CN204142420U - Vacuum and leak rate Multifunctional school standard apparatus - Google Patents
Vacuum and leak rate Multifunctional school standard apparatus Download PDFInfo
- Publication number
- CN204142420U CN204142420U CN201420627900.4U CN201420627900U CN204142420U CN 204142420 U CN204142420 U CN 204142420U CN 201420627900 U CN201420627900 U CN 201420627900U CN 204142420 U CN204142420 U CN 204142420U
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- Prior art keywords
- vacuum
- shutdown valve
- manual shutdown
- leak rate
- valve
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- Examining Or Testing Airtightness (AREA)
Abstract
The utility model announces a kind of vacuum and leak rate Multifunctional school standard apparatus, and comprise casing and vacuum and leak rate Multifunctional school Barebone, described vacuum and leak rate Multifunctional school Barebone are located in described casing; Described vacuum and leak rate Multifunctional school Barebone comprise signal piping, high vacuum calibration subsystem, low vacuum calibration subsystem, leak rate calibration subsystem, mechanical pump and molecular pump; Described signal piping comprises wireway, manual shutdown valve V
9, manual shutdown valve V
10, manual shutdown valve V
2, micrometering valve V
6with electromagnetism shutdown valve V
14, described manual shutdown valve V
9, described manual shutdown valve V
10, suffered manual shutdown valve V
2, described micrometering valve V
6with described electromagnetism shutdown valve V
14connected successively by wireway.The utility model is rational in infrastructure, meets national standard, easy to operate, calibration data accurately and reliably, and calibrating efficiency high, calibration range is wide.
Description
Technical field
The utility model relates to a kind of measuring apparatus, particularly a kind of vacuum and leak rate Multifunctional school standard apparatus.
Background technology
Vacuum correction technology and leak rate detection technique significant in the research and production such as space flight, surface, microelectronics, scientific research or enterprise's production line are needed vacuum gauge, vacuum leak, leak locator and gas micro-flowmeter calibration testing.Because vacuum parameters is more, required calibrating installation kind is also more, if prepare different calibrating installations for different vacuum parameters, can increase the total cost of building calibrating installation undoubtedly, also can take the larger space, place of calibration laboratory simultaneously.And the majority in existing vacuum correction device and leak rate calibrating installation exists function singleness, calibration range is narrower, calibration accuracy is not high problem, and then measurement unit is made to have to build more calibrating installation to meet actual alignment demand.
Utility model content
In view of this, the utility model is to provide a kind of and meets national standard, easy to operate, calibration data accurately and reliably and precision is high, calibrating efficiency is high and have vacuum and the leak rate Multifunctional school standard apparatus of wider calibration range.
For solving the problem, the utility model adopts following technical scheme: vacuum and leak rate Multifunctional school standard apparatus, and comprise casing and vacuum and leak rate Multifunctional school Barebone, described vacuum and leak rate Multifunctional school Barebone are located in described casing; Described vacuum and leak rate Multifunctional school Barebone comprise signal piping, vacuum correction subsystem, leak rate calibration subsystem, mechanical pump and molecular pump; Described signal piping comprises wireway, manual shutdown valve V
9, manual shutdown valve V
10, manual shutdown valve V
2, manual shutdown valve V
1, electromagnetism shutdown valve V
15with Pirani gauge G
5; Described manual shutdown valve V
9, described manual shutdown valve V
10, described manual shutdown valve V
2, described manual shutdown valve V
1, described molecular pump, described electromagnetism shutdown valve V
15with described Pirani gauge G
5connected successively by wireway; Described mechanical pump is successively through electromagnetic release valve V
17with gear oily trap be positioned at described manual shutdown valve V
9with described Pirani gauge G
5between described signal piping connect conducting, described leak rate calibration subsystem be positioned at described manual shutdown valve V
9with described manual shutdown valve V
2between described signal piping connect conducting, described vacuum correction subsystem be positioned at described manual shutdown valve V
2with described manual shutdown valve V
1between described signal piping connect conducting, be positioned at described manual shutdown valve V
1with the described signal piping between described molecular pump is through micrometering valve V
16conducting is connected with nitrogen memory storage.
Above-mentioned vacuum and leak rate Multifunctional school standard apparatus, described vacuum correction subsystem comprises vacuum chamber, monitoring ionization vacuum ga(u)ge G
1, standard ionization vacuum ga(u)ge G
2with vacuum correction incoming end, described monitoring ionization vacuum ga(u)ge G
1conducting is connected, described standard ionization vacuum ga(u)ge G with described vacuum chamber
2be connected conducting with described vacuum chamber, described vacuum chamber be positioned at described manual shutdown valve V
2with described manual shutdown valve V
1between described signal piping connect conducting, described vacuum chamber is shutdown valve V manually
3be connected conducting with described vacuum correction incoming end, be positioned at described vacuum correction incoming end and described manual shutdown valve V
3between wireway by wireway through manual shutdown valve V
4be positioned at described manual shutdown valve V
1with the wireway between described molecular pump connects conducting.
Above-mentioned vacuum and leak rate Multifunctional school standard apparatus, described leak rate calibration subsystem comprises by school small opening L
1, with reference to small opening L
2, with reference to small opening L
3with quadrupole mass spectrometer M, described by school small opening L
1described manual shutdown valve V is positioned at by wireway access
9with described manual shutdown valve V
10between signal piping, described with reference to small opening L
2through manual shutdown valve V
11be positioned at described manual shutdown valve V
10with described manual shutdown valve V
2between signal piping connect conducting, described with reference to small opening L
3through manual shutdown valve V
12be positioned at described manual shutdown valve V
10with described manual shutdown valve V
2between signal piping connect conducting, described quadrupole mass spectrometer M be positioned at described manual shutdown valve V
10with described manual shutdown valve V
2between signal piping connect conducting.
Above-mentioned vacuum and leak rate Multifunctional school standard apparatus, described vacuum correction incoming end is provided with blind plate.
Above-mentioned vacuum and leak rate Multifunctional school standard apparatus, also comprise microcomputer, standard ionization gauge and compound vacuum gauge, and described microcomputer communicates to connect with described standard ionization gauge and described compound vacuum gauge respectively.
Above-mentioned vacuum and leak rate Multifunctional school standard apparatus, described standard ionization gauge is located at described standard ionization vacuum ga(u)ge G
2on; Described monitoring ionization vacuum ga(u)ge G
1with described Pirani gauge G
5on be respectively equipped with a described compound vacuum gauge.
Above-mentioned vacuum and leak rate Multifunctional school standard apparatus, described microcomputer is furnished with display screen.
Above-mentioned vacuum and leak rate Multifunctional school standard apparatus, described molecular pump and described gear oil trap are furnished with heating arrangement respectively.
Above-mentioned vacuum and leak rate Multifunctional school standard apparatus, the tank wall of described casing is provided with power switch, and described power switch comprises mechanical pump power switch, electromagnetism shutdown valve V
15power switch, molecular pump power source switch, quadrupole mass spectrometer M power switch, keep off oily trap heating arrangement power switch, molecular pump heating arrangement power switch and total power switch.
The beneficial effects of the utility model are: the utility model is rational in infrastructure, meet national standard, easy to operate, calibration data accurately and reliably, and calibrating efficiency high, calibration range is wide, can be used for the calibrating of various high and low vacuum meter and vacuum standard small opening.
Accompanying drawing explanation
Fig. 1 is the casing surface structure schematic diagram of the utility model vacuum and leak rate Multifunctional school standard apparatus;
Fig. 2 is the vacuum of the utility model vacuum and leak rate Multifunctional school standard apparatus and the fundamental diagram of leak rate Multifunctional school Barebone.
In figure: 100-casing, 101-general supply incoming end, 102-molecular pump power source incoming end, 103-mechanical pump power switch, 104-electromagnetism shutdown valve V
15power switch, 105-molecular pump power source switch, 106-quadrupole mass spectrometer M power switch, 107-keeps off oily trap heating arrangement power switch, 108-molecular pump heating arrangement power switch, 109-display screen, 200-vacuum and leak rate Multifunctional school Barebone, 201-mechanical pump, 202-molecular pump, 203-vacuum correction subsystem, 204-leak rate calibration subsystem, the manual shutdown valve V of 205-
1, the manual shutdown valve V of 206-
3, the manual shutdown valve V of 207-
9, the manual shutdown valve V of 208-
10, the manual shutdown valve V of 209-
11, 210-electromagnetism shutdown valve V
15, 211-micrometering valve V
16, 212-electromagnetism shutdown valve V
17, 213-keeps off oily trap, and 214-monitors ionization vacuum ga(u)ge G
1, 215-standard vacuum rule G
2, 216-vacuum chamber, 217-is by school small opening L
1, 218-is with reference to small opening L
2, 219-is with reference to small opening L
3, 220-quadrupole mass spectrometer M, 221-vacuum correction incoming end, the manual shutdown valve V of 222-
2, the manual shutdown valve V of 223-
12, 224-Pirani gauge G
5, the manual shutdown valve V of 225-
4, 226-nitrogen memory storage.
Embodiment
For clearly demonstrating the scheme in the utility model, providing preferred embodiment below and being described with reference to the accompanying drawings.
As depicted in figs. 1 and 2, vacuum and leak rate Multifunctional school standard apparatus, comprise casing 100 and vacuum and leak rate Multifunctional school Barebone 200, described vacuum and leak rate Multifunctional school Barebone 200 are located in described casing 100; Described vacuum and leak rate Multifunctional school Barebone 200 comprise signal piping, vacuum correction subsystem 203, leak rate calibration subsystem 204, mechanical pump 201 and molecular pump 202; Described signal piping comprises wireway, manual shutdown valve V
9207, manual shutdown valve V
10208, manual shutdown valve V
2222, manual shutdown valve V
1205, electromagnetism shutdown valve V
15210 and Pirani gauge G
5224; Described manual shutdown valve V
9207, described manual shutdown valve V
10208, described manual shutdown valve V
2222, described manual shutdown valve V
1205, described molecular pump 202, described electromagnetism shutdown valve V
15210 and described Pirani gauge G
5224 are connected successively by wireway; Described mechanical pump 201 is successively through electromagnetic release valve V
17212 and the oily trap of gear 213 be positioned at described manual shutdown valve V
9207 and described Pirani gauge G
5described signal piping between 224 connects conducting, and described leak rate is calibrated subsystem 204 and is positioned at described manual shutdown valve V
9207 and described manual shutdown valve V
2described signal piping between 222 connects conducting, described vacuum correction subsystem 203 be positioned at described manual shutdown valve V
2222 and described manual shutdown valve V
1described signal piping between 205 connects conducting, is positioned at described manual shutdown valve V
1described signal piping between 205 and described molecular pump 202 is through micrometering valve V
16211 are connected conducting with nitrogen memory storage 226.
Wherein, as shown in Figure 2, described vacuum correction subsystem 203 comprises vacuum chamber 216, monitoring ionization vacuum ga(u)ge G
1214, standard ionization vacuum ga(u)ge G
2215 and vacuum correction incoming end 221, described monitoring ionization vacuum ga(u)ge G
1214 are connected conducting with described vacuum chamber 216, described standard ionization vacuum ga(u)ge G
2215 are connected conducting with described vacuum chamber 216, described vacuum chamber 216 be positioned at described manual shutdown valve V
2222 and described manual shutdown valve V
1described signal piping between 205 connects conducting, described vacuum chamber 216 manually shutdown valve V
3206 are connected conducting with described vacuum correction incoming end 221, are positioned at described vacuum correction incoming end 221 and described manual shutdown valve V
3wireway between 206 by wireway through manual shutdown valve V
4225 be positioned at described manual shutdown valve V
1wireway between 205 and described molecular pump 202 connects conducting; Described leak rate calibration subsystem 204 comprises by school small opening L
1217, with reference to small opening L
2218, with reference to small opening L
3219 and quadrupole mass spectrometer M220, described by school small opening L
1217 are positioned at described manual shutdown valve V by wireway access
9207 with described manual shutdown valve V
10signal piping between 208, described with reference to small opening L
2218 through manual shutdown valve V
11be positioned at described manual shutdown valve V
10208 and described manual shutdown valve V
2signal piping between 222 connects conducting, described with reference to small opening L
3219 through manual shutdown valve V
12223 be positioned at described manual shutdown valve V
10208 and described manual shutdown valve V
2signal piping between 222 connects conducting, described quadrupole mass spectrometer M220 be positioned at described manual shutdown valve V
10208 and described manual shutdown valve V
2signal piping between 222 connects conducting.
In order to avoid foreign material fall into the snorkel of described vacuum correction incoming end 221, described vacuum correction incoming end 221 is provided with blind plate.When not using described vacuum correction subsystem 203, available described blind plate covers the snorkel of described vacuum correction incoming end 221.
In order to improve the handling of described vacuum and leak rate Multifunctional school Barebone 200, in the present embodiment, also comprise microcomputer, standard ionization gauge and compound vacuum gauge, described microcomputer communicates to connect with described standard ionization gauge and described compound vacuum gauge respectively; Wherein, described standard ionization gauge is located at described standard ionization vacuum ga(u)ge G
2on 216; Described monitoring ionization vacuum ga(u)ge G
1215 and described Pirani gauge G
5be respectively equipped with a described compound vacuum gauge on 224, and described microcomputer is furnished with display screen.
In particular cases, when carrying out school inspection to vacuometer measuring appratus such as vacuum meters, the dynamic limit vacuum tightness of described vacuum and leak rate Multