CN201251016Y - Injection device of trace gas - Google Patents
Injection device of trace gas Download PDFInfo
- Publication number
- CN201251016Y CN201251016Y CNU200820151036XU CN200820151036U CN201251016Y CN 201251016 Y CN201251016 Y CN 201251016Y CN U200820151036X U CNU200820151036X U CN U200820151036XU CN 200820151036 U CN200820151036 U CN 200820151036U CN 201251016 Y CN201251016 Y CN 201251016Y
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Abstract
The utility model relates to an injection device of trace gas comprising a low-vacuum section, a high-vacuum chamber and an ultrahigh vacuum chamber, wherein a gas storing steel cylinder of the low-vacuum section is connected with a magnetic valve, a thermocouple gauge and a fine tuning valve in series through a copper flexible pipe, turbine molecular pump sets are respectively matched on the high-vacuum chamber and the ultrahigh vacuum chamber, which is separated through a seal plate whose middle is provided with flow-limiting eyelets, the seal plate is fixed on a flange, a nozzle is connected at the outlet of the fine tuning valve, the nozzle is communicated with the high-vacuum chamber, the ultrahigh vacuum chamber is communicated with a corrugated pipe, and is connected with the seal plate with the flow-limiting eyelets on the right end of an air-operated valve, the seal plate is fixed on the flange, the left end of the air-operated valve is directly connected with a testing device main body through the flange, and the high-vacuum chamber and the ultrahigh vacuum chamber are further respectively connected with a thermionic cathode ionization gauge. The device has the advantages that uniform and stable testing gas flow can be obtained when carrying out the gas injecting test, and the flow capacity of gas can be finely adjusted, which effectively improves the accuracy of testing data.
Description
Technical field
The utility model relates to a kind of new gas injection device, is specifically related to a kind of equipment that minimum gas injects of realizing under ultra-high vacuum environment.
Background technique
At present, gas injection equipment is made up of gas storage cylinder, tracheae and needle-valve etc. under the known vacuum environment.Open the switch venting on the gas storage cylinder, by metering pin valve gas is injected into experimental setup through tracheae then.But because general needle-valve precision is limited, the foreign gas in the pipeline can reduce the purity of experimental gas again, and injection process also can only be the directivity that a kind of casual diffusion more can not guarantee air-flow, finally can cause experimental research can not obtain ideal results.
The model utility content
The utility model discloses a kind of equipment that minimum gas injects of realizing under ultra-high vacuum environment, its purpose is to overcome gas injection equipment under the existing vacuum environment, adopt metering pin valve that gas directly is injected into experimental setup through tracheae, cause the purity of experimental gas to reduce, can not guarantee the directivity of air-flow, cause drawbacks such as experimental result is inaccurate.The utility model has designed a difference vacuum structure, by reset valve the minimum gas of flow-controllable is injected experimental setup under high vacuum or even ultra-high vacuum environment.By the gas injection process that this equipment carries out, the uniform and stable and good directionality of the experimental gas of injection has improved its reliability in actual applications greatly, goes for the actual conditions of high request.
The technological scheme that its technical problem that solves the utility model adopts is, at first selects the Precision trimming valve of import for use, and minimum adjustable leak rate is 1 * 10
-9Torrl/s; Design a kind of two-stage differential vacuum structure for equipment then, be respectively rough vacuum end and high vacuum end, two ends all dispose the turbo-molecular pump assembly respectively, and pumping speed is 70l/s, middle is that the oxygen free copper sealing plate of the current limliting aperture of Φ 2 separates with having bore, is fixed on the flange; In the outlet port of fine tuning valve a bore being installed is that Φ 1 length is the nozzle of 20mm, in order to focused airflow, improves the energy of injecting gas; 3 vacuum gauges of different vacuum sections configurations are used to measure its degree of vacuum, and one of them is used to measure rough vacuum for thermocouple rule, other two for hot cathode ioization gauge is used to measure high vacuum or ultrahigh vacuum, can accurately calculate the gas flow of injection by degree of vacuum.
A kind of trace gas injection equipment is characterized in that: comprise rough vacuum section, high vacuum chamber and supervacuum chamber; Rough vacuum section gas storage cylinder is connected in series through copper flexible pipe and solenoid valve, thermocouple rule, reset valve; High vacuum chamber and supervacuum chamber dispose the turbo-molecular pump assembly respectively, and the middle sealing plate that has the current limliting aperture of using separates, and sealing plate is fixed on the flange; Connect a nozzle in the outlet port of fine tuning valve, nozzle is communicated with high vacuum chamber, and supervacuum chamber is communicated with bellows; The sealing plate that right-hand member by flange and pneumatic valve has the current limliting aperture connects, and sealing plate is fixed on the flange, and the left end of pneumatic valve directly is connected with flange with the experimental setup main body; High vacuum chamber and supervacuum chamber also are connected with hot cathode ioization gauge respectively.
The described sealing plate that has the current limliting aperture, aperture is opened at the sealing plate center, and the center of aperture and nozzle is all on same straight line.
Nozzle is installed in outlet port at fine tuning valve, in order to focused airflow, improves the energy of injecting gas; 3 vacuum gauges of different vacuum sections configurations are used to measure its degree of vacuum, and one of them is used to measure rough vacuum for thermocouple rule, other two for hot cathode ioization gauge is used to measure high vacuum or ultrahigh vacuum, can accurately calculate the gas flow of injection by degree of vacuum.
The beneficial effects of the utility model are, can obtain uniform and stable experimental gas stream when carrying out the gas injection experiments, and can the fine adjustment gas flow, effectively improve the validity of laboratory data.
Description of drawings
Fig. 1 is a kind of trace gas injection equipment structural representation of the utility model.
1. gas storage cylinder, 2. solenoid valve, 3. copper flexible pipe, 4. thermocouple rule, 5. reset valve, 6. nozzle, 7. hot cathode ioization gauge, 8. sealing plate, 9. bellows, the 10. pneumatic family of power and influence, 11. turbo-molecular pump assemblys, 12. supervacuum chambers, 13. high vacuum chambers.
Embodiment
Below in conjunction with accompanying drawing and be that embodiment is further described the utility model.
A kind of trace gas injection equipment as shown in Figure 1, comprises rough vacuum section, high vacuum chamber and supervacuum chamber; Rough vacuum section gas storage cylinder 1 is connected in series through copper flexible pipe 3 and solenoid valve 2, thermocouple rule 4, reset valve 5; High vacuum chamber and supervacuum chamber dispose turbo-molecular pump assembly 11 respectively, and the middle oxygen free copper sealing plate 8 that has the current limliting aperture of using separates, and oxygen free copper sealing plate 8 is fixed on the flange; Connect a nozzle 6 in the outlet port of reset valve 5, nozzle 6 is communicated with high vacuum chamber; Supervacuum chamber is communicated with bellows; The oxygen free copper sealing plate that has the current limliting aperture by flange and pneumatic valve right-hand member connects, and the oxygen free copper sealing plate is fixed on the flange, and the left end of pneumatic valve directly is connected with flange with the experimental setup main body; High vacuum chamber and supervacuum chamber also are connected with hot cathode ioization gauge respectively.Aperture on the oxygen free copper sealing plate is opened at the sealing plate center, and the center of aperture and nozzle is all on same straight line.
The diameter of current limliting aperture is 2mm, and orifice size is 1mm, and length is 20mm; Gas storage cylinder 1 is equipped with required experimental gas, can directly change another gas when experiment changes, and the sealing plate 8 of nozzle 6 and band current limliting aperture plays the effect of sealing and current limliting simultaneously, and turbo-molecular pump assembly 11 is no oil pollution unit.
At first start turbo-molecular pump assembly 11, obtain the system vacuum environment, open the switch of gas storage cylinder 1, gas is emitted, opens solenoid valve 2 then, experimental gas enters copper flexible pipe 3, observe the degree of vacuum indicated value of thermocouple rule 4, regulate reset valve 5 when an amount of, control micro-air communication and cross nozzle 6 and enter high vacuum chamber 13 and supervacuum chamber 12, the air-flow main body is a taper shape by behind the pneumatic valve 10 by the current limliting aperture on the sealing plate 8 then, finally be injected into the vacuum chamber of experimental setup, finish whole injection process.
Claims (2)
1. a trace gas injection equipment is characterized in that: comprise rough vacuum section, high vacuum chamber and supervacuum chamber; Rough vacuum section gas storage cylinder is connected in series through copper flexible pipe and solenoid valve, thermocouple rule, reset valve; High vacuum chamber and supervacuum chamber dispose the turbo-molecular pump assembly respectively, and the middle sealing plate that has the current limliting aperture of using separates, and sealing plate is fixed on the flange; Connect a nozzle in the outlet port of fine tuning valve, nozzle is communicated with high vacuum chamber, and supervacuum chamber is communicated with bellows; The sealing plate that right-hand member by flange and pneumatic valve has the current limliting aperture connects, and sealing plate is fixed on the flange, and the left end of pneumatic valve directly is connected with flange with the experimental setup main body; High vacuum chamber and supervacuum chamber also are connected with hot cathode ioization gauge respectively.
2. a kind of trace gas injection equipment according to claim 1 is characterized in that: the described sealing plate that has the current limliting aperture, aperture is opened at the sealing plate center, and the center of aperture and nozzle is all on same straight line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200820151036XU CN201251016Y (en) | 2008-07-21 | 2008-07-21 | Injection device of trace gas |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNU200820151036XU CN201251016Y (en) | 2008-07-21 | 2008-07-21 | Injection device of trace gas |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN201251016Y true CN201251016Y (en) | 2009-06-03 |
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ID=40746690
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNU200820151036XU Expired - Fee Related CN201251016Y (en) | 2008-07-21 | 2008-07-21 | Injection device of trace gas |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN201251016Y (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101408277B (en) * | 2008-07-21 | 2012-03-07 | 上海第二工业大学 | Trace gas injection equipment under ultra-high vacuum environment |
| CN106935112A (en) * | 2017-05-17 | 2017-07-07 | 中国科学技术大学 | A kind of vacuum plant |
| CN113607519A (en) * | 2021-08-02 | 2021-11-05 | 合肥工业大学 | Residual gas analysis device and method based on laser damage sample |
-
2008
- 2008-07-21 CN CNU200820151036XU patent/CN201251016Y/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101408277B (en) * | 2008-07-21 | 2012-03-07 | 上海第二工业大学 | Trace gas injection equipment under ultra-high vacuum environment |
| CN106935112A (en) * | 2017-05-17 | 2017-07-07 | 中国科学技术大学 | A kind of vacuum plant |
| CN113607519A (en) * | 2021-08-02 | 2021-11-05 | 合肥工业大学 | Residual gas analysis device and method based on laser damage sample |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C17 | Cessation of patent right | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20090603 Termination date: 20100721 |