CN205810760U - Be suitable to the pumped vacuum systems of time of-flight mass spectrometer source housing - Google Patents
Be suitable to the pumped vacuum systems of time of-flight mass spectrometer source housing Download PDFInfo
- Publication number
- CN205810760U CN205810760U CN201620705119.3U CN201620705119U CN205810760U CN 205810760 U CN205810760 U CN 205810760U CN 201620705119 U CN201620705119 U CN 201620705119U CN 205810760 U CN205810760 U CN 205810760U
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- China
- Prior art keywords
- vacuum
- source housing
- electromagnetic valve
- mouth
- hatch door
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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Abstract
The utility model discloses a kind of pumped vacuum systems being suitable to time of-flight mass spectrometer source housing, including the source housing being provided with hatch door;It is provided with the high vacuum gauge for detecting source housing inner chamber vacuum on the outer wall of described source housing and in detecting source housing, is positioned at Low vacuum gauge and molecular pump, the high-vacuum electromagnetic valve of described hatch door position vacuum;Described high-vacuum electromagnetic valve air inlet connects with described molecular pump air vent, high-vacuum electromagnetic valve outlet is connected with mechanical pump or membrane pump air inlet by first mouth of pipe and second mouth of pipe of tee T, 3rd mouth of pipe of described tee T is connected with being positioned at described hatch door position bleeding point in source housing with forvacuum electromagnetic valve by pipeline, described molecular pump air inlet and source housing inner space.This utility model advantage is to realize source housing inner chamber by rough vacuum to the vacuum of condition of high vacuum degree transition, and the vacuum time is short simultaneously, and compact conformation volume is little.
Description
Technical field
This utility model relates to time of-flight mass spectrometer source housing, especially relates to be suitable to time of-flight mass spectrometer ion
The pumped vacuum systems of source chamber.
Background technology
Matrix Assisted Laser Desorption ion source is solid sample resolving, and the sample in sample target groove is by turnover model machine
Structure steps into vacuum environment at the hatch door of source housing, it may be assumed that be introduced into the rough vacuum surrounded by sample target groove with hatch door
(10-2Mbar) region (or the least chamber), then sample moves to an off source chamber condition of high vacuum degree (10 with sample target groove- 7Mbar) region.After sample target groove is positioned by detent mechanism, and then sample resolves in a specific region.Therefore,
Source housing inner chamber exists by rough vacuum to the vacuum of condition of high vacuum degree transition, and above-mentioned vacuum needs to take out very
Do-nothing system realizes.
Summary of the invention
This utility model purpose is to provide a kind of pumped vacuum systems being suitable to time of-flight mass spectrometer source housing.
For achieving the above object, this utility model takes following technical proposals:
The pumped vacuum systems being suitable to time of-flight mass spectrometer source housing described in the utility model, including being provided with hatch door
Source housing;It is provided with the high vacuum gauge for detecting source housing inner chamber vacuum on the outer wall of described source housing and uses
Low vacuum gauge and molecular pump, the high-vacuum electromagnetic valve of described hatch door position vacuum it is positioned in detection source housing;Institute
Stating high-vacuum electromagnetic valve air inlet to connect with described molecular pump air vent, high-vacuum electromagnetic valve outlet passes through the first of tee T
The mouth of pipe and second mouth of pipe connect with mechanical pump or membrane pump air inlet, and the 3rd mouth of pipe of described tee T is by pipeline and takes out true in advance
Empty electromagnetic valve connects with being positioned at described hatch door position bleeding point in source housing, in described molecular pump air inlet and source housing
Chamber connects.
This utility model advantage is to realize source housing inner chamber by rough vacuum to the evacuation mistake of condition of high vacuum degree transition
Journey, the vacuum time is short simultaneously, and compact conformation volume is little.
Accompanying drawing explanation
Fig. 1 is structural representation of the present utility model.
Fig. 2 is the internal structure schematic diagram of source housing described in the utility model.
Fig. 3 is the rearview of Fig. 2.
Detailed description of the invention
As Figure 1-3, the pumped vacuum systems being suitable to time of-flight mass spectrometer source housing described in the utility model, including
It is provided with the source housing 2 of hatch door 1;It is provided with on the outer wall of described source housing 2 for detecting source housing 2 inner chamber vacuum
High vacuum gauge 3 and be positioned at the Low vacuum gauge 4 of described hatch door 1 position vacuum, Yi Jifen in detect source housing 2
Sub-pump 5, high-vacuum electromagnetic valve 6;Described high-vacuum electromagnetic valve 6 air inlet connects with described molecular pump 5 air vent, high-vacuum electromagnetic
Valve 6 air vent is connected with mechanical pump 9 or membrane pump air inlet with second mouth of pipe 8 by first mouth of pipe 7 of tee T, described threeway
3rd mouth of pipe 10 of pipe is taken out by being positioned at described hatch door 1 position in pipeline 11 and forvacuum electromagnetic valve 12 and source housing 2
QI KOU connects, described molecular pump 5 air inlet and source housing 2 inner space.
Utility model works principle is summarized as follows:
It is full of air in starting stage source housing 2, is directly bled by mechanical pump 9, but molecular pump 5 can not be the most right
The source housing 2 being full of air is bled, and could extract after needing mechanical pump 9 to extract and reaching certain vacuum.The most right
In the initial evacuation stage, first by the inner chamber body extracting vacuum of molecular pump 5 and reached 10 by mechanical pump 9-2Mbar level, simultaneously
Mechanical pump 9 is positioned at described hatch door in the 3rd mouth of pipe 10, pipeline 11 and the forvacuum electromagnetic valve 12 of tee T is to source housing 2
Bleed in 1 position;Due to air pressure balance, now Low vacuum gauge 4 reading is the vacuum in source housing 2,
Host computer constantly reads the measured value of Low vacuum gauge 4, when the measured value of Low vacuum gauge 4 reaches 10-2During mbar level, host computer sends
Instruction is opened molecular pump 5 and is carried out extracting vacuum, until vacuum reaches more than 10 in source housing 2-7Mbar level is (by high vacuum gauge 3
Reading judges) time, till i.e. can carrying out the vacuum state of ion source laser desorption.
When entering target, close high-vacuum electromagnetic valve 6, open forvacuum electromagnetic valve 12 and make mechanical pump 9 to by sample target groove 14
Bleed in the region surrounded with hatch door 1, when being extracted into 10-2During the mbar order of magnitude, sample target groove 14 can be controlled toward source housing 2
Internal motion.
Claims (1)
1. be suitable to a pumped vacuum systems for time of-flight mass spectrometer source housing, including the source housing being provided with hatch door;Its
It is characterised by: be provided with the high vacuum gauge for detecting source housing inner chamber vacuum on the outer wall of described source housing and use
Low vacuum gauge and molecular pump, the high-vacuum electromagnetic valve of described hatch door position vacuum it is positioned in detection source housing;Institute
Stating high-vacuum electromagnetic valve air inlet to connect with described molecular pump air vent, high-vacuum electromagnetic valve outlet passes through the first of tee T
The mouth of pipe and second mouth of pipe connect with mechanical pump or membrane pump air inlet, and the 3rd mouth of pipe of described tee T is by pipeline and takes out true in advance
Empty electromagnetic valve connects with being positioned at described hatch door position bleeding point in source housing, in described molecular pump air inlet and source housing
Chamber connects.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201620705119.3U CN205810760U (en) | 2016-07-06 | 2016-07-06 | Be suitable to the pumped vacuum systems of time of-flight mass spectrometer source housing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201620705119.3U CN205810760U (en) | 2016-07-06 | 2016-07-06 | Be suitable to the pumped vacuum systems of time of-flight mass spectrometer source housing |
Publications (1)
Publication Number | Publication Date |
---|---|
CN205810760U true CN205810760U (en) | 2016-12-14 |
Family
ID=58140720
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201620705119.3U Expired - Fee Related CN205810760U (en) | 2016-07-06 | 2016-07-06 | Be suitable to the pumped vacuum systems of time of-flight mass spectrometer source housing |
Country Status (1)
Country | Link |
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CN (1) | CN205810760U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107644803A (en) * | 2017-10-01 | 2018-01-30 | 江苏天瑞仪器股份有限公司 | A kind of gas chromatography mass spectrometry vacuum cavity |
-
2016
- 2016-07-06 CN CN201620705119.3U patent/CN205810760U/en not_active Expired - Fee Related
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107644803A (en) * | 2017-10-01 | 2018-01-30 | 江苏天瑞仪器股份有限公司 | A kind of gas chromatography mass spectrometry vacuum cavity |
CN107644803B (en) * | 2017-10-01 | 2024-03-19 | 江苏天瑞仪器股份有限公司 | Air-mass combined vacuum cavity |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20161214 Termination date: 20190706 |
|
CF01 | Termination of patent right due to non-payment of annual fee |