CN109390204A - A kind of wide range adjustable mobile vacuum mass-spectrometer measurement equipment - Google Patents
A kind of wide range adjustable mobile vacuum mass-spectrometer measurement equipment Download PDFInfo
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- CN109390204A CN109390204A CN201811505426.7A CN201811505426A CN109390204A CN 109390204 A CN109390204 A CN 109390204A CN 201811505426 A CN201811505426 A CN 201811505426A CN 109390204 A CN109390204 A CN 109390204A
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- 238000005259 measurement Methods 0.000 title claims abstract description 17
- 238000005086 pumping Methods 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 9
- 241000233855 Orchidaceae Species 0.000 claims 1
- 238000004458 analytical method Methods 0.000 abstract description 10
- 239000004615 ingredient Substances 0.000 abstract description 4
- 230000009286 beneficial effect Effects 0.000 abstract description 3
- 230000008901 benefit Effects 0.000 abstract description 3
- 239000000203 mixture Substances 0.000 abstract description 3
- 239000007789 gas Substances 0.000 description 14
- 230000006872 improvement Effects 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000005457 optimization Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 3
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 238000001819 mass spectrum Methods 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 238000005070 sampling Methods 0.000 description 2
- 230000001225 therapeutic effect Effects 0.000 description 2
- 238000001514 detection method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 230000008595 infiltration Effects 0.000 description 1
- 238000001764 infiltration Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- -1 vacuum leak Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/24—Vacuum systems, e.g. maintaining desired pressures
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
- H01J49/04—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components
- H01J49/0422—Arrangements for introducing or extracting samples to be analysed, e.g. vacuum locks; Arrangements for external adjustment of electron- or ion-optical components for gaseous samples
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
Abstract
The invention discloses a kind of wide range adjustable mobile vacuum mass-spectrometer measurement equipment, including difference vacuum chamber, pumping unit, difference vacuum gauge, inlet vacuum rule, level four bars mass spectrograph, gate valve one, gate valve two, reset valve, angle valve and vacuum line, difference vacuum chamber bottom is connected by gate valve one with pumping unit, there are two interface flange, one of them described interface flanges to be connect respectively with difference vacuum gauge and level four bars mass spectrograph by threeway for difference vacuum chamber side；The beneficial effects of the present invention are: a wide range may be implemented in the equipment, b is mobile, c automatically adjusts sample rate, d gas composition analysis diversity, the residual gas ingredient that the equipment can effectively analyze in interior vacuum helps to analyze the main source of gas componant, so that specific aim measure be taken to improve vacuum degree；The equipment has good social benefit, is suitble to promote the use of.
Description
Technical field
The present invention relates to a kind of measuring device, specially a kind of wide range adjustable mobile vacuum mass-spectrometer measurement equipment,
Belong to vacuum mass-spectrometer measurement equipment application technical field.
Background technique
In cyclotron, under the collective effect in electric field and magnetic field, plasma can occur orientation deflection and accelerate,
Treatment head is eventually transferred to by transit.The effect of high vacuum is that the mean free path of plasma can be improved, subtracts
Few plasma collides in deflection and accelerator with other particles in vacuum, deflects direction so as to cause deviateing.
In the accelerating cavity of existing cyclotron in vacuum, residual gas is usually had, residual gas ingredient mainly comes
The vacuum in accelerating cavity can be reduced from modes, residual gas such as the release of internal material surface gas, vacuum leak, gas infiltrations
Degree causes the track of plasma orientation deflection that error occurs, reduces the therapeutic quality of plasma.
Summary of the invention
The object of the invention is that in order to solve usually to have residual in the accelerating cavity of existing cyclotron in vacuum
Residual air body, residual gas can reduce the vacuum degree in accelerating cavity, cause the track of plasma orientation deflection that error occurs, reduce
The problem of therapeutic quality of plasma, and propose a kind of wide range adjustable mobile vacuum mass-spectrometer measurement equipment.
