CN114918431A - Vacuum environment control method, system, equipment and medium for EBSM equipment forming chamber - Google Patents
Vacuum environment control method, system, equipment and medium for EBSM equipment forming chamber Download PDFInfo
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- CN114918431A CN114918431A CN202210545730.4A CN202210545730A CN114918431A CN 114918431 A CN114918431 A CN 114918431A CN 202210545730 A CN202210545730 A CN 202210545730A CN 114918431 A CN114918431 A CN 114918431A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/30—Process control
- B22F10/32—Process control of the atmosphere, e.g. composition or pressure in a building chamber
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F10/00—Additive manufacturing of workpieces or articles from metallic powder
- B22F10/20—Direct sintering or melting
- B22F10/28—Powder bed fusion, e.g. selective laser melting [SLM] or electron beam melting [EBM]
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F12/00—Apparatus or devices specially adapted for additive manufacturing; Auxiliary means for additive manufacturing; Combinations of additive manufacturing apparatus or devices with other processing apparatus or devices
- B22F12/90—Means for process control, e.g. cameras or sensors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B33—ADDITIVE MANUFACTURING TECHNOLOGY
- B33Y—ADDITIVE MANUFACTURING, i.e. MANUFACTURING OF THREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVE AGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING, STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING
- B33Y30/00—Apparatus for additive manufacturing; Details thereof or accessories therefor
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F2999/00—Aspects linked to processes or compositions used in powder metallurgy
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P10/00—Technologies related to metal processing
- Y02P10/25—Process efficiency
Abstract
The invention relates to the field of 3D printing, in particular to a vacuum environment control method, a system, equipment and a medium for an EBSM (electron beam lithography) equipment forming chamber, wherein the forming chamber can be controlled to quickly reach a high-vacuum processing environment by controlling a plurality of valves and a vacuum pump in vacuum starting, so that the working efficiency is improved, the high-vacuum processing environment is ensured, the pollution of parts can be reduced during processing, the parts can be protected, the average free path under high vacuum is high, and the electronic energy can not be attenuated seriously; and in the vacuum stopping process, the vacuum environment can be quickly stopped, so that the printing mold can be conveniently and quickly taken out.
Description
Technical Field
The invention relates to the field of 3D printing, in particular to a vacuum environment control method, a vacuum environment control system, vacuum environment control equipment and a vacuum environment control medium for an EBSM (electron beam lithography) equipment forming chamber.
Background
In recent years, in the field of 3D printing, a large-sized EBSM 3D printing technology has received more and more extensive attention, such as an electron gun, an electron beam, and the like, have been successfully developed and commercialized, and some 3D printing apparatuses using the technology are commercially available. The large-size EBSM equipment with multiple groups of electron guns working in a coordinated mode at present requires that a high-vacuum-degree processing environment can be quickly achieved in a forming chamber, but the high-vacuum-degree processing environment cannot be quickly achieved in the current forming chamber, so that the efficiency of parts in processing cannot be improved, and meanwhile, when the parts are processed, the vacuum environment in the forming chamber cannot be quickly reached, so that the risk of pollution exists. Therefore, vacuum control of the EBSM equipment is very important, and the need for developing a more reliable and complete vacuum control system is urgent.
Disclosure of Invention
The invention provides a vacuum environment control method, a system, equipment and a medium for an EBSM (electron beam space modulation) equipment forming chamber, aiming at the problems that in the prior art, electron beam selective molten metal additive manufacturing equipment has large volume, complex structure, difficulty in reaching the vacuum degree, high processing cost and incapability of enlarging size components.
The invention is realized by the following technical scheme:
a vacuum environment control method for an EBSM equipment forming chamber comprises the following steps:
starting in vacuum: sending a vacuum starting instruction, sequentially opening a plurality of valves and a vacuum pump, and sending an instruction for controlling the qualified forming chamber to a master control system after the vacuum chamber meets the requirement of vacuum degree; wherein, the valves comprise safety valves, butterfly valves, gate valves and flow regulating valves; the plurality of vacuum pumps comprise a front-stage screw pump, a secondary roots pump and a plurality of molecular pumps;
the vacuum start-up was as follows:
opening a butterfly valve, sequentially communicating gas circuits between the control forming chamber and the preceding stage screw pump, starting the secondary roots pump when the preceding stage screw pump reaches a rated rotating speed, closing the butterfly valve when the preceding stage vacuum degree of the control forming chamber meets requirements, and opening a gate valve and a flow regulating valve; a plurality of molecular pumps are started simultaneously, the vacuum degree of the control forming chamber is detected, and a qualified signal of the control forming chamber is sent to a master control system after the vacuum degree requirement in the control forming chamber is met;
starting printing: the master control system sends a printing instruction after receiving the qualified instruction of the vacuum chamber;
stopping vacuum: after printing is finished, sending a vacuum stop instruction, and sequentially stopping a plurality of vacuum pumps and valves;
wherein the vacuum stop comprises the following steps:
and (3) closing the plurality of molecular pumps, closing the gate valve and the flow regulating valve in sequence when the rotating speed of the plurality of molecular pumps is reduced from the highest level to the lowest level, stopping the secondary roots pump, and stopping the preceding stage screw pump after the speed of the secondary roots pump is reduced.
Furthermore, when the plurality of molecular pumps are started simultaneously, the master control system monitors the alarm signals of the molecular pumps, detects whether faults exist, stops opening of the gate valve and the flow regulating valve if fault information is monitored, and overhauls the plurality of molecular pumps, otherwise, the molecular pumps work normally.
Further, before the butterfly valve is opened, the control molding chamber door, the cylinder, the safety valve, the gate valve and the flow regulating valve are monitored in sequence.
Preferably, after the vacuum stops, the air release valve is opened to release air, after the air release is finished, the vacuum count value of the control forming chamber is detected, and when the vacuum count value meets the requirement, the printing mold is taken out.
A vacuum environment control system for an EBSM apparatus forming chamber, comprising:
a first start command module for vacuum start: sending a vacuum starting instruction, sequentially opening a plurality of valves and a vacuum pump, and sending an instruction for controlling the qualified forming chamber to a master control system after the vacuum chamber meets the vacuum degree requirement; wherein, the valves comprise a safety valve, a butterfly valve, a gate valve and a flow regulating valve; the plurality of vacuum pumps comprise a front-stage screw pump, a secondary roots pump and a plurality of molecular pumps;
the vacuum start-up was as follows:
opening a butterfly valve, sequentially communicating gas circuits between the control forming chamber and the preceding stage screw pump, starting the secondary roots pump when the preceding stage screw pump reaches a rated rotating speed, closing the butterfly valve when the preceding stage vacuum degree of the control forming chamber meets requirements, and opening a gate valve and a flow regulating valve; a plurality of molecular pumps are started simultaneously, the vacuum degree of the control forming chamber is detected, and a qualified signal of the control forming chamber is sent to a master control system after the vacuum degree requirement in the control forming chamber is met;
the second starting instruction module is used for starting printing: the master control system sends a printing instruction after receiving the qualified instruction of the vacuum chamber;
a stop command module to vacuum stop: after printing is finished, sending a vacuum stop instruction, and sequentially stopping a plurality of vacuum pumps and valves;
wherein the vacuum stop comprises the following steps:
and closing the plurality of molecular pumps, sequentially closing the gate valve and the flow regulating valve when the rotating speed of the plurality of molecular pumps is reduced from the highest level to the lowest level, stopping the secondary roots pump, and stopping the preceding-stage screw pump after the speed of the secondary roots pump is reduced.
Further, the first starting instruction module further comprises a monitoring module, and the monitoring module is used for monitoring the alarm signals of the molecular pumps when the molecular pumps are started simultaneously, detecting whether faults exist or not, stopping opening of the gate valve and the flow regulating valve if fault information is monitored, and overhauling the molecular pumps, otherwise, the molecular pumps normally work.
Vacuum environment control device of an EBSM (electron beam lithography) device forming chamber, comprising a memory, a processor and a computer program stored in the memory and executable on the processor, characterized in that the processor, when executing the computer program, implements the steps of the vacuum environment control method of an EBSM device forming chamber as described above.
A computer-readable storage medium storing a computer program, wherein the computer program, when executed by a processor, implements the steps of a method for vacuum environment control of an EBSM apparatus forming chamber, as described above.
