CN206583585U - A kind of measurement and analytical equipment for magnet Dewar condition of high vacuum degree - Google Patents

A kind of measurement and analytical equipment for magnet Dewar condition of high vacuum degree Download PDF

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Publication number
CN206583585U
CN206583585U CN201720273357.6U CN201720273357U CN206583585U CN 206583585 U CN206583585 U CN 206583585U CN 201720273357 U CN201720273357 U CN 201720273357U CN 206583585 U CN206583585 U CN 206583585U
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CN
China
Prior art keywords
vacuum
line
measurement
interface
flange
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Expired - Fee Related
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CN201720273357.6U
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Chinese (zh)
Inventor
黄鹏程
程翔宇
房震
高洋
陈文革
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Hefei Institutes of Physical Science of CAS
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Hefei Institutes of Physical Science of CAS
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Abstract

The utility model discloses a kind of measurement for magnet Dewar condition of high vacuum degree and analytical equipment, including vacuum line, flange, vacuum valve, vacuum gauge, quadrupole mass spectrometry instrument, helium referance leak, the edge of a knife flange-interface being quickly connected with tested vacuum cavity is installed on vacuum line, vacuum gauge, quadrupole mass spectrometry instrument is arranged on device vacuum line by edge of a knife flange respectively, referance leak is arranged on device vacuum line by fast acting flange, and the edge of a knife flange-interface of tested vacuum cavity, vacuum gauge, quadrupole mass spectrometry instrument, helium referance leak is connected by vacuum valve with vacuum line, spare interface is also left on vacuum line.The utility model reduces the perforate to vacuum cavity to greatest extent, the vacuum of vacuum cavity can be significantly lifted, using simple in construction, the material of realization easy to process, using standard component, effectively realizes vacuum measurement and analytic function, ensure that it can stablize long-term work, reduce production cost.

