CN109799315A - A kind of residual gas analysis system that width air pressure range is applicable - Google Patents
A kind of residual gas analysis system that width air pressure range is applicable Download PDFInfo
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- CN109799315A CN109799315A CN201711135129.3A CN201711135129A CN109799315A CN 109799315 A CN109799315 A CN 109799315A CN 201711135129 A CN201711135129 A CN 201711135129A CN 109799315 A CN109799315 A CN 109799315A
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- residual gas
- air pressure
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- analysis system
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Abstract
The invention belongs to technical field of vacuum, and in particular to a kind of residual gas analysis system that width air pressure range is applicable.The present invention includes analysis cavity, air inlet (KF16), upper flange, reset valve, ionization gauge, residual gas analyzer, molecular pump and fore pump, analysis cavity is circular vacuum room, there are four interfaces for band, the upper end is DN100 flange, for connecting upper flange, two or so, middle part is to interface is worn, for connecting the KF40 flange of ionization gauge and for the CF100 flange of connection molecule pump, lower end is CF35 flange, for connecting residual gas analyzer；Ionization gauge is arranged in the middle part of analysis cavity, and residual gas analyzer is mounted in the middle part of analysis cavity；System is connect by reset valve horizontal interface with vacuum chamber to be measured.Using system of the invention, the operating pressure of residual gas analyzer can be expanded and be depressed into ultrahigh vacuum for atmosphere and can survey.
Description
Technical field
The invention belongs to technical field of vacuum, and in particular to a kind of residual gas analysis system that width air pressure range is applicable.
Background technique
Neutral beam injector is most effective auxiliary heating method in controlled nuclear fusion experiment, and ion source is neutral beam note
Enter the core component of device, operating air pressure is 10-1Pa magnitude, and the gas of dry cleansing is required, once it is mixed into foreign gas, meeting
Defective component, foreign particle can destroy Tokamak Plasma.Using residual gas analyzer to ion source gas ingredient into
Row analysis, but common residual gas analyzer operating pressure is 10-2From atmosphere to be pressed onto superelevation true hereinafter, therefore designing one by Pa
The applicable residual gas analysis system of empty width air pressure range.
Summary of the invention
The purpose of the present invention is in view of the foregoing defects the prior art has, provide a kind of remnants that wide air pressure range is applicable
Gas analysis system, solving residual gas analyzer cannot be at high pressure to the deficiency of the analysis of gas componant.
Technical scheme is as follows:
A kind of residual gas analysis system that width air pressure range is applicable, including analysis cavity, air inlet (KF16), upper flange,
Reset valve, ionization gauge, residual gas analyzer, molecular pump and fore pump, analysis cavity are circular vacuum room, band there are four interface,
The upper end is DN100 flange, and for connecting upper flange, two or so, middle part is to interface is worn, for connecting the KF40 method of ionization gauge
CF100 flange blue and for connection molecule pump, lower end is CF35 flange, for connecting residual gas analyzer；
Ionization gauge is arranged in the middle part of analysis cavity, and residual gas analyzer is mounted in the middle part of analysis cavity；
System is connect by reset valve horizontal interface with vacuum chamber to be measured.
A kind of residual gas analysis system that width air pressure range is applicable, the analysis cavity diameter 120mm, high 150mm, volume
For 1177cm3。
A kind of residual gas analysis system that width air pressure range is applicable, the adjustable amount of the reset valve minimum is 4.7 × 10- 3Pa.L.s-1。
A kind of residual gas analysis system that width air pressure range is applicable, molecular pump bore is 100mm, is provided for analysis cavity
The pumping speed of 100L/s.
A kind of residual gas analysis system that width air pressure range is applicable, the residual gas analysis system, when vacuum to be measured
When the air pressure of room meets residual gas analyzer job requirement, do not start molecular pump and fore pump, reset valve is opened to maximum.
A kind of residual gas analysis system that width air pressure range is applicable, the residual gas analysis system, when vacuum to be measured
When the air pressure of room is higher than residual gas analyzer job requirement, start fore pump and molecular pump first, then according to analysis cavity
Vacuum degree adjusts reset valve, and the vacuum degree of analysis cavity is adjusted 10-3~10-4Pa magnitude, it is normal to meet residual gas analyzer
Work.
The beneficial effects of the present invention are:
Using system of the invention, the operating pressure of residual gas analyzer can be expanded and be depressed into ultrahigh vacuum for atmosphere
It can survey.
Detailed description of the invention
Fig. 1 is suitable for the residual gas analysis system of wide air pressure range
Fig. 2 analyzes cavity configuration
1. reset valve in figure；2. air inlet (KF16)；3. upper flange；4. analysis cavity；5. ionization gauge；6. molecular pump；7. residual
Remaining gas analyzer；8.DN100 flange；9.KF40 flange；10.CF100 flange；11.CF35 flange.
Specific embodiment
The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
Residual gas analysis system suitable for wide air pressure range is by analysis cavity 4, air inlet (KF16) 2, upper flange 3, micro-
Valve 1, ionization gauge 5, residual gas analyzer 7, molecular pump 6 and necessary fore pump composition are adjusted, as shown in Figure 1.Analysis cavity 4 is circle
Shape vacuum chamber, diameter 120mm, high 150mm, volume about 1177cm3, band is DN100 flange 8 there are four interface, the upper end, is used for
Upper flange 3 is connected, two or so, middle part is to interface is worn, for connecting the KF40 flange 9 of ionization gauge 5 and for connection molecule pump 6
CF100 flange 10, lower end be CF35 flange 11, for connecting residual gas analyzer 7, as shown in Figure 2.1 model of reset valve
For GW-J4, the adjustable amount of minimum is 4.7 × 10-3Pa.L.s-1, and dial is had, it can accurately adjust very much and flow to analysis cavity
Gas flow；6 bore of molecular pump is 100mm, provides the pumping speed of 100L/s for analysis cavity 4；Ionization gauge 5 at the middle part of analysis cavity 4,
Measure the average gas pressure of analysis cavity 4；Residual gas analyzer 7 is mounted on 4 middle part of analysis cavity.
System is connect by 1 horizontal interface of reset valve with vacuum chamber to be measured, when the air pressure of vacuum chamber to be measured meets remnants
When 7 job requirement of gas analyzer, do not start molecular pump 6 and fore pump, reset valve 1 is opened to maximum.When vacuum to be measured
When the air pressure of room is higher than 7 job requirement of residual gas analyzer, start fore pump and molecular pump 6 first, then according to analysis cavity 4
Vacuum degree adjust reset valve 1, the vacuum degree of analysis cavity is adjusted 10-3~10-4Pa magnitude meets residual gas analyzer 7
It works normally.
Claims (6)
1. a kind of residual gas analysis system that width air pressure range is applicable, including it is analysis cavity, air inlet (KF16), upper flange, micro-
Adjust valve, ionization gauge, residual gas analyzer, molecular pump and fore pump, it is characterised in that: analysis cavity is circular vacuum room, is had
Four interfaces, the upper end are DN100 flange, and for connecting upper flange, two or so, middle part is to interface is worn, for connecting ionization gauge
KF40 flange and for connection molecule pump CF100 flange, lower end be CF35 flange, for connecting residual gas analyzer；
Ionization gauge is arranged in the middle part of analysis cavity, and residual gas analyzer is mounted in the middle part of analysis cavity；
System is connect by reset valve horizontal interface with vacuum chamber to be measured.
2. a kind of applicable residual gas analysis system of wide air pressure range as described in claim 1, it is characterised in that: described point
Analyse chamber diameter 120mm, high 150mm, volume 1177cm3。
3. a kind of applicable residual gas analysis system of wide air pressure range as described in claim 1, it is characterised in that: described micro-
Adjusting the adjustable amount of valve minimum is 4.7 × 10-3Pa.L.s-1。
4. a kind of applicable residual gas analysis system of wide air pressure range as described in claim 1, it is characterised in that: molecular pump
Bore is 100mm, provides the pumping speed of 100L/s for analysis cavity.
5. a kind of applicable residual gas analysis system of wide air pressure range as described in claim 1, it is characterised in that: described residual
Remaining gas analysis system, when the air pressure of vacuum chamber to be measured meets residual gas analyzer job requirement, do not start molecular pump with
Fore pump opens reset valve to maximum.
6. a kind of applicable residual gas analysis system of wide air pressure range as described in claim 1, it is characterised in that: described residual
Remaining gas analysis system starts fore pump when the air pressure of vacuum chamber to be measured is higher than residual gas analyzer job requirement first
And molecular pump, reset valve is then adjusted according to the vacuum degree of analysis cavity, the vacuum degree of analysis cavity is adjusted 10-3~10-4Pa amount
Grade meets residual gas analyzer normal work.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711135129.3A CN109799315A (en) | 2017-11-16 | 2017-11-16 | A kind of residual gas analysis system that width air pressure range is applicable |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201711135129.3A CN109799315A (en) | 2017-11-16 | 2017-11-16 | A kind of residual gas analysis system that width air pressure range is applicable |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109799315A true CN109799315A (en) | 2019-05-24 |
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| CN201711135129.3A Pending CN109799315A (en) | 2017-11-16 | 2017-11-16 | A kind of residual gas analysis system that width air pressure range is applicable |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080048663A1 (en) * | 2006-08-23 | 2008-02-28 | Korean Research Institute Of Standards And Science | Apparatus for and method of measuring composition and pressure of the discharged gas from ion gauge using residual gas analyzer |
| CN202693563U (en) * | 2012-07-06 | 2013-01-23 | 中国科学院物理研究所 | Multifunctional monitoring apparatus for vacuum system |
| CN104748911A (en) * | 2015-03-13 | 2015-07-01 | 成都飞机工业（集团）有限责任公司 | Multifunctional vacuum calibrating device |
| CN105784941A (en) * | 2016-03-23 | 2016-07-20 | 中国科学院光电研究院 | Device and method for analyzing gas in online manner |
| CN206411084U (en) * | 2016-12-08 | 2017-08-15 | 毅泰成科技股份有限公司 | Antipollution residual gas analysis device |
| CN207882230U (en) * | 2017-11-16 | 2018-09-18 | 核工业西南物理研究院 | A kind of residual gas analysis system that width air pressure range is applicable |
-
2017
- 2017-11-16 CN CN201711135129.3A patent/CN109799315A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20080048663A1 (en) * | 2006-08-23 | 2008-02-28 | Korean Research Institute Of Standards And Science | Apparatus for and method of measuring composition and pressure of the discharged gas from ion gauge using residual gas analyzer |
| CN202693563U (en) * | 2012-07-06 | 2013-01-23 | 中国科学院物理研究所 | Multifunctional monitoring apparatus for vacuum system |
| CN104748911A (en) * | 2015-03-13 | 2015-07-01 | 成都飞机工业（集团）有限责任公司 | Multifunctional vacuum calibrating device |
| CN105784941A (en) * | 2016-03-23 | 2016-07-20 | 中国科学院光电研究院 | Device and method for analyzing gas in online manner |
| CN206411084U (en) * | 2016-12-08 | 2017-08-15 | 毅泰成科技股份有限公司 | Antipollution residual gas analysis device |
| CN207882230U (en) * | 2017-11-16 | 2018-09-18 | 核工业西南物理研究院 | A kind of residual gas analysis system that width air pressure range is applicable |
Non-Patent Citations (1)
| Title |
|---|
| 质量技术监督行业职业技能鉴定指导中心等: "《化学基础与分析检验 第2版》", 北京：中国质检出版社, pages: 290 * |
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