CN102346088A - Leakage detection method for helium mass spectrum with low helium filling concentration - Google Patents

Leakage detection method for helium mass spectrum with low helium filling concentration Download PDF

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Publication number
CN102346088A
CN102346088A CN2011100263357A CN201110026335A CN102346088A CN 102346088 A CN102346088 A CN 102346088A CN 2011100263357 A CN2011100263357 A CN 2011100263357A CN 201110026335 A CN201110026335 A CN 201110026335A CN 102346088 A CN102346088 A CN 102346088A
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China
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helium
isolation valve
concentration
pure
container
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CN2011100263357A
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CN102346088B (en
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胡茂中
廖旭东
白国云
陈涛
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63653 Troops of PLA
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63653 Troops of PLA
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Abstract

The invention provides a leakage detection method for a helium mass spectrum with low helium filling concentration. A device consists of a container, a channel-type drainage hole, a pure helium source and a leakage detector, wherein isolating valves are used for controlling the use of helium, pure helium and a vacuum pump respectively. The leakage detection method comprises the following steps of: 1, closing the isolating valves for the pure helium and the vacuum pump and opening the isolating valve for the detector to measure a system background of the detector; 2, closing the isolating valve for the helium and opening the isolating valve for the pure helium to measure the leakage rate of the pure helium on the inlet of the drainage hole; 3, closing the isolating valve for the pure helium, opening the isolating valve for the vacuum pump, exhausting the helium at the inlet end of the drainage hole and opening the isolating valve for the helium to measure the system background; and 4, injecting the pure helium step by step through the gas inlet of the container to make the theoretical concentrations of the helium in the container be 0.05%, 0.1%, 0.3% and 0.5%, and measuring the leakage rate of the helium passing through the drainage hole according to every concentration. In the method, the helium is configured gas and the pure helium is gas with the helium concentration of 100 percent; and the leakage detection sensitivity is 1.5*10<-8>Pa.m<3> per second according to the helium concentration of 0.1%.

Description

The low helium concentration helium mass spectrum leak detection method of filling
Technical field
The present invention relates to the vacuum helium mass spectrum Leak Detection field in the Non-Destructive Testing, be particularly useful for the detection that the special seal piece installing should not vacuumize or fill the sealing property of high pressure.
Background technology
At present; In the application of helium mass spectrometer leak detecting technology; Fill helium concentration gets more than 20% more; But some packoff inside does not allow to charge into the probe gas that can't discharge in a large number; To the requirement of this type special detection; Provided by the invention hanging down filled helium concentration helium mass spectrum leak detection method, and be simple and practical, has broad application prospects.
Summary of the invention
The objective of the invention is to: the leak hunting method that provides, utilize 1 ‰ helium concentration can make its leak detection sensitivity be about 1.5 * 10 -8Pam 3/ s; The signal of background is low during leak detection, and noise fluctuations is little, and what help improving system can the leak detection rate.
The present invention is achieved in that the low helium concentration helium mass spectrum leak detection method of filling, and device is made up of container, channel-style small opening, pure helium gas source, leak locator; Wherein the helium 1 of container 3 is by isolation valve 4 regulating and controlling; Pure helium 7 is by isolation valve 6 regulating and controlling; Vacuum pump 2 is by isolation valve 5 regulating and controlling;
1. step is closed isolation valve 5,6 and is in cut-off state, opens isolation valve 9 and measures its system's background by detector 10;
2. step closes isolation valve 4, opens isolation valve 6, measures small opening 8 porch, the following leak rate of pure helium 7;
3. step is closed isolation valve 6, is opened isolation valve 5, extracts the helium 1 of small opening 8 inlet ends, opens isolation valve 4 again and measures its system's background;
4. step injects pure helium 7 through container 3 air intake openings step by step, makes helium 1 theoretical concentration in the container 3 be respectively 0.5 ‰, 1 ‰, 3 ‰, 5 ‰, and corresponding each measurement of concetration helium 1 is through the leak rate of small opening 8.
Described method, helium 1 are the gas of configuration, and pure helium 7 is the gas of 100% helium concentration.
Described method, utilizing 1 ‰ helium concentration can make its leak detection sensitivity is 1.5 * 10 -8Pam 3/ s.
The scheme that the present invention adopted: the probe gas charged into 1 ‰ helium concentration by the inside at leak detection position, be connected with helium mass spectrometer leak detector in the outside at leak detection position, utilize the helium mass spectrum leak detection method to realize that its sealing property detects.During detection, open the conventional criteria small opening earlier, the state of effect leak detection system, and then the referance leak calibration system sensitivity of opening 1 ‰ helium concentration, the leak detection sensitivity of this method is about 1.5 * 10 -8Pam 3/ s.
Application specific standard small opening of the present invention is decided to be the helium concentration in the referance leak and leak detection operating mode consistent, can reduce because of the inconsistent error of introducing the result that hunts leak of the helium concentration of referance leak and leak detection operating mode.This method has solved packoff inside effectively should not vacuumize or fill the technical barrier of one type of detected pieces sealing detection of high pressure, shows technical progress.
 