The purpose of the present invention can be achieved through the following technical solutions: a kind of wide range adjustable mobile vacuum mass spectrum survey
Measure equipment, including difference vacuum chamber, pumping unit, difference vacuum gauge PKR251, inlet vacuum rule, level four bars mass spectrograph RGA,
CF100 gate valve one, CF35 gate valve two, VAT590 reset valve, KF40 angle valve and vacuum line, difference vacuum chamber bottom
It is connected by CF100 gate valve one with pumping unit, it is true to master by poor designs branch pipeline, difference vacuum chamber and pumping unit
Empty room gas sampling analysis, realizes the use scope upper limit of level four bars mass spectrograph being expanded to 105Pa (common level four bars mass spectrum
The use scope of meter is 10-2~10-5Pa), realize that mass spectrograph range effectively covers accelerator vacuum operation overall process, pass through difference
Divide vacuum gauge that can measure difference internal vacuum chamber pressure change, while internal pressure value can be fed back, passes through software and judge to realize
Control to valve opening degree automatically adjusts oversampling ratio according to difference internal vacuum chamber pressure change to realize, improves and divide
Analyse precision.Limitation of the fixed conductance to measurement accuracy is got rid of, there are two interface flange, one of institutes for difference vacuum chamber side
It states interface flange to connect with difference vacuum gauge PKR251 and level four bars mass spectrograph RGA respectively by threeway, another described interface
Flange is connect with two difference branches respectively by threeway, and two difference branches are connected by a threeway with four-way,
The vacuum line includes CF40 bellows one and CF16 bellows two, which can be made into shifting using stainless steel aluminum profile
Dynamic formula measuring station, do not need it is fixed connect on accelerator, can according to measurement request difference, adjust interface position.Make using ring
Border is more flexible, which possesses more judgment basis in cyclotron field relative to traditional helium mass spectrometer leak detector.
First in leak type, the type that leaks outside in determining can be understood；Secondly in accelerator high power experimentation, pass through mass spectrum
Detection may determine that outlet type；Whether the wall treatment effect before can finally quantifying conjunction chamber meets the requirements, and provides wall condition
More judgment basis.Keep application field more extensive；
Wherein, two place branch of CF35 gate valve is connected by CF40 bellows one；
Branch is connected by CF16 bellows two where VAT590 reset valve, is also connected with inlet vacuum on the four-way
Rule.
Further technological improvement of the invention is: the internal diameter of the CF40 bellows one is φ 35mm, and the CF16
The internal diameter of bellows two is φ 16mm.
Further technological improvement of the invention is: the inlet vacuum rule are connected with KF40 angle valve by four-way, and
Inlet vacuum rule are arranged between KF40 angle valve and CF35 gate valve two.
Further technological improvement of the invention is: the difference vacuum chamber, CF35 gate valve two, inlet vacuum rule and
It is interconnected between KF40 angle valve inside.
Further technological improvement of the invention is: the CF35 gate valve two is connected with VAT590 by four-way and finely tunes
Valve.
Further technological improvement of the invention is: the control precision of the VAT590 reset valve is high, it can be achieved that 0-
The dynamic Significant Change of 100.000% opening degree, and transformation period is shorter.
Further technological improvement of the invention is: the inlet vacuum rule will be before and after vacuum line with difference vacuum gauge
Vacuum degree feedback, controls the folding of VAT590 reset valve and CF35 gate valve after judging by software, realize and guaranteeing level four bars
In the case that mass spectrograph works normally, sample rate is improved, and then realize the optimization of measuring accuracy.
The working method of the measuring device specifically includes the following steps:
Step 1: before measuring device is connected to main vacuum chamber, needing to run the pumping unit of equipment, and it is internal poor to make
Point internal vacuum chamber reaches capacity vacuum (~10-5Pa), at this time on two difference branches valve all in closed state；
Step 2: measuring device is connected to main vacuum chamber, and the reading of inlet vacuum rule and vacuum at main bonding in vacuum are led to
Software judgement is crossed, realizes the folding of valve, the working range of ordinary circumstance lower valve is as follows:
A) in the case where main vacuum is in low vacuum even atmospheric condition (105~10-1Pa), micro- by software control VAT590
It adjusts the opening degree of valve that vacuum degree dynamic in difference vacuum chamber may be implemented and maintains 10-2~10-3Pa.Not only guaranteeing mass spectrograph just
Often work, while it also being made to have been at the highest operation interval of analysis precision.
B) when main vacuum is in middle vacuum even high vacuum (10-2~10-5Pa), even if reset valve is complete at this time
Complete open not can guarantee precision yet, need to open by software control CF35 gate valve, to improve system conductance, obtain higher
Sample rate.
The analytic process of mass spectrograph can be monitored continuously.The control of valve is also constantly in the dynamic regulation of software, soft
The judgement of part is taken from the duplex feedback of inlet vacuum rule and difference vacuum gauge.
