CN208092000U - Material air-breathing deflation rate test device - Google Patents
Material air-breathing deflation rate test device Download PDFInfo
- Publication number
- CN208092000U CN208092000U CN201820453828.6U CN201820453828U CN208092000U CN 208092000 U CN208092000 U CN 208092000U CN 201820453828 U CN201820453828 U CN 201820453828U CN 208092000 U CN208092000 U CN 208092000U
- Authority
- CN
- China
- Prior art keywords
- breathing
- air
- test
- deflation
- specimen chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
This application discloses a kind of material air-breathing deflation rate test devices of, including air-breathing test system and deflation test system, disengaging specimen chamber and the disengaging sample molecular pump being arranged on working face, disengaging specimen chamber connection disengaging sample molecular pump, it is characterised in that：Air-breathing tests system and test system transposition setting of deflating, crosspoint is disengaging specimen chamber, it includes air-breathing sample transfer bar, pumping property test cabinet, first-class conduit selector valve and air inlet pipe microleak valve that pumping property, which tests system, it passes in and out specimen chamber one end and connects air-breathing sample transfer bar, the other end for passing in and out specimen chamber connects pumping property test cabinet, deflation test system includes deflation sample transfer bar, outgassing behaviour test cabinet and second conduit selector valve, the one end for passing in and out specimen chamber connects deflation sample transfer bar, the other end for passing in and out specimen chamber connects outgassing behaviour test cabinet, and the application has the characteristics that:Accuracy is high, and it is convenient to measure, and integrated level is high.
Description
Technical field
This application involves a kind of test device, especially a kind of test of the residual gas pressure and pumping property of energy test material
Device.
Background technology
MEMS (MEMS), also referred to as microelectromechanical systems, micro-system, micromechanics etc. refer to size at several millimeters
Or even smaller high-tech device, MEMS be collection microsensor, microactrator, micro mechanical structure, the micro- energy of micro battery,
Signal processing and control circuit, high-performance electronic integrated device, interface, communication etc. are in the microdevice or system of one.
Therefore MEMS chip performance has certain requirement, and MEMS chip is a kind of element vacuumized, in the process used
In, the phenomenon that sealing material has deflation and permeation, can cause internal air pressure to go up, and the performance of chip is caused to decline,
Element of the MEMS chip as consumer level needs the performance for ensureing chip in 3 to 5 years, so needing to test chip in 3 to 5 years
Vacuum degree, and the inside no pressure sensor of MEMS is unable to measure.
Utility model content
The technical issues of the application solves is to overcome the deficiencies in the prior art, and provide a kind of accuracy height, is surveyed
Measure convenient material air-breathing deflation rate test device.
Technical solution includes used by the application solves above-mentioned technical problem：A kind of material air-breathing deflation rate test dress
It sets, including air-breathing test system and deflation test system, disengaging specimen chamber and the disengaging sample molecular pump being arranged on working face, it is described
The disengaging specimen chamber connection disengaging sample molecular pump, it is characterised in that：The air-breathing test system and deflation test system
Arranged in a crossed manner, crosspoint is disengaging specimen chamber, and pumping property test system includes air-breathing sample transfer bar, pumping property test
Room, first-class conduit selector valve and air inlet pipe microleak valve, described disengaging specimen chamber one end connect air-breathing sample transfer bar, the disengaging
The other end of specimen chamber connects pumping property test cabinet, and deflation test system includes deflation sample transfer bar, outgassing behaviour test
Room and second conduit selector valve pass in and out one end connection deflation sample transfer bar of specimen chamber, pass in and out the other end connection gas release performance of specimen chamber
Energy test cabinet, is additionally provided with first pipe, second pipe and third pipeline, the first pipe and second pipe are separately connected
Pumping property test cabinet, the third pipeline connect outgassing behaviour test cabinet, are arranged between first pipe and third pipeline
There is second conduit selector valve, first-class conduit selector valve is provided between second pipe and first pipe, in first pipe
There are two air inlet pipe microleak valves for upper setting, and advantage and effect are：By air-breathing test system and test system set of deflating one
It rises, it is cost-effective.
Preferably, graphite heating piece, thermocouple, the first hot cathode ioization gauge are provided in the pumping property test cabinet
And magnetic suspension rotor gauge, graphite heating piece, it measures pumping property at any time by thermocouple and tests indoor temperature, the described first heat
Cathode ionization gauge is used for the real-time vacuum degree in test experiments, and the magnetic suspension rotor pipe is for calibrating the ionization of the first hot cathode
Rule, advantage and effect are：The accurately pumping property of test material.
Preferably, the second hot cathode ioization gauge, diaphragm vacuum gauge and chip are provided in the outgassing behaviour test cabinet
Breaking plant, the vacuum degree of the outgassing behaviour test cabinet, described before second hot cathode ioization gauge test destroys
The vacuum degree of the outgassing behaviour test cabinet after diaphragm vacuum gauge test destruction, advantage and effect are：It accurately measures
The air pressure of residual gas.
Preferably, it is additionally provided with residual gas analyzer, the residual gas analyzer connects outgassing behaviour test cabinet,
Its advantage and effect are：The ingredient of residual gas can be differentiated.
Preferably, it is provided with third valve between the disengaging specimen chamber and air-breathing sample transfer bar, in the disengaging sample
The 4th valve is provided between room and deflation sample transfer bar, advantage and effect are：Air-breathing sample transfer bar and deflation sample transfer bar is set to be in
Vacuum environment improves the accuracy of measurement.
Preferably, there are six first-class conduit selector valve settings, there are three the settings of second conduit selector valve,
Advantage and effect are：It is selected for different materials, to improve testing precision.
Preferably, air-breathing partition plate is provided between the pumping property test cabinet and the first pipe
Valve is provided with deflation partition gate valve, advantage and effect between the outgassing behaviour test cabinet and the first pipe
Fruit is：So that outgassing behaviour test cabinet and pumping property test cabinet is in vacuum environment, improves the accuracy of measurement.
Preferably, it is additionally provided with control system, the control system connects air-breathing test system and deflation test system,
Its advantage and effect are：The data of measurement are passed into operator, more intuitive and convenient by control system.
The application has the characteristics that:Accuracy is high, and it is convenient to measure, and integrated level is high.
Description of the drawings
Fig. 1 is the side view of the embodiment of the present application.
Fig. 2 is the vertical view of the embodiment of the present application.
Fig. 3 is the partial enlarged view of the X of Fig. 2 of the embodiment of the present application.
In figure：11 working faces, 12 control systems, 2 air-breathings test system, 21 air-breathing sample transfer bars, and 22 air-breathings separate gate valve,
23 first hot cathode ioization gauges, 24 magnetic suspension rotor gauges, 25 pumping property test cabinets, 26 thermocouples, 27 first valves, 28 first
Conductance pipe selector valve, 29 air inlet pipe microleak valves, 3 deflation test systems, 31 deflation sample transfer bars, 32 deflate partition gate valves, and 33 the
Two hot cathode ioization gauges, 34 residual gas analyzers, 35 outgassing behaviour test cabinets, 36 diaphragm vacuum gauges, 37 second valves, 38
Second-rate conduit selector valve, 39 chip breaking plants, 4 disengaging specimen chambers, 5 third hot cathode ioization gauges, 51 first pipes, 52 second pipes
Road, 6 disengaging sample molecular pumps, 7 third valves, 8 the 4th valves.
Specific implementation mode
It is described in further detail below in conjunction with the accompanying drawings and by embodiment to the application, following embodiment is to this Shen
Explanation please and the application is not limited to following embodiment.
As shown in Figure 1 to Figure 3, a kind of material air-breathing deflation rate test device includes the air-breathing being arranged on working face 11
Test system 2 and deflation test system 3, control system 12 connect air-breathing test system 2 and deflation test system 3, air-breathing test
System 2 and deflation test system 3 are arranged in a crossed manner, and crosspoint is disengaging specimen chamber 4, and the disengaging connection of specimen chamber 4 passes in and out sample molecular pump 6, into
Go out the environment vacuumize process that sample molecular pump 6 will pass in and out specimen chamber 4.
It includes air-breathing sample transfer bar 21, air-breathing partition gate valve 22, the first hot cathode ioization gauge that pumping property, which tests system 2,
23, magnetic suspension rotor gauge 24, pumping property test cabinet 25, thermocouple 26, the first valve 27, first-class conduit selector valve 28, into
Tracheae microleak valve 29, graphite heating piece（It is not shown in figure）, third hot cathode ioization gauge 5 and disengaging specimen chamber 4, pass in and out specimen chamber 4 one
End connection air-breathing sample transfer bar 21, interior air-breathing sample transfer bar 21 is vacuum environment, is arranged between disengaging specimen chamber 4 and air-breathing sample transfer bar 21
There is third valve 7, ensure to be vacuum environment in air-breathing sample transfer bar 21, disengaging sample molecular pump 6 or air-breathing sample transfer bar 21 are taken out very
Vacancy is managed, the other end connection pumping property test cabinet 25 of disengaging specimen chamber 4, and graphite heating is provided in pumping property test cabinet 25
Piece（It is not shown in figure）, thermocouple 26, the first hot cathode ioization gauge 23 and magnetic suspension rotor gauge 24, graphite heating piece（In figure not
It shows）Quickly sample can be heated, temperature rise speed is more than 10 degrees seconds, measures pumping property survey at any time by thermocouple 26
The temperature in room 25 is tried, the first hot cathode ioization gauge 23 is used for the real-time vacuum degree in test experiments, and magnetic suspension rotor pipe 24
For calibrating the first hot cathode ioization gauge, the other end of pumping property test cabinet 25 connects first pipe 51, is surveyed in pumping property
Air-breathing partition gate valve 22 is provided between examination room 25 and connection first pipe 51, by pumping property test cabinet 25 and first pipe
51 vacuum degree separation, second pipe 52 connect pumping property test cabinet 25, and second pipe 52 passes through first-class conduit selector valve
28 connection first pipes 51, first-class conduit selector valve 28 are provided with 6, are selected for different materials, accurate to improve test
Degree is also set up in first pipe 51 there are two air inlet pipe microleak valve 29, can meet ultrahigh vacuum needs, and adjust and compare
Precisely.
Deflation test system 3 includes deflation sample transfer bar 31, partition gate valve 32 of deflating, the second hot cathode ioization gauge 33, residual
Remaining gas analyzer 34, outgassing behaviour test cabinet 35, diaphragm vacuum gauge 36, the second valve 37, second conduit selector valve 38, core
Piece breaking plant 39 and disengaging specimen chamber 4, one end connection deflation sample transfer bar 31 of disengaging specimen chamber 4, interior deflation sample transfer bar 31 is vacuum
Environment is provided with the 4th valve 8 between disengaging specimen chamber 4 and deflation sample transfer bar 31, ensures to be vacuum ring in deflation sample transfer bar 31
The other end connection outgassing behaviour of border, disengaging sample molecular pump 6 or 31 vacuumize process of deflation sample transfer bar, disengaging specimen chamber 4 is surveyed
It tries room 35, the second hot cathode ioization gauge 33, residual gas analyzer 34, diaphragm vacuum gauge to be provided in outgassing behaviour test cabinet 35
36 and chip breaking plant 39, the second hot cathode ioization gauge 33 can be tested destroy before outgassing behaviour test cabinet 35 vacuum degree,
And diaphragm vacuum gauge 36 can test the vacuum degree of the outgassing behaviour test cabinet 35 after destroying, residual gas analyzer 34 can be tested
Chip interior participates in the type of gas, and the other end of outgassing behaviour test cabinet 35 connects first pipe 51, is tested in outgassing behaviour
Deflation partition gate valve 32 is provided between room 35 and first pipe 51, by the true of outgassing behaviour test cabinet 35 and first pipe 51
Reciprocal of duty cycle detaches, and third pipeline 53 connects outgassing behaviour test cabinet 35, and third pipeline 53 is connected by second conduit selector valve 38
First pipe 51, second conduit selector valve 38 is provided with 3, to improve measuring accuracy, is additionally provided in first pipe 51
Two air inlet pipe microleak valves 29 can meet ultrahigh vacuum needs, and adjust more accurate.
Operation principle, air-breathing test a system of the pumping property that system 2 is test material, and sample disengaging room 4 is close
Envelope, the first valve 27 and third valve 7 are opened, using disengaging sample molecular pump 6 by pumping property test cabinet 25 and air-breathing sample presentation
Vacuumize process in bar 21 closes the first valve 27 and third valve 7, by gettering material sample to be tested be put into sample into
Go out room 4 and seal, the first valve 27 and third valve 7 is opened, gettering material sample is pushed to air-breathing by air-breathing sample transfer bar 21
The first valve 27 and third valve 7 are closed in performance test room 25, and gettering material can just carry out air-breathing after there was only activated at,
Graphite heating piece（It is not shown in figure）State of activation is heated the sample to, thermocouple 26 tests the temperature of pumping property test cabinet 25
Degree controls at 400 degree or so, from 29 gas injection of air inlet pipe microleak valve, a first-class conduit selector valve 28 is selected, by gas
Pumping property test cabinet 25 is entered using pipeline 2 from pipeline 1 by first-class conduit selector valve 28 at leisure, controls air-breathing
The vacuum degree of performance test room 25 remains unchanged, and the gas poured is made all by getter material getters, to continue for gas injection, leads to
The variation of 25 vacuum degree of pumping property test cabinet is crossed, the pumping property curve of gettering material is obtained.
Deflation test system 3 is a system of the residual gas pressure of test material, sample disengaging room 4 is sealed, by second
Valve 37 and the 4th valve 8 are opened, and will be taken out in outgassing behaviour test cabinet 35 and deflation sample transfer bar 31 using disengaging sample molecular pump 6 true
Vacancy is managed, and the second valve 37 and the 4th valve 8 are closed, and sample to be tested is put into sample disengaging room 4 and is sealed, by second
Valve 37 and the 4th valve 8 are opened, and sample is pushed to outgassing behaviour test cabinet 35 by deflation sample transfer bar 31, by 37 He of the second valve
4th valve 8 is closed, and the vacuum degree of outgassing behaviour test cabinet 35, outgassing behaviour are surveyed before the test of the second hot cathode ioization gauge 33 destroys
The chip breaking plant 39 in room 35 is tried by sample broke, internal residual gas is discharged into vacuum environment, film vacuum
36 test of rule destroy after outgassing behaviour test cabinet 35 vacuum degrees, using the vacuum degree of outgassing behaviour test cabinet 35 before destruction and
The vacuum degree of outgassing behaviour test cabinet 35 after destruction extrapolates the vacuum degree of residual gas, while residual gas analyzer 34 is also
The ingredient of the gas of sample interior can be analyzed.
Explanation in relation to upper and lower equal position relationships in the application is in accordance with the attached drawing of embodiment to describe.
Described in this specification above content is only to the application example explanation；Moreover, the application zero
The title that component is taken can also be different, done equivalent of all structure, feature and principles according to described in the application inventional idea or
Simple change is included in the protection domain of the application.
Claims (8)
1. a kind of material air-breathing deflation rate test device, including the air-breathing test system being arranged on working face and test system of deflating
System, disengaging specimen chamber and disengaging sample molecular pump, the disengaging specimen chamber connection disengaging sample molecular pump, it is characterised in that：Institute
The air-breathing test system stated and test system transposition setting of deflating, crosspoint is disengaging specimen chamber, and the air-breathing tests system packet
Include air-breathing sample transfer bar, pumping property test cabinet, first-class conduit selector valve and air inlet pipe microleak valve, described disengaging specimen chamber one end
Air-breathing sample transfer bar is connected, the other end of the disengaging specimen chamber connects pumping property test cabinet, and system packet is tested in the deflation
Deflation sample transfer bar, outgassing behaviour test cabinet and second conduit selector valve are included, one end connection deflation sample transfer bar of specimen chamber is passed in and out, into
The other end connection outgassing behaviour test cabinet for going out specimen chamber, is additionally provided with first pipe, second pipe and third pipeline, and described the
One pipeline and second pipe are separately connected pumping property test cabinet, and the third pipeline connects outgassing behaviour test cabinet, the
It is provided with second conduit selector valve between one pipeline and third pipeline, first is provided between second pipe and first pipe
Conductance pipe selector valve, there are two air inlet pipe microleak valves for setting in first pipe.
2. material air-breathing deflation rate test device according to claim 1, it is characterised in that：The pumping property test
Interior is provided with graphite heating piece, thermocouple, the first hot cathode ioization gauge and magnetic suspension rotor gauge, graphite heating piece, by thermoelectricity
The even pumping property that measures at any time tests indoor temperature, and first hot cathode ioization gauge is used for real-time true in test experiments
Reciprocal of duty cycle, the magnetic suspension rotor pipe is for calibrating the first hot cathode ioization gauge.
3. material air-breathing deflation rate test device according to claim 1, it is characterised in that：The outgassing behaviour test
Interior is provided with the second hot cathode ioization gauge, diaphragm vacuum gauge and chip breaking plant, and second hot cathode ioization gauge is surveyed
The vacuum degree of the outgassing behaviour test cabinet, the diaphragm vacuum gauge test the gas release performance after destroying before examination destroys
The vacuum degree of energy test cabinet.
