CN205810759U - Mass spectrometer ion source room pumped vacuum systems - Google Patents
Mass spectrometer ion source room pumped vacuum systems Download PDFInfo
- Publication number
- CN205810759U CN205810759U CN201620705116.XU CN201620705116U CN205810759U CN 205810759 U CN205810759 U CN 205810759U CN 201620705116 U CN201620705116 U CN 201620705116U CN 205810759 U CN205810759 U CN 205810759U
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- CN
- China
- Prior art keywords
- air inlet
- vacuum
- electromagnetic valve
- source housing
- hatch door
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
The utility model discloses a kind of mass spectrometer ion source room pumped vacuum systems, including the source housing being provided with hatch door；Source housing outer wall is provided with high vacuum gauge and Low vacuum gauge and molecular pump, high-vacuum electromagnetic valve, air inlet electromagnetic valve；High-vacuum electromagnetic valve air inlet connects with described molecular pump air vent, high-vacuum electromagnetic valve outlet is connected with mechanical pump or membrane pump air inlet by first mouth of pipe and second mouth of pipe of tee T, 3rd mouth of pipe of tee T is connected with being positioned at hatch door position bleeding point in source housing with forvacuum electromagnetic valve by pipeline, molecular pump air inlet and source housing inner space, the air inlet of air inlet electromagnetic valve is connected with air, and the gas outlet of air inlet electromagnetic valve is connected with the air inlet being positioned at hatch door position in source housing.This utility model advantage is to realize source housing inner chamber by rough vacuum to the vacuum of condition of high vacuum degree transition.
Description
Technical field
This utility model relates to time of-flight mass spectrometer source housing, especially relates to mass spectrometer ion source room evacuation system
System.
Background technology
Matrix Assisted Laser Desorption ion source is solid sample resolving, and the sample in sample target groove is by turnover model machine
Structure steps into vacuum environment at the hatch door of source housing, it may be assumed that be introduced into the rough vacuum surrounded by sample target groove with hatch door
(10-2Mbar) region (or the least chamber), then sample moves to an off source chamber condition of high vacuum degree (10 with sample target groove- 7Mbar) region.After sample target groove is positioned by detent mechanism, and then sample resolves in a specific region.Therefore,
Source housing inner chamber exists by rough vacuum to the vacuum of condition of high vacuum degree transition, and above-mentioned vacuum needs to take out very
Do-nothing system realizes.
Summary of the invention
This utility model purpose is to provide a kind of mass spectrometer ion source room pumped vacuum systems.
For achieving the above object, this utility model takes following technical proposals:
Mass spectrometer ion source room described in the utility model pumped vacuum systems, including the source housing being provided with hatch door；Institute
State the high vacuum gauge being provided with on the outer wall of source housing for detecting source housing inner chamber vacuum and for detecting ion source
Indoor are positioned at Low vacuum gauge and molecular pump, high-vacuum electromagnetic valve, the air inlet electromagnetic valve of described hatch door position vacuum；Institute
Stating high-vacuum electromagnetic valve air inlet to connect with described molecular pump air vent, high-vacuum electromagnetic valve outlet passes through the first of tee T
The mouth of pipe and second mouth of pipe connect with mechanical pump or membrane pump air inlet, and the 3rd mouth of pipe of described tee T is by pipeline and takes out true in advance
Empty electromagnetic valve connects with being positioned at described hatch door position bleeding point in source housing, in described molecular pump air inlet and source housing
Chamber connects, and the air inlet of described air inlet electromagnetic valve is connected with air, is positioned in the gas outlet of air inlet electromagnetic valve and source housing
The air inlet of hatch door position is connected.
This utility model advantage is to realize source housing inner chamber by rough vacuum to the evacuation mistake of condition of high vacuum degree transition
Journey, the vacuum time is short simultaneously, and compact conformation volume is little.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the internal structure schematic diagram of source housing described in the utility model.
Fig. 3 is the rearview of Fig. 2.
Detailed description of the invention
As Figure 1-3, mass spectrometer ion source room described in the utility model pumped vacuum systems, including being provided with hatch door 1
Source housing 2；Be provided with on the outer wall of described source housing 2 high vacuum gauge 3 for detecting source housing 2 inner chamber vacuum,
With Low vacuum gauge 4 and molecular pump 5, the fine vacuum being positioned at described hatch door 1 position vacuum in detecting source housing 2
Electromagnetic valve 6, air inlet electromagnetic valve 13；Described high-vacuum electromagnetic valve 6 air inlet connects with described molecular pump 5 air vent, fine vacuum electricity
Magnet valve 6 air vent is connected with mechanical pump 9 or membrane pump air inlet with second mouth of pipe 8 by first mouth of pipe 7 of tee T, and described three
3rd mouth of pipe 10 of siphunculus is positioned at described hatch door 1 position by pipeline 11 and forvacuum electromagnetic valve 12 in source housing 2
Bleeding point connects, described molecular pump 5 air inlet and source housing 2 inner space, and the air inlet of described air inlet electromagnetic valve 13 is with big
Gas phase connects, and the gas outlet of air inlet electromagnetic valve 13 is connected with the air inlet being positioned at hatch door position in source housing 2.
Utility model works principle is summarized as follows:
It is full of air in starting stage source housing 2, is directly bled by mechanical pump 9, but molecular pump 5 can not be the most right
The source housing 2 being full of air is bled, and could extract after needing mechanical pump 9 to extract and reaching certain vacuum.The most right
In the initial evacuation stage, first by the inner chamber body extracting vacuum of molecular pump 5 and reached 10 by mechanical pump 9-2Mbar level, simultaneously
Mechanical pump 9 is positioned at described hatch door in the 3rd mouth of pipe 10, pipeline 11 and the forvacuum electromagnetic valve 12 of tee T is to source housing 2
Bleed in 1 position；Due to air pressure balance, now Low vacuum gauge 4 reading is the vacuum in source housing 2,
Host computer constantly reads the measured value of Low vacuum gauge 4, when the measured value of Low vacuum gauge 4 reaches 10-2During mbar level, host computer sends
Instruction is opened molecular pump 5 and is carried out extracting vacuum, until vacuum reaches more than 10 in source housing 2-7Mbar level is (by high vacuum gauge 3
Reading judges) time, till i.e. can carrying out the vacuum state of ion source laser desorption.
When going out target, sample target groove 14 moves to hatch door 1 position, now opens air inlet electromagnetic valve 13 and puts into air by sample
The region that target groove 14 surrounds with hatch door 1, makes this region identical with external ambient air pressure, the most just can open hatch door 1 and more vary
Product target.
Claims (1)
1. a mass spectrometer ion source room pumped vacuum systems, including the source housing being provided with hatch door；It is characterized in that: described from
The high vacuum gauge for detecting source housing inner chamber vacuum it is provided with and in detecting source housing on the outer wall of component room
It is positioned at Low vacuum gauge and molecular pump, high-vacuum electromagnetic valve, the air inlet electromagnetic valve of described hatch door position vacuum；Described height
Vacuum solenoid air inlet connects with described molecular pump air vent, the high-vacuum electromagnetic valve outlet first mouth of pipe by tee T
Connecting with mechanical pump or membrane pump air inlet with second mouth of pipe, the 3rd mouth of pipe of described tee T is by pipeline and forvacuum electricity
Magnet valve connects with being positioned at described hatch door position bleeding point in source housing, and described molecular pump air inlet is with source housing inner chamber even
Logical, the air inlet of described air inlet electromagnetic valve is connected with air, is positioned at hatch door in the gas outlet of air inlet electromagnetic valve and source housing
The air inlet of position is connected.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620705116.XU CN205810759U (en) | 2016-07-06 | 2016-07-06 | Mass spectrometer ion source room pumped vacuum systems |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201620705116.XU CN205810759U (en) | 2016-07-06 | 2016-07-06 | Mass spectrometer ion source room pumped vacuum systems |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205810759U true CN205810759U (en) | 2016-12-14 |
Family
ID=58140730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201620705116.XU Expired - Fee Related CN205810759U (en) | 2016-07-06 | 2016-07-06 | Mass spectrometer ion source room pumped vacuum systems |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205810759U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109031387A (en) * | 2018-05-23 | 2018-12-18 | 衡阳师范学院 | The device and method of rapid draing static collection emanometer measurement chamber |
| CN109444249A (en) * | 2018-11-23 | 2019-03-08 | 广州禾信康源医疗科技有限公司 | Vacuum for vacuum instrument is into varying device |
| WO2023207159A1 (en) * | 2022-04-29 | 2023-11-02 | 中元汇吉生物技术股份有限公司 | Ion source cavity, ion source, and mass spectrometer |
-
2016
- 2016-07-06 CN CN201620705116.XU patent/CN205810759U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109031387A (en) * | 2018-05-23 | 2018-12-18 | 衡阳师范学院 | The device and method of rapid draing static collection emanometer measurement chamber |
| CN109444249A (en) * | 2018-11-23 | 2019-03-08 | 广州禾信康源医疗科技有限公司 | Vacuum for vacuum instrument is into varying device |
| CN109444249B (en) * | 2018-11-23 | 2024-10-15 | 广州禾信康源医疗科技有限公司 | Vacuum sample inlet and changing device for vacuum instrument |
| WO2023207159A1 (en) * | 2022-04-29 | 2023-11-02 | 中元汇吉生物技术股份有限公司 | Ion source cavity, ion source, and mass spectrometer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161214 Termination date: 20190706 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |