CN107543661A - The adjustable vacuum leak hunting automated system of sensitivity - Google Patents
The adjustable vacuum leak hunting automated system of sensitivity Download PDFInfo
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- CN107543661A CN107543661A CN201610586739.4A CN201610586739A CN107543661A CN 107543661 A CN107543661 A CN 107543661A CN 201610586739 A CN201610586739 A CN 201610586739A CN 107543661 A CN107543661 A CN 107543661A
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Abstract
The invention discloses a kind of adjustable vacuum leak hunting automated system of sensitivity, mainly includes vacuum acquirement and measuring unit and leak detection unit；The vacuum acquirement includes vacuum chamber, molecular pump, screw pump, vacuum meter, pneumatic gate valve, controllable butterfly valve, magnetic valve and filter with measuring unit；The leak detection unit includes helium mass spectrometer leak detector, referance leak, inflation/deflation equipment and computer control system, and computer control system is controlled by PLC program to molecular pump, screw pump, helium mass spectrometer leak detector and each valve.The present invention improves convenience and accuracy rate that test apparatus operates, experimental data processing ability is effectively lifted, and saves test period and funds by computer control system.
Description
Technical field
Vacuum leak hunting technical field of the present invention, specifically, the present invention relates to a kind of adjustable vacuum leak hunting of sensitivity certainly
Dynamicization system, the system opening and closing of solenoid valve control referance leak, automatically control helium using controllable butterfly valve regulation leak detection system flow
Mass-spectrometer leak detector, realize that sensitivity can adjust.
Background technology
At present, general vacuum leak detecting system mainly includes vacuum chamber, high-vacuum molecular pump, auxiliary pump, vacuum meter, cut-off
Valve, referance leak and leak detector etc..First to vacuum chamber, stop valve is opened when reaching the vacuum that leak detection requires, is made
Vacuum chamber and the leak detector of normal work connect, and the record system background values after leak detector is stable, then open referance leak, treat
Leak detector indicating value is stable, records response value, and standard of closure small opening waits leak detector to return to background initial value, work is filled with to detected pieces
The helium of pressure, the response value of leak detector is recorded, so as to reach vacuum leak hunting purpose.
After system sensitivity refers to that examined product is connected with leak detection system, leak detector and leak detection system are in specifically work bar
Under part, leak detector can detect when pure probe gas passes through small opening minimum leak rate.
At present, the sensitivity of vacuum leak detecting system is substantially a fixed value.According to external related data and domestic experience,
The actual value of the integral leakage of satellite propulsion system is generally 10-6Pa·m3/ s~10-7Pa·m3/ s magnitude.Due to different product
Leak rate require different, therefore can not be hunted leak for the less product of allowed leakage, common vacuum leak detecting system.
Therefore, it is necessary to develop a kind of adjustable vacuum leak hunting automated system of sensitivity.
The content of the invention
It is an object of the invention to provide a kind of adjustable vacuum leak hunting automated system of sensitivity, the system is using controllable
Butterfly valve adjusts leak detection system flow, the opening and closing of solenoid valve control referance leak, automatically controls helium mass spectrometer leak detector, so as to realize leak detection
The adjustable vacuum leak hunting automated system of sensitivity.
To achieve these goals, present invention employs following technical solution：
The adjustable vacuum leak hunting automated system of sensitivity, mainly includes vacuum acquirement and measuring unit and leak detection is single
Member；The vacuum acquirement and measuring unit include vacuum chamber, molecular pump, screw pump, vacuum meter, pneumatic gate valve, controllable butterfly valve,
Magnetic valve and filter；The leak detection unit includes helium mass spectrometer leak detector, referance leak, inflation/deflation equipment and computer control system
System, wherein, molecular pump one end is connected on vacuum chamber by pneumatic gate valve one, and the molecular pump other end passes through magnetic valve one respectively
With controllable butterfly valve and helium mass spectrometer leak detector, screw pump pipeline connection, screw pump is with controllable butterfly valve pipeline again respectively by pneumatically inserting
Plate valve two and magnetic valve two connect with vacuum chamber, filter one；Vacuum meter is also respectively provided with vacuum chamber, by magnetic valve three
The filter two of connection and the referance leak connected by magnetic valve four, vacuum chamber is also associated with inflation/deflation equipment, to be measured
Sample carries out inflation/deflation, and computer control system is by PLC program to molecular pump, screw pump, helium mass spectrometer leak detector and each valve
Door is controlled.
Further, the controllable butterfly valve is by setting valve opening come the flow of control valve.
Further, the computer control system is used to send control letter to vavuum pump, each valve, helium mass spectrometer leak detector
Number, and the incoming data-signal of vavuum pump, each valve, helium mass spectrometer leak detector is handled, then control, measurement result are showed
Come.
Further, screw pump on the pipeline of pneumatic gate valve two with being additionally provided with vacuum meter.
Further, standby magnetic valve five is additionally provided with the pipeline between magnetic valve four and referance leak, for balancing
Referance leak pressure.
The adjustable vacuum leak hunting automatic mode of sensitivity, comprises the following steps：
1) product to be hunted leak is arranged in vacuum chamber, connects inflation/deflation equipment, vacuum chamber is evacuated；
2) reach after leak detection requires vacuum, start helium mass spectrometer leak detector, after helium mass spectrometer leak detector normal work, be connected into inspection
Leakage system；
3) screw pump gas flow is entered by the regulation of controllable butterfly valve, so as to change the gas flow into helium mass spectrometer leak detector,
Change the background noise of helium mass spectrometer leak detector；
4) referance leak is demarcated by computer control system, records related data, recovered after demarcation to system sheet
Behind bottom, treat leak detection product and be filled with the search gas for requiring pressure, record leak detector data and result is fed back into computer control
System processed, then after the processing of computer control system, draw the parameter of product to be hunted leak.
It is an advantage of the current invention that it can realize that leak detection system sensitivity is freely adjusted in a set of vacuum leak detecting system
Section, so as to realize the vacuum leak hunting of the product to different leak rate requirements, improves the utilization rate of separate unit testing equipment.It is meanwhile logical
Computer control system to be crossed, improves the convenience and accuracy rate of test apparatus operation, experimental data processing ability is effectively lifted,
Save test period and funds.
Brief description of the drawings
Fig. 1 is the schematic diagram of the adjustable vacuum leak hunting automated system of sensitivity of the present invention.
Embodiment
Embodiments of the present invention are further described below in conjunction with accompanying drawing.
Reference picture 1, whole system of the invention mainly include vacuum acquirement and measuring unit and leak detection unit；It is described true
Sky obtains includes vacuum chamber 7, molecular pump 9, screw pump 13, vacuum meter 6, pneumatic gate valve 8,17, controllable butterfly valve with measuring unit
10th, magnetic valve and filter；The leak detection unit includes helium mass spectrometer leak detector 12, referance leak 3, inflation/deflation equipment 18 and calculated
Machine control system 20, wherein, the one end of molecular pump 9 is connected on vacuum chamber 7 by pneumatic gate valve 1, the other end of molecular pump 9
Respectively by magnetic valve 1 and controllable butterfly valve 10 and helium mass spectrometer leak detector 12, the pipeline connection of screw pump 13, screw pump 13 with can
The control pipeline of butterfly valve 10 is connected by pneumatic gate valve 27 and magnetic valve 2 15 with vacuum chamber 7, filter 1 respectively again, screw rod
Pump on the pipeline of pneumatic gate valve two with being additionally provided with vacuum meter；The controllable butterfly valve is by setting valve opening come control valve
Flow, vacuum meter 6, the filter 24 connected by magnetic valve 35 are also respectively provided with vacuum chamber and passes through magnetic valve
The referance leak 3 of 42 connections, vacuum chamber 7 are also associated with inflation/deflation equipment 18, and inflation/deflation, computer are carried out to testing sample 19
Control system 20 is controlled by PLC program to molecular pump 9, screw pump 13, helium mass spectrometer leak detector 12 and each valve, specifically
Ground, computer control system are used to vavuum pump, each valve, helium mass spectrometer leak detector send control signal, and handle vavuum pump,
The incoming data-signal of each valve, helium mass spectrometer leak detector, then control, measurement result are showed.
In a specific embodiment, standby magnetic valve is additionally provided with the pipeline between magnetic valve four and referance leak
Five, for tension metrics small opening pressure.
