CN204439178U - A kind of caliberating device of mass-flow gas meter - Google Patents
A kind of caliberating device of mass-flow gas meter Download PDFInfo
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- CN204439178U CN204439178U CN201520014647.XU CN201520014647U CN204439178U CN 204439178 U CN204439178 U CN 204439178U CN 201520014647 U CN201520014647 U CN 201520014647U CN 204439178 U CN204439178 U CN 204439178U
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Abstract
The utility model relates to a kind of caliberating device of mass-flow gas meter, comprises High Purity Nitrogen source of the gas, septum valve, flow control instrument, normal flow take into account by school flowmeter incoming end; The gas of described High Purity Nitrogen source of the gas is connected with by school flowmeter incoming end I by pipeline, is provided with septum valve, air intake valve and boost gauge successively at High Purity Nitrogen source of the gas and by the pipeline between the flowmeter incoming end I of school; Be connected with proving flowmeter by pipeline by school flowmeter incoming end II, proving flowmeter is provided with gas outlet; The described incoming end III by school flowmeter is connected with flow quantity control instrument.The utility model structure is simple, operation is reliable, accuracy is high.
Description
Technical field
The utility model belongs to flowmeter detection technique field, is specifically related to a kind of caliberating device of mass-flow gas meter.
Background technology
In chemical industry and electronics manufacturing enterprise, some have ion implantation and doping that the gas Chang Zuowei catalyzer of special physico-chemical property or semiconductor devices and integrated circuit produce, or the size of these gas flows directly affects catalysis ion implantation and doping effect, but due to self physicochemical characteristic of some gas, run into water or other impurity, chemical reaction can be there is, its product meeting Severe blockage, the equipment such as corrosion pipeline and flowmeter, but in real production work, these gases inevitably contact with air again, the mass-flow gas meter measuring its flow is caused to be measured inaccurate.Traditional treating method is generally taked to return emblem mark and is determined or buy a set of caliberating device by oneself, and disadvantageous factor is that maintenance cycle is long, costly.
Summary of the invention
The purpose of this utility model is the caliberating device overcoming the deficiencies in the prior art and provide a kind of mass-flow gas meter, and the gaseous exchange gauge verification that is simple, that meet the special physicochemical characteristic of part of this apparatus structure is comparatively strict with.
In order to achieve the above object, the utility model adopts following technical scheme:
The utility model provides a kind of caliberating device of mass-flow gas meter, it is characterized in that: comprise High Purity Nitrogen source of the gas, septum valve, flow control instrument, normal flow take into account by school flowmeter incoming end; The gas of described High Purity Nitrogen source of the gas is connected with by school flowmeter incoming end I by pipeline, is provided with septum valve, air intake valve and boost gauge successively at High Purity Nitrogen source of the gas and by the pipeline between the flowmeter incoming end I of school; Be connected with proving flowmeter by pipeline by school flowmeter incoming end II, proving flowmeter is provided with gas outlet; The described incoming end III by school flowmeter is connected with flow quantity control instrument.
Described boost gauge is connected with pipeline by ball valve.
Described normal flow counts standard form wet flow indicator, and precision is 0.05 grade.
Described pipeline is stainless-steel tube, and stainless-steel tube is withstand voltage, and scope is 0 ~ 60MPa; The withstand voltage scope of described septum valve is 0 ~ 60MPa.
The purity of described High Purity Nitrogen source of the gas is at least 99.999%.
Compared with prior art, the beneficial effect that obtains of the utility model:
1. have employed High Purity Nitrogen source of the gas in the utility model structure, because its purity is high, free from foreign meter, do not remain, avoid the physicochemical characteristic due to boron trifluoride, run into water or other impurity, chemical reaction can be there is, the problem of the meeting of its product Severe blockage, corrosion pipeline and flowmeter.
2. the utility model adopts high-pressure pressure regulating valve, realizes the pressure regulation of gas source feed end, pressurize object, especially when micro-air pressure adjustment, possesses very strong operability.
3. in the utility model device by school flowmeter connection traffic controller, conveniently can realize the object of on-line monitoring flow.
Accompanying drawing explanation
Fig. 1 is the utility model structural representation.
Embodiment
Below in conjunction with accompanying drawing, the utility model is further illustrated:
With reference to shown in Fig. 1, a kind of caliberating device of mass-flow gas meter, comprises High Purity Nitrogen source of the gas 1, septum valve 2, flow control instrument 3, standard form wet flow indicator 4 and by school flowmeter 5 incoming end; The gas of described High Purity Nitrogen source of the gas 1 is connected with by school flowmeter incoming end I by pipeline, be provided with septum valve 2, air intake valve 6 and boost gauge 7 successively at High Purity Nitrogen source of the gas 1 and by the pipeline between the flowmeter incoming end I of school, boost gauge 7 is connected with pipeline by ball valve 9; Be connected with standard form wet flow indicator 4 by pipeline by school flowmeter incoming end II, standard form wet flow indicator 4 is provided with gas outlet 8; Describedly be connected with flow quantity control instrument 3 by school flowmeter incoming end III.
The utility model device course of work:
1, according to the request for utilization of standard form wet type flow, preliminary work before punctuate is carried out;
2, high pressure nitrogen stop valve is opened, septum valve nitrogen pressure is used to be adjusted to 0.5Mpa, open air intake valve 6 and ball valve 9, observe air intake valve 6 and whether what accessed by school flowmeter incoming end 5 be 0.5Mpa by the admission pressure representative value between the flowmeter of school, whether observation caliber type wet type flow 4 pointer rotates simultaneously;
3, given 100g/h, 200 g/hs, 300 g/hs, 400 g/hs, 500 g/h flow signal values are distinguished to what accessed by school flowmeter incoming end 5 by school flowmeter by flow quantity control instrument 3;
4, when flow quantity control instrument 3 is to a certain flow signal value given by school flowmeter accessed by school flowmeter incoming end 5, measure standard wet flow indicator 4 with stopwatch and often spend the 10L nitrogen time used.The instantaneous delivery of the lower object gas of this table fixed point can be conversed by following formula:
M=10/t*3600*ρ*k
M: object gas instantaneous mass flow
T: standard wet flow indicator often spends the 10L nitrogen time used
ρ: object gas density
K: gas conversion coefficient
5, the object gas instantaneous mass flow conversed and flow quantity control instrument 3 are monitored accessed by school flowmeter incoming end 5 contrasted by the measured value of school flowmeter, calculate error between the two, if when error is less than 5%, qualified by checking flow meter.
Claims (5)
1. a caliberating device for mass-flow gas meter, is characterized in that: comprise High Purity Nitrogen source of the gas, septum valve, flow quantity control instrument, normal flow take into account by school flowmeter incoming end; The gas of described High Purity Nitrogen source of the gas is connected with by school flowmeter incoming end I by pipeline, is provided with septum valve, air intake valve and boost gauge successively at High Purity Nitrogen source of the gas and by the pipeline between the flowmeter incoming end I of school; Be connected with proving flowmeter by pipeline by school flowmeter incoming end II, proving flowmeter is provided with gas outlet; The described incoming end III by school flowmeter is connected with flow quantity control instrument.
2. according to the caliberating device of mass-flow gas meter described in claim 1, it is characterized in that: described boost gauge is connected with pipeline by ball valve.
3. the caliberating device of mass-flow gas meter according to claim 1 or 2, it is characterized in that: described normal flow counts standard form wet flow indicator, precision is 0.05 grade.
4. the caliberating device of mass-flow gas meter according to claim 1 or 2, is characterized in that: described pipeline is stainless-steel tube, and stainless-steel tube is withstand voltage, and scope is 0 ~ 60MPa; The withstand voltage scope of described septum valve is 0 ~ 60MPa.
5. the caliberating device of mass-flow gas meter according to claim 1 or 2, is characterized in that: the purity of described High Purity Nitrogen source of the gas is at least 99.999%.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520014647.XU CN204439178U (en) | 2015-01-09 | 2015-01-09 | A kind of caliberating device of mass-flow gas meter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520014647.XU CN204439178U (en) | 2015-01-09 | 2015-01-09 | A kind of caliberating device of mass-flow gas meter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204439178U true CN204439178U (en) | 2015-07-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520014647.XU Expired - Fee Related CN204439178U (en) | 2015-01-09 | 2015-01-09 | A kind of caliberating device of mass-flow gas meter |
Country Status (1)
| Country | Link |
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| CN (1) | CN204439178U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106595953A (en) * | 2016-12-21 | 2017-04-26 | 杭州依技设备成套工程有限公司 | Medical oxygen metering instrument metering standard device |
| CN109342700A (en) * | 2018-08-20 | 2019-02-15 | 中国纺织科学研究院有限公司 | Long filament ageing properties test macro and method |
| CN110672172A (en) * | 2018-07-03 | 2020-01-10 | 辽宁思凯科技股份有限公司 | Internet of things MEMS (micro-electromechanical systems) thermal mass gas meter system device and gas flow measuring method |
-
2015
- 2015-01-09 CN CN201520014647.XU patent/CN204439178U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106595953A (en) * | 2016-12-21 | 2017-04-26 | 杭州依技设备成套工程有限公司 | Medical oxygen metering instrument metering standard device |
| CN106595953B (en) * | 2016-12-21 | 2019-01-29 | 杭州依技设备成套工程有限公司 | Medical oxygen class measurement instrument metrological standard unit |
| CN110672172A (en) * | 2018-07-03 | 2020-01-10 | 辽宁思凯科技股份有限公司 | Internet of things MEMS (micro-electromechanical systems) thermal mass gas meter system device and gas flow measuring method |
| CN109342700A (en) * | 2018-08-20 | 2019-02-15 | 中国纺织科学研究院有限公司 | Long filament ageing properties test macro and method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150701 Termination date: 20170109 |
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| CF01 | Termination of patent right due to non-payment of annual fee |