Compared with the prior art, the invention has the following beneficial technical effects:
the invention provides a vacuum environment control method of an EBSM (electron beam lithography) equipment forming chamber, which is characterized in that a plurality of valves and vacuum pumps are controlled during vacuum starting, so that the forming chamber can be controlled to quickly reach a high-vacuum processing environment, the working efficiency is improved, the high-vacuum processing environment is ensured, the pollution of parts can be reduced during processing, the parts can be protected, the average free path is high under high vacuum, and the electron energy cannot be attenuated seriously; and in the vacuum stopping process, the vacuum environment can be quickly stopped, so that the printing mold can be conveniently and quickly taken out.
Furthermore, the valves comprise safety valves, butterfly valves, gate valves and flow regulating valves; the vacuum pumps comprise a preceding stage screw pump, a secondary roots pump and a plurality of molecular pumps, and the generation of a vacuum environment can be effectively improved through a plurality of valves and a plurality of vacuum pumps.
A vacuum environment control system of an EBSM equipment forming chamber is characterized in that a first starting instruction module is used for starting vacuum in a control forming chamber until the requirement of vacuum degree is met, and then an instruction for controlling the qualified forming chamber is sent to a master control system; and then the second starting instruction module prints in the control forming chamber, and after the printing is finished, the stopping instruction module stops the vacuum, so that the intelligence of the vacuum equipment in the EBSM equipment forming chamber is improved.
Drawings
FIG. 1 is a flow chart of a method for controlling a vacuum environment in a forming chamber of an EBSM machine according to the present invention;
FIG. 2 is a flow chart of vacuum environment controlled vacuum start-up of a forming chamber of an EBSM apparatus of the present invention;
FIG. 3 is a flow chart illustrating the vacuum environment-controlled vacuum stop of the EBSM equipment forming chamber of the present invention;
FIG. 4 is a block diagram of a vacuum environment control system for a forming chamber of an EBSM apparatus of the present invention.
Detailed Description
In order to make those skilled in the art better understand the technical solutions of the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that the terms "first," "second," and the like in the description and claims of the present invention and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
The invention is described in further detail below with reference to the accompanying drawings:
referring to fig. 1, in an embodiment of the present invention, a method, a system, a device, and a medium for controlling a vacuum environment of a molding chamber of an EBSM device are provided, so as to effectively solve the problems of a large volume, a complex structure, a difficulty in reaching a vacuum degree, a high processing cost, and a failure to increase a size component of an existing electron beam selective molten metal additive manufacturing device.
In particular to a vacuum environment control method of the EBSM equipment forming chamber. The method comprises the following steps:
starting in vacuum: sending a vacuum starting instruction, sequentially opening a plurality of valves and a vacuum pump, and sending an instruction for controlling the qualified forming chamber to a master control system after the vacuum chamber meets the vacuum degree requirement; wherein, the valves comprise safety valves, butterfly valves, gate valves and flow regulating valves; the plurality of vacuum pumps comprise a preceding stage screw pump, a secondary roots pump and a plurality of molecular pumps;
the vacuum start-up was as follows:
opening a butterfly valve, sequentially communicating gas circuits between the control forming chamber and the preceding stage screw pump, starting the secondary roots pump when the preceding stage screw pump reaches a rated rotating speed, closing the butterfly valve when the preceding stage vacuum degree of the control forming chamber meets requirements, and opening a gate valve and a flow regulating valve; starting a plurality of molecular pumps simultaneously, detecting the vacuum degree of the control forming chamber, and sending a qualified signal of the control forming chamber to the master control system after the vacuum degree requirement in the control forming chamber is met;
starting printing: the master control system sends a printing instruction after receiving the qualified instruction of the vacuum chamber;
stopping vacuum: after printing is finished, sending a vacuum stop instruction, and sequentially stopping a plurality of vacuum pumps and valves;
wherein the vacuum stop comprises the following steps:
and (3) closing the plurality of molecular pumps, closing the gate valve and the flow regulating valve in sequence when the rotating speed of the plurality of molecular pumps is reduced from the highest level to the lowest level, stopping the secondary roots pump, and stopping the preceding stage screw pump after the speed of the secondary roots pump is reduced.
Specifically, when a plurality of molecular pumps are started simultaneously, the master control system monitors the alarm signal of each molecular pump, detects whether a fault exists, and stops opening of the gate valve and the flow regulating valve if fault information is monitored, so that the molecular pumps are overhauled, otherwise, the molecular pumps work normally.
Specifically, before the butterfly valve is opened, the control forming chamber door, the cylinder, the safety valve, the gate valve and the flow regulating valve are monitored in sequence.
Specifically, after the vacuum stops, the air release valve is opened to release air, after the air release is finished, the vacuum count value of the control forming chamber is detected, and when the vacuum count value meets the requirement, the printing mold is taken out.
The EBSM equipment comprises a vacuum printing chamber, an electron gun, a powder spreading device, a workbench unit, a preheating unit, a demagnetization unit and a water cooling unit;
the vacuum printing chamber unit comprises vacuum pump systems, a vacuum degree detector, a vacuum control valve system and a vacuum pipeline, wherein the vacuum pump systems, the vacuum degree detector, the vacuum control valve system and the vacuum pipeline are installed outside the vacuum printing chamber. The vacuum pump system comprises a preceding stage mechanical pump (screw pump), a secondary stage Roots pump and 8 molecular pumps; the vacuum degree detector is used for detecting the vacuum degree of each stage and comprises a preceding stage detection vacuum gauge and a cavity vacuum detection vacuum gauge; the vacuum control valve is installed on the vacuum, comprises a purge valve, a butterfly valve, an air release valve, a safety valve, a molecular pump gate valve and a flow regulating valve and is used for protecting the vacuum pump and regulating the vacuum degree.
In conclusion, the invention provides a vacuum environment control method of an EBSM equipment forming chamber, which can control the forming chamber to quickly reach a high vacuum processing environment by controlling a plurality of dry valves and vacuum pumps in vacuum starting, improves the working efficiency, ensures the high vacuum processing environment, can reduce pollution during processing of parts, can protect the parts, and has high average free path under high vacuum, so that the electron energy can not be attenuated seriously; and in the vacuum stopping process, the vacuum environment can be quickly stopped, so that the printing mold can be conveniently and quickly taken out.
As shown in fig. 4, the present invention further provides a real-time variable monitoring system for a hydroelectric LCU controller, which uses plc as a control unit and comprises a first start instruction module, a second start instruction module and a stop instruction module;
a first start command module for vacuum start: sending a vacuum starting instruction, sequentially opening a plurality of valves and a vacuum pump, and sending an instruction for controlling the qualified forming chamber to a master control system after the vacuum chamber meets the vacuum degree requirement; wherein, the valves comprise a safety valve, a butterfly valve, a gate valve and a flow regulating valve; the plurality of vacuum pumps comprise a preceding stage screw pump, a secondary roots pump and a plurality of molecular pumps;
the vacuum start-up was as follows:
opening a butterfly valve, sequentially communicating and controlling gas circuits between the forming chamber and a preceding stage screw pump, starting the preceding stage screw pump, starting a secondary roots pump when the preceding stage screw pump reaches a rated rotating speed, closing the butterfly valve after the preceding stage vacuum degree of the forming chamber reaches a requirement, and opening a gate valve and a flow regulating valve; a plurality of molecular pumps are started simultaneously, the vacuum degree of the control forming chamber is detected, and a qualified signal of the control forming chamber is sent to a master control system after the vacuum degree requirement in the control forming chamber is met;
the second starting instruction module is used for starting printing: the master control system sends a printing instruction after receiving the qualified instruction of the vacuum chamber;
a stop command module to vacuum stop: after printing is finished, sending a vacuum stop instruction, and sequentially stopping a plurality of vacuum pumps and valves;
wherein the vacuum stop comprises the following steps:
and (3) closing the plurality of molecular pumps, closing the gate valve and the flow regulating valve in sequence when the rotating speed of the plurality of molecular pumps is reduced from the highest level to the lowest level, stopping the secondary roots pump, and stopping the preceding stage screw pump after the speed of the secondary roots pump is reduced.
The invention also provides a vacuum environment control device of the EBSM device forming chamber, which comprises a memory, a processor and a computer program stored in the memory and capable of running on the processor, such as the vacuum environment control program of the EBSM device forming chamber.
The processor, when executing the computer program, implements the steps of the method for controlling the vacuum environment of the molding chamber of the EBSM apparatus, such as vacuum start: sending a vacuum starting instruction, sequentially opening a plurality of valves and a vacuum pump, and sending an instruction for controlling the qualified forming chamber to a master control system after the vacuum chamber meets the vacuum degree requirement; wherein, the valves comprise safety valves, butterfly valves, gate valves and flow regulating valves; the plurality of vacuum pumps comprise a preceding stage screw pump, a secondary roots pump and a plurality of molecular pumps;
the vacuum start-up was as follows:
opening a butterfly valve, sequentially communicating and controlling gas circuits between the forming chamber and a preceding stage screw pump, starting the preceding stage screw pump, starting a secondary roots pump when the preceding stage screw pump reaches a rated rotating speed, closing the butterfly valve after the preceding stage vacuum degree of the forming chamber reaches a requirement, and opening a gate valve and a flow regulating valve; starting a plurality of molecular pumps simultaneously, detecting the vacuum degree of the control forming chamber, and sending a qualified signal of the control forming chamber to the master control system after the vacuum degree requirement in the control forming chamber is met;
starting printing: the master control system sends a printing instruction after receiving the qualified instruction of the vacuum chamber;
stopping vacuum: after printing is finished, sending a vacuum stop instruction, and sequentially stopping a plurality of vacuum pumps and valves;
wherein the vacuum stop comprises the following steps:
and (3) closing the plurality of molecular pumps, closing the gate valve and the flow regulating valve in sequence when the rotating speed of the plurality of molecular pumps is reduced from the highest level to the lowest level, stopping the secondary roots pump, and stopping the preceding stage screw pump after the speed of the secondary roots pump is reduced.
Alternatively, the processor implements the functions of the modules in the system when executing the computer program, for example: a first start command module for vacuum start: sending a vacuum starting instruction, sequentially opening a plurality of valves and a vacuum pump, and sending an instruction for controlling the qualified forming chamber to a master control system after the vacuum chamber meets the vacuum degree requirement; wherein, the valves comprise safety valves, butterfly valves, gate valves and flow regulating valves; the plurality of vacuum pumps comprise a front-stage screw pump, a secondary roots pump and a plurality of molecular pumps;
the vacuum start-up was as follows:
opening a butterfly valve, sequentially communicating and controlling gas circuits between the forming chamber and a preceding stage screw pump, starting the preceding stage screw pump, starting a secondary roots pump when the preceding stage screw pump reaches a rated rotating speed, closing the butterfly valve after the preceding stage vacuum degree of the forming chamber reaches a requirement, and opening a gate valve and a flow regulating valve; starting a plurality of molecular pumps simultaneously, detecting the vacuum degree of the control forming chamber, and sending a qualified signal of the control forming chamber to the master control system after the vacuum degree requirement in the control forming chamber is met;
a second start instruction module, configured to start printing: the master control system sends a printing instruction after receiving the qualified instruction of the vacuum chamber;
a stop command module to vacuum stop: after printing is finished, sending a vacuum stop instruction, and sequentially stopping a plurality of vacuum pumps and valves;
wherein, the vacuum stop is as follows:
and (3) closing the plurality of molecular pumps, closing the gate valve and the flow regulating valve in sequence when the rotating speed of the plurality of molecular pumps is reduced from the highest level to the lowest level, stopping the secondary roots pump, and stopping the preceding stage screw pump after the speed of the secondary roots pump is reduced.
The first starting instruction module further comprises a monitoring module, when the plurality of molecular pumps are started simultaneously, the main control system monitors alarm signals of the molecular pumps, detects whether faults exist, stops opening of the gate valve and the flow regulating valve if fault information is monitored, and overhauls the plurality of molecular pumps, otherwise, the molecular pumps work normally.
Illustratively, the computer program may be partitioned into one or more modules/units, stored in the memory and executed by the processor, to implement the invention. The one or more modules/units may be a series of computer program instruction segments capable of performing specific functions that describe the execution of the computer program in the vacuum environment control equipment of the EBSM equipment molding chamber. For example, the computer program may be divided into a first start instruction module, a second start instruction module and a stop instruction module, and the specific functions of each module are as follows: the first starting instruction module is used for vacuum starting: sending a vacuum starting instruction, sequentially opening a plurality of valves and a vacuum pump, and sending an instruction for controlling the qualified forming chamber to a master control system after the vacuum chamber meets the vacuum degree requirement; wherein, the valves comprise a safety valve, a butterfly valve, a gate valve and a flow regulating valve; the plurality of vacuum pumps comprise a preceding stage screw pump, a secondary roots pump and a plurality of molecular pumps;
the vacuum start-up was as follows:
opening a butterfly valve, sequentially communicating and controlling gas circuits between the forming chamber and a preceding stage screw pump, starting the preceding stage screw pump, starting a secondary roots pump when the preceding stage screw pump reaches a rated rotating speed, closing the butterfly valve after the preceding stage vacuum degree of the forming chamber reaches a requirement, and opening a gate valve and a flow regulating valve; a plurality of molecular pumps are started simultaneously, the vacuum degree of the control forming chamber is detected, and a qualified signal of the control forming chamber is sent to a master control system after the vacuum degree requirement in the control forming chamber is met;
the second starting instruction module is used for starting printing: the master control system sends a printing instruction after receiving the qualified instruction of the vacuum chamber;
a stop command module to vacuum stop: after printing is finished, sending a vacuum stop instruction, and sequentially stopping a plurality of vacuum pumps and valves;
wherein, the vacuum stop is as follows:
and (3) closing the plurality of molecular pumps, closing the gate valve and the flow regulating valve in sequence when the rotating speed of the plurality of molecular pumps is reduced from the highest level to the lowest level, stopping the secondary roots pump, and stopping the preceding stage screw pump after the speed of the secondary roots pump is reduced.
The first starting instruction module further comprises a monitoring module, the monitoring module is used for monitoring the alarm signals of the molecular pumps when the molecular pumps are started simultaneously, detecting whether faults exist or not, if the fault information is monitored, stopping opening of the gate valve and the flow regulating valve, and overhauling the molecular pumps, otherwise, the molecular pumps normally work.
The vacuum environment control equipment of the EBSM equipment forming chamber can be computing equipment such as a desktop computer, a notebook computer, a palm computer, a cloud server and the like. The hydroelectric LCU controller variable real-time monitoring device can include, but is not limited to, a processor, a memory.
The processor may be a Central Processing Unit (CPU), other general purpose processor, a Digital Signal Processor (DSP), an Application Specific Integrated Circuit (ASIC), an off-the-shelf programmable gate array (FPGA) or other programmable logic device, discrete gate or transistor logic, discrete hardware components, etc. The general purpose processor can be a microprocessor or the processor can be any conventional processor or the like that is the control center for the vacuum environment control apparatus of the EBSM apparatus fabrication chamber and that connects the various parts of the vacuum environment control apparatus of the entire EBSM apparatus fabrication chamber using various interfaces and lines.
The memory can be used to store the computer programs and/or modules, and the processor can be used to implement the various functions of the vacuum environment control apparatus of the EBSM apparatus forming chamber by executing or executing the computer programs and/or modules stored in the memory and invoking the data stored in the memory.
The memory may mainly include a storage program area and a storage data area, wherein the storage program area may store an operating system, an application program required by at least one function (such as a sound playing function, an image playing function, etc.), and the like; the storage data area may store data (such as audio data, a phonebook, etc.) created according to the use of the cellular phone, etc. In addition, the memory may include high-speed random access memory, and may also include non-volatile memory, such as a hard disk, a memory, a plug-in hard disk, a Smart Media Card (SMC), a Secure Digital (SD) card, a flash memory card (FlashCard), at least one magnetic disk storage device, a flash memory device, or other volatile solid state storage device.
The present invention also provides a computer readable storage medium storing a computer program which, when executed by a processor, implements the steps of the method for controlling a vacuum environment of a molding chamber of an EBSM apparatus.
The vacuum environment control device integrated modules/units of the EBSM device molding chamber, if implemented as software functional units and sold or used as stand-alone products, may be stored in a computer readable storage medium.
Based on such understanding, all or part of the processes of the method can be realized by the present invention, and the computer program can be stored in a computer readable storage medium, and when the computer program is executed by a processor, the steps of the method for controlling the vacuum environment of the EBSM device forming chamber can be realized. Wherein the computer program comprises computer program code, which may be in the form of source code, object code, an executable file or some intermediate form, etc.
The computer-readable medium may include: any entity or device capable of carrying said computer program code, a recording medium, a usb-disk, a removable hard disk, a magnetic disk, an optical disk, a computer memory, a Read-only memory (ROM), a Random Access Memory (RAM), an electrical carrier signal, a telecommunications signal, a software distribution medium, etc.
It should be noted that the computer readable medium may contain content that is subject to appropriate increase or decrease as required by legislation and patent practice in jurisdictions, for example, in some jurisdictions, computer readable media does not include electrical carrier signals and telecommunications signals as is required by legislation and patent practice.
Examples
According to the figure 2, when the vacuum system is started, before the vacuum system is started, the gate of the forming chamber is closed, the cylinder is clamped, the safety valve is opened, and the gate valve and the flow regulating valve are closed. And opening a butterfly valve, and controlling an air path between the forming chamber and the backing pump by the butterfly valve. After the preparation work is finished, the rated rotating speed is gradually reached after the front-stage screw pump is started; and starting a secondary roots pump, wherein the roots pump is characterized in that the speed of the rotation speed controlled by a frequency converter is not determined according to the speed increasing time of the vacuum degree, after the rated rotation speed is reached, the vacuum degree value of a preceding stage vacuum gauge is detected, only the roots pump works in the vacuum chamber during vacuum pumping, and the butterfly valve is closed after the requirement is reached. Opening a gate valve and a flow regulating valve, starting 8 molecular pumps at the same time, and monitoring alarm signals of all the molecular pumps to determine whether faults exist or not. After the whole system is completely started, the reading of the vacuum gauge of the main cavity of the vacuum chamber is detected until the vacuum degree requirement is met, a qualified signal of the environment of the vacuum chamber is sent to the master control system, and the EBSM equipment is waited for starting printing.
According to the illustration in fig. 3, when the vacuum is stopped, after the printing work of the equipment is completed, the vacuum system needs to be automatically stopped, and all the vacuum pumps and valves should be stopped step by step in sequence as required. After receiving the vacuum stopping signal, firstly stopping 8 molecular pumps, gradually reducing the speed in the stopping process because the molecular pumps run at a high speed, and closing the gate valve and the flow regulating valve when the speed is reduced from the highest level to the lowest level; and then, the roots pump is closed, the screw pump is stopped after the speed is gradually reduced, and the whole vacuum system is stopped after the screw pump is completely stopped. And finally, manually opening the air release valve to give up, and opening the gate of the forming chamber to take the part when the vacuum count value of the main cavity is detected to be one atmospheric pressure after air release is completed.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solutions of the present invention and not for limiting the same, and although the present invention is described in detail with reference to the above embodiments, those of ordinary skill in the art should understand that: modifications and equivalents may be made to the embodiments of the invention without departing from the spirit and scope of the invention, which is to be covered by the claims.
Claims (8)
1. A vacuum environment control method of an EBSM equipment forming chamber is characterized by comprising the following steps:
starting vacuum: sending a vacuum starting instruction, sequentially opening a plurality of valves and a vacuum pump, and sending an instruction for controlling the qualified forming chamber to a master control system after the vacuum chamber meets the vacuum degree requirement; wherein, the valves comprise a safety valve, a butterfly valve, a gate valve and a flow regulating valve; the plurality of vacuum pumps comprise a front-stage screw pump, a secondary roots pump and a plurality of molecular pumps;
the vacuum start-up was as follows:
opening a butterfly valve, sequentially communicating and controlling gas circuits between the forming chamber and a preceding stage screw pump, starting the preceding stage screw pump, starting a secondary roots pump when the preceding stage screw pump reaches a rated rotating speed, closing the butterfly valve after the preceding stage vacuum degree of the forming chamber reaches a requirement, and opening a gate valve and a flow regulating valve; starting a plurality of molecular pumps simultaneously, detecting the vacuum degree of the control forming chamber, and sending a qualified signal of the control forming chamber to the master control system after the vacuum degree requirement in the control forming chamber is met;
starting printing: the master control system sends a printing instruction after receiving the qualified instruction of the vacuum chamber;
stopping vacuum: after printing is finished, sending a vacuum stop instruction, and sequentially stopping a plurality of vacuum pumps and valves;
wherein, the vacuum stop is as follows:
and (3) closing the plurality of molecular pumps, closing the gate valve and the flow regulating valve in sequence when the rotating speed of the plurality of molecular pumps is reduced from the highest level to the lowest level, stopping the secondary roots pump, and stopping the preceding stage screw pump after the speed of the secondary roots pump is reduced.
2. The method of claim 1, wherein when the plurality of molecular pumps are started simultaneously, the master control system monitors the alarm signal of each molecular pump to detect whether a fault exists, and if the fault information is detected, the gate valve and the flow control valve are stopped to open to repair the plurality of molecular pumps, otherwise, the molecular pumps work normally.
3. The method of claim 1, wherein the gate valve, the cylinder, the safety valve, the gate valve and the flow control valve are monitored sequentially before the butterfly valve is opened.
4. The method for controlling the vacuum environment of the molding chamber of the EBSM equipment as claimed in claim 1, wherein after the vacuum is stopped, the deflation valve is opened to deflate, after deflation is completed, the vacuum count value for controlling the molding chamber is detected, and when the vacuum count value meets the requirement, the printing mold is taken out.
5. A vacuum environment control system of an EBSM equipment forming chamber, comprising:
a first start command module for vacuum start: sending a vacuum starting instruction, sequentially opening a plurality of valves and a vacuum pump, and sending an instruction for controlling the qualified forming chamber to a master control system after the vacuum chamber meets the requirement of vacuum degree; wherein, the valves comprise safety valves, butterfly valves, gate valves and flow regulating valves; the plurality of vacuum pumps comprise a preceding stage screw pump, a secondary roots pump and a plurality of molecular pumps;
the vacuum start-up was as follows:
opening a butterfly valve, sequentially communicating gas circuits between the control forming chamber and the preceding stage screw pump, starting the secondary roots pump when the preceding stage screw pump reaches a rated rotating speed, closing the butterfly valve when the preceding stage vacuum degree of the control forming chamber meets requirements, and opening a gate valve and a flow regulating valve; starting a plurality of molecular pumps simultaneously, detecting the vacuum degree of the control forming chamber, and sending a qualified signal of the control forming chamber to the master control system after the vacuum degree requirement in the control forming chamber is met;
a second start instruction module, configured to start printing: the master control system sends a printing instruction after receiving the qualified instruction of the vacuum chamber;
a stop command module to vacuum stop: after printing is finished, sending a vacuum stop instruction, and sequentially stopping a plurality of vacuum pumps and valves;
wherein the vacuum stop comprises the following steps:
and (3) closing the plurality of molecular pumps, closing the gate valve and the flow regulating valve in sequence when the rotating speed of the plurality of molecular pumps is reduced from the highest level to the lowest level, stopping the secondary roots pump, and stopping the preceding stage screw pump after the speed of the secondary roots pump is reduced.
6. The system of claim 5, wherein the first start command module further comprises a monitoring module, and the monitoring module is configured to monitor the alarm signal of each molecular pump when the plurality of molecular pumps are started simultaneously, detect whether a fault exists, and if the fault information is detected, stop opening the gate valve and the flow regulating valve, and overhaul the plurality of molecular pumps, or otherwise operate normally.
7. A vacuum environment control apparatus for an EBSM apparatus forming chamber, comprising a memory, a processor and a computer program stored in the memory and executable on the processor, wherein the processor when executing the computer program implements the steps of a method for vacuum environment control of an EBSM apparatus forming chamber as claimed in any one of claims 1 to 6.
8. A computer readable storage medium storing a computer program, wherein the computer program when executed by a processor implements the steps of a method for vacuum environment control of an EBSM apparatus forming chamber as claimed in any one of claims 1 to 6.
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