The method that vacuum leak hunting is carried out using the system of the present invention is as follows：The first step, product is arranged on vacuum chamber, connected
Good inflation/deflation equipment and pipeline, close vacuum chamber gate；Second step, start screw pump, pneumatic gate valve 17 is opened, to vacuum chamber
Pumping, vacuum degree in vacuum chamber is monitored by vacuum meter 6；3rd step, when vacuum reaches 10Pa, pneumatic gate valve 17 is closed,
Controllable butterfly valve and pneumatic gate valve 8 are opened, starts molecular pump；4th step, vacuum chamber reach leak detection and require 5 × 10-3Pa of vacuum
Afterwards, start helium mass spectrometer leak detector, after helium mass spectrometer leak detector normal work, opens solenoid valve 11, helium mass spectrometer leak detector is connected into inspection
Leakage system；5th step, controllable butterfly valve valve opening being adjusted by computer control system, control enters screw pump gas flow, from
And change the gas flow into helium mass spectrometer leak detector, change the background noise value of helium mass spectrometer leak detector, such as 5 × 10-9Pa·m3/s；
6th step, referance leak is opened by computer control system, vacuum leak detecting system demarcated, record standard small opening is nominal
The changing value of value and helium mass spectrometer leak detector, draws system leak detection sensitivities；7th step, helium mass spectrum is examined after referance leak is demarcated
Leakage instrument recovers to system background 5 × 10-9Pa·m3After/s, the search gas for requiring pressure is filled with to product by inflation/deflation equipment
(high-purity helium), record leak detector data variation value in three minutes and result is fed back into computer control system；8th step, warp
After computer control system calculating processing, the leak rate value of product is drawn, the value is less than or equal to allowed leakage value, and then product leak rate closes
Lattice, the value is more than allowed leakage value, and then product leak rate is unqualified.
Although the embodiment of the present invention is described in detail and illustrated above, it should be noted that
Those skilled in the art can carry out various equivalent changes and modification, its institute to above-mentioned embodiment according to the spirit of the present invention
Caused function, all should be within protection scope of the present invention in the spirit covered without departing from specification and accompanying drawing.
Claims (6)
1. the adjustable vacuum leak hunting automated system of sensitivity, mainly include vacuum acquirement and measuring unit and leak detection unit；
The vacuum acquirement includes vacuum chamber, molecular pump, screw pump, vacuum meter, pneumatic gate valve, controllable butterfly valve, electricity with measuring unit
Magnet valve and filter；The leak detection unit includes helium mass spectrometer leak detector, referance leak, inflation/deflation equipment and computer control system
System, wherein, molecular pump one end is connected on vacuum chamber by pneumatic gate valve one, and the molecular pump other end passes through magnetic valve one respectively
With controllable butterfly valve and helium mass spectrometer leak detector, screw pump pipeline connection, screw pump is with controllable butterfly valve pipeline again respectively by pneumatically inserting
Plate valve two and magnetic valve two connect with vacuum chamber, filter one；Vacuum meter is also respectively provided with vacuum chamber, by magnetic valve three
The filter two of connection and the referance leak connected by magnetic valve four, vacuum chamber is also associated with inflation/deflation equipment, to be measured
Sample carries out inflation/deflation, and computer control system is by PLC program to molecular pump, screw pump, helium mass spectrometer leak detector and each valve
Door is controlled.
2. the system as claimed in claim 1, wherein, the controllable butterfly valve is by setting valve opening come the stream of control valve
Amount.
3. the system as claimed in claim 1, wherein the computer control system is used for vavuum pump, each valve, helium mass spectrum
Leak detector sends control signal, and handles the incoming data-signal of vavuum pump, each valve, helium mass spectrometer leak detector, then will control,
Measurement result shows.
4. the system as described in claim any one of 1-3, wherein, screw pump on the pipeline of pneumatic gate valve two with being additionally provided with
Vacuum meter.
5. the system as described in claim any one of 1-3, wherein, also set up on the pipeline between magnetic valve four and referance leak
There is standby magnetic valve five, for tension metrics small opening pressure.
6. the method hunted leak using any one of the claim 1-5 systems, is comprised the following steps：
1) product to be hunted leak is arranged in vacuum chamber, connects inflation/deflation equipment, vacuum chamber is evacuated；
2) reach after leak detection requires vacuum, start helium mass spectrometer leak detector, after helium mass spectrometer leak detector normal work, be connected into leak detection system
System；
3) screw pump gas flow is entered by the regulation of controllable butterfly valve, so as to change the gas flow into helium mass spectrometer leak detector, changed
The background noise of helium mass spectrometer leak detector；
4) referance leak is demarcated by computer control system, records related data, recovered after demarcation to system background,
Treat leak detection product and be filled with the search gas for requiring pressure, record leak detector data and result is fed back into computer control system
System, then after the processing of computer control system, draw the parameter of product to be hunted leak.
