CN207882230U - A kind of residual gas analysis system that width air pressure range is applicable - Google Patents
A kind of residual gas analysis system that width air pressure range is applicable Download PDFInfo
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- CN207882230U CN207882230U CN201721529457.7U CN201721529457U CN207882230U CN 207882230 U CN207882230 U CN 207882230U CN 201721529457 U CN201721529457 U CN 201721529457U CN 207882230 U CN207882230 U CN 207882230U
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Abstract
The utility model belongs to technical field of vacuum, and in particular to a kind of residual gas analysis system that width air pressure range is applicable.The utility model includes analysis cavity, air inlet (KF16), upper flange, reset valve, ionization gauge, residual gas analyzer, molecular pump and fore pump, analysis cavity is circular vacuum room, there are four interfaces for band, the upper end is DN100 flanges, for connecting upper flange, two or so, middle part is to wearing interface, KF40 flanges for connecting ionization gauge and the CF100 flanges pumped for connection molecule, lower end is CF35 flanges, for connecting residual gas analyzer；Ionization gauge is arranged in the middle part of analysis cavity, and residual gas analyzer is mounted in the middle part of analysis cavity；System is connect by reset valve horizontal interface with vacuum chamber to be measured.Using the system of the utility model, can the expansion of the operating pressure of residual gas analyzer be depressed into ultrahigh vacuum for air can survey.
Description
Technical field
The utility model belongs to technical field of vacuum, and in particular to a kind of residual gas analysis system that width air pressure range is applicable
System.
Background technology
Neutral beam injector is most effective auxiliary mode of heating in controlled nuclear fusion experiment, and ion source is neutral beam note
Enter the core component of device, operating air pressure is 10-1Pa magnitudes, and the gas of dry cleansing is required, once it is mixed into foreign gas, meeting
Defective component, foreign particle can destroy Tokamak Plasma.Using residual gas analyzer to ion source gas ingredient into
Row analysis, but common residual gas analyzer operating pressure is 10-2From air to be pressed onto superelevation true hereinafter, therefore designing one by Pa
The applicable residual gas analysis system of empty width air pressure range.
Utility model content
The purpose of this utility model is in view of the foregoing defects the prior art has, to provide what a kind of wide air pressure range was applicable in
Residual gas analysis system, solving residual gas analyzer cannot be at high pressure to the deficiency of the analysis of gas componant.
The technical solution of the utility model is as follows：
A kind of residual gas analysis system that width air pressure range is applicable, including analysis cavity, air inlet (KF16), upper flange,
Reset valve, ionization gauge, residual gas analyzer, molecular pump and fore pump, analysis cavity are circular vacuum room, band there are four interface,
The upper end is DN100 flanges, and for connecting upper flange, two or so, middle part is to wearing interface, the KF40 methods for connecting ionization gauge
CF100 flanges blue and for connection molecule pump, lower end is CF35 flanges, for connecting residual gas analyzer；
Ionization gauge is arranged in the middle part of analysis cavity, and residual gas analyzer is mounted in the middle part of analysis cavity；
System is connect by reset valve horizontal interface with vacuum chamber to be measured.
A kind of residual gas analysis system that width air pressure range is applicable, the analysis cavity diameter 120mm, high 150mm, volume
For 1177cm3。
A kind of residual gas analysis system that width air pressure range is applicable, the adjustable amount of the reset valve minimum is 4.7 × 10- 3Pa.L.s-1。
A kind of residual gas analysis system that width air pressure range is applicable, molecular pump bore is 100mm, is provided for analysis cavity
The pumping speed of 100L/s.
A kind of residual gas analysis system that width air pressure range is applicable, the residual gas analysis system, when vacuum to be measured
When the air pressure of room meets residual gas analyzer job requirement, do not start molecular pump and fore pump, reset valve is opened to maximum.
A kind of residual gas analysis system that width air pressure range is applicable, the residual gas analysis system, when vacuum to be measured
When the air pressure of room is higher than residual gas analyzer job requirement, start fore pump and molecular pump first, then according to analysis cavity
Vacuum degree adjusts reset valve, and the vacuum degree of analysis cavity is adjusted 10-3~10-4Pa magnitudes, it is normal to meet residual gas analyzer
Work.
The beneficial effects of the utility model are：
Using the system of the utility model, it is that air is depressed into superelevation that can expand the operating pressure of residual gas analyzer
Vacuum can be surveyed.
Description of the drawings
Fig. 1 is suitable for the residual gas analysis system of wide air pressure range
Fig. 2 analyzes cavity configuration
1. reset valve in figure；2. air inlet (KF16)；3. upper flange；4. analysis cavity；5. ionization gauge；6. molecular pump；7. residual
Remaining gas analyzer；8.DN100 flanges；9.KF40 flanges；10.CF100 flanges；11.CF35 flanges.
Specific implementation mode
Below in conjunction with the accompanying drawings and specific embodiment is described in further detail the utility model.
Residual gas analysis system suitable for wide air pressure range is by analysis cavity 4, air inlet (KF16) 2, upper flange 3, micro-
Valve 1, ionization gauge 5, residual gas analyzer 7, molecular pump 6 and necessary fore pump composition are adjusted, as shown in Figure 1.Analysis cavity 4 is circle
Shape vacuum chamber, diameter 120mm, high 150mm, volume about 1177cm3, band is DN100 flanges 8 there are four interface, the upper end, is used for
Upper flange 3 is connected, two or so, middle part KF40 flanges 9 for connecting ionization gauge 5 and pumps 6 to wearing interface for connection molecule
CF100 flanges 10, lower end be CF35 flanges 11, for connecting residual gas analyzer 7, as shown in Figure 2.1 model of reset valve
For GW-J4, the adjustable amount of minimum is 4.7 × 10-3Pa.L.s-1, and dial is carried, it can accurately adjust very much and flow to analysis cavity
Gas flow；6 bore of molecular pump is 100mm, and the pumping speed of 100L/s is provided for analysis cavity 4；Ionization gauge 5 at the middle part of analysis cavity 4,
Measure the average gas pressure of analysis cavity 4；Residual gas analyzer 7 is mounted on 4 middle part of analysis cavity.
System is connect by 1 horizontal interface of reset valve with vacuum chamber to be measured, when the air pressure of vacuum chamber to be measured meets remnants
When 7 job requirement of gas analyzer, do not start molecular pump 6 and fore pump, reset valve 1 is opened to maximum.When vacuum to be measured
When the air pressure of room is higher than 7 job requirement of residual gas analyzer, start fore pump and molecular pump 6 first, then according to analysis cavity 4
Vacuum degree adjust reset valve 1, the vacuum degree of analysis cavity is adjusted 10-3~10-4Pa magnitudes meet residual gas analyzer 7
Normal work.
Claims (4)
1. a kind of residual gas analysis system that width air pressure range is applicable, including it is analysis cavity, air inlet (KF16), upper flange, micro-
Adjust valve, ionization gauge, residual gas analyzer, molecular pump and fore pump, it is characterised in that：Analysis cavity is circular vacuum room, is carried
Four interfaces, the upper end are DN100 flanges, and for connecting upper flange, two or so, middle part is to wearing interface, for connecting ionization gauge
KF40 flanges and for connection molecule pump CF100 flanges, lower end be CF35 flanges, for connecting residual gas analyzer；
Ionization gauge is arranged in the middle part of analysis cavity, and residual gas analyzer is mounted in the middle part of analysis cavity；
System is connect by reset valve horizontal interface with vacuum chamber to be measured.
2. a kind of applicable residual gas analysis system of wide air pressure range as described in claim 1, it is characterised in that：Described point
Analyse chamber diameter 120mm, high 150mm, volume 1177cm3。
3. a kind of applicable residual gas analysis system of wide air pressure range as described in claim 1, it is characterised in that：It is described micro-
It is 4.7 × 10 to adjust the adjustable amount of valve minimum-3Pa.L.s-1。
4. a kind of applicable residual gas analysis system of wide air pressure range as described in claim 1, it is characterised in that：Molecular pump
Bore is 100mm, and the pumping speed of 100L/s is provided for analysis cavity.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721529457.7U CN207882230U (en) | 2017-11-16 | 2017-11-16 | A kind of residual gas analysis system that width air pressure range is applicable |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721529457.7U CN207882230U (en) | 2017-11-16 | 2017-11-16 | A kind of residual gas analysis system that width air pressure range is applicable |
Publications (1)
| Publication Number | Publication Date |
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| CN207882230U true CN207882230U (en) | 2018-09-18 |
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| CN201721529457.7U Active CN207882230U (en) | 2017-11-16 | 2017-11-16 | A kind of residual gas analysis system that width air pressure range is applicable |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109799315A (en) * | 2017-11-16 | 2019-05-24 | 核工业西南物理研究院 | A kind of residual gas analysis system that width air pressure range is applicable |
-
2017
- 2017-11-16 CN CN201721529457.7U patent/CN207882230U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109799315A (en) * | 2017-11-16 | 2019-05-24 | 核工业西南物理研究院 | A kind of residual gas analysis system that width air pressure range is applicable |
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