CN108896255A - A kind of target pipe leakage detection apparatus and leak hunting method - Google Patents
A kind of target pipe leakage detection apparatus and leak hunting method Download PDFInfo
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- CN108896255A CN108896255A CN201810789437.6A CN201810789437A CN108896255A CN 108896255 A CN108896255 A CN 108896255A CN 201810789437 A CN201810789437 A CN 201810789437A CN 108896255 A CN108896255 A CN 108896255A
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- target pipe
- gas
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- leak
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/28—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds
- G01M3/2807—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds for pipes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/222—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for tubes
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
The present invention discloses a kind of target pipe leakage detection apparatus and leak hunting method, is related to target pipe air-tightness leak hunting technology field, designs to check target pipe air-tightness.The target pipe leakage detection apparatus includes：Gas imports part, and the gas imports part and imports part for being passed through detection gas, the gas into target pipe and include：Air accumulator, air accumulator are connected to by the first conduction pipe with the target pipe, and the first control valve is equipped on the first conduction pipe；Plenum member, the plenum member are used to increase the pressure in the target pipe, and the plenum member includes：Gas compressor, gas compressor are connected to by the second conduction pipe with the target pipe, are equipped with the second control valve on second conduction pipe；Gas leakage detector, the gas leakage detector is for hunting leak to the target pipe.Target pipe leakage detection apparatus and leak hunting method are used to detect target pipe with the presence or absence of leak source by the present invention.
Description
Technical field
The present invention relates to target pipe air-tightness leak hunting technology field more particularly to a kind of target pipe leakage detection apparatus and leak hunting method.
Background technique
Physical vapour deposition (PVD) vacuum coating equipment (abbreviation PVD equipment) before vacuum extraction, needs the air-tightness to target pipe
It hunts leak, there are two types of existing leak hunting method is general, one kind is before PVD equipment vacuumizes, passes through after target pipe is installed
Water is injected in the cooling water pipe road direction target pipe of target pipe, by whether having water droplet exudation at the detection target seal of tube, to determine on target pipe
Leak source position；Another kind for after target pipe is installed first without leak detection, specifically when PVD equipment vacuumizes operation, to
Target pipe is passed through detection gas and hunts leak.The above two equal Shortcomings of leak hunting method, when hunting leak according to first method, if
Leak source size is smaller, then the water droplet very little oozed out, be difficult in this way discovery water droplet, in turn result in omission, and if leak source size compared with
Hour, it forms water droplet and takes a long time or be hardly formed water droplet, also be easy to cause omission, finally make PVD equipment in vacuum
There is leak in target pipe when operation under environment, and institute's leak influences coating effects, influences product quality, or result in the need for setting PVD
It begins to speak to safeguard for secondary, increases cost and be delayed the production cycle, if the leak during the work time of target pipe, will result in PVD equipment
It is mixed into foreign gas in vacuum chamber, film coating environment is caused to change, the membranous layer property plated out changes, and to reach original film layer
Matter needs to adjust filming parameter to realize original membranous layer property, or original film layer is not achieved adjusting parameter
Matter, and then increase debugging difficulty；When hunting leak using second method, if there is leak source, need to safeguard P VD equipment vacuum breaker, together
Sample increases maintenance cost.
Summary of the invention
The embodiment of the present invention, which provides a kind of target pipe leakage detection apparatus and leak hunting method, main purpose, to be installed in target pipe
Afterwards, with regard to the leak detection of achievable target pipe before equipment vacuumizes, the accuracy of leak detection is improved.
In order to achieve the above objectives, the embodiment of the present invention adopts the following technical scheme that：
A kind of target pipe leakage detection apparatus, including：
Gas imports part, and the gas imports part and imports part for being passed through detection gas, the gas into target pipe and include：
Air accumulator, the air accumulator are connected to by the first conduction pipe with the target pipe, are equipped with the first control on first conduction pipe
Valve；
Plenum member, the plenum member are used to increase the pressure in the target pipe, and the plenum member includes：Gas compressor,
The gas compressor is connected to by the second conduction pipe with the target pipe, is equipped with the second control valve on second conduction pipe；
Gas leakage detector, the gas leakage detector are connected to the target pipe.
Target pipe leakage detection apparatus provided in an embodiment of the present invention imports part by gas and is passed through detection gas into target pipe, together
When, in order to improve the accuracy of leak detection, the pressure in target pipe is increased using plenum member, target pipe is restored to working condition, then lead to
It crosses gas leakage detector to hunt leak to target pipe, whether there is the size of leak source, the position of leak source and leak rate with precise measurement target pipe,
Especially the target pipe leakage detection apparatus is after target pipe is installed, and equipment hunts leak to target pipe before vacuumizing, and thus is avoided that something lost
The phenomenon that causing equipment vacuum breaker to safeguard when leakage.
