CN206583585U - A kind of measurement and analytical equipment for magnet Dewar condition of high vacuum degree - Google Patents
A kind of measurement and analytical equipment for magnet Dewar condition of high vacuum degree Download PDFInfo
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Abstract
本实用新型公开了一种用于磁体杜瓦高真空度的测量及分析装置，包括真空管路、法兰、真空阀门、真空规管、四极质谱分析仪、氦标准漏孔，真空管路上安装有与被测真空腔体进行快速连接的刀口法兰接口，真空规管、四极质谱分析仪分别通过刀口法兰安装在装置真空管路上，标准漏孔通过快接法兰安装在装置真空管路上，且被测真空腔体的刀口法兰接口、真空规管、四极质谱分析仪、氦标准漏孔均通过真空阀门与真空管路连接，真空管路上还留有备用接口。本实用新型最大限度地减少了对真空腔体的开孔，可显著地提升真空腔体的真空度，采用结构简单，易于加工实现的材料，使用标准件，有效实现了真空测量及分析功能，保证其能稳定长期工作，降低了生产成本。
The utility model discloses a measuring and analyzing device for high vacuum degree of a magnet Dewar, which comprises a vacuum pipeline, a flange, a vacuum valve, a vacuum gauge, a quadrupole mass spectrometer, a helium standard leak hole, and a vacuum pipeline is installed on the vacuum pipeline. The knife-edge flange interface for quick connection with the vacuum chamber to be tested, the vacuum gauge and the quadrupole mass spectrometer are respectively installed on the vacuum pipeline of the device through the knife-edge flange, and the standard leak is installed on the vacuum pipeline of the device through the quick-connect flange, and The knife-edge flange interface, vacuum gauge, quadrupole mass spectrometer, and helium standard leak of the vacuum chamber to be tested are all connected to the vacuum pipeline through the vacuum valve, and there are spare interfaces on the vacuum pipeline. The utility model minimizes the opening of the vacuum cavity, can significantly improve the vacuum degree of the vacuum cavity, adopts materials with a simple structure and is easy to process, and uses standard parts to effectively realize the vacuum measurement and analysis functions. It is guaranteed that it can work stably for a long time, and the production cost is reduced.
Description
技术领域：Technical field:
本实用新型涉及真空技术领域，主要涉及一种用于磁体杜瓦高真空度的测量及分析装置。The utility model relates to the field of vacuum technology, and mainly relates to a measuring and analyzing device for magnet Dewar high vacuum degree.
背景技术：Background technique:
超导磁体系统一般是由磁体、杜瓦、冷屏、抽空机组、制冷机、电源等组成。超导磁体工作在低温、真空环境下，低温环境由制冷机提供，真空环境由真空机组提供。A superconducting magnet system is generally composed of a magnet, a Dewar, a cold screen, an evacuation unit, a refrigerator, and a power supply. The superconducting magnet works in a low temperature and vacuum environment, the low temperature environment is provided by a refrigerator, and the vacuum environment is provided by a vacuum unit.
磁体杜瓦在使用前需要对真空杜瓦进行漏率标定，以确定真空杜瓦是否能满足真空度的要求，一般需要在真空杜瓦上安装标准漏孔，抽空机组配合检漏仪，以便实现对真空杜瓦的漏率检测。The magnet Dewar needs to calibrate the leak rate of the vacuum Dewar before use to determine whether the vacuum Dewar can meet the requirements of the vacuum degree. Generally, it is necessary to install a standard leak hole on the vacuum Dewar, and the evacuation unit cooperates with a leak detector to achieve Leak rate detection for vacuum dewar.
为了使磁体工作在安全稳定的真空环境下，需要对真空度进行实时监测，一般需要在真空杜瓦上安装真空规。这样可以实现对真空度的实时在线监控。In order to make the magnet work in a safe and stable vacuum environment, it is necessary to monitor the vacuum degree in real time. Generally, a vacuum gauge needs to be installed on the vacuum dewar. In this way, real-time online monitoring of the vacuum degree can be realized.
磁体杜瓦在使用中，如果出现了真空度的波动等情况，需要了解是那些原因造成的真空度的波动，需要对真空质量进行在线分析，一般在真空杜瓦上安装残余气体分析仪进行在线动态分析。During the use of the magnet Dewar, if there are fluctuations in the vacuum degree, etc., it is necessary to understand the fluctuations in the vacuum degree caused by those reasons, and to conduct online analysis of the vacuum quality. Generally, a residual gas analyzer is installed on the vacuum Dewar for online analysis. Dynamic Analysis.