Description of drawings
Below in conjunction with accompanying drawing the present invention is further specified.
Accompanying drawing 1 is the enforcement structural representation of the inventive method;
As shown in the figure: the 1-helium; The 2-vacuum pump; The 3-container; 4,5,6,9-isolation valve; The pure helium of 7-; The 8-small opening; The 10-leak locator;
Accompanying drawing 2 low concentration helium show the curve map of leakage;
As shown in the figure: electric signal (V) is linear with concentration (volume ratio).
Accompanying drawing 3 high concentration helium show the curve map of leakage;
As shown in the figure: electric signal (V) is linear with concentration (volume ratio).
 
Embodiment
Below in conjunction with embodiment the present invention is further specified.
Embodiment
Clean,, stop up referance leak to avoid macromolecular particles such as dirt, impurity with absolute ethyl alcohol cleaning experiment equipment and seal;
Fig. 1 is seen in the experimental system assembly; 1) container connects helium and is connected with the small opening inlet end, and the spike helium gas of promptly utilizing syringe to allocate is in advance injected container; 2) outlet side of small opening is connected by corrugated tube (standard K F25), logical detector; 3) the ready back of vacuum pump debugging is communicated with the container outlet side, promptly utilizes vacuum pump that container is vacuumized, and keeps its vacuum state constant; 4) pure helium is connected with the small opening inlet end.
Step by step: wherein the helium 1 of container 3 is by isolation valve 4 regulation and control; Pure helium 7 is by isolation valve 6 regulation and control; Vacuum pump 2 is by isolation valve 5 regulation and control; Detector 10 is by isolation valve 9 regulation and control;
1. close isolation valve 5,6 and be in cut-off state, open isolation valve 9 and measure its system's background by detector 10;
2. close isolation valve 4, open isolation valve 6, measure small opening 8 porch, the following leak rate of pure helium 7;
3. close isolation valve 6, open isolation valve 5, extract the helium 1 of small opening 8 inlet ends, open isolation valve 4 again and measure its system's background;
4. inject pure helium 7 step by step through container 3 air intake openings, make helium 1 theoretical concentration in the container (3) be respectively 0.5 ‰, 1 ‰, 3 ‰, 5 ‰, corresponding each measurement of concetration helium 1 is through the leak rate of small opening 8.
Used helium is the gas of configuration, and pure helium is the gas of 100% helium concentration.
Testing result:
(1) the low helium concentration helium mass spectrum leak detection experimental data statistics of filling is seen table 1.
Table 1
Learn F > by last table; F 0.01Significantly, Reliability is more than 99% on α=0.01 level for (1,2)=98.5, regression equation, with it between linear relationship close, i.e. concentration and leak rate linear dependence under low consistency conditions.
According to above-mentioned experimental technique; This small opening is applied the helium source of variable concentrations; According to the ultimate principle of least square method, set up the one-variable linear regression equation between leak detection electric signal (X) and the concentration (Y), through variance analysis and F method of inspection regression equation is carried out significance test.
(2) low concentration Data Processing in Experiment statistics is seen table 2.
Learnt by last table: the F value is big, residual sum of squares (RSS) is less, be illustrated in experimental data linear precision that height fills leak rate and concentration under the helium condition not and the precision among a small circle good.
(3) high concentration Data Processing in Experiment statistics is seen table 3.
Learn by last table: F>F 0.01(1,4)=21.20, i.e. leak rate and concentration linear dependence under the high concentration condition, regression equation highly significant.
Comparative analysis with table 2 and table 3: the F value is big in the table 2, residual sum of squares (RSS) is less; Be illustrated in experimental data linear precision that height fills leak rate and concentration under the helium condition not and the precision among a small circle good; It is different that reason is that the volume difference of two types of experiments used distribution modes and gas distributing chamber causes filling helium concentration control accuracy, and then influence the result's that hunts leak uncertainty; Therefore, in actual leak detection work, be the result's that reduces to hunt leak uncertainty, demarcation state (mainly being the probe gas concentration and the pressure of referance leak) should be consistent with the leak detection operating mode as much as possible.

Claims (3)