Optionally, first conduction pipe and second conduction pipe are connected to third conduction pipe, the third conducting
Pipe is connected to the target pipe by the first communicating valve, and for being connected to the valve port of the third conduction pipe in first communicating valve
On third control valve is installed.
Optionally, the target pipe leakage detection apparatus further includes：Air pressure detecting element, the air pressure detecting element are mounted on described
On third conduction pipe, for detecting the pressure in the target pipe.
Optionally, the target pipe leakage detection apparatus further includes：Gas exports part, and the gas export part is for draining the target
Gas in pipe, the gas export part includes the relief tube being connected to the target pipe, and the relief tube is connected to the third
Conduction pipe.
Optionally, the target pipe leakage detection apparatus further includes：Controller, the controller are used for the helium being passed through into target pipe
Amount, and for controlling the pressure in the target pipe, first control valve and second control valve as electrically-controlled valve, and the control
Device processed is connect with first control valve and second control valve.
Optionally, it is that helium imports part that the gas, which imports part, and the gas leakage detector is helium leak check instrument.
On the other hand the embodiment of the present invention additionally provides a kind of using above-mentioned target pipe leakage detection apparatus hunts leak to target pipe
Leak hunting method, the leak hunting method include：
Detection gas are passed through into the target pipe；
To being pressurized in the target pipe, when the pressure P1 in the target pipe is at least equal to operating pressure P0When stop increase
Pressure；
It is hunted leak using the gas leakage detector to the pressurized target pipe.
Leak hunting method provided in an embodiment of the present invention, leak hunting method is easy to operate, can precise measurement target pipe whether there is
The size of leak source, the position of leak source and leak rate, especially the target pipe leakage detection apparatus are after target pipe is installed, and equipment is taken out
The phenomenon that hunting leak before vacuum to target pipe, equipment vacuum breaker caused to safeguard when thus being avoided that omission.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of target pipe leakage detection apparatus provided in an embodiment of the present invention；
Fig. 2 is a kind of schematic diagram of target pipe leak detection position provided in an embodiment of the present invention；
Fig. 3 is a kind of schematic block circuit diagram of target pipe leakage detection apparatus provided in an embodiment of the present invention；
Fig. 4 is a kind of flow diagram of leak hunting method provided in an embodiment of the present invention.
Specific embodiment
Target pipe leakage detection apparatus and leak hunting method are described in detail with reference to the accompanying drawing.
In the description of the present invention, it is to be understood that, term " center ", "upper", "lower", "front", "rear", " left side ",
The orientation or positional relationship of the instructions such as " right side ", "vertical", "horizontal", "top", "bottom", "inner", "outside" is based on the figure
Orientation or positional relationship is merely for convenience of description of the present invention and simplification of the description, rather than the device of indication or suggestion meaning or
Element must have a particular orientation, be constructed and operated in a specific orientation, therefore be not considered as limiting the invention.
Term " first ", " second " be used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance or
Implicitly indicate the quantity of indicated technical characteristic." first " is defined as a result, the feature of " second " can be expressed or imply
Ground includes one or more of the features.In the description of the present invention, unless otherwise indicated, the meaning of " plurality " is two or
It is more than two.
The embodiment of the invention provides a kind of target pipe leakage detection apparatus, which includes：Gas imports part, described
Gas imports part for being passed through detection gas into target pipe；Plenum member, the plenum member are used to increase the pressure in the target pipe；
Gas leakage detector, the gas leakage detector is for hunting leak to the target pipe.
Target pipe leakage detection apparatus provided in an embodiment of the present invention imports part by gas first and is passed through detection gas into target pipe,
The gas flow being passed through allows for that the gas leakage detector measurement is enable to obtain, then is passed through by plenum member to the target pipe
Gas with certain pressure is to make target pipe be restored to working condition, i.e. target in this way to increase the pressure in the target pipe
Pressure in pipe reaches working condition pressure, hunts leak so that target pipe is under operating pressure state, can be improved inspection in this way
The precision of leakage, the phenomenon that preventing missing inspection, finally hunt leak to pressurized target pipe using gas leakage detector, and gas leak detection
Instrument performance is stablized, high sensitivity, is capable of the accurate leak source position for detecting target pipe and corresponding leak rate size.
