CN206208685U - A kind of use Dynamic flow methed measures the vacuum measurement system of material outgassing performance - Google Patents
A kind of use Dynamic flow methed measures the vacuum measurement system of material outgassing performance Download PDFInfo
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- CN206208685U CN206208685U CN201621072319.6U CN201621072319U CN206208685U CN 206208685 U CN206208685 U CN 206208685U CN 201621072319 U CN201621072319 U CN 201621072319U CN 206208685 U CN206208685 U CN 206208685U
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Abstract
A kind of use Dynamic flow methed measures the vacuum measurement system of material outgassing performance, and structure is：The outlet side of the first molecular pump of air extractor connects the inlet end of the second molecular pump；The outlet side of the second molecular pump connects the inlet end of mechanical pump；Pirani gauge is connected between second molecular pump and preceding step valve；The inlet end connection air accumulator of the gas mass flow gauge of inlet duct；The outlet side of gas mass flow gauge connects one end of ultrahigh vacuum reset valve；The outlet side of inlet duct is connected with the inlet end of the first molecular pump, and ultrahigh vacuum vent valve is also associated with the outlet side of inlet duct；The ultrahigh vacuum stop valve of conductance unit is connected between the inlet end of conductance and outlet side；The outlet side of conductance is connected with the inlet end of the first molecular pump；Measuring chamber connects the inlet end of conductance by ultrahigh vacuum valve；Measuring chamber is also associated with level Four bar mass spectrograph and ultrahigh vacuum ionization gauge；Liftable first baking oven of test device peripheral hardware；Connected by airtight passage between sample room and measuring chamber.
Description
Technical field
The technical program belongs to vacuum device technical field of measurement and test, specifically a kind of to be put using Dynamic flow methed measurement material
The vacuum measurement system of gas performance.
Background technology
The deflation rate of material is to evaluate an important performance indications of material especially vacuum material, any solid material
Can be dissolved under atmospheric environment, adsorb some gases.When material is placed in vacuum, gas will be desorbed and discharge, so
The outgassing behaviour level of material directly affects reliability and the life-span of vacuum device and air-tightness packaging.
With the development of vacuum technique, the outgassing behaviour of material is analyzed in micro electronmechanical vacuum system encapsulation field, semiconductor
Vital guidance is suffered from the material selections of emerging field such as air-tight packaging field, big low profile photovoltaic vacuum device to make
With existing technology is analyzed for the outgassing behaviour of material, and complex structure, measurement range are narrow, no gas calibration device, dress
Put the uncertain larger of measurement measured result.
The content of the invention
In order to solve the above-mentioned problems in the prior art, the utility model proposes a kind of new vacuum measurement system,
It is specific as follows：
A kind of use Dynamic flow methed measures the vacuum measurement system of material outgassing performance, including platform, air extractor, enters
Device of air, measuring chamber, sample room and sample transport mechanism；
The air extractor includes mechanical pump and two molecular pumps；The inlet end of the first molecular pump is entering for air extractor
Gas end；The outlet side of the first molecular pump connects the inlet end of the second molecular pump；The outlet side of the second molecular pump is connected by preceding step valve
Connect the inlet end of mechanical pump；Pirani gauge is connected between second molecular pump and preceding step valve；
The inlet duct includes air accumulator and gaseous mass flowmeter；The inlet end of gas mass flow gauge passes through air inlet
Valve connects air accumulator；The outlet side of gas mass flow gauge connects one end of ultrahigh vacuum reset valve, ultrahigh vacuum reset valve
The other end is the outlet side of inlet duct；The outlet side of inlet duct is connected with the inlet end of the first molecular pump, inlet duct
Outlet side on be also associated with ultrahigh vacuum vent valve；The inlet duct peripheral hardware heating mantle；
The air accumulator of the inlet duct also connects gas cylinder by solving pressure valve；
