CN101408277B - Trace gas injection equipment under ultra-high vacuum environment - Google Patents
Trace gas injection equipment under ultra-high vacuum environment Download PDFInfo
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- CN101408277B CN101408277B CN2008100407775A CN200810040777A CN101408277B CN 101408277 B CN101408277 B CN 101408277B CN 2008100407775 A CN2008100407775 A CN 2008100407775A CN 200810040777 A CN200810040777 A CN 200810040777A CN 101408277 B CN101408277 B CN 101408277B
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Abstract
The invention provides trace gas injection equipment under ultra-high vacuum environment, comprises a low vacuum section, a high vacuum chamber and an ultra-high vacuum chamber; a gas storage steel tank is connected in series with an electromagnetic valve, a thermocouple and a slight adjustment valve through a copper hose; the high vacuum chamber and the ultra-high vacuum chamber are respectivelyprovided with a turbine molecular pump unit and divided at the middle by a sealing plate with a current limit small hole; the sealing plate is fixed on a flange; the outlet of the slight adjustment valve is connected with a nozzle which is communicated with the high vacuum chamber; the ultra-high vacuum chamber is communicated with a corrugated pipe and connected with the sealing plate with the current limit small hole at the right end of a pneumatic valve by the flange; the sealing plate is fixed on the flange; the left end of the pneumatic valve is directly connected with a test device mainbody by the flange; and the high vacuum chamber and the ultra-high vacuum chamber are also respectively connected with a thermal-cathode inoization gauge. The trace gas injection equipment can obtain uniform and stable test gas flow during the injection test, can precisely adjust the flux of the gas and can effectively improve the precision of the test data.
Description
Technical field
The present invention relates to a kind of new gas injection device, be specifically related to a kind of equipment that minimum gas injects of under ultra-high vacuum environment, realizing.
Background technique
At present, gas injection equipment is made up of gas storage cylinder, tracheae and needle-valve etc. under the known vacuum environment.Open the switch venting on the gas storage cylinder, through metering pin valve gas is injected into experimental setup through tracheae then.But because general needle-valve precision is limited, the foreign gas in the pipeline can reduce the purity of experimental gas again, and injection process also can only be the directivity that a kind of casual diffusion more can not guarantee air-flow, finally can cause experimental research can not obtain ideal results.
Summary of the invention
The present invention discloses a kind of equipment that minimum gas injects of under ultra-high vacuum environment, realizing; Its purpose is to overcome gas injection equipment under the existing vacuum environment; Adopt metering pin valve that gas directly is injected into experimental setup through tracheae; Cause the purity of experimental gas to reduce, can not guarantee the directivity of air-flow, cause drawbacks such as experimental result is inaccurate.The present invention has designed a difference vacuum structure, through minimum gas under high vacuum or even ultra-high vacuum environment the injection experimental setup of reset valve with flow-controllable.Through the gas injection process that this equipment carries out, the uniform and stable and good directionality of the experimental gas of injection has improved its reliability in practical application greatly, goes for the actual conditions of high request.
The technical solution adopted for the present invention to solve the technical problems is, at first selects the Precision trimming valve of import for use, and minimum adjustable leak rate is 1 * 10
-9Torrl/s; Design a kind of two-stage differential vacuum structure for equipment then; Be respectively rough vacuum end and high vacuum end, two ends all dispose the turbo-molecular pump assembly respectively, and pumping speed is 70l/s; The middle use has bore and separates as the oxygen free copper sealing plate of the current limliting aperture of Φ 2, is fixed on the flange; In the outlet port of fine tuning valve a bore being installed is that Φ 1 length is the nozzle of 20mm, in order to focused airflow, improves the energy of injecting gas; 3 vacuum gauges of different vacuum sections configurations are used to measure its degree of vacuum, and one of them is used to measure rough vacuum for thermocouple rule, other two for hot cathode ioization gauge is used to measure high vacuum or ultrahigh vacuum, can accurately calculate the gas flow of injection through degree of vacuum.
Trace gas injection equipment under the ultra-high vacuum environment is characterized in that: comprise rough vacuum section, high vacuum chamber and supervacuum chamber; Rough vacuum section gas storage cylinder is connected in series through copper flexible pipe and solenoid valve, thermocouple rule, reset valve; High vacuum chamber and supervacuum chamber dispose the turbo-molecular pump assembly respectively, and the middle sealing plate that has the current limliting aperture of using separates, and sealing plate is fixed on the flange; Connect a nozzle in the outlet port of fine tuning valve, nozzle is communicated with high vacuum chamber, and supervacuum chamber is communicated with bellows; The sealing plate that the right-hand member of flange and pneumatic valve has the current limliting aperture connects, and sealing plate is fixed on the flange, and the left end of pneumatic valve directly is connected with flange with the experimental setup main body; High vacuum chamber and supervacuum chamber also are connected with hot cathode ioization gauge respectively.
The described sealing plate that has the current limliting aperture, aperture is opened at the sealing plate center, and the center of aperture and nozzle is all on same straight line.
Nozzle is installed in outlet port at fine tuning valve, in order to focused airflow, improves the energy of injecting gas; 3 vacuum gauges of different vacuum sections configurations are used to measure its degree of vacuum, and one of them is used to measure rough vacuum for thermocouple rule, other two for hot cathode ioization gauge is used to measure high vacuum or ultrahigh vacuum, can accurately calculate the gas flow of injection through degree of vacuum.
The invention has the beneficial effects as follows, can obtain uniform and stable experimental gas stream when carrying out the gas injection experiments, and can the fine adjustment gas flow, the validity of laboratory data effectively improved.
Description of drawings
Fig. 1 is the trace gas injection equipment structural representation under the ultra-high vacuum environment of the present invention.
1. gas storage cylinder, 2. solenoid valve, 3. copper flexible pipe, 4. thermocouple rule, 5. reset valve, 6. nozzle, 7. hot cathode ioization gauge, 8. sealing plate, 9. bellows, the 10. pneumatic family of power and influence, 11. turbo-molecular pump assemblys, 12. supervacuum chambers, 13. high vacuum chambers.
Embodiment
Below in conjunction with accompanying drawing be that strength further describes the present invention.
Trace gas injection equipment under the ultra-high vacuum environment, as shown in Figure 1, comprise rough vacuum section, high vacuum chamber and supervacuum chamber; Rough vacuum section gas storage cylinder 1 is connected in series through copper flexible pipe 3 and solenoid valve 2, thermocouple rule 4, reset valve 5; High vacuum chamber and supervacuum chamber dispose turbo-molecular pump assembly 11 respectively, and the middle oxygen free copper sealing plate 8 that has the current limliting aperture of using separates, and oxygen free copper sealing plate 8 is fixed on the flange; Connect a nozzle 6 in the outlet port of reset valve 5, nozzle 6 is communicated with high vacuum chamber; Supervacuum chamber is communicated with bellows; The oxygen free copper sealing plate that has the current limliting aperture of flange and pneumatic valve right-hand member connects, and the oxygen free copper sealing plate is fixed on the flange, and the left end of pneumatic valve directly is connected with flange with the experimental setup main body; High vacuum chamber and supervacuum chamber also are connected with hot cathode ioization gauge respectively.Aperture on the oxygen free copper sealing plate is opened at the sealing plate center, and the center of aperture and nozzle is all on same straight line.
The diameter of current limliting aperture is 2mm, and orifice size is 1mm, and length is 20mm; Gas storage cylinder 1 is equipped with required experimental gas, can directly change other a kind of gas when experiment changes, and the sealing plate 8 of nozzle 6 and band current limliting aperture plays the effect of sealing and current limliting simultaneously, and turbo-molecular pump assembly 11 is no oil pollution unit.
At first start turbo-molecular pump assembly 11, obtain the system vacuum environment, open the switch of gas storage cylinder 1; Gas is emitted, and opens solenoid valve 2 then, and experimental gas gets into copper flexible pipe 3; Observe the degree of vacuum indicated value of thermocouple rule 4, regulate reset valve 5 when an amount of, control micro-air communication and cross nozzle 6 entering high vacuum chambers 13 and supervacuum chamber 12; The air-flow main body is through the current limliting aperture on the sealing plate 8 then; Be a taper shape through behind the pneumatic valve 10, finally be injected into the vacuum chamber of experimental setup, accomplish whole injection process.
Claims (2)
1. the trace gas injection equipment under the ultra-high vacuum environment is characterized in that: comprise rough vacuum section, high vacuum chamber and supervacuum chamber; Rough vacuum section gas storage cylinder is connected in series through copper flexible pipe and solenoid valve, thermocouple rule, reset valve; High vacuum chamber and supervacuum chamber dispose the turbo-molecular pump assembly respectively, and the middle sealing plate that has the current limliting aperture of using separates, and sealing plate is fixed on the flange; Connect a nozzle in the outlet port of fine tuning valve, nozzle is communicated with high vacuum chamber, and supervacuum chamber is communicated with bellows; The sealing plate that the right-hand member of flange and pneumatic valve has the current limliting aperture connects, and sealing plate is fixed on the flange, and the left end of pneumatic valve directly is connected with flange with the experimental setup main body; High vacuum chamber and supervacuum chamber also are connected with hot cathode ioization gauge respectively.
2. the trace gas injection equipment under the ultra-high vacuum environment according to claim 1 is characterized in that: the described sealing plate that has the current limliting aperture, aperture is opened at the sealing plate center, and the center of aperture and nozzle is all on same straight line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100407775A CN101408277B (en) | 2008-07-21 | 2008-07-21 | Trace gas injection equipment under ultra-high vacuum environment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008100407775A CN101408277B (en) | 2008-07-21 | 2008-07-21 | Trace gas injection equipment under ultra-high vacuum environment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101408277A CN101408277A (en) | 2009-04-15 |
| CN101408277B true CN101408277B (en) | 2012-03-07 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008100407775A Expired - Fee Related CN101408277B (en) | 2008-07-21 | 2008-07-21 | Trace gas injection equipment under ultra-high vacuum environment |
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| Country | Link |
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| CN (1) | CN101408277B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108204519A (en) * | 2017-11-21 | 2018-06-26 | 卢松华 | A kind of Novel medical oxygen filling apparatus |
| CN108561746A (en) * | 2018-04-24 | 2018-09-21 | 中车长江车辆有限公司 | Vacuum measuring device and cryogenic liquid storing and transporting system |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB421509A (en) * | 1933-03-28 | 1934-12-21 | Meaf Mach En Apparaten Fab Nv | Improvements in or relating to the transference of combustible liquid gases from one container into another |
| CN2050924U (en) * | 1989-04-15 | 1990-01-10 | 陆剑飞 | Gas charging-discharging and recovering device |
| CN2260228Y (en) * | 1995-06-13 | 1997-08-20 | 机械工业部第七设计研究院 | Apparatus for filling or recovering gas SF6 of oil-free type |
| WO1999002251A2 (en) * | 1997-07-11 | 1999-01-21 | Advanced Delivery & Chemical Systems, Ltd. | Bulk chemical delivery system |
| CN201251016Y (en) * | 2008-07-21 | 2009-06-03 | 上海第二工业大学 | Injection device of trace gas |
-
2008
- 2008-07-21 CN CN2008100407775A patent/CN101408277B/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB421509A (en) * | 1933-03-28 | 1934-12-21 | Meaf Mach En Apparaten Fab Nv | Improvements in or relating to the transference of combustible liquid gases from one container into another |
| CN2050924U (en) * | 1989-04-15 | 1990-01-10 | 陆剑飞 | Gas charging-discharging and recovering device |
| CN2260228Y (en) * | 1995-06-13 | 1997-08-20 | 机械工业部第七设计研究院 | Apparatus for filling or recovering gas SF6 of oil-free type |
| WO1999002251A2 (en) * | 1997-07-11 | 1999-01-21 | Advanced Delivery & Chemical Systems, Ltd. | Bulk chemical delivery system |
| CN201251016Y (en) * | 2008-07-21 | 2009-06-03 | 上海第二工业大学 | Injection device of trace gas |
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| Publication number | Publication date |
|---|---|
| CN101408277A (en) | 2009-04-15 |
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Granted publication date: 20120307 Termination date: 20120721 |