1. hang down and fill helium concentration helium mass spectrum leak detection method, it is characterized in that: device is made up of container, channel-style small opening, pure helium gas source, leak locator; Wherein the helium (1) of container (3) is by isolation valve (4) regulating and controlling; Pure helium (7) is by isolation valve (6) regulating and controlling; Vacuum pump (2) is by isolation valve (5) regulating and controlling;
1. step closes isolation valve (5), (6) are in cut-off state, opens isolation valve (9) and measures its system's background by detector (10);
2. step closes isolation valve (4), opens isolation valve (6), measures small opening (8) porch, the following leak rate of pure helium (7);
3. step is closed isolation valve (6), is opened isolation valve (5), extracts the helium (1) of small opening (8) inlet end, opens isolation valve (4) again and measures its system's background;
4. step injects pure helium (7) through container (3) air intake opening step by step, makes helium (1) theoretical concentration in the container (3) be respectively 0.5 ‰, 1 ‰, 3 ‰, 5 ‰, and corresponding each measurement of concetration helium (1) is through the leak rate of small opening (8).
2. method according to claim 1 is characterized in that: helium (1) is the gas of configuration, and pure helium (7) is the gas of 100% helium concentration.
3. method according to claim 1 is characterized in that: utilizing 1 ‰ helium concentration can make its leak detection sensitivity is 1.5 * 10 -8Pam 3/ s.
CN 201110026335 2011-01-25 2011-01-25 Leakage detection method for helium mass spectrum with low helium filling concentration Expired - Fee Related CN102346088B (en)

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Cited By (9)

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Publication number Priority date Publication date Assignee Title
CN103389187A (en) * 2012-05-11 2013-11-13 中国科学院理化技术研究所 Low-temperature cold-leakage detecting system and method
CN104776961A (en) * 2014-01-15 2015-07-15 广州市和晋自动化控制技术有限公司 Method for realizing stable reference background index of gas leakage detection system and gas leakage detection system
CN106405006A (en) * 2016-08-31 2017-02-15 天津立中车轮有限公司 Mutual inspection device for double helium concentration meters
CN106500920A (en) * 2016-11-08 2017-03-15 厦门建霖工业有限公司 A kind of standard leak block and preparation method thereof and the standard tester using the standard leak block and its making, using method
CN108444651A (en) * 2018-06-21 2018-08-24 中国核动力研究设计院 A kind of isotope target piece helium mass spectrum leak detecting device and detection method
CN109163857A (en) * 2018-08-29 2019-01-08 清华大学 A kind of high temperature and pressure helium leakage quantitative testing device and detection method
CN110174224A (en) * 2019-04-23 2019-08-27 中国科学院合肥物质科学研究院 Multi-layer compound structure conductor outer layer stainless steel weld joint helium mass spectrum back pressure leak detection method
CN111093741A (en) * 2017-09-14 2020-05-01 隆萨有限公司 Apparatus and method for improved seal integrity testing
CN111896191A (en) * 2020-06-15 2020-11-06 成都飞机工业(集团)有限责任公司 On-site calibration method and auxiliary calibration equipment for integral oil tank leakage detection equipment

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CN101303265A (en) * 2008-07-14 2008-11-12 北京中科科仪技术发展有限责任公司 Sampling system of helium mass-spectrometer leak detector
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CN101303265A (en) * 2008-07-14 2008-11-12 北京中科科仪技术发展有限责任公司 Sampling system of helium mass-spectrometer leak detector
CN101750192A (en) * 2010-01-14 2010-06-23 江苏飞格光电有限公司 Low gas consumption detection method of pressure helium leakage detector

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Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103389187A (en) * 2012-05-11 2013-11-13 中国科学院理化技术研究所 Low-temperature cold-leakage detecting system and method
CN104776961A (en) * 2014-01-15 2015-07-15 广州市和晋自动化控制技术有限公司 Method for realizing stable reference background index of gas leakage detection system and gas leakage detection system
CN106405006A (en) * 2016-08-31 2017-02-15 天津立中车轮有限公司 Mutual inspection device for double helium concentration meters
CN106500920A (en) * 2016-11-08 2017-03-15 厦门建霖工业有限公司 A kind of standard leak block and preparation method thereof and the standard tester using the standard leak block and its making, using method
CN106500920B (en) * 2016-11-08 2019-03-19 厦门百霖净水科技有限公司 A kind of standard leak block and preparation method thereof and standard tester and its production, application method using the standard leak block
CN111093741A (en) * 2017-09-14 2020-05-01 隆萨有限公司 Apparatus and method for improved seal integrity testing
CN108444651A (en) * 2018-06-21 2018-08-24 中国核动力研究设计院 A kind of isotope target piece helium mass spectrum leak detecting device and detection method
CN109163857A (en) * 2018-08-29 2019-01-08 清华大学 A kind of high temperature and pressure helium leakage quantitative testing device and detection method
CN110174224A (en) * 2019-04-23 2019-08-27 中国科学院合肥物质科学研究院 Multi-layer compound structure conductor outer layer stainless steel weld joint helium mass spectrum back pressure leak detection method
CN110174224B (en) * 2019-04-23 2021-06-29 中国科学院合肥物质科学研究院 Helium mass spectrum backpressure leak detection method for stainless steel welding seam on outer layer of conductor with multilayer composite structure
CN111896191A (en) * 2020-06-15 2020-11-06 成都飞机工业(集团)有限责任公司 On-site calibration method and auxiliary calibration equipment for integral oil tank leakage detection equipment
CN111896191B (en) * 2020-06-15 2021-11-30 成都飞机工业(集团)有限责任公司 On-site calibration method and auxiliary calibration equipment for integral oil tank leakage detection equipment

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