CN212354430U - Air inlet device for controlling pressure in high-vacuum environment - Google Patents
Air inlet device for controlling pressure in high-vacuum environment Download PDFInfo
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- CN212354430U CN212354430U CN202020381461.9U CN202020381461U CN212354430U CN 212354430 U CN212354430 U CN 212354430U CN 202020381461 U CN202020381461 U CN 202020381461U CN 212354430 U CN212354430 U CN 212354430U
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Abstract
The utility model discloses an air inlet unit of high vacuum environment control pressure. So that the detection and pressure for deep space is 102The device comprises a first regulating valve, a primary pressure regulating cavity, a fine channel, a fine adjusting valve and a secondary pressure regulating cavity; the external gas is communicated with the primary pressure regulating cavity through a first regulating valve; the number of the fine channels is N, and N is more than or equal to 1; the diameter of the fine channel ranges from 0.01mm to 1 mm; the inlets of the N micro channels are communicated with the primary pressure regulating cavity, and the outlets of the N micro channels are communicated with the secondary pressure regulating cavity through N micro adjusting valves; the flow regulating range of the fine regulating valve is 0.5mL-5 mL; second stageThe pressure adjusting cavity is communicated with an external device to be examined; and the primary pressure regulating cavity and the secondary pressure regulating cavity are both provided with vacuum gauges.
Description
Technical Field
The utility model relates to an air inlet unit especially relates to an air inlet unit of high vacuum environment control pressure.
Background
In recent years, with the development of spacecraft deep space exploration, the requirements on space environment simulation test equipment are higher and higher. The low-pressure test is an important test item in a space environment simulation test, and is mainly used for checking whether a spacecraft or a spacecraft system component can endure a low-pressure environment, can normally work under the low-pressure environment and can endure rapid change of air pressure, so that the spacecraft or the spacecraft system component is prevented from losing efficacy in the launching process or in-orbit.
The low-pressure test is mainly completed by using a low-pressure test chamber at present, but the limit pressure of the low-pressure test chamber can only reach 102Pa, but the pressure value required for the current spacecraft or spacecraft component for deep space exploration to be lower than 10 when carrying out low-pressure tests2Pa, some low pressure tests even require pressure values of 10-5Level of Pa, so at 102Pa～10-5The low-pressure test chamber in the pressure magnitude range of Pa can not meet the test requirements.
The limit pressure of the low-pressure test chamber can only reach 102Pa, detection of deep space and pressure of 102The problem that the low-pressure test below Pa magnitude cannot be completed, and the existing test methodThe method comprises the following steps: the method is carried out in a space environment simulation test device, but has two limitations:
firstly, because the decompression rate can not be adjusted after the vacuum pumping system is started, the decompression rate can not be accurately controlled.
Secondly, after the vacuum pumping system is started, the pressure is gradually reduced until the ultimate vacuum degree of the equipment is reached, so that the pressure can not be stabilized to be close to the pressure value required by the test.
SUMMERY OF THE UTILITY MODEL
In order to solve the problem of the deep space detection and pressure proposed in the background art, the pressure is 102The problem that the low-pressure test below the Pa magnitude of force can not be effectively implemented, the utility model provides an air inlet unit of high vacuum environment control pressure.
The utility model discloses a concrete technical scheme is:
the utility model provides a high vacuum environment pressure control air inlet device, which comprises a first regulating valve, a primary pressure regulating cavity, a fine channel, a fine regulating valve and a secondary pressure regulating cavity;
the external gas is communicated with the primary pressure regulating cavity through a first regulating valve;
the number of the fine channels is N, and N is more than or equal to 1; the diameter of the fine channel ranges from 0.01mm to 1 mm;
the inlets of the N micro channels are communicated with the primary pressure regulating cavity, and the outlets of the N micro channels are communicated with the secondary pressure regulating cavity through N micro adjusting valves; the flow regulating range of the fine regulating valve is 0.5mL-5 mL;
the secondary pressure adjusting cavity is communicated with an external device to be tested;
and the primary pressure regulating cavity and the secondary pressure regulating cavity are both provided with vacuum gauges.
