entirely hardware embodiment, an entirely software embodiment or an embodiment combining software and hardware aspects. Furthermore, the present application may take the form of a computer program product embodied on one or more computer-usable storage media (including, but not limited to, disk storage, CD-ROM, optical storage, and the like) having computer-usable program code embodied therein.
The present application is described with reference to flowchart illustrations and/or block diagrams of methods, apparatus (systems) and computer program products according to embodiments of the application. It will be understood that each flow and/or block of the flowchart illustrations and/or block diagrams, and combinations of flows and/or blocks in the flowchart illustrations and/or block diagrams, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, embedded processor, or other programmable data processing apparatus to produce a machine, such that the instructions, which execute via the processor of the computer or other programmable data processing apparatus, create means for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be stored in a computer-readable memory that can direct a computer or other programmable data processing apparatus to function in a particular manner, such that the instructions stored in the computer-readable memory produce an article of manufacture including instruction means which implement the function specified in the flowchart flow or flows and/or block diagram block or blocks.
These computer program instructions may also be loaded onto a computer or other programmable data processing apparatus to cause a series of operational steps to be performed on the computer or other programmable apparatus to produce a computer implemented process such that the instructions which execute on the computer or other programmable apparatus provide steps for implementing the functions specified in the flowchart flow or flows and/or block diagram block or blocks.
Claims (8)
1. The device for inhibiting the effect of the inflating airflow of the differential system is characterized by comprising a differential vacuum system, a deflection magnet, a vacuum chamber, a superconducting accelerator and an extraction system;
the output end of the differential vacuum system is connected with one end of the deflection magnet and one end of the vacuum chamber through a transmission pipeline;
the other ends of the deflection magnet and the vacuum chamber are connected with the output end of the superconducting accelerator through a transmission pipeline;
the superconducting accelerator is used for outputting charged particle beam;
the extraction system is arranged above the deflection magnet and the vacuum chamber, and the input end of the extraction system is communicated with the upper parts of the middle parts of the deflection magnet and the vacuum chamber through a transmission pipeline;
the extraction system comprises a collection vacuum chamber, a tripolar sputtering ion pump and a spoiler; the input end of the collecting vacuum chamber is communicated with the deflection magnet and the vacuum chamber, the output end of the collecting vacuum chamber is connected with the tripolar sputtering ion pump, and the spoiler is obliquely arranged in the collecting vacuum chamber;
the extraction system further comprises a spoiler driving motor; the spoiler driving motor is arranged on the outer side of the top of the collecting vacuum chamber, an output shaft of the spoiler driving motor is connected with the spoiler, and the inclined angle of the spoiler is set by the spoiler driving motor.
2. The apparatus of claim 1, wherein the differential vacuum system comprises a differential vacuum chamber, a differential conduit, a plenum, and a molecular pump train; the differential vacuum chambers are provided with a plurality of differential pipelines, two adjacent differential vacuum chambers are communicated through the differential pipelines, and the differential pipelines are arranged at the central positions of the differential vacuum chambers;
the output end of the plenum chamber is connected with the differential vacuum chamber at the bottom through the differential pipeline, and the differential vacuum chamber at the top is connected with one end of the deflection magnet and one end of the vacuum chamber through the differential pipeline and the transmission pipeline in sequence; each differential vacuum chamber is connected with one molecular pump unit.
3. The device according to claim 2, wherein the diameter of the differential pipeline is set from top to bottom and from large to small.
4. The apparatus of claim 1, further comprising a monitoring vacuum gauge and a measuring vacuum gauge; the monitoring vacuum gauge is arranged on a transmission pipeline between the superconducting accelerator and the deflection magnet as well as between the vacuum chamber, and the measuring vacuum gauge is arranged at the end part of the collecting vacuum chamber in the air flow direction and used for detecting the vacuum degree value.
5. The apparatus of claim 4, further comprising a computer control system; the monitoring vacuum gauge, the measuring vacuum gauge and the spoiler driving motor are electrically connected with the computer control system; the monitoring vacuum gauge and the measuring vacuum gauge transmit the detected vacuum degree value into the computer control system, and the computer control system adjusts the action of the spoiler driving motor according to the received vacuum degree value, so that the setting of the inclination angle of the spoiler is realized.
6. The apparatus of claim 5, wherein the spoiler has an inclination angle that is an optimal restraining angle when the vacuum level is a minimum.
7. A method of suppressing the effects of differential system inflation gas flow, the method being implemented on the basis of the apparatus of any one of claims 1 to 6, comprising:
step 1, setting the inclination angle of a spoiler, so that the inclination angle of the spoiler is an optimal inhibition angle;
step 2, the beam output by the superconducting accelerator flows through a deflection magnet and a vacuum chamber to deflect and then enters a differential vacuum system; he gas output by a differential pipeline positioned at the central position in the differential vacuum system sequentially enters a collecting vacuum chamber along a linear direction through a deflection magnet, a vacuum chamber and a transmission pipeline;
and step 3, after the He gas flow collected in the collection vacuum chamber is disturbed by the spoiler, pumping by a tripolar sputtering ion pump.
8. The method of claim 7, wherein the method of setting the optimal suppression angle in step 1 comprises the steps of:
step 1.1, reading a reading of a monitoring vacuum gauge, and presetting an initial forward stepping rotation angle of a spoiler driving motor;
step 1.2, after the spoiler driving motor rotates, reading the reading of the monitoring vacuum gauge at the moment after the reading of the monitoring vacuum gauge and the reading of the measuring vacuum gauge are stable;
step 1.3, the reading of the monitoring vacuum gauge in the step 1.2 is differenced with the reading of the monitoring vacuum gauge before the rotation of the spoiler driving motor, and the steering of the spoiler driving motor is determined according to the difference;
if the difference is a positive value, the spoiler driving motor reverses the rotation direction; if the difference is negative, the spoiler driving motor rotates in the rotating direction of the previous step;
step 1.4, when the rotation direction is reversed for more than two times continuously, the vacuum degree value is minimum, and the spoiler angle at the moment is the optimal inhibition angle.
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