Compared with prior art, the beneficial effects of the present invention are: a wide range may be implemented in the equipment, relative to tradition four
Grade bar mass spectrograph (working range: 10-2~10-5Pa for), which can realize level four bars mass spectrograph 105~
10-5It is worked normally in the case of Pa, expands working range；B is mobile, which can be made into shifting using stainless steel aluminum profile
Dynamic formula measuring station, do not need it is fixed connect on accelerator, can according to measurement request difference, adjust interface position, using more
Flexibly；C automatically adjusts sample rate, can measure difference internal vacuum chamber pressure change by difference vacuum gauge, while can will be internal
Pressure values feedback realizes the control to valve opening degree by software judgement, to realize according to difference internal vacuum chamber pressure
Variation automatic adjustment oversampling ratio, improves analysis precision；D gas composition analysis diversity can analyze relative molecular mass number and exist
The partial pressure and content situation of the gaseous molecular of 1-100, it is more abundant that analysis result compares leak detector.The equipment can be effective
The residual gas ingredient that ground analyzes in interior vacuum helps to analyze the main source of gas componant, so that specific aim measure be taken to mention
Condition of high vacuum degree；The equipment has good social benefit, is suitble to promote the use of.
Detailed description of the invention
In order to facilitate the understanding of those skilled in the art, the present invention will be further described below with reference to the drawings.
Fig. 1 is overall structure connection schematic diagram of the present invention.
Specific embodiment
Technical solution of the present invention is clearly and completely described below in conjunction with embodiment, it is clear that described reality
Applying example is only a part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is general
Logical technical staff all other embodiment obtained without creative efforts belongs to what the present invention protected
Range.
Refering to Figure 1, a kind of wide range adjustable mobile vacuum mass-spectrometer measurement equipment, including difference vacuum chamber,
It is evacuated unit, difference vacuum gauge PKR251, inlet vacuum rule, level four bars mass spectrograph RGA, CF100 gate valve one, CF35 plate
Valve two, VAT590 reset valve, KF40 angle valve and vacuum line, difference vacuum chamber bottom is by CF100 gate valve one and takes out
Mechanism of qi group is connected, and is analyzed by poor designs branch pipeline, difference vacuum chamber and pumping unit main vacuum chamber's gas sampling, is realized
The use scope upper limit of level four bars mass spectrograph is expanded to 105(use scope of common level four bars mass spectrograph is 10 by Pa-2~
10-5Pa), realize that mass spectrograph range effectively covers accelerator vacuum operation overall process, it is true that difference can be measured by difference vacuum gauge
The variation of empty room internal pressure, while internal pressure value can be fed back, the control to valve opening degree is realized by software judgement, from
And realize and oversampling ratio is automatically adjusted according to difference internal vacuum chamber pressure change, improve analysis precision.Get rid of fixed conductance
Limitation to measurement accuracy, there are two interface flange, one of them described interface flanges to pass through three reduction of fractions to a common denominators for difference vacuum chamber side
It is not connect with difference vacuum gauge PKR251 and level four bars mass spectrograph RGA, another described interface flange is by threeway respectively with two
The connection of difference branch, two difference branches are connected by a threeway with four-way, and the vacuum line includes CF40
Bellows one and CF16 bellows two, the measuring device can be made into mobile measuring station using stainless steel aluminum profile, not need solid
Fixed pattern connects on accelerator, can adjust interface position according to measurement request difference.Keep application environment more flexible, which sets
It is standby to possess more judgment basis in cyclotron field relative to traditional helium mass spectrometer leak detector.It, can first in leak type
With the type that leaks outside in clear judgement；Secondly in accelerator high power experimentation, outlet class may determine that by Mass Spectrometer Method
Type；Whether the wall treatment effect before can finally quantifying conjunction chamber meets the requirements, and provides more judgment basis to wall condition.Make to apply
Field is more extensive；
Wherein, two place branch of CF35 gate valve is connected by CF40 bellows one；
Branch is connected by CF16 bellows two where VAT590 reset valve, is also connected with inlet vacuum on the four-way
Rule.
As a kind of technical optimization scheme of the invention, the internal diameter of the CF40 bellows one is φ 35mm, and described
The internal diameter of CF16 bellows two is φ 16mm.
As a kind of technical optimization scheme of the invention, the inlet vacuum rule are connected with KF40 angle valve by four-way,
And inlet vacuum rule are arranged between KF40 angle valve and CF35 gate valve two.
As a kind of technical optimization scheme of the invention, the difference vacuum chamber, CF35 gate valve two, inlet vacuum rule
It is interconnected between KF40 angle valve inside.
As a kind of technical optimization scheme of the invention, the CF35 gate valve two is connected with VAT590 by four-way and finely tunes
Valve.
The working method of the measuring device specifically includes the following steps:
Step 1: before measuring device is connected to main vacuum chamber, needing to run the pumping unit of equipment, and it is internal poor to make
Point internal vacuum chamber reaches capacity vacuum (~10-5Pa), at this time on two difference branches valve all in closed state；
Step 2: measuring device is connected to main vacuum chamber, and the reading of inlet vacuum rule and vacuum at main bonding in vacuum are led to
Software judgement is crossed, realizes the folding of valve, the working range of ordinary circumstance lower valve is as follows:
A) in the case where main vacuum is in low vacuum even atmospheric condition (105~10-1Pa), micro- by software control VAT590
It adjusts the opening degree of valve that vacuum degree dynamic in difference vacuum chamber may be implemented and maintains 10-2~10-3Pa.Not only guaranteeing mass spectrograph just
Often work, while it also being made to have been at the highest operation interval of analysis precision.