Description

A kind of measurement and analytical equipment for magnet Dewar condition of high vacuum degree
Technical field:
The utility model is related to technical field of vacuum, relates generally to a kind of measurement for magnet Dewar condition of high vacuum degree and divides Analysis apparatus.
Background technology:
Superconducting magnet system is usually to be made up of magnet, Dewar, cold screen, evacuation unit, refrigeration machine, power supply etc..Superconducting magnetic Body running is under low temperature, vacuum environment, and low temperature environment is provided by refrigeration machine, and vacuum environment is provided by vacuum pump set.
Magnet Dewar using preceding need to vacuum dewar carry out leak rate demarcation, to determine whether vacuum dewar can meet very The requirement of reciprocal of duty cycle, generally requires and referance leak is installed on vacuum dewar, and vacuator assembles conjunction leak detector, to realize to vacuum The leak rate detection of Dewar.
In order that magnet is operated under the vacuum environment of safety and stability, it is necessary to be monitored in real time to vacuum, general need Vacuum gauge to be installed on vacuum dewar.The real time and on line monitoring to vacuum can so be realized.
Magnet Dewar in use, in the event of vacuum fluctuation situations such as, it is to be understood that be that those reasons are caused Vacuum fluctuation, it is necessary to vacuum quality carry out on-line analysis, residual gas analyzer is typically installed on vacuum dewar Carry out on-line dynamic analysis.
In summary, the vacuum system of superconducting magnet need to carry out main vacuum chamber the monitoring of vacuum, residual gas into Analysis, leak rate detection etc., the realization of these functions needs multiple vacuum devices to complete.The general meeting in Vacuum System Design Carry out reserved flange port on vacuum chamber various vacuum devices are installed.Excessive flange opening can increase manufacturing cost, destruction The Mechanical Structure Strength of vacuum dewar, increases the system leak rate of vacuum dewar.Factors above is that can superconducting magnet dewar normal The key factor of work.
In order to reduce the above mentioned problem of above vacuum dewar appearance, in Dewar design process, we try one's best few to Dewar Carry out perforate.Using this measurement apparatus, diameter 50mm edge of a knife flange only need to be opened on magnet Dewar.By the present apparatus It is quick installed at by diameter 50mm edge of a knife flange on vacuum dewar, you can complete to survey the vacuum of magnet vacuum dewar Amount, residual gas constituent analysis, leak rate detection.
Utility model content:
The utility model purpose is exactly to be used for magnet Dewar condition of high vacuum degree there is provided one kind to make up the defect of prior art Measurement and analytical equipment, conveniently can detect and analyze, its is safe and reliable, improves the vacuum of vacuum system, reduces true The processing cost of cavity body.
The utility model is achieved through the following technical solutions:
A kind of measurement and analytical equipment for magnet Dewar condition of high vacuum degree, including vacuum line, flange, vacuum valve, Vacuum gauge, quadrupole mass spectrometry instrument, helium referance leak, it is characterised in that:It is provided with the vacuum line and tested vacuum The edge of a knife flange-interface that cavity is quickly connected, the vacuum gauge, quadrupole mass spectrometry instrument are pacified by edge of a knife flange respectively On device vacuum line, referance leak is arranged on device vacuum line by fast acting flange, and tested vacuum cavity Edge of a knife flange-interface, vacuum gauge, quadrupole mass spectrometry instrument, helium referance leak are connected by vacuum valve with vacuum line.
The material of described vacuum line is 304 stainless steels, and the diameter of its main line is more than the diameter of equipment connecting line.
A diameter of 50mm of described main line, a diameter of 35mm of equipment connecting line, matching vacuum valve A diameter of is respectively 50mm and 35mm.
Spare interface is also left on described vacuum line.
Described spare interface is two, and one is edge of a knife interface, and one is fast connection interface, and spare interface not use by the used time Vacuum blind plate is sealed.
The utility model has the advantages that:
1)The vacuum measurement and analytical equipment, main line use a diameter of 50mm stainless steel pipeline, matching A diameter of 35mm measurement valve, reaches optimum state in size design optimization, realizes evacuated collection and the function of analysis, Reduce the bypass line influence delayed to vacuum.
2)Vacuum gauge, quadrupole mass spectrometry instrument, helium referance leak pass through a diameter of 35mm valve and device vacuum Tube chamber is connected, in that context it may be convenient to realize the break-make per road, is conducive to quickly realizing the individual operations or multi-mode operation of vacuum project. It can easily realize that in the case of not influenceing vacuum, the progress to equipment is changed online.
3)On the basis of ensureing to the function needed for vacuum cavity, reduce to know clearly to greatest extent and vacuum cavity is opened Hole, can significantly lift the vacuum of vacuum cavity.
4)Simple and convenient inexpensive design form.Using simple in construction, it is easy to the material that processing is realized, to greatest extent Using standard component, vacuum measurement and analytic function have effectively achieved, it is ensured that it can stablize long-term work.
Several measure integrated uses above, by being connect to the standard edge of a knife flange that an a diameter of 50mm is opened on vacuum cavity Mouthful, you can realize the vacuum measurement and the analysis of vacuum performance for large-scale vacuum system.Number of aperture on vacuum cavity is big It is big to reduce, the vacuum of vacuum system is improved, the processing cost of vacuum cavity is reduced.The valve that device passes through a diameter of 50mm Door is connected with vacuum cavity, and each equipment is connected using a diameter of 35mm valve with vacuum end, both realizes vacuum The online replacing function of equipment, also achieves the protection to vacuum equipment in the case of non-NULL is true.The manufacture of device is simple in construction, It is most of to be processed using standard component, reduce production cost.
Brief description of the drawings:
Fig. 1 is apparatus structure schematic diagram,
Fig. 2 is Fig. 1 left view,
Fig. 3 is the schematic device with alternate configuration.
Embodiment:
Referring to accompanying drawing.
Embodiment 1:
A kind of measurement and analytical equipment for magnet Dewar condition of high vacuum degree, including vacuum line 3, flange 2 and 5, vacuum Valve 4 and 9, vacuum gauge 6, quadrupole mass spectrometry instrument 1, helium referance leak 7;The vacuum valve 4 that the present apparatus passes through diameter 50mm It is connected with tested device;It is connected by equipment connecting line 8 with vacuum gauge 6, quadrupole mass spectrometry instrument 1, helium referance leak 7, By controlling vacuum valve 4 that UNICOM and the closing of measurement apparatus and vacuum cavity can be achieved;When vacuum cavity starts to vacuumize When, open vacuum valve 4, and the corresponding diameter 35mm of vacuum gauge 5 vacuum valve 9, and open vacuum gauge, you can measurement is true The dynamic vacuum degree of cavity body.When vacuum reaches the leak detection state that can meet, open the corresponding diameter 35mm's of referance leak Valve, now utilizes referance leak and leak detector, you can the demarcation of leak rate is carried out to whole vacuum cavity, the ginseng of demarcation is utilized Number, coordinates outer bottom pour ladle inspection method, you can realize the measure to the overall outer leak rate of vacuum cavity.When equipment in the process of running, vacuum Degree is less than 10-3Pa magnitudes, open the corresponding 35mm of quadrupole mass spectrometry instrument valve, and open quadrupole mass spectrometry instrument, It can be achieved to analyze the dynamic of the airborne composition in vacuum cavity inside.
When equipment is run, you can individually open vacuum meter, referance leak, four-electrode spectrum.Vacuum can also be opened simultaneously Rule and referance leak, vacuum gauge and four-electrode spectrum.Function above is realized by diameter 35mm valve, is conveniently realized Single device measurement or the conversion of many device measurings.
When vacuum cavity prepares before vacuum breaker, the corresponding diameter 35mm of each vacuum equipment valve 9 is first closed, to realize Protection to each vacuum equipment, prevents vacuum equipment infringement to vacuum equipment such as aqueous vapor under non-vacuum environment.Then again Diameter 50mm valve is closed, the disconnection with tested vacuum cavity so can be achieved.
Two-way spare interface 10 and 11 can also be increased on device as needed, interface 10 is that a diameter of 35mm vacuum connects soon Mouthful, interface 11 is a diameter of 35mm edge of a knife flange-interface, is connected by a diameter of 35mm hand valve with vacuum line.True During empty system operation, standby vacuum equipment can be quickly installed online.

Claims (5)

1. a kind of measurement and analytical equipment for magnet Dewar condition of high vacuum degree, including it is vacuum line, flange, vacuum valve, true Sky is regulated, quadrupole mass spectrometry instrument, helium referance leak, it is characterised in that:It is provided with the vacuum line and tested vacuum chamber The edge of a knife flange-interface that body is quickly connected, the vacuum gauge, quadrupole mass spectrometry instrument are installed by edge of a knife flange respectively On device vacuum line, referance leak is arranged on device vacuum line by fast acting flange, and the knife of tested vacuum cavity Mouth flange-interface, vacuum gauge, quadrupole mass spectrometry instrument, helium referance leak are connected by vacuum valve with vacuum line.
2. the measurement and analytical equipment according to claim 1 for magnet Dewar condition of high vacuum degree, it is characterised in that:It is described The material of vacuum line be 304 stainless steels, the diameter of its main line is more than the diameter of equipment connecting line.
3. the measurement and analytical equipment according to claim 2 for magnet Dewar condition of high vacuum degree, it is characterised in that:It is described Main line a diameter of 50mm, a diameter of 35mm of equipment connecting line, matching vacuum valve it is a diameter of be respectively 50mm and 35mm.
4. the measurement and analytical equipment according to claim 1 for magnet Dewar condition of high vacuum degree, it is characterised in that:It is described Vacuum line on also leave spare interface.
5. the measurement and analytical equipment according to claim 4 for magnet Dewar condition of high vacuum degree, it is characterised in that:It is described Spare interface be two, one be edge of a knife interface, one be fast connection interface, and spare interface not the used time with vacuum blind plate seal Firmly.
CN201720273357.6U 2017-03-21 2017-03-21 A kind of measurement and analytical equipment for magnet Dewar condition of high vacuum degree Expired - Fee Related CN206583585U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201720273357.6U CN206583585U (en) 2017-03-21 2017-03-21 A kind of measurement and analytical equipment for magnet Dewar condition of high vacuum degree

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201720273357.6U CN206583585U (en) 2017-03-21 2017-03-21 A kind of measurement and analytical equipment for magnet Dewar condition of high vacuum degree

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112484644A (en) * 2020-10-27 2021-03-12 深圳供电局有限公司 Cable core deviation Dewar monitoring device for arc laying of high-temperature superconducting cable

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112484644A (en) * 2020-10-27 2021-03-12 深圳供电局有限公司 Cable core deviation Dewar monitoring device for arc laying of high-temperature superconducting cable
CN112484644B (en) * 2020-10-27 2022-07-22 深圳供电局有限公司 Cable core deviation Dewar monitoring device for arc laying of high-temperature superconducting cable

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CF01 Termination of patent right due to non-payment of annual fee
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Granted publication date: 20171024

Termination date: 20180321