CN206960059U - A kind of vacuum leak judges control system - Google Patents
A kind of vacuum leak judges control system Download PDFInfo
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- CN206960059U CN206960059U CN201720925443.0U CN201720925443U CN206960059U CN 206960059 U CN206960059 U CN 206960059U CN 201720925443 U CN201720925443 U CN 201720925443U CN 206960059 U CN206960059 U CN 206960059U
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- pump
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Abstract
A kind of vacuum leak judges control system, and roughing line connection mechanical pump and lobe pump, roughing line are provided with roughing valve；Backing line connection molecule pump and fore pump, backing line are provided with high threshold and preceding step valve；Pipeline is taken out provided with auxiliary between roughing line and backing line, auxiliary pipeline of taking out connects quadruple mass-spectrometer；Host computer connects PLC, and host computer connection vacuum meter, quadruple mass-spectrometer connection PLC, mechanical pump, lobe pump, roughing valve, molecular pump, fore pump, high threshold and preceding step valve electrically connect with PLC.The utility model is sent to PLC by host computer and performs order, controls the start stop operation of each vavuum pump and vacuum valve；Host computer is to PLC and other connection equipment the information timely processing fed back to and real-time display；When leak detection judges, the curve of pressure-time being drawn out automatically, allows the operator to judge leakaging cause quickly, the QMS for analyzing residual gas components and leak detection is integrated in control system, makes operation more flexible and convenient.
Description
Technical field
It the utility model is related to technical field of vacuum equipment, and in particular to a kind of vacuum leak detecting system.
Background technology
For any one vacuum system or vacuum tank, all in the absence of absolute leak-free phenomenon.When vacuum is taken out not
Up, when not reaching pre-provisioning request, first have to judge whether gas leakage, its secondary judgement small opening size, and then find out small opening
Position and eliminate gas leak phenomenon.When judging whether gas leak phenomenon, not only include from vacuum system small opening or gap
The gas of the gas of seepage, also material is released, and this, which is resulted in vacuum chamber, a variety of residual gas.
For a vacuum system, if after being evacuated to a period of time, predetermined requirement is not reaching to, existing
Leakage does not judge this link under control system, therefore when judging reason, can seem and compare blindly and to spend big
The time of amount, it can so have a strong impact on operating efficiency.Meanwhile existing judgment mode, can not analyze residual gas into
Point, also it is unfavorable for effective progress of leak detection work.
With the development of mass-spectrometric technique, QMS is as a kind of highly useful rga instrument, its spirit
Sensitivity height, small volume, it is cheap many advantages, such as, will be played a greater and greater role in vacuum leak hunting field.
Utility model content
The purpose of this utility model is that providing a kind of vacuum leak judges control system, when leakage judges, judges original
Cause, judge the residual gas components in vacuum chamber, improve the efficiency of leak detection work.
Used technical scheme is the utility model to achieve the above object：A kind of vacuum leak judges control system,
Vacuum meter, vacuum equipment connection roughing line and backing line, roughing line connection mechanical pump and Roots are installed on vacuum equipment
Pump, roughing line are provided with roughing valve；Backing line connection molecule pump and fore pump, backing line are provided with high threshold and prime
Valve；Pipeline is taken out provided with auxiliary between roughing line and backing line, auxiliary pipeline of taking out connects quadruple mass-spectrometer；Host computer connection PLC controls
Device processed, host computer are connected and installed in the vacuum meter on vacuum equipment, quadruple mass-spectrometer connection PLC, mechanical pump, lobe pump, slightly taken out
Valve, molecular pump, fore pump, high threshold and preceding step valve electrically connect with PLC.
The auxiliary pipeline of taking out takes out valve provided with auxiliary, and auxiliary valve of taking out electrically connects with PLC.
The vacuum is calculated as Pirani gauge, ionization gauge or electric capacity rule.
The host computer is industrial computer, and industrial computer is provided with touch-screen.
Vacuum leak of the present utility model judges control system, and PLC is sent by host computer and performs order, PLC controls
The start stop operation of each vavuum pump of lower unit and vacuum valve；The information that host computer is fed back to PLC and other connection equipment is timely
Processing and real-time display；When leak detection judges, the curve of pressure-time is drawn out automatically, allows the operator to sentence quickly
Break and leakaging cause, the QMS for analyzing residual gas components and leak detection is integrated in control system, makes operation more
Add flexible.
Brief description of the drawings
Fig. 1 is that the utility model vacuum leak judges control system control principle drawing.
Fig. 2 is that the utility model vacuum leak judges control system schematic diagram.
Fig. 3 is that vacuum leak of the present utility model judges control system pressure-time curve figure.
Embodiment
Vacuum leak of the present utility model judges that control system as depicted in figs. 1 and 2, installs vacuum meter on vacuum equipment,
Vacuum equipment connects roughing line and backing line, and roughing line connection mechanical pump and lobe pump, roughing line are provided with and slightly taken out
Valve；Backing line connection molecule pump and fore pump, backing line are provided with high threshold and preceding step valve；Roughing line and backing line it
Between be provided with it is auxiliary take out pipeline, it is auxiliary to take out pipeline connection quadruple mass-spectrometer, it is auxiliary take out pipeline and be provided with auxiliary take out valve；Host computer is industrial computer, work
Control machine is provided with touch-screen, and host computer is connected with PLC by Ethernet mouths, and instruction control external equipment is sent to PLC
Operation, while read the data message that PLC feeds back from external equipment；Host computer is connected and installed in by RS232 serial line interfaces
Vacuum meter on vacuum equipment, the pressure values of vacuum system is read in real time, by the pressure value real-time display monitored in touch-screen
On, and show the curve that pressure changes over time；The A/D module connection of remote the control plug and PLC of quadruple mass-spectrometer, in real time
The composition and content of residual gas in vacuum chamber are analyzed, by the residual gas presentation of information of monitoring on the touchscreen.Mechanical pump, sieve
Thatch pump, roughing valve, molecular pump, fore pump, high threshold, preceding step valve and auxiliary valve of taking out electrically connect with PLC.
In use, opening mechanical pump, roughing vacuum pump, fore pump, preceding step valve and molecular pump successively, vacuum chamber is evacuated, simultaneously
Quadruple mass-spectrometer is reached vacuum state, after pressure reaches 1500Pa, open lobe pump, when vacuum reaches 5Pa in stove, simultaneously
When molecular pump reaches full-speed state, roughing valve is closed, opens high threshold, vacuum can reach 5*10 in stove in 30 minutes-3Pa, then pass through
After the pumping of a period of time, if being not reaching to predetermined ultimate pressure, i.e. 5*10-4Pa, then need to carry out vacuum leak judgement.
After certain pressure is extracted into, high vacuum valve is closed, starts leakage and judges, pressure can be drawn automatically on touch-screen
Force-time curve, after one section, curve is as shown in Figure 3：
1. curve as shown in a, i.e., pressure is kept constant, illustrate it is air tight also do not deflate, but pressure value is higher than predetermined pole
Pressure limiting force value, represent that the service behaviour of vavuum pump is bad；
2. curve as shown in b, i.e., pressure is begun to ramp up quickly, then rise and slow down and tend to balance, illustrate only to deflate
There is no gas leakage；
3. curve is as shown by c, i.e., pressure is ramped with certain slope, and explanation is gas leakage；
4. curve as shown in d, i.e., pressure is begun to ramp up quickly, then rise and slow down and ramped with certain slope, say
It is bright to have deflation and have gas leakage.
By curve map, it can easily judge that vacuum chamber whether there is gas leakage, be fed back to by QMS
Information, analyze the composition and content of residual gas in vacuum chamber, it is possible to take appropriate measures and solve.
Claims (4)
1. a kind of vacuum leak judges control system, it is characterised in that：Vacuum meter is installed, vacuum equipment connection is thick on vacuum equipment
Pipeline and backing line are taken out, roughing line connection mechanical pump and lobe pump, roughing line are provided with roughing valve；Backing line connects
Molecular pump and fore pump, backing line are provided with high threshold and preceding step valve；Pipeline is taken out provided with auxiliary between roughing line and backing line,
It is auxiliary to take out pipeline connection quadruple mass-spectrometer；Host computer connects PLC, and host computer is connected and installed in the vacuum on vacuum equipment
Meter, quadruple mass-spectrometer connection PLC, mechanical pump, lobe pump, roughing valve, molecular pump, fore pump, high threshold and preceding step valve and PLC are controlled
Device electrically connects.
2. a kind of vacuum leak according to claim 1 judges control system, it is characterised in that：Auxiliary take out sets on pipeline
Have it is auxiliary take out valve, auxiliary valve of taking out electrically connects with PLC.
3. a kind of vacuum leak according to claim 1 judges control system, it is characterised in that：The vacuum is calculated as resistance
Rule, ionization gauge or electric capacity rule.
4. a kind of vacuum leak according to claim 1 judges control system, it is characterised in that：The host computer is industry control
Machine, industrial computer are provided with touch-screen.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720925443.0U CN206960059U (en) | 2017-07-28 | 2017-07-28 | A kind of vacuum leak judges control system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720925443.0U CN206960059U (en) | 2017-07-28 | 2017-07-28 | A kind of vacuum leak judges control system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206960059U true CN206960059U (en) | 2018-02-02 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720925443.0U Active CN206960059U (en) | 2017-07-28 | 2017-07-28 | A kind of vacuum leak judges control system |
Country Status (1)
| Country | Link |
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| CN (1) | CN206960059U (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109283886A (en) * | 2018-11-21 | 2019-01-29 | 合肥中科离子医学技术装备有限公司 | A kind of vacuum sealing film test equipment based on PLC |
| CN111999014A (en) * | 2020-09-07 | 2020-11-27 | 北京中科九微科技有限公司 | Molecular pump unit and vacuum system leak detection method |
| CN112360770A (en) * | 2020-11-09 | 2021-02-12 | 上海裕达实业有限公司 | Hand-push type intelligent molecular pump unit |
| CN114411110A (en) * | 2022-01-24 | 2022-04-29 | 苏州中科科仪技术发展有限公司 | Coating apparatus and control method of coating apparatus |
| CN115045832A (en) * | 2022-05-24 | 2022-09-13 | 深圳市联影高端医疗装备创新研究院 | Vacuum acquisition apparatus, magnetic resonance system, and vacuum acquisition method |
-
2017
- 2017-07-28 CN CN201720925443.0U patent/CN206960059U/en active Active
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109283886A (en) * | 2018-11-21 | 2019-01-29 | 合肥中科离子医学技术装备有限公司 | A kind of vacuum sealing film test equipment based on PLC |
| CN111999014A (en) * | 2020-09-07 | 2020-11-27 | 北京中科九微科技有限公司 | Molecular pump unit and vacuum system leak detection method |
| CN112360770A (en) * | 2020-11-09 | 2021-02-12 | 上海裕达实业有限公司 | Hand-push type intelligent molecular pump unit |
| CN114411110A (en) * | 2022-01-24 | 2022-04-29 | 苏州中科科仪技术发展有限公司 | Coating apparatus and control method of coating apparatus |
| CN114411110B (en) * | 2022-01-24 | 2023-04-14 | 苏州中科科仪技术发展有限公司 | Coating apparatus and control method of coating apparatus |
| CN115045832A (en) * | 2022-05-24 | 2022-09-13 | 深圳市联影高端医疗装备创新研究院 | Vacuum acquisition apparatus, magnetic resonance system, and vacuum acquisition method |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20201009 Address after: 116600, No. seven, 13 street, Northeast Economic and Technological Development Zone, Liaoning, Dalian Patentee after: Dalian weitike nanotechnology Co., Ltd Address before: 116600, Zhenxing Road, Dalian Bay, Ganjingzi District, Liaoning, Dalian, 200 Patentee before: DALIAN VACUUM TECHNOLOGIES Inc. |
|
| TR01 | Transfer of patent right |