It is exemplary, physical vapour deposition (PVD) vacuum coating equipment (abbreviation PVD equipment) is carried out by the target pipe leakage detection apparatus
It is that leak detection operation, and institute are carried out before vacuumizing to PVD equipment after target pipe is mounted in PVD equipment when leak detection
It is high to state target pipe leakage detection apparatus precision of detecting leak gas, can ensure the subsequent operating environment of target pipe, meanwhile, it also can be avoided in PVD equipment
Under vacuum conditions because target pipe needs the phenomenon that safeguarding to PVD equipment vacuum breaker there are leak source.
Referring to Fig.1, specifically, gas importing part includes：Air accumulator 9, the air accumulator 9 pass through the first conduction pipe 10
It is connected to the target pipe 1, the first control valve 11 is installed on first conduction pipe 10, pass through the first control valve 11 control first
The circulation and blocking of conduction pipe 10, and then control the circulation of detection gas.The air accumulator 9 can be storage cylinder or other storages
The device of gas is deposited, first control valve 11 can be hand-operated valve, or electrically-controlled valve.
Referring to Fig.1, specifically, the plenum member includes：Gas compressor 8, shown gas compressor 8 pass through the second conducting
Pipe 20 is connected to the target pipe 1, and the second control valve 7 is equipped on second conduction pipe 20, passes through the second control valve 7 control the
The circulation and blocking of two conduction pipes 20, and then control the circulation of compressed gas.The gas compressor 8 can compress for air
Machine, second control valve 7 can be hand-operated valve, or electrically-controlled valve.
In order to simplify the structure of entire target pipe leakage detection apparatus, prevent conduction pipe is more from causing redundancy phenomena, described first leads
Siphunculus 10 and second conduction pipe 20 are connected to third conduction pipe 4, specifically, first conduction pipe 10, described second
Conduction pipe 20 is connected to the third conduction pipe 4 by the second communicating valve 12, specifically, the second communicating valve 12 is triple valve, when
When the target pipe leakage detection apparatus hunts leak to the target pipe in PVD equipment, the third conduction pipe 4 is connected by the first communicating valve 2
On the cooling water pipeline 14 for passing through the target pipe 1, it can be thus further simplified the structure of entire target pipe leakage detection apparatus, directly benefit
Use cooling water pipeline as the partially ON pipe of the target pipe leakage detection apparatus, while the target pipe leakage detection apparatus is made for ease of operation
Industry is equipped with third control valve 3 for being connected on the valve port of the third conduction pipe 4 in first communicating valve 2, passes through third
Control valve 3 controls entire target pipe leakage detection apparatus and whether imports helium or compressed gas into target pipe, and the third control valve 3 can be with
For hand-operated valve, or electrically-controlled valve, specifically, first communicating valve 2 is triple valve.
Exemplary, it is that helium imports part, halogen gas imports part, the dilute importing part of second, four fluorine ethylenes that the gas, which imports part,
It imports part, three vinyl chlorides importing part and the gas containing halogen and imports part, optionally, helium is selected to import part, the helium is led
Enter part for being passed through helium into target pipe, then the gas leakage detector is helium leak check instrument, and helium leak check instrument performance is stablized, and spirit
Sensitivity is high.
In order to improve the accuracy of target pipe leak detection, the target pipe leakage detection apparatus further includes：Air pressure detecting element, the air pressure
Detecting element is used to detect the pressure in the target pipe, in specific leak detection, after using helium leak check instrument to increase pressure
When target pipe is hunted leak, the air pressure change situation in the target pipe can be also detected by air pressure detecting element, passes through air pressure change situation
Whether correct verify helium leak check instrument result detected, for example, when air pressure detecting element detects air pressure detected and becomes smaller,
Illustrate that target pipe has leak source, if helium leak check instrument also detects to prove that target pipe has leak source with leak source, pass through air pressure
Detecting element is mutually confirmed with helium leak check instrument, keeps leak detection result more acurrate.
Exemplary, the air pressure detecting element can be pressure gauge 13, and the pressure gauge 13 is mounted on the third conducting
On pipe 4, it is also possible to pressure sensor, the pressure sensor is mounted on 1 inner wall of target pipe.
It after completing to hunt leak to target pipe, needs to export to the pressure release of target pipe and by the gas in target pipe, the target pipe leak detection dress
It sets and further includes：Gas exports part, and the gas export part is used to drain the gas in the target pipe, and exemplary, the gas is led
Part includes relief tube 5 out, and the relief tube 5 is connected to the third conduction pipe 4, is equipped with pressure release control on the relief tube 5
Valve 6, the conducting or blocking of relief tube 5 described in the folding control by the unloading pressure control valve 6, specifically, the relief tube 5 is logical
It crosses third connecting valve and is connected to the third conduction pipe 4, the unloading pressure control valve 6 can be hand-operated valve, or electrically-controlled valve,
The third connecting valve is triple valve.