Furthermore, N fine channels are all opened on a base, and the base is integrally installed on the first-level pressure regulating cavity.
Further, a sealing ring is installed at the matching position of the base and the primary pressure adjusting cavity.
Further, N microchannels use N capillaries.
Further, in order to ensure that the pressure value of the secondary pressure regulating cavity in the initial stage is always lower than 0.1Pa, the device also comprises an auxiliary vacuum-pumping assembly; the auxiliary vacuumizing assembly comprises an auxiliary vacuumizing pipeline, a molecular pump and a vacuum dry pump;
one end of the auxiliary vacuum-pumping pipeline is communicated with the secondary pressure adjusting cavity, the other end of the auxiliary vacuum-pumping pipeline is communicated with the vacuum dry pump, and the molecular pump is arranged on the auxiliary vacuum-pumping pipeline and is positioned between the secondary pressure adjusting cavity and the vacuum dry pump; and second regulating valves are respectively arranged between the molecular pump and the secondary pressure regulating cavity and between the molecular pump and the vacuum dry pump.
Further, the primary pressure adjusting cavity is communicated with an external vacuum tank through a flange.
Furthermore, the secondary pressure regulating cavity is communicated with an external device to be tested through a third regulating valve and a flange.
The utility model has the advantages that:
the utility model discloses the device adopts first governing valve + one-level pressure to adjust the chamber and carries out the coarse tune to the atmospheric pressure of outside vacuum tank, and the mode that the fine microchannel of rethread + fine setting valve + second grade pressure adjusts the chamber and carries out the meticulous pressure regulating of second grade has realized pressure at 102Pa～10-5The air input is controllable in the Pa range, the pressure is stable, the problem that the pressure is difficult to stabilize in the deep space exploration low-pressure test in the aerospace field is solved, and the device is simple in structure and easy to realize.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
The reference numbers are as follows:
1-air inlet flange, 2-first regulating valve, 3-primary pressure regulating cavity, 4-fine channel, 5-fine regulating valve, 6-secondary pressure regulating cavity, 7-third regulating valve, 8-air outlet flange, 9-vacuum gauge, 10-base, 11-sealing ring, 12-auxiliary vacuum-pumping pipeline, 13-molecular pump, 14-vacuum dry pump and 15-second regulating valve.
Detailed Description
The technical solution of the present invention will be described clearly and completely with reference to the accompanying drawings, and obviously, the described embodiments are some, but not all embodiments of the present invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
In the description of the invention, it is noted that the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Examples
As shown in fig. 1, the embodiment provides a specific structure of a high vacuum environment pressure control air inlet device, which includes an air inlet flange 1, a first regulating valve 2, a primary pressure regulating cavity 3, a fine channel 4, a trim valve 5, a secondary pressure regulating cavity 6, a third regulating valve 7, and an air outlet flange 8;
the external gas is communicated with the primary pressure regulating cavity 3 through the gas inlet flange 1 and the first regulating valve 2;
the number of the fine channels 4 is N, and N is more than or equal to 1; the diameter of the fine channel 4 ranges from 0.01mm to 1 mm; in this embodiment, N is 8 (this number and the diameter of the microchannel can be selected according to the actual pressure requirement, as shown in fig. 1, the numbers from left to right are 1 to 8, specifically:
the diameter of the No. 1 micro channel is 0.01 mm-0.05 mm, the diameter of the No. 2 micro channel is 0.05-0.08 mm, and the pressure requirement of the No. 1 micro channel is 10-5Used for regulating Pa pressure.
The diameter of No. 5 micro-channel tube is 0.12-0.17 mm, the diameter of No. 6 micro-channel tube is 0.17-0.25 mm, and the pressure requirement is 10-3Used for regulating Pa pressure.
The diameter of No. 7 micro channel is 0.25-0.5 mm, the diameter of No. 8 micro channel is 0.5-1 mm, it is mainly used for pressure requirement at 10-2Used for regulating Pa pressure.