B) when main vacuum is in middle vacuum even high vacuum (10-2~10-5Pa), even if reset valve is complete at this time
Complete open not can guarantee precision yet, need to open by software control CF35 gate valve, to improve system conductance, obtain higher
Sample rate.
The analytic process of mass spectrograph can be monitored continuously.The control of valve is also constantly in the dynamic regulation of software, soft
The judgement of part is taken from the duplex feedback of inlet vacuum rule and difference vacuum gauge.
The beneficial effects of the present invention are: a wide range may be implemented in the equipment, b is mobile, and c automatically adjusts sample rate, d gas
Body composition analysis diversity, the residual gas ingredient which can effectively analyze in interior vacuum help to analyze gas componant
Main source, thus take specific aim measure improve vacuum degree；The equipment has good social benefit, and suitable popularization makes
With.
Present invention disclosed above preferred embodiment is only intended to help to illustrate the present invention.There is no detailed for preferred embodiment
All details are described, are not limited the invention to the specific embodiments described.Obviously, according to the content of this specification,
It can make many modifications and variations.These embodiments are chosen and specifically described to this specification, is in order to better explain the present invention
Principle and practical application, so that skilled artisan be enable to better understand and utilize the present invention.The present invention is only
It is limited by claims and its full scope and equivalent.
Claims (5)
1. a kind of wide range adjustable mobile vacuum mass-spectrometer measurement equipment, it is characterised in that: including difference vacuum chamber, air exhauster
Group, difference vacuum gauge, inlet vacuum rule, level four bars mass spectrograph, gate valve one, gate valve two, reset valve, angle valve and vacuum tube
Road, difference vacuum chamber bottom are connected by gate valve one with pumping unit, and there are two interface methods for difference vacuum chamber side
Orchid, one of them described interface flange are connect respectively by threeway with difference vacuum gauge and level four bars mass spectrograph, described in another
Interface flange is connect with two difference branches respectively by threeway, and two difference branches are connected by a threeway with four-way
It connects, the vacuum line includes bellows one and bellows two；
Wherein, two place branch of gate valve is connected by bellows one；
Branch is connected by bellows two where reset valve, and inlet vacuum rule are also connected on the four-way.
2. a kind of wide range adjustable mobile vacuum mass-spectrometer measurement equipment according to claim 1, which is characterized in that institute
The internal diameter for stating bellows one is φ 35mm, and the internal diameter of the bellows two is φ 16mm.
3. a kind of wide range adjustable mobile vacuum mass-spectrometer measurement equipment according to claim 1, which is characterized in that institute
It states inlet vacuum rule and angle valve is connected with by four-way, and inlet vacuum rule are arranged between angle valve and gate valve two.
4. a kind of wide range adjustable mobile vacuum mass-spectrometer measurement equipment according to claim 1, which is characterized in that institute
It states and is interconnected between difference vacuum chamber, gate valve two, inlet vacuum rule and angle valve inside.
5. a kind of wide range adjustable mobile vacuum mass-spectrometer measurement equipment according to claim 1, which is characterized in that institute
It states gate valve two and reset valve is connected with by four-way.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811505426.7A CN109390204B (en) | 2018-12-10 | 2018-12-10 | Wide-range adjustable movable vacuum mass spectrum measuring equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811505426.7A CN109390204B (en) | 2018-12-10 | 2018-12-10 | Wide-range adjustable movable vacuum mass spectrum measuring equipment |
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| Publication Number | Publication Date |
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| CN109390204A true CN109390204A (en) | 2019-02-26 |
| CN109390204B CN109390204B (en) | 2024-03-12 |
Family
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| CN201811505426.7A Active CN109390204B (en) | 2018-12-10 | 2018-12-10 | Wide-range adjustable movable vacuum mass spectrum measuring equipment |
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Cited By (2)
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| CN113301704A (en) * | 2021-05-17 | 2021-08-24 | 中国科学院近代物理研究所 | Device and method for inhibiting air flow effect of inflation of differential system |
| CN113740552A (en) * | 2021-09-03 | 2021-12-03 | 中国工程物理研究院材料研究所 | Sampling system with gas distribution function |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113301704A (en) * | 2021-05-17 | 2021-08-24 | 中国科学院近代物理研究所 | Device and method for inhibiting air flow effect of inflation of differential system |
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| CN109390204B (en) | 2024-03-12 |
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