The inlet end of the inlet duct is connected with conductance unit；Conductance unit includes ultrahigh vacuum stop valve and conductance；
Ultrahigh vacuum stop valve is connected between the inlet end of conductance and outlet side；Ultrahigh vacuum electricity is connected with the outlet side of conductance
From rule；The outlet side of conductance is connected with the inlet end of the first molecular pump；The conductance unit peripheral hardware heating mantle；
The measuring chamber is located on platform, and measuring chamber is closed；Measuring chamber connects conductance by ultrahigh vacuum valve
Inlet end；Measuring chamber is also associated with level Four bar mass spectrograph and ultrahigh vacuum ionization gauge；Test device peripheral hardware liftable first dries
Case；The bottom surface of the first baking oven is provided with opening, and in the state of the first baking oven is dropped on platform, the opening of the first baking oven is close with platform
Close connection；
The sample room is located on platform, and sample room is closed；Pass through airtight passage between sample room and measuring chamber
Connection；Sample room is covered with the second baking oven；
The sample room is provided with the housing of glass material；
The device for transferring samples includes track, sample heating platform and electromagnetic control apparatus；The track passes through closed
Passage, and track two ends respectively in the measuring chamber and in sample room, track is by welding or other modes are fixed on vacuum tube
In road；Sample heating platform is slidably connected with track, and it (can also be sample to be filled on sample heating platform with magnetic metal material
Product heating platform is obtained by magnetic metal material)；Electromagnetic control apparatus track the end, and positioned at measuring chamber and sample
Outside product room；The sample heating platform is connected by non-contact magnetic force coupled modes with electromagnetic control apparatus；Described track two
End is provided with baffling device；
Also include heater；Heater is the high-frequency induction heating apparatus being enclosed within outside the housing of measuring chamber；Or
Towards the infrared heating device of the housing of measuring chamber；Or it is placed on the outdoor heating plate of measurement；
The measuring chamber and sample room are equipped with temperature measuring equipment.
Further, the platform is provided with sealing structure corresponding with the first baking oven openend, and the first baking oven drops to flat
In the state of on platform, openend and the platform airtight connection of the first baking oven.
Further, the baffling device at the track two ends, its material is ceramics, quartz glass or metal, for positioning sample
Position in product heating platform measuring chamber and sample room, and can prevent it from de-orbiting；The material of heating platform is can to cut down conjunction
Gold, nickel, iron or cobalt.
When implementing, magnet can be housed on the sample heating platform；Electromagnetic control apparatus are to be wound with coil
Iron core or permanent magnet；The end face of iron core is opposite with magnet face, in sample heating platform not by the shape of external force
Under state, its position is in sample room；
Coil is by switching connection dc source；The sample heating platform is connected on track by extension spring.(the structure
Advantage is that electric current saves electromagnetic control apparatus commutating circuit without commutation in coil.Overall structure is simple, practical, it is easy to real
It is existing)
Coil can also be connected on dc source by commutating circuit, now, the sample heating platform and track
Between do not set extension spring etc..(structural advantages are that electric current commutation in coil is realized by commutating circuit, are saved under vacuum environment
Structural member, it is to avoid to the potential impact of vacuum environment)
Further, described ultrahigh vacuum ionization gauge is B-A type ultrahigh vacuum ion gauges.
Further, the air extractor, the tracheae of connection is metal tube between inlet duct, measuring chamber and sample room
Road, the CF edges of a knife flange between metal tubes using standard is connected, and using the sealing of red copper sealing ring；Described ultrahigh vacuum
Stop valve, conductance valve, ultrahigh vacuum reset valve, ultrahigh vacuum vent valve are all all-metal hand control valves.
Further, described gas cylinder internal is stored with the calibration gas under certain process stage.