The inlets of the 8 micro channels 4 are communicated with the primary pressure regulating cavity 3; the outlets of the 8 micro channels 4 are respectively communicated with the secondary pressure adjusting cavity 6 through 8 micro adjusting valves 5 (the flow adjusting range of the micro adjusting valves is 0.5mL-5 mL); the secondary pressure adjusting cavity 6 is communicated with an external device to be tested through a third adjusting valve 7 and an air outlet flange 8; and the first-stage pressure adjusting cavity 3 and the second-stage pressure adjusting cavity 6 are both provided with vacuum gauges 9 for measuring pressure values in the pressure adjusting cavities in real time.
In practice, the microchannel 4 has two designs:
the first method comprises the following steps: the micro channels 4 are all arranged on a base 10, the base 10 is integrally arranged on the primary pressure adjusting cavity 3, and in order to ensure air tightness, a sealing ring 11 is arranged at the position where the base 10 is matched with the primary pressure adjusting cavity 3.
Second, the microchannel 4 is made using a capillary tube, without a base.
Both the two modes can be selected according to actual conditions, and the first mode is adopted in the embodiment.
Preferably, in practical application, the pressure in the secondary pressure regulating cavity is difficult to maintain at a level lower than 0.1Pa all the time, so in order to ensure that the pressure value of the secondary pressure regulating cavity is lower than 0.1Pa all the time, the device also comprises an auxiliary vacuum-pumping assembly; the auxiliary vacuum-pumping assembly comprises an auxiliary vacuum-pumping pipeline 12, a molecular pump 13 and a vacuum dry pump 14; one end of an auxiliary vacuum-pumping pipeline 12 is communicated with the secondary pressure adjusting cavity 6, the other end of the auxiliary vacuum-pumping pipeline is communicated with a vacuum dry pump 14, and a molecular pump 13 is arranged on the auxiliary vacuum-pumping pipeline 12 and is positioned between the secondary pressure adjusting cavity 6 and the vacuum dry pump 14; third regulating valves 15 are respectively arranged between the molecular pump 13 and the secondary pressure regulating cavity 6 and between the molecular pump 13 and the vacuum dry pump 14. When the pressure in the secondary pressure regulating cavity 6 is found to exceed 0.1pa, the auxiliary vacuum-pumping assembly is started to regulate the pressure in the secondary pressure regulating cavity to be below 0.1 pa.
The specific use process of the device provided by the embodiment is as follows:
firstly, the pressure of gas entering the secondary pressure adjusting cavity is required to be ensured not to be higher than 0.1Pa, when the pressure displayed by a vacuum gauge of the secondary pressure adjusting cavity is higher than 0.1Pa, a third adjusting valve, a molecular pump and a vacuum dry pump in the auxiliary vacuumizing assembly are opened to vacuumize the secondary pressure adjusting cavity, and when the pressure displayed by the vacuum gauge is lower than 0.1Pa, the third adjusting valve, the molecular pump and the vacuum dry pump in the auxiliary vacuumizing assembly are closed to start subsequent work.
Secondly, when in operation, external air enters the primary pressure regulating cavity through the air inlet flange and the first regulating valve, and the external air (generally 10) is regulated through the first regulating5Pa) performing coarse adjustment, and closing the first regulating valve when the pressure of a vacuum gauge on the primary pressure regulating cavity is lower than 10 Pa;
thereafter, fine adjustment of the pressure is performed as the case may be:
case 1: when the required pressure is 10-5When the pressure is Pa, opening the fine tuning valves below the No. 1 and No. 2 fine channels, closing the fine tuning valves of the other channels, and realizing fine tuning of the pressure by adjusting the opening degrees of the fine tuning valves;
case 2: when the required pressure is 10-4When the pressure is Pa, opening the fine tuning valves below the No. 3 and No. 4 fine channels, closing the fine tuning valves of the other channels, and realizing fine pressure tuning by adjusting the opening degrees of the fine tuning valves;
case 3: when the required pressure is 10-3When the pressure is Pa, opening the micro-regulating valves below the No. 5 and No. 6 micro-channels, closing the micro-regulating valves of the other channels, and realizing fine pressure regulation by regulating the opening degree of the micro-regulating valves;
case 4: when the required pressure is 10-2When Pa, the micro-adjusting valves below the No. 7 and No. 8 micro-channels are opened, and the micro-adjusting valves of the rest channels are closed, and the micro-adjusting valves are openedAdjusting the opening of the fine adjustment valve to realize fine adjustment of pressure;
when the pressure of the vacuum gauge on the secondary pressure adjusting cavity shows the pressure corresponding to each condition, closing the fine adjustment valve;
and finally, opening a second regulating valve, and enabling the gas in the secondary pressure regulating cavity to enter the device to be tested.
Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; although the present invention has been described in detail with reference to the foregoing embodiments, it should be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; such modifications and substitutions do not depart from the spirit and scope of the present invention.
Claims (8)
1. The utility model provides a high vacuum environment control pressure's air inlet unit which characterized in that:
the device comprises a first regulating valve, a primary pressure regulating cavity, a micro channel, a fine regulating valve and a secondary pressure regulating cavity;
the external gas is communicated with the primary pressure regulating cavity through a first regulating valve;
the number of the fine channels is N, and N is more than or equal to 1; the diameter of the fine channel ranges from 0.01mm to 1 mm;
the inlets of the N micro channels are communicated with the primary pressure regulating cavity, and the outlets of the N micro channels are respectively communicated with the secondary pressure regulating cavity through N micro regulating valves; the flow regulating range of the fine regulating valve is 0.5mL-5 mL;
the secondary pressure adjusting cavity is communicated with an external device to be tested;
and the primary pressure regulating cavity and the secondary pressure regulating cavity are both provided with vacuum gauges.
2. The high vacuum environment pressure control inlet device of claim 1, wherein: the N micro channels are all arranged on a base, and the base is integrally arranged on the primary pressure adjusting cavity.
3. The high vacuum environment pressure control inlet device of claim 1, wherein: the N micro channels adopt N capillaries.
4. The high-vacuum ambient pressure control intake apparatus according to claim 2 or 3, wherein: the device also comprises an auxiliary vacuum-pumping assembly; the auxiliary vacuumizing assembly comprises an auxiliary vacuumizing pipeline, a molecular pump and a vacuum dry pump;
one end of the auxiliary vacuum-pumping pipeline is communicated with the secondary pressure adjusting cavity, the other end of the auxiliary vacuum-pumping pipeline is communicated with the vacuum dry pump, and the molecular pump is arranged on the auxiliary vacuum-pumping pipeline and is positioned between the secondary pressure adjusting cavity and the vacuum dry pump; and second regulating valves are respectively arranged between the molecular pump and the secondary pressure regulating cavity and between the molecular pump and the vacuum dry pump.
5. The high vacuum environment pressure control inlet device of claim 4, wherein: the number of the fine channels is 8, and the diameter of each fine channel is different.
6. The high vacuum environment pressure control inlet device of claim 5, wherein: the primary pressure adjusting cavity is communicated with an external vacuum tank through a flange.
7. The high vacuum environment pressure control inlet device of claim 6, wherein: and the secondary pressure regulating cavity is communicated with an external device to be tested through a third regulating valve and a flange.
8. The high vacuum environment pressure control inlet device of claim 2, wherein: and a sealing ring is arranged at the matching position of the base and the primary pressure adjusting cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020381461.9U CN212354430U (en) | 2020-03-23 | 2020-03-23 | Air inlet device for controlling pressure in high-vacuum environment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202020381461.9U CN212354430U (en) | 2020-03-23 | 2020-03-23 | Air inlet device for controlling pressure in high-vacuum environment |
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| CN212354430U true CN212354430U (en) | 2021-01-15 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111377070A (en) * | 2020-03-23 | 2020-07-07 | 中国科学院西安光学精密机械研究所 | Air inlet device for controlling pressure in high-vacuum environment |
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2020
- 2020-03-23 CN CN202020381461.9U patent/CN212354430U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111377070A (en) * | 2020-03-23 | 2020-07-07 | 中国科学院西安光学精密机械研究所 | Air inlet device for controlling pressure in high-vacuum environment |
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