Referring to Fig. 3, first control valve 11, second control valve 7, the third control valve 3 and the pressure release control
It when valve 6 processed is electrically-controlled valve, is connect with controller 19, the controller 19 is used for the amount of helium being passed through into target pipe, and uses
In controlling the pressure in the target pipe, the folding of above-mentioned all solenoid valves is controlled by controller 19, realizes automatic control.
Referring to Fig.1, the air accumulator 9 and gas compressor 8 are fixed on cart 15, are easy to use.
The embodiment of the invention also provides a kind of leak hunting method hunted leak using above-mentioned target pipe leakage detection apparatus to target pipe,
Referring to Fig. 4, the leak hunting method includes：
S1：Detection gas are passed through into the target pipe.
Part is imported using the gas and is passed through detection gas into target pipe, specifically, opening third control valve 3 and the first control
Valve 11 processed closes the second control valve 7 and unloading pressure control valve 6, and the detection gas in air accumulator are passed through in target pipe 1, when the target pipe 1
When interior pressure is 0.5bar-4.0bar, first control valve 11 is closed, being passed through for detection gas is stopped, it is optionally, described
Pressure in target pipe 1 is 0.5bar-2bar, further alternative, and the pressure in the target pipe 1 is 0.5bar-1bar, the target
Pressure in pipe 1 is 0.5bar.
When the target pipe leakage detection apparatus has air pressure detecting element, i.e., pressure gauge is installed on the described third conduction pipe 4
When 13, it can be observed by pressure gauge and read pressure values.
S2：To being pressurized in the target pipe, the pressure P in the target pipe1At least equal to operating pressure P0When stop increase
Pressure.
Specifically, opening the second control valve 7, the gas with pressure is imported into target pipe by gas compressor 8, works as institute
State air pressure detecting element atmospheric pressure value P detected1At least equal to the operating pressure P of target pipe0When, second control valve 7 is closed,
Stop being passed through gas into target pipe, not only there are probe gas (detection gas) in such target pipe, target pipe is also quite in work
In environment, the accuracy of leak detection is improved.
Exemplary, when being pressurized in the target pipe, after pressurization in the target pipe pressure P1With operating pressure P0's
Relationship is：P0≤P1≤1.5P0, optionally, P0≤P1≤0.8P0, further alternative, P0=P1。
S3：It is hunted leak using the gas leakage detector to the pressurized target pipe.
Specifically, helium leak check instrument is connect with suction gun when being hunted leak using helium leak check instrument, helium leak check instrument is opened,
After helium leak check instrument is stablized, the aperture of suction gun is adjacent at the target seal of tube and slowly moves, when helium leak check instrument shows leak source,
There are leak sources for the opposite position of expression suction gun keyhole detection, record leak rate and leak source position, after helium leak check instrument is stablized, after
It is continuous to hunt leak according to aforesaid operations process；If helium leak check instrument does not show leak source, illustrate that the target seal of tube is good.
Referring to Fig. 2, the position that the target pipe 1 is easy leakage is probably present in：16 at upper end sealing, at lower end sealing
17 and lower end 18, so needing to carry out emphasis leak detection to above three position in leak detection, prevent from omitting.
In the case that the target pipe leakage detection apparatus further includes air pressure detecting element, in the target pipe be pressurized after also wrap
It includes：Within a preset time, the air pressure detecting element pressure change detected is observed, determines whether the target pipe has leakage
Point passes through air pressure detecting element and helium if target pipe, there are leak source, the air pressure detecting element pressure detected can become smaller in this way
Gas leak detector mutually confirms, and keeps leak detection result more acurrate.The preset time is generally 10 minutes to 20 minutes, is optionally 12
Minute, specific value can be determined according to the pressure size in the specification and target pipe of target pipe to 15 minutes.
Air-leakage test equally can be carried out to the target pipe in PVD equipment using above-mentioned leak hunting method, specifically in leak detection,
Target pipe is mounted in PVD equipment first, then follows above-mentioned leak hunting method and hunts leak to target pipe, after completing leak detection, then to PVD
Equipment vacuumizes plated film, and effect achieved in this way is：Before PVD equipment vacuumizes carry out the leak detection of target pipe, and for leak source into
Row is repaired, and preventing target pipe, internal cooling water exudation influences coating effects during the work time, and then influences product film quality.
In the description of this specification, particular features, structures, materials, or characteristics can be real in any one or more
Applying can be combined in any suitable manner in example or example.The foregoing is merely a specific embodiment of the invention, but protection of the invention
Range is not limited thereto, and anyone skilled in the art in the technical scope disclosed by the present invention, can be easily
Expect change or replacement, should be covered by the protection scope of the present invention.Therefore protection scope of the present invention should be with the power
Subject to the protection scope that benefit requires.
Claims (10)
1. a kind of target pipe leakage detection apparatus, which is characterized in that including：
Gas imports part, and the gas imports part and imports part for being passed through detection gas, the gas into target pipe and include：Gas storage
Tank, the air accumulator are connected to by the first conduction pipe with the target pipe, are equipped with the first control valve on first conduction pipe；
Plenum member, the plenum member are used to increase the pressure in the target pipe, and the plenum member includes：Gas compressor, it is described
Gas compressor is connected to by the second conduction pipe with the target pipe, is equipped with the second control valve on second conduction pipe；
Gas leakage detector, the gas leakage detector are connected to the target pipe.
2. target pipe leakage detection apparatus according to claim 1, which is characterized in that first conduction pipe and second conducting
The connection of Guan Junyu third conduction pipe, the third conduction pipe is connected to the target pipe by the first communicating valve, and described first connects
Third control valve is installed for being connected on the valve port of the third conduction pipe in port valve.
3. target pipe leakage detection apparatus according to claim 2, which is characterized in that the target pipe leakage detection apparatus further includes：Air pressure
Detecting element, the air pressure detecting element are mounted on the third conduction pipe, for detecting the pressure in the target pipe.
4. target pipe leakage detection apparatus according to claim 2, which is characterized in that the target pipe leakage detection apparatus further includes：Gas
Part is exported, the gas export part is used to drain the gas in the target pipe, and the gas export part includes and the target Guan Lian
Logical relief tube, the relief tube are connected to the third conduction pipe.
5. target pipe leakage detection apparatus according to claim 1, which is characterized in that the target pipe leakage detection apparatus further includes：Control
Device, the controller are used for the amount of helium being passed through into target pipe, and for controlling the pressure in the target pipe, first control
Valve and second control valve are electrically-controlled valve, and the controller is connect with first control valve and second control valve.
6. target pipe leakage detection apparatus according to claim 1, which is characterized in that it is that helium imports part that the gas, which imports part,
The gas leakage detector is helium leak check instrument.
7. it is a kind of using target pipe leakage detection apparatus described in claim 1~6 any claim to the leak hunting method of target pipe, it is special
Sign is that the leak hunting method includes：
Detection gas are passed through into the target pipe；
To being pressurized in the target pipe, the pressure P in the target pipe1At least equal to operating pressure P0When stop pressurization；
It is hunted leak using the gas leakage detector to the pressurized target pipe.
8. leak hunting method according to claim 7, which is characterized in that when being passed through detection gas into the target pipe, when
When pressure in the target pipe is 0.5bar-4.0bar, stop being passed through for detection gas.
9. leak hunting method according to claim 7, which is characterized in that when being pressurized in the target pipe, after pressurization
Pressure P in the target pipe1With operating pressure P0Relationship be：P0≤P1≤1.5P0。
10. leak hunting method according to claim 7, which is characterized in that the target pipe leakage detection apparatus further include air pressure inspection
Survey element in the case where, in the target pipe be pressurized after further include：Within a preset time, the air pressure detecting element institute is observed
The pressure change of detection, determines whether the target pipe has leak source.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810789437.6A CN108896255A (en) | 2018-07-18 | 2018-07-18 | A kind of target pipe leakage detection apparatus and leak hunting method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810789437.6A CN108896255A (en) | 2018-07-18 | 2018-07-18 | A kind of target pipe leakage detection apparatus and leak hunting method |
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| CN108896255A true CN108896255A (en) | 2018-11-27 |
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| CN201810789437.6A Pending CN108896255A (en) | 2018-07-18 | 2018-07-18 | A kind of target pipe leakage detection apparatus and leak hunting method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110608855A (en) * | 2019-10-21 | 2019-12-24 | 启迪蓝光(福建)新材料有限公司 | Device for detecting air leakage in target piece production process |
| CN112179585A (en) * | 2020-09-24 | 2021-01-05 | 厦门日村环保科技有限公司 | Method for detecting pipeline tightness |
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