综上所述，超导磁体的真空系统需要对主真空室进行真空度的监测、残余气体成分分析、漏率检测等，这些功能的实现需要多个真空器件来完成。一般在真空系统设计时会在真空室上进行预留法兰口来安装各种真空器件。过多的法兰开口会增加制造成本，破坏真空杜瓦的机械结构强度，增加真空杜瓦的系统漏率。以上因素是超导磁体杜瓦能否正常工作的重要因素。To sum up, the vacuum system of a superconducting magnet needs to monitor the vacuum degree of the main vacuum chamber, analyze the residual gas composition, and detect the leak rate, etc. The realization of these functions requires multiple vacuum devices to complete. Generally, when designing the vacuum system, flange ports are reserved on the vacuum chamber to install various vacuum devices. Too many flange openings will increase the manufacturing cost, destroy the mechanical structure strength of the vacuum dewar, and increase the system leakage rate of the vacuum dewar. The above factors are important factors for the normal operation of the superconducting magnet Dewar.
为了降低以上真空杜瓦出现的上述问题，在杜瓦设计过程中，我们尽量少对杜瓦进行开孔。采用本测量装置，只需在磁体杜瓦上开一个直径50mm的刀口法兰即可。将本装置通过直径50mm的刀口法兰快速安装在真空杜瓦上，即可完成对磁体真空杜瓦的真空度测量、残余气体成分分析、漏率检测。In order to reduce the above-mentioned problems in the vacuum Dewar, we try to open as few holes as possible in the Dewar design process. With this measuring device, it is only necessary to open a knife-edge flange with a diameter of 50 mm on the magnet Dewar. The device is quickly installed on the vacuum dewar through a knife-edge flange with a diameter of 50mm, and the vacuum degree measurement, residual gas composition analysis, and leak rate detection of the magnet vacuum dewar can be completed.
实用新型内容：Utility model content:
本实用新型目的就是为了弥补已有技术的缺陷，提供一种用于磁体杜瓦高真空度的测量及分析装置，可方便检测和分析，其安全、可靠，提升了真空系统的真空度，降低了真空腔体的加工成本。The purpose of this utility model is to make up for the defects of the prior art, to provide a measurement and analysis device for high vacuum degree of magnet Dewar, which can be convenient for detection and analysis, and it is safe and reliable, improves the vacuum degree of the vacuum system, reduces the The processing cost of the vacuum chamber is reduced.
本实用新型是通过以下技术方案实现的：The utility model is achieved through the following technical solutions:
一种用于磁体杜瓦高真空度的测量及分析装置，包括真空管路、法兰、真空阀门、真空规管、四极质谱分析仪、氦标准漏孔，其特征在于：所述真空管路上安装有与被测真空腔体进行快速连接的刀口法兰接口，所述真空规管、四极质谱分析仪分别通过刀口法兰安装在装置真空管路上，标准漏孔通过快接法兰安装在装置真空管路上，且被测真空腔体的刀口法兰接口、真空规管、四极质谱分析仪、氦标准漏孔均通过真空阀门与真空管路连接。A measuring and analyzing device for magnet Dewar high vacuum, including vacuum pipeline, flange, vacuum valve, vacuum gauge, quadrupole mass spectrometer, helium standard leak, characterized in that: the vacuum pipeline is installed There is a knife-edge flange interface for quick connection with the vacuum cavity to be tested. The vacuum gauge and quadrupole mass spectrometer are respectively installed on the vacuum pipeline of the device through the knife-edge flange, and the standard leak is installed on the vacuum tube of the device through the quick-connect flange. On the road, and the knife-edge flange interface of the vacuum chamber to be tested, the vacuum gauge, the quadrupole mass spectrometer, and the helium standard leak are all connected to the vacuum pipeline through the vacuum valve.
所述的真空管路的材料为304不锈钢，其主管路的直径大于设备连接管路的直径。The material of the vacuum pipeline is 304 stainless steel, and the diameter of the main pipeline is larger than that of the equipment connecting pipeline.
所述的主管路的直径为50mm，设备连接管路的直径为35mm, 与之匹配的真空阀门直径为分别为50mm和35mm。The diameter of the main pipeline is 50mm, the diameter of the equipment connecting pipeline is 35mm, and the diameters of the matching vacuum valves are 50mm and 35mm respectively.
所述的真空管路上还留有备用接口。There is also a spare interface on the vacuum pipeline.
所述的备用接口为两个，一个为刀口接口，一个为快接接口，且备用接口不用时用真空盲板封住。There are two spare interfaces, one is a knife-edge interface and the other is a quick-connect interface, and the spare interface is sealed with a vacuum blind plate when not in use.
本实用新型的优点是：The utility model has the advantages of:
1）所述真空测量及分析装置，主管路采用直径为50mm的不锈钢管路，与之匹配的直径为35mm的测量阀门，在尺寸设计优化达到最佳状态，实现了真空采集与分析的功能，也降低了旁通管路对真空滞后的影响。1) For the vacuum measurement and analysis device, the main pipeline adopts a stainless steel pipeline with a diameter of 50mm, and the matching measuring valve with a diameter of 35mm achieves the best state in size design optimization, realizing the functions of vacuum collection and analysis, Also reduces the effect of the bypass line on vacuum hysteresis.
2）真空规管、四极质谱分析仪、氦标准漏孔均通过直径为35mm的阀门与装置真空管腔连接，可以方便的实现每路的通断，有利于快速实现真空项目的单项操作或多项操作。可以方便的实现不影响真空度的情况下，对设备的进行在线更换。2) Vacuum gauges, quadrupole mass spectrometers, and helium standard leaks are all connected to the vacuum lumen of the device through a valve with a diameter of 35mm, which can easily realize the on-off of each channel, which is conducive to the rapid realization of single operations or multiple vacuum projects. item action. It is convenient to realize the online replacement of the equipment without affecting the vacuum degree.
3）在保证对真空腔体所需的功能基础上，最大限度地减少了了对真空腔体的开孔，可显著地提升真空腔体的真空度。3) On the basis of ensuring the required functions of the vacuum chamber, the opening of the vacuum chamber is minimized, and the vacuum degree of the vacuum chamber can be significantly improved.
4）简单方便低成本的设计形式。采用结构简单，易于加工实现的材料，最大限度地使用标准件，有效地实现了真空测量及分析功能，保证其能稳定长期工作。4) Simple, convenient and low-cost design. The material with simple structure and easy processing is adopted, and the standard parts are used to the maximum extent, which effectively realizes the vacuum measurement and analysis functions, and ensures that it can work stably for a long time.
以上几项措施综合运用，通过对真空腔体上开一个直径为50mm的标准刀口法兰接口，即可实现对于大型真空系统的真空度测量及真空性能的分析。真空腔体上的开孔数大大减少，提升了真空系统的真空度，降低了真空腔体的加工成本。装置通过直径为50mm的阀门与真空腔体连接，并且每个设备均采用直径为35mm的阀门与真空端连接，既实现了真空设备的在线更换功能，也实现了在非空真情况下对真空设备的保护。装置的制造结构简单，大部分均采用标准件加工生产，降低了生产成本。With the comprehensive application of the above measures, by opening a standard knife-edge flange interface with a diameter of 50mm on the vacuum chamber, the measurement of the vacuum degree and the analysis of the vacuum performance of the large-scale vacuum system can be realized. The number of openings on the vacuum cavity is greatly reduced, the vacuum degree of the vacuum system is improved, and the processing cost of the vacuum cavity is reduced. The device is connected to the vacuum chamber through a valve with a diameter of 50mm, and each device is connected to the vacuum end with a valve with a diameter of 35mm, which not only realizes the online replacement function of the vacuum equipment, but also realizes the vacuum replacement function in the non-vacuum condition. equipment protection. The manufacturing structure of the device is simple, and most of them are processed and produced by standard parts, which reduces the production cost.
附图说明：Description of drawings:
图1为装置结构示意图，Figure 1 is a schematic diagram of the device structure,
图2为图1的左视图，Figure 2 is the left side view of Figure 1,
图3为具有备用结构的装置示意图。Figure 3 is a schematic diagram of the device with an alternate configuration.
具体实施方式：detailed description:
参见附图。See attached picture.
实施例1：Example 1:
一种用于磁体杜瓦高真空度的测量及分析装置，包括真空管路3、法兰2和5、真空阀门4和9、真空规管6、四极质谱分析仪1、氦标准漏孔7；本装置通过直径50mm的真空阀门4与被测装置连接；通过设备连接管路8与真空规管6、四极质谱分析仪1、氦标准漏孔7连接,通过控制真空阀门4即可实现测量装置与真空腔体的联通与关闭；当真空腔体开始抽真空时，打开真空阀门4，以及真空规5对应的直径35mm的真空阀门9，并打开真空规，即可测量真空腔体的动态真空度。当真空度达到可以满足检漏状态，打开标准漏孔对应的直径35mm的阀门，此时利用标准漏孔及检漏仪，即可对整个真空腔体进行漏率的标定，利用标定的参数，配合外漏包检法，即可实现对真空腔体整体外漏率的测定。当设备在运行过程中，真空度达到小于10-3Pa量级，打开四极质谱分析仪对应的35mm的阀门，并开启四极质谱分析仪，可实现对真空腔体内部气载成分的动态分析。A measuring and analyzing device for magnet Dewar high vacuum, including vacuum pipeline 3, flanges 2 and 5, vacuum valves 4 and 9, vacuum gauge 6, quadrupole mass spectrometer 1, helium standard leak 7 The device is connected to the device under test through a vacuum valve 4 with a diameter of 50mm; it is connected to the vacuum gauge 6, the quadrupole mass spectrometer 1, and the helium standard leak hole 7 through the equipment connection pipeline 8, and can be realized by controlling the vacuum valve 4. The connection and closure of the measuring device and the vacuum chamber; when the vacuum chamber starts to be vacuumed, open the vacuum valve 4 and the vacuum valve 9 with a diameter of 35mm corresponding to the vacuum gauge 5, and open the vacuum gauge to measure the vacuum chamber. dynamic vacuum. When the vacuum degree reaches the leak detection state, open the valve with a diameter of 35mm corresponding to the standard leak. At this time, the standard leak and the leak detector can be used to calibrate the leak rate of the entire vacuum chamber. Using the calibrated parameters, Combined with the leakage package inspection method, the measurement of the overall leakage rate of the vacuum chamber can be realized. When the equipment is in operation and the vacuum degree reaches the level of less than 10 -3 Pa, open the 35mm valve corresponding to the quadrupole mass spectrometer and turn on the quadrupole mass spectrometer to realize the dynamic analysis of the airborne components inside the vacuum chamber analyze.
在设备运行时，即可单独开启真空计、标准漏孔、四极质谱。也可以同时开启真空规与标准漏孔、真空规与四极质谱。以上的功能是通过直径35mm的阀门实现的，方便地实现了单设备测量或多设备测量的转换。When the equipment is running, the vacuum gauge, standard leak and quadrupole mass spectrometer can be turned on independently. It is also possible to open the vacuum gauge and standard leak, vacuum gauge and quadrupole mass spectrometer at the same time. The above functions are realized through a valve with a diameter of 35mm, which conveniently realizes the conversion of single-device measurement or multi-device measurement.
当真空腔体准备破真空前，先关闭各个真空设备对应的直径35mm的阀门9，以实现对各个真空设备的保护，防止真空设备在非真空环境下水气等对真空设备的损害。然后再关闭直径50mm的阀门，这样可实现与被测真空腔体的断开。Before the vacuum chamber is ready to break the vacuum, first close the valve 9 with a diameter of 35 mm corresponding to each vacuum device to protect each vacuum device and prevent the vacuum device from being damaged by moisture and the like in a non-vacuum environment. Then close the valve with a diameter of 50mm, which can realize the disconnection from the vacuum chamber to be measured.
装置上还可根据需要增加两路备用接口10和11，接口10是直径为35mm的真空快接口，接口11是直径为35mm的刀口法兰接口，均通过直径为35mm的手阀与真空管路连接。在真空系统运行时，可以在线快速的安装备用真空设备。Two spare interfaces 10 and 11 can also be added to the device as needed. Interface 10 is a vacuum quick interface with a diameter of 35mm, and interface 11 is a knife-edge flange interface with a diameter of 35mm. Both are connected to the vacuum pipeline through a hand valve with a diameter of 35mm. . When the vacuum system is running, spare vacuum equipment can be quickly installed online.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112484644A (en) * | 2020-10-27 | 2021-03-12 | 深圳供电局有限公司 | Cable core deviation Dewar monitoring device for arc laying of high-temperature superconducting cable |
| CN113820065A (en) * | 2021-09-30 | 2021-12-21 | 江南工业集团有限公司 | Vacuum pumping system based on high-temperature and high-pressure environment |
| CN113916440A (en) * | 2020-07-10 | 2022-01-11 | 张家港中集圣达因特种装备有限公司 | Pressure vessel and its vacuum degree measuring device |
| CN116773639A (en) * | 2023-05-26 | 2023-09-19 | 昆明物理研究所 | Dewar internal atmosphere test analysis device and test analysis method thereof |
-
2017
- 2017-03-21 CN CN201720273357.6U patent/CN206583585U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113916440A (en) * | 2020-07-10 | 2022-01-11 | 张家港中集圣达因特种装备有限公司 | Pressure vessel and its vacuum degree measuring device |
| CN112484644A (en) * | 2020-10-27 | 2021-03-12 | 深圳供电局有限公司 | Cable core deviation Dewar monitoring device for arc laying of high-temperature superconducting cable |
| CN112484644B (en) * | 2020-10-27 | 2022-07-22 | 深圳供电局有限公司 | Cable core eccentric Dewar monitoring device for arc laying of high temperature superconducting cables |
| CN113820065A (en) * | 2021-09-30 | 2021-12-21 | 江南工业集团有限公司 | Vacuum pumping system based on high-temperature and high-pressure environment |
| CN116773639A (en) * | 2023-05-26 | 2023-09-19 | 昆明物理研究所 | Dewar internal atmosphere test analysis device and test analysis method thereof |
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