4. material air-breathing deflation rate test device according to claim 3, it is characterised in that：It is additionally provided with residual gas point
Analyzer, the residual gas analyzer connect outgassing behaviour test cabinet.
5. material air-breathing deflation rate test device according to claim 1, it is characterised in that：In the disengaging specimen chamber and
It is provided with third valve between air-breathing sample transfer bar, the 4th valve is provided between the disengaging specimen chamber and deflation sample transfer bar.
6. material air-breathing deflation rate test device according to claim 1, it is characterised in that：The first-class conduit choosing
It selects there are six valve settings, there are three the settings of second conduit selector valve.
7. material air-breathing deflation rate test device according to claim 1, it is characterised in that：It is surveyed in the pumping property
Air-breathing partition gate valve is provided between examination room and the first pipe, in the outgassing behaviour test cabinet and described the
Deflation partition gate valve is provided between one pipeline.
8. material air-breathing deflation rate test device according to claim 1, it is characterised in that：Control system is additionally provided with,
The control system connection air-breathing test system and deflation test system.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820453828.6U CN208092000U (en) | 2018-04-02 | 2018-04-02 | Material air-breathing deflation rate test device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820453828.6U CN208092000U (en) | 2018-04-02 | 2018-04-02 | Material air-breathing deflation rate test device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN208092000U true CN208092000U (en) | 2018-11-13 |
Family
ID=64057520
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201820453828.6U Active CN208092000U (en) | 2018-04-02 | 2018-04-02 | Material air-breathing deflation rate test device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN208092000U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108387691A (en) * | 2018-04-02 | 2018-08-10 | 杭州赛威斯真空技术有限公司 | A kind of material air-breathing deflation rate test device |
-
2018
- 2018-04-02 CN CN201820453828.6U patent/CN208092000U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108387691A (en) * | 2018-04-02 | 2018-08-10 | 杭州赛威斯真空技术有限公司 | A kind of material air-breathing deflation rate test device |
| CN108387691B (en) * | 2018-04-02 | 2023-08-22 | 杭州赛威斯真空技术有限公司 | Material gassing rate testing arrangement that breathes in |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN102494741B (en) | Static sampling introduction device and method of calibrating pressure leak hole | |
| CN101793585B (en) | Device and method for detecting sealing property of sealing element | |
| CN106525683B (en) | A kind of film permeation rate measuring device and measurement method | |
| US8448498B1 (en) | Hermetic seal leak detection apparatus | |
| CN105300869B (en) | A kind of device and its measuring method of difference vacuum meter measurement material gas permeability | |
| CN105004479B (en) | Ion gauge and mass spectrograph calibrating installation and method based on normal pressure measurement | |
| CN101458109A (en) | Constant pressure type gas flowmeter transfiguration chamber bellows volume change measuring set | |
| US9097609B1 (en) | Hermetic seal leak detection apparatus with variable size test chamber | |
| CN105547956A (en) | Device and method for measuring gas permeability of thin film by using vacuometer | |
| CN106662498B (en) | Measurement of gas density increase in a thin film chamber | |
| CN106226000A (en) | A kind of vacuum leakproofness energy measurement apparatus and method | |
| CN106442897B (en) | A kind of decompression vapor liquid equilibrium measurement system | |
| CN208092000U (en) | Material air-breathing deflation rate test device | |
| CN103837567B (en) | The liquid specific heat capacity measurement device of energy self-equilibrating pressurization and method | |
| EP1980836A2 (en) | Multiple sample gas sorption tester | |
| CN202793689U (en) | Testing device for pressure sensor temperature characteristic | |
| CN106679897A (en) | Leakage hole's leakage rate measuring apparatus | |
| CN102012148A (en) | Vacuum drying device and control method | |
| CN108387691A (en) | A kind of material air-breathing deflation rate test device | |
| CN109916568A (en) | Electric machine controller sealing propertytest system, device and method | |
| CN203786003U (en) | Static volumetric method based automatic adsorption measuring device | |
| CN206074385U (en) | A kind of monitor station that nonevaporable getter pumping property is measured using dynamic level pressure method | |
| CN203350209U (en) | Device for synchronously tracking and measuring micro heat change of gas-solid adsorption process | |
| CN201314833Y (en) | Measuring device for the size change of corrugated pipe in transfiguration chamber for constant pressure gas flow indicator | |
| CN103884519A (en) | Ultralow temperature vacuum heat transfer efficiency test system |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |