CN112360770A - Hand-push type intelligent molecular pump unit - Google Patents
Hand-push type intelligent molecular pump unit Download PDFInfo
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- CN112360770A CN112360770A CN202011242451.8A CN202011242451A CN112360770A CN 112360770 A CN112360770 A CN 112360770A CN 202011242451 A CN202011242451 A CN 202011242451A CN 112360770 A CN112360770 A CN 112360770A
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- Prior art keywords
- molecular pump
- pump
- hand
- push type
- type intelligent
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
- F04D27/008—Stop safety or alarm devices, e.g. stop-and-go control; Disposition of check-valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/58—Cooling; Heating; Diminishing heat transfer
- F04D29/582—Cooling; Heating; Diminishing heat transfer specially adapted for elastic fluid pumps
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The invention provides a hand-push type intelligent molecular pump unit, which comprises a molecular pump, a mechanical pump, a rack, an electromagnetic baffle valve, an electromagnetic differential pressure valve and a control module, wherein: the molecular pump and the signal conditioning board are arranged on the table top of the rack, and the mechanical pump is arranged inside the rack; the molecular pump is used as a main pump, the mechanical pump is used as a backing pump, and the molecular pump and the mechanical pump are connected through a corrugated pipe; an electromagnetic differential pressure valve is arranged between the molecular pump and the mechanical pump; an electromagnetic baffle valve is arranged at the inlet of the molecular pump; the control module is communicated with the mechanical pump, the molecular pump, the electromagnetic baffle valve and the electromagnetic differential pressure valve to realize centralized logic control. The hand-push type intelligent unit has the advantages of excellent performance, high reliability, high automation degree and more advantages, and is convenient to use if the hand-push type intelligent unit is started by one key; the air cooling design is adopted, the modularization is realized, and the maintenance is easy; automatic protection, remote monitoring and data storage; the exhaust port of the main pump is provided with a gauge pipe, so that the safety is high, and the like.
Description
Technical Field
The invention relates to the field of vacuum obtaining equipment, in particular to a hand-push type intelligent molecular pump unit.
Background
Scientific research work is carried out in universities, scientific research institutions and laboratories, and in the fields of mass spectrometry, surface analysis, sputtering, evaporation coating and the like, a plurality of analytical instruments, detection equipment, production process lines and the like need to have certain clean vacuum environment when realizing the functions. The intelligent molecular pump unit avoids the specialized work of unit configuration of a client, has extremely low requirement on the operating skill of the client, and has very high market demand and development prospect in the present society of industry subdivision.
The same type of unit products in the current market only use the prime mechanical pump and the molecular pump in simple series, and have simple and crude structure, low automation degree and poor safety and reliability.
Patent document is utility model patent of CN207294034U discloses a handcart, especially relates to a vertical lift's handcart, includes: a horizontal movement part for performing horizontal movement; the vertical lifting component is connected with the moving component and is used for performing vertical movement; the supporting component is connected with the vertical lifting component and used for supporting the molecular pump; the supporting part comprises a first supporting plate and a second supporting plate, and the first supporting plate is connected with the vertical lifting part; the first support plate and the second support plate are connected through a plurality of distance adjusting parts; the plurality of distance adjusting parts are respectively arranged at the edges of the first supporting plate and the second supporting plate and are used for respectively adjusting the distance between the edges of the first supporting plate and the second supporting plate which are positioned at the same side so as to adjust the levelness of the second supporting plate; can conveniently transport the molecular pump to and conveniently change the vertical height of molecular pump, with the cavity height of cooperation chemical vapor deposition equipment, and can adjust the levelness of backup pad, do benefit to the loading and unloading of molecular pump. But the above scheme is highly automated.
Disclosure of Invention
The invention aims to provide a hand-push type intelligent molecular pump unit which can provide a required vacuum space and a clean functional environment.
The invention provides a hand-push type intelligent molecular pump unit, which comprises a molecular pump, a mechanical pump, a rack, an electromagnetic baffle valve, an electromagnetic differential pressure valve and a control module, wherein:
the molecular pump and the signal conditioning board are arranged on the table top of the rack, and the mechanical pump is arranged inside the rack;
the molecular pump is used as a main pump, the mechanical pump is used as a backing pump, and the molecular pump and the mechanical pump are connected through a corrugated pipe;
an electromagnetic differential pressure valve is arranged between the molecular pump and the mechanical pump;
an electromagnetic baffle valve is arranged at the inlet of the molecular pump;
the control module is communicated with the mechanical pump, the molecular pump, the electromagnetic baffle valve and the electromagnetic differential pressure valve to realize centralized logic control.
Preferably, the frame is provided with a handle.
Preferably, the molecular pump is a medium-sized high-vacuum oil-free molecular pump.
Preferably, the frame is welded by 1Cr18Ni9 austenitic stainless steel.
Preferably, the control module comprises a signal conditioning board, a touch screen controller, an analog vacuum gauge, a power supply, a current monitoring module and an alarm, wherein:
the signal conditioning board is provided with a start-stop relay, an analog quantity input, an RS485 communication interface and an alarm relay;
the current monitoring module is used for monitoring the current of the backing pump;
the analog quantity vacuum gauge is arranged at the air inlet of the molecular pump and is used for monitoring the vacuum degree of the unit during working;
the power supply is used for supplying power;
the alarm realizes the alarm function.
Preferably, the touch screen controller has a status indicator lamp, a system monitor, an RS485 interface, and an ethernet port.
Preferably, the range of the analog vacuum gauge is 1000mbar to 5E-8 mbar.
Preferably, the signal conditioning board can perform signal acquisition and output, logic protection and fault handling.
Preferably, a cooling fan is further included, which cools the molecular pump.
Preferably, the bottom of the frame is provided with universal wheels.
Compared with the prior art, the invention has the following beneficial effects:
1. the unit provided by the invention is convenient to use, excellent in performance, high in reliability and high in automation degree;
2. according to the invention, one-key starting can be realized through the touch screen control and signal conditioning board, and the use is convenient;
3. the invention realizes air cooling design through the cooling fan, is modularized and is easy to maintain;
4. the invention can realize the functions of automatic protection, remote monitoring and data storage through the signal conditioning board, the alarm and the current monitoring module;
5. the exhaust port of the main pump is provided with the analog quantity vacuum gauge pipe, so that the vacuum degree of the cavity is monitored at any time, and the safety is high.
Drawings
Other features, objects and advantages of the invention will become more apparent upon reading of the detailed description of non-limiting embodiments with reference to the following drawings:
FIG. 1 is a front view of a hand-push intelligent molecular pump assembly provided by the present invention;
fig. 2 is a top view of a hand-push intelligent molecular pump assembly provided by the present invention.
The figures show that:
1-main molecular pump, 2-preceding stage mechanical pump, 3-frame, 4-bellows, 5-touch screen controller, 6-analog vacuum gauge, 7-power supply, 8-signal conditioning board, 9-alarm, 10-electromagnetic baffle valve, 11-electromagnetic differential pressure valve, 12-cooling fan, 13-handle, 14-current monitoring module
Detailed Description
The present invention will be described in detail with reference to specific examples. The following examples will assist those skilled in the art in further understanding the invention, but are not intended to limit the invention in any way. It should be noted that it would be obvious to those skilled in the art that various changes and modifications can be made without departing from the spirit of the invention. All falling within the scope of the present invention.
The invention provides a hand-push type intelligent molecular pump unit which comprises a main pumping molecular pump 1, a preceding stage mechanical pump 2, a frame 3, a corrugated pipe 4, a touch screen controller 5, an analog quantity vacuum gauge 6, a power supply 7, a signal conditioning plate 8, an alarm 9, an electromagnetic baffle valve 10, an electromagnetic differential pressure valve 11, a cooling fan 12, a handle 13 and a current monitoring module 14. The unit mainly comprises a molecular pump 1 as a main pump, a mechanical pump 2 as a backing pump, and a bellows 4 hose between the molecular pump 1 and the backing pump for connecting the backing pump and the mechanical pump. A full-range vacuum gauge 6 is arranged at an air inlet of the molecular pump, and the vacuum degree of the unit during working is monitored; an electromagnetic differential pressure valve 11 is arranged between the molecular pump 1 and the mechanical pump 2, so that the exhaust port of the molecular pump can be conveniently switched on and off, and the molecular pump is logically linked with the running current of the mechanical pump 2 to play an intelligent protection role; a high vacuum electromagnetic baffle valve 10 is arranged at the inlet of the molecular pump, and is logically linked with the vacuum degree of the cavity when in work, and the molecular pump is automatically protected when the vacuum degree of the air inlet is abnormal; the signal conditioning board 8 is provided with a start-stop relay, an analog quantity input, an RS485 communication interface, an alarm relay and the like, and is respectively communicated with the power supply 7, the touch screen controller 5, the backing pump 2, the molecular pump 1, the analog quantity vacuum gauge 6, the alarm 9, the high-vacuum electromagnetic baffle valve 10, the electromagnetic differential pressure valve 11 and the current monitoring module 14, so that the centralized logic control is realized. The hand-push type intelligent unit has the advantages of excellent performance, high reliability, high automation degree and more advantages, and is convenient to use if the hand-push type intelligent unit is started by one key; the air cooling design is adopted, the modularization is realized, and the maintenance is easy; automatic protection, remote monitoring and data storage; the exhaust port of the main pump is provided with a gauge pipe, so that the safety is high, and the like.
The intelligent molecular pump unit provided by the invention adopts a hand-push type structure, and a handle 13 is arranged on the frame 3. The frame 3 is made of 1Cr18Ni9 austenitic stainless steel through welding, stress relief treatment is carried out through artificial aging, the structural strength is excellent, and meanwhile the stability of the material under severe environment is guaranteed due to the good corrosion resistance of the frame.
The main molecular pump 1 adopts a medium-sized high-vacuum oil-free molecular pump.
The control part consists of a signal conditioning board 8, a touch screen controller 5, an analog quantity vacuum gauge 6, a 24V power supply 7, a current monitoring module 14 and an alarm 9. 5 full touch-sensitive screens of touch-sensitive screen controller take status indicator lamp, system monitoring, 1 RS485,1 ethernet port. The range of the analog quantity vacuum gauge 6 is 1000 mbar-5E-8 mbar. The power supply 7 may supply power to the fan motor and the module. The signal conditioning board 8 is provided with a start-stop relay, an analog quantity input, an RS485 communication interface, an alarm relay, signal acquisition and output, logic protection and fault processing. The current monitoring module 14 is used to monitor the backing pump current. The unit can be monitored by a local display screen, the remote system is started and stopped, data is monitored and recorded, faults and operation records are recorded, curves are displayed, and a report is derived by a U disk.
Compared with the prior art, the hand-push type intelligent molecular pump unit provided by the invention has the following advantages:
the system has the advantages of convenient use, excellent performance, high reliability, high automation degree and more advantages, such as one-key starting, strong maneuverability and convenient use; the air cooling design is adopted, the modularization is realized, and the maintenance is easy; automatic protection, remote monitoring and data storage; the exhaust port of the main pump is provided with a gauge pipe, so that the safety is high, and the like.
The foregoing description of specific embodiments of the present invention has been presented. It is to be understood that the present invention is not limited to the specific embodiments described above, and that various changes or modifications may be made by one skilled in the art within the scope of the appended claims without departing from the spirit of the invention. The embodiments and features of the embodiments of the present application may be combined with each other arbitrarily without conflict.
Claims (10)
1. The utility model provides a hand propelled intelligence molecular pump unit, its characterized in that includes molecular pump, mechanical pump, frame, electromagnetic flapper valve, electromagnetism differential pressure valve and control module, wherein:
the molecular pump and the signal conditioning board are arranged on the table top of the rack, and the mechanical pump is arranged inside the rack;
the molecular pump is used as a main pump, the mechanical pump is used as a backing pump, and the molecular pump and the mechanical pump are connected through a corrugated pipe;
an electromagnetic differential pressure valve is arranged between the molecular pump and the mechanical pump;
an electromagnetic baffle valve is arranged at the inlet of the molecular pump;
the control module is communicated with the mechanical pump, the molecular pump, the electromagnetic baffle valve and the electromagnetic differential pressure valve to realize centralized logic control.
2. The hand-push type intelligent molecular pump unit according to claim 1, wherein a handle is arranged on the frame.
3. The hand-push type intelligent molecular pump unit as claimed in claim 1, wherein the molecular pump is a medium-sized high-vacuum oil-free molecular pump.
4. The hand-push type intelligent molecular pump unit as claimed in claim 1, wherein the rack is welded by 1Cr18Ni9 austenitic stainless steel.
5. The hand-push type intelligent molecular pump unit according to claim 1, wherein the control module comprises a signal conditioning board, a touch screen controller, an analog quantity vacuum gauge, a power supply, a current monitoring module and an alarm, wherein:
the signal conditioning board is provided with a start-stop relay, an analog quantity input, an RS485 communication interface and an alarm relay;
the current monitoring module is used for monitoring the current of the backing pump;
the analog quantity vacuum gauge is arranged at the air inlet of the molecular pump and is used for monitoring the vacuum degree of the unit during working;
the power supply is used for supplying power;
the alarm realizes the alarm function.
6. The hand-propelled intelligent molecular pump assembly of claim 5, wherein the touch screen controller comprises a status indicator light, a system monitor, an RS485 interface and an Ethernet port.
7. The hand-push type intelligent molecular pump unit as claimed in claim 5, wherein the range of the analog vacuum gauge is 1000mbar to 5E-8 mbar.
8. The hand-push intelligent molecular pump unit as claimed in claim 5, wherein the signal conditioning board is capable of signal acquisition and output, logic protection and fault handling.
9. The hand propelled intelligent molecular pump unit of claim 1, further comprising a cooling fan that cools the molecular pump.
10. The hand-push type intelligent molecular pump unit as claimed in claim 1, wherein the bottom of the rack is provided with universal wheels.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011242451.8A CN112360770A (en) | 2020-11-09 | 2020-11-09 | Hand-push type intelligent molecular pump unit |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011242451.8A CN112360770A (en) | 2020-11-09 | 2020-11-09 | Hand-push type intelligent molecular pump unit |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN112360770A true CN112360770A (en) | 2021-02-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011242451.8A Pending CN112360770A (en) | 2020-11-09 | 2020-11-09 | Hand-push type intelligent molecular pump unit |
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| CN (1) | CN112360770A (en) |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5125158B1 (en) * | 1969-10-27 | 1976-07-29 | ||
| GB1464901A (en) * | 1973-03-30 | 1977-02-16 | Cit Alcatel | Molecular vacuum pump assembly |
| CN104179706A (en) * | 2013-05-27 | 2014-12-03 | 山东亿家能太阳能有限公司 | Molecular pump pumping speed tester |
| CN104564786A (en) * | 2014-12-23 | 2015-04-29 | 中国原子能科学研究院 | Vacuum turbo molecular pump |
| CN205207236U (en) * | 2015-11-30 | 2016-05-04 | 四川九天真空科技股份有限公司 | A molecular pump unit key opens and stops system |
| CN106762564A (en) * | 2015-11-25 | 2017-05-31 | 江苏华东空分设备制造有限公司 | A kind of portable vacuum extractor |
| CN107542662A (en) * | 2017-08-19 | 2018-01-05 | 浙江力鑫真空设备有限公司 | A kind of portable Roots's guiding valve vacuum pump set |
| CN206960059U (en) * | 2017-07-28 | 2018-02-02 | 大连维钛克科技股份有限公司 | A kind of vacuum leak judges control system |
| CN207145191U (en) * | 2017-04-21 | 2018-03-27 | 钢研纳克检测技术有限公司 | A kind of magnetic valve buffering, nothing return the turbomolecular pump pumped vacuum systems of oil |
| CN209943053U (en) * | 2019-02-26 | 2020-01-14 | 成都无极真空科技有限公司 | Ultrahigh vacuum automatic exhaust table with inflation function |
| CN111749922A (en) * | 2020-07-27 | 2020-10-09 | 中国科学院合肥物质科学研究院 | Molecular pump fault diagnosis prediction system |
-
2020
- 2020-11-09 CN CN202011242451.8A patent/CN112360770A/en active Pending
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5125158B1 (en) * | 1969-10-27 | 1976-07-29 | ||
| GB1464901A (en) * | 1973-03-30 | 1977-02-16 | Cit Alcatel | Molecular vacuum pump assembly |
| CN104179706A (en) * | 2013-05-27 | 2014-12-03 | 山东亿家能太阳能有限公司 | Molecular pump pumping speed tester |
| CN104564786A (en) * | 2014-12-23 | 2015-04-29 | 中国原子能科学研究院 | Vacuum turbo molecular pump |
| CN106762564A (en) * | 2015-11-25 | 2017-05-31 | 江苏华东空分设备制造有限公司 | A kind of portable vacuum extractor |
| CN205207236U (en) * | 2015-11-30 | 2016-05-04 | 四川九天真空科技股份有限公司 | A molecular pump unit key opens and stops system |
| CN207145191U (en) * | 2017-04-21 | 2018-03-27 | 钢研纳克检测技术有限公司 | A kind of magnetic valve buffering, nothing return the turbomolecular pump pumped vacuum systems of oil |
| CN206960059U (en) * | 2017-07-28 | 2018-02-02 | 大连维钛克科技股份有限公司 | A kind of vacuum leak judges control system |
| CN107542662A (en) * | 2017-08-19 | 2018-01-05 | 浙江力鑫真空设备有限公司 | A kind of portable Roots's guiding valve vacuum pump set |
| CN209943053U (en) * | 2019-02-26 | 2020-01-14 | 成都无极真空科技有限公司 | Ultrahigh vacuum automatic exhaust table with inflation function |
| CN111749922A (en) * | 2020-07-27 | 2020-10-09 | 中国科学院合肥物质科学研究院 | Molecular pump fault diagnosis prediction system |
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| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20210212 |