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Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109297640A (en) * | 2018-09-18 | 2019-02-01 | 西安先为电器科技有限责任公司 | A kind of device and method improving vacuum ionization halogen gas detector accuracy |
| CN109323811A (en) * | 2017-07-31 | 2019-02-12 | 深圳市远望工业自动化设备有限公司 | Mass spectrum leak detection equipment with vacuum cavity |
| CN109357819A (en) * | 2018-12-19 | 2019-02-19 | 国联汽车动力电池研究院有限责任公司 | It is a kind of for detecting the device and method of battery system box sealing performance |
| CN109655212A (en) * | 2018-12-17 | 2019-04-19 | 兰州空间技术物理研究所 | A kind of extruding metal sealing device for detecting leak rate and method |
| CN109765004A (en) * | 2019-01-21 | 2019-05-17 | 辽宁工程技术大学 | A kind of gas seal property analog synthesis detection system |
| US20190187021A1 (en) * | 2017-12-20 | 2019-06-20 | Miasolé Equipment Integration (Fujian) Co., Ltd. | Airtightness detection equipment |
| CN111739663A (en) * | 2020-07-27 | 2020-10-02 | 核工业西南物理研究院 | Vacuum helium leak detection tool and method suitable for nuclear fusion reaction device |
| CN112857695A (en) * | 2021-01-15 | 2021-05-28 | 合肥工业大学 | Laser gyro stable inflation and high-precision leak detection system |
| CN113029460A (en) * | 2021-02-03 | 2021-06-25 | 武汉英飞光创科技有限公司 | Leak detection method for optical device |
| CN114411110A (en) * | 2022-01-24 | 2022-04-29 | 苏州中科科仪技术发展有限公司 | Coating apparatus and control method of coating apparatus |
| CN114918431A (en) * | 2022-05-19 | 2022-08-19 | 西安增材制造国家研究院有限公司 | Vacuum environment control method, system, equipment and medium for EBSM equipment forming chamber |
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Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109323811A (en) * | 2017-07-31 | 2019-02-12 | 深圳市远望工业自动化设备有限公司 | Mass spectrum leak detection equipment with vacuum cavity |
| US20190187021A1 (en) * | 2017-12-20 | 2019-06-20 | Miasolé Equipment Integration (Fujian) Co., Ltd. | Airtightness detection equipment |
| CN109297640A (en) * | 2018-09-18 | 2019-02-01 | 西安先为电器科技有限责任公司 | A kind of device and method improving vacuum ionization halogen gas detector accuracy |
| CN109655212B (en) * | 2018-12-17 | 2021-06-04 | 兰州空间技术物理研究所 | Metal extrusion sealing leakage rate detection device and method |
| CN109655212A (en) * | 2018-12-17 | 2019-04-19 | 兰州空间技术物理研究所 | A kind of extruding metal sealing device for detecting leak rate and method |
| CN109357819A (en) * | 2018-12-19 | 2019-02-19 | 国联汽车动力电池研究院有限责任公司 | It is a kind of for detecting the device and method of battery system box sealing performance |
| CN109765004A (en) * | 2019-01-21 | 2019-05-17 | 辽宁工程技术大学 | A kind of gas seal property analog synthesis detection system |
| CN111739663A (en) * | 2020-07-27 | 2020-10-02 | 核工业西南物理研究院 | Vacuum helium leak detection tool and method suitable for nuclear fusion reaction device |
| CN112857695A (en) * | 2021-01-15 | 2021-05-28 | 合肥工业大学 | Laser gyro stable inflation and high-precision leak detection system |
| CN113029460A (en) * | 2021-02-03 | 2021-06-25 | 武汉英飞光创科技有限公司 | Leak detection method for optical device |
| CN113029460B (en) * | 2021-02-03 | 2021-12-31 | 武汉英飞光创科技有限公司 | Leak detection method for optical device |
| CN114411110A (en) * | 2022-01-24 | 2022-04-29 | 苏州中科科仪技术发展有限公司 | Coating apparatus and control method of coating apparatus |
| CN114411110B (en) * | 2022-01-24 | 2023-04-14 | 苏州中科科仪技术发展有限公司 | Coating apparatus and control method of coating apparatus |
| CN114918431A (en) * | 2022-05-19 | 2022-08-19 | 西安增材制造国家研究院有限公司 | Vacuum environment control method, system, equipment and medium for EBSM equipment forming chamber |
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