Further, also including upper industrial computer；
Described temperature measuring equipment is electronic temperature transmitter, and its data output end connects the data input pin of industrial computer；
Described ultrahigh vacuum ionization gauge is electronic type ultrahigh vacuum ionization gauge, and ultrahigh vacuum ionization gauge is electronic type superelevation
Vacuum ionization ga(u)ge, their data output end connects the data input pin of industrial computer；
Described level Four bar mass spectrograph is electronic type level Four bar mass spectrograph, and its data output end connects the data of industrial computer
Input；
Described Pirani gauge is electronic type Pirani gauge vacuum meter, the data output end connection industrial computer of Pirani gauge vacuum meter
Data input pin；
Described gas mass flow gauge is electronic type gas mass flow gauge, its data output end connection industrial computer
Data input pin；
Described preceding step valve is electromagnetism-gas-driving valve, and its control signal input all connects the control signal output of industrial computer
End；
Described heater, the signal of the controller of two molecular pumps all connect the control signal output of industrial computer；
The temperature controller control signal input of described the first baking oven, the second baking oven and heating mantle all connects the control of industrial computer
Signal output part processed；
The switch input signal of described mechanical pump connects the signal output part of industrial computer；
The switch input signal of the second described baking oven elevating mechanism all connects the signal output part of industrial computer.
The technical characterstic of this vacuum measuring system includes：
1st, outgassing behaviour of the system using Dynamic flow methed for material carries out qualitative and quantitative analysis, main test
Material outgassing species, deflation rate, the discharge quantity of gas with various and total discharge quantity.
2nd, system is applied to computer-automatic collection and processing data, can in a short time gather ultrahigh vacuum ionization gauge
With the mass spectrometric delta data of level Four bar, processed by calculating and draw measurement result.
3rd, the system can also be directed to the outgassing behaviour test during micro vacuum electronic component works, and can measure all
Such as MEMS, semiconductor packing device are under different vacuums, the performance that is worked under different temperatures and deflation characteristic.
4th, chief component is by ULTRA-HIGH VACUUM PUMPING system, gas handling system, vacuum specimen chamber, vacuum measurement room, level Four
Level Four bar mass spectrograph, ultrahigh vacuum ion gauge, sample magnetic driving mechanism, the electrical control of multiple heaters and auxiliary
Unit is constituted.
5th, system overall vacuum pipeline and vacuum chamber use 316L stainless steel materials, and it is close that interface is vacuum edge of a knife flange
Envelope, end vacuum is better than 5 × 10-8pa
6th, system uses the micro control system air inlet of gas mass flow gauge, precise control vacuum system vacuum.
7th, switch sample is shifted in measuring chamber and sample room position by using magnetic driving mechanism, heater can be switched
(baking oven) can carry out bakeout degassing to all of background of measuring chamber and sample room, improve background vacuum.
Brief description of the drawings
Fig. 1 is the principle schematic diagram. of this vacuum measuring system；
Fig. 2 is the principle schematic diagram. of device for transferring samples；
In figure：Step valve before 1 mechanical pump, 2 first molecular pumps, 3,4 second molecular pumps, 5 Pirani gauges (Pirani gauge is vacuum meter,
It is atmospheric pressure~5 × 10 suitable for surveying vacuum-4Mbar), 6 ultrahigh vacuum vent valves, 7 ultrahigh vacuum reset valves, 8 gaseous masses
Flowmeter, 9 high vacuum intake valves, 10, air accumulator, 11 solution pressure valves, 12 gas cylinders, 13 ultrahigh vacuum stop valves, 14 ultrahigh vacuum electricity
From rule, (ionization gauge is vacuum meter, it is adaptable to survey vacuum for 0.01mbar~10-9Mbar), 15 conductance measurement apparatus, 16 superelevation
Vacuum valve, 17 measuring chambers, 18 sample rooms, 19 sample magnetic driving mechanisms (device for transferring samples), 20 sample room heated ovens (
Two baking ovens), 21 level Four bar mass spectrographs (separating and detect the instrument of different isotopes), 22 ultrahigh vacuum ionization gauges, 23 samples add
Hot platform, 24 ultra-high vacuum system baking ovens (the first baking oven), 25 vacuum line heating mantles；26 tracks, 27 electromagnetic control apparatus, 28
Magnet.
Specific embodiment
Such as Fig. 1, a kind of vacuum measurement system of use Dynamic flow methed measurement material outgassing performance, including platform, pumping
Device, inlet duct, measuring chamber, sample room and sample transport mechanism；
The air extractor includes mechanical pump and two molecular pumps；The inlet end of the first molecular pump is entering for air extractor
Gas end；The outlet side of the first molecular pump connects the inlet end of the second molecular pump；The outlet side of the second molecular pump is connected by preceding step valve
Connect the inlet end of mechanical pump；Pirani gauge is connected between second molecular pump and preceding step valve；
The inlet duct includes air accumulator and gaseous mass flowmeter；The inlet end of gas mass flow gauge passes through air inlet
Valve connects air accumulator；The outlet side of gas mass flow gauge connects one end of ultrahigh vacuum reset valve, ultrahigh vacuum reset valve
The other end is the outlet side of inlet duct；The outlet side of inlet duct is connected with the inlet end of the first molecular pump, inlet duct
Outlet side on be also associated with ultrahigh vacuum vent valve；The inlet duct peripheral hardware heating mantle；
The air accumulator of the inlet duct also connects gas cylinder by solving pressure valve；
The inlet end of the inlet duct is connected with conductance unit；Conductance unit includes ultrahigh vacuum stop valve and conductance；
Ultrahigh vacuum stop valve is connected between the inlet end of conductance and outlet side；Ultrahigh vacuum electricity is connected with the outlet side of conductance
From rule；The outlet side of conductance is connected with the inlet end of the first molecular pump；The conductance unit peripheral hardware heating mantle；
The measuring chamber is located on platform, and measuring chamber is closed；Measuring chamber connects conductance by ultrahigh vacuum valve
Inlet end；Measuring chamber is also associated with level Four bar mass spectrograph and ultrahigh vacuum ionization gauge；Test device peripheral hardware liftable first dries
Case；The bottom surface of the first baking oven is provided with opening, and in the state of the first baking oven is dropped on platform, the opening of the first baking oven is close with platform
Close connection；
The sample room is located on platform, and sample room is closed；Pass through airtight passage between sample room and measuring chamber
Connection；Sample room is covered with the second baking oven；
The sample room is provided with the housing of glass material；
The device for transferring samples includes track, sample heating platform and electromagnetic control apparatus；The track passes through closed
Passage, and track two ends respectively in the measuring chamber and in sample room, track is by welding or other modes are fixed on vacuum tube
In road；Sample heating platform is slidably connected with track；Electromagnetic control apparatus track the end, and positioned at measuring chamber and sample room
Outward；The sample heating platform is connected by non-contact magnetic force coupling mechanism with electromagnetic control apparatus；
Described track two ends are provided with barrier structure, and described track material is ceramics, quartz glass, metal etc.
Described sample heating platform is obtained from as the metal material with magnetic, or is filled on sample heating platform
Be magnetic metal material.The magnetic metal material can be the materials such as kovar alloy, nickel, iron, cobalt.
Also include heater；Heater is that radiation is the high-frequency induction heating apparatus being enclosed within outside the housing of measuring chamber；
Or the infrared heating device of the housing towards measuring chamber；Or it is placed on the outdoor heating sheet devices of measurement；
The measuring chamber and sample room are equipped with temperature measuring equipment.
In this example, the platform is provided with sealing structure corresponding with the first baking oven openend, and the first baking oven drops to platform
In the state of upper, openend and the platform airtight connection of the first baking oven.
Such as Fig. 2, electromagnetic control apparatus are the iron core or permanent magnet for being wound with coil；
The air extractor, the tracheae of connection is metal tubes, metal tube between inlet duct, measuring chamber and sample room
CF edges of a knife flange between road using standard is connected, and using the sealing of red copper sealing ring；
Described ultrahigh vacuum stop valve, conductance valve, ultrahigh vacuum reset valve, ultrahigh vacuum vent valve are all all-metal hands
Dynamic control valve.
Described gas cylinder internal is stored with the calibration gas under certain process stage.
Also include upper industrial computer；
Described temperature measuring equipment is electronic temperature transmitter, and its data output end connects the data input pin of industrial computer；
Described ultrahigh vacuum ionization gauge is electronic type ultrahigh vacuum ionization gauge, and ultrahigh vacuum ionization gauge is electronic type superelevation
Vacuum ionization ga(u)ge, their data output end connects the data input pin of industrial computer；
Described Pirani gauge is electronic type Pirani gauge vacuum meter, the data output end connection industrial computer of Pirani gauge vacuum meter
Data input pin；
Described gas mass flow gauge is electronic type gas mass flow gauge, its data output end connection industrial computer
Data input pin；
Described preceding step valve is electromagnetism-gas-driving valve, and its control signal input all connects the control signal output of industrial computer
End；
Described heater, the signal of the controller of two molecular pumps all connect the control signal output of industrial computer；
The temperature controller control signal input of described the first baking oven, the second baking oven and heating mantle all connects the control of industrial computer
Signal output part processed；
The switch input signal of described mechanical pump connects the signal output part of industrial computer；
The switch input signal of the second described baking oven elevating mechanism all connects the signal output part of industrial computer.
The testing procedure of this vacuum measuring system includes：
1st, by surveyed material sample fixed placement on the magnetic force pallet of sample magnetic driving mechanism 19.
2nd, mechanical pump 1 is opened, step valve 3, ultrahigh vacuum stop valve 13 and ultrahigh vacuum valve 16 before opening, to this vacuum measurement
System carries out pre- pumping.
3rd, when measuring system vacuum vacuum is better than 10pa (by the reading of Pirani gauge 5), the first molecular pump 2 and second point are opened
Sub- pump 4 is vacuumized to measuring system；
When vacuum is better than 5 × 10-4(by the reading of ultrahigh vacuum ionization gauge 22) during pa, ultra-high vacuum system baking oven is fallen
24, heating temperature curve is set, 300 DEG C are to slowly warm up to, 10 hours are incubated, bakeout degassing is carried out to vacuum system and sample room.Together
When, vacuum line heating mantle 25 is also carried out bakeout degassing, 150 DEG C of outgassing temperature to air inlet pipeline.
4th, after baking is finished, the power supply of ultra-high vacuum system baking oven 24 is closed, the interim slow ultra-high vacuum system that rises dries
Case 24, until measuring chamber cools to 120 degrees Celsius, rises ultra-high vacuum system baking oven 24, after being down to normal temperature, by sample completely
Magnetic driving mechanism 19, material sample is transferred in measuring chamber 17 from sample room 18 by magnetic drives, now opens sample
The power supply of product room heated oven 20 carries out bakeout degassing to sample room 18, and 450 DEG C of baking temperature after 4 hours of baking, closes sample
The power supply of room heated oven 20, the closing power supply of heating mantle 25, normal temperature is cooled to sample room 18.
Background degasification is continued to vacuum measurement system, until background end vacuum reaches test request.
5th, ionization degasification is carried out to ultrahigh vacuum ionization gauge 14, ultrahigh vacuum ionization gauge 22 and level Four bar mass spectrograph 21.
6th, after degasification is finished, ultrahigh vacuum valve 16 is closed, surveys vacuum system leak rate.
7th, ultrahigh vacuum valve 16 is opened, ultrahigh vacuum stop valve 13 is closed, when vacuum measuring system background vacuum reaches
During end vacuum, level Four bar mass spectrograph 21, record level Four bar mass spectrograph 21, ultrahigh vacuum ionization gauge 22 and ultrahigh vacuum electricity are opened
From the data of rule 14, and the deflation species of base vacuum is obtained, the correction factor for bringing gas with various into calculates vacuum system
The partial pressure of interior each gas componant, is multiplied by conductance and draws putting for base vacuum by the pressure difference at the two ends of conductance measurement apparatus 15
Gas rate, is calculated by bringing partial pressure gauge into, then draws the deflation rate of background gas with various, and data above is used as amendment data.
8th, according to testing requirement, heater is opened, the sample on sample heating platform 23 is heated, now recorded
The data being continually changing with the time that lower level Four bar mass spectrograph 21 and ultrahigh vacuum ionization gauge 22 are measured, by these data, obtain
To the deflation species of sample, and the partial pressure that sample discharges each gas componant is calculated, by the two ends of conductance measurement apparatus 15
Pressure difference is multiplied by conductance is worth sample deflation rate at a certain temperature, is calculated by bringing partial pressure gauge into, then show that background is different
The deflation rate of gas.By the average value of the pressure difference at certain data variation time inner flow guide two ends be multiplied by conductance value multiplied by with
Certain hour, draws the discharge quantity of sample in certain data variation time, is drawn by the integration of gas flow in different time sections
Total discharge quantity.Again by data correction, then blowdown gas composition, outgassing rate, total discharge quantity, the difference of sample can be drawn
The outgassing rate and discharge quantity of gas, and draw curve.
Claims (7)
1. a kind of use Dynamic flow methed measures the vacuum measurement system of material outgassing performance, it is characterized in that including platform, pumping
Device, inlet duct, measuring chamber, sample room and sample transport mechanism；
The air extractor includes mechanical pump and two molecular pumps；The inlet end of the first molecular pump is the air inlet of air extractor
End；The outlet side of the first molecular pump connects the inlet end of the second molecular pump；The outlet side of the second molecular pump is connected by preceding step valve
The inlet end of mechanical pump；Pirani gauge is connected between second molecular pump and preceding step valve；
The inlet duct includes air accumulator and gaseous mass flowmeter；The inlet end of gas mass flow gauge is connected by intake valve
Connect air accumulator；The outlet side of gas mass flow gauge connects one end of ultrahigh vacuum reset valve, ultrahigh vacuum reset valve it is another
End is the outlet side of inlet duct；The outlet side of inlet duct is connected with the inlet end of the first molecular pump, and inlet duct goes out
Ultrahigh vacuum vent valve is also associated with gas end；The inlet duct peripheral hardware heating mantle；
The air accumulator of the inlet duct also connects gas cylinder by solving pressure valve；
The inlet end of the inlet duct is connected with conductance unit；Conductance unit includes ultrahigh vacuum stop valve and conductance；Superelevation
Vaccum stop valve is connected between the inlet end of conductance and outlet side；Ultrahigh vacuum ionization is connected with the outlet side of conductance
Rule；The outlet side of conductance is connected with the inlet end of the first molecular pump；The conductance unit peripheral hardware heating mantle；
The measuring chamber is located on platform, and measuring chamber is closed；Measuring chamber connects the air inlet of conductance by ultrahigh vacuum valve
End；Measuring chamber is also associated with level Four bar mass spectrograph and ultrahigh vacuum ionization gauge；Liftable first baking oven of test device peripheral hardware；The
The bottom surface of one baking oven is provided with opening, in the state of the first baking oven is dropped on platform, opening and the closed company of platform of the first baking oven
Connect；
The sample room is located on platform, and sample room is closed；Connected by airtight passage between sample room and measuring chamber；
Sample room is covered with the second baking oven；
The sample room is provided with the housing of glass material；
The device for transferring samples includes track, sample heating platform and electromagnetic control apparatus；The track passes through airtight passage,
And the two ends of track, respectively in measuring chamber and in sample room, track is fixed in vacuum pipe by welding or other modes；
Sample heating platform is slidably connected with track, is filled on sample heating platform with magnetic metal material；Electromagnetic control apparatus exist
The end of track, and outside measuring chamber and sample room；The sample heating platform is by non-contact magnetic force coupled modes and electricity
Magnetic controller is connected；
Described track two ends are provided with baffling device；
Also include heater；Heater is the high-frequency induction heating apparatus being enclosed within outside the housing of measuring chamber；Or direction
The infrared heating device of the housing of measuring chamber；Or it is placed in the heating plate outside measuring chamber；
The measuring chamber and sample room are equipped with temperature measuring equipment.
2. vacuum measurement system according to claim 1, it is characterized in that the platform is provided with and the first baking oven openend
Corresponding sealing structure, in the state of the first baking oven is dropped on platform, openend and the platform airtight connection of the first baking oven.
3. vacuum measurement system according to claim 1, it is characterized in that the air extractor, inlet duct, measuring chamber and
The tracheae of connection is metal tubes between sample room, and the CF edges of a knife flange between metal tubes using standard is connected, and is adopted
Sealed with red copper sealing ring；
Described ultrahigh vacuum stop valve, conductance valve, ultrahigh vacuum reset valve, ultrahigh vacuum vent valve are all that all-metal is controlled manually
Valve processed.
4. vacuum measurement system according to claim 1, it is characterized in that described gas cylinder internal is stored with calibration gas.
5. vacuum measurement system according to claim 1, it is characterized in that the baffling device at the track two ends, its material is
Ceramics, quartz glass or metal.
6. vacuum measurement system according to claim 1, it is characterized in that described ultrahigh vacuum ionization gauge is B-A type superelevation
Vacuum ion gauge.
7. vacuum measurement system according to claim 1, it is characterized in that also including upper industrial computer；
Described temperature measuring equipment is electronic temperature transmitter, and its data output end connects the data input pin of industrial computer；
Described ultrahigh vacuum ionization gauge is electronic type ultrahigh vacuum ionization gauge, and ultrahigh vacuum ionization gauge is electronic type ultrahigh vacuum
Ionization gauge, their data output end connects the data input pin of industrial computer；
Described level Four bar mass spectrograph is electronic type level Four bar mass spectrograph, and its data output end connects the data input of industrial computer
End；
Described Pirani gauge is electronic type Pirani gauge vacuum meter, and the data output end of Pirani gauge vacuum meter connects the data of industrial computer
Input；
Described gas mass flow gauge is electronic type gas mass flow gauge, and its data output end connects the data of industrial computer
Input；
Described preceding step valve is electromagnetism-gas-driving valve, and its control signal input all connects the control signal output of industrial computer；
Described heater, the signal of the controller of two molecular pumps all connect the control signal output of industrial computer；
The temperature controller control signal input of described the first baking oven, the second baking oven and heating mantle all connects the control letter of industrial computer
Number output end；
The switch input signal of described mechanical pump connects the signal output part of industrial computer；
The switch input signal of the second described baking oven elevating mechanism all connects the signal output part of industrial computer.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621072319.6U CN206208685U (en) | 2016-09-22 | 2016-09-22 | A kind of use Dynamic flow methed measures the vacuum measurement system of material outgassing performance |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201621072319.6U CN206208685U (en) | 2016-09-22 | 2016-09-22 | A kind of use Dynamic flow methed measures the vacuum measurement system of material outgassing performance |
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| CN201621072319.6U Expired - Fee Related CN206208685U (en) | 2016-09-22 | 2016-09-22 | A kind of use Dynamic flow methed measures the vacuum measurement system of material outgassing performance |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109390204A (en) * | 2018-12-10 | 2019-02-26 | 合肥中科离子医学技术装备有限公司 | A kind of wide range adjustable mobile vacuum mass-spectrometer measurement equipment |
| CN112304804A (en) * | 2020-10-28 | 2021-02-02 | 北京东方计量测试研究所 | Material outgassing rate testing system and testing method thereof |
| CN114113285A (en) * | 2021-12-08 | 2022-03-01 | 中国工程物理研究院材料研究所 | Mechanism and method for measuring air release rate of metal material |
-
2016
- 2016-09-22 CN CN201621072319.6U patent/CN206208685U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109390204A (en) * | 2018-12-10 | 2019-02-26 | 合肥中科离子医学技术装备有限公司 | A kind of wide range adjustable mobile vacuum mass-spectrometer measurement equipment |
| CN109390204B (en) * | 2018-12-10 | 2024-03-12 | 合肥中科离子医学技术装备有限公司 | Wide-range adjustable movable vacuum mass spectrum measuring equipment |
| CN112304804A (en) * | 2020-10-28 | 2021-02-02 | 北京东方计量测试研究所 | Material outgassing rate testing system and testing method thereof |
| CN112304804B (en) * | 2020-10-28 | 2024-03-22 | 北京东方计量测试研究所 | Material air release rate testing system and testing method thereof |
| CN114113285A (en) * | 2021-12-08 | 2022-03-01 | 中国工程物理研究院材料研究所 | Mechanism and method for measuring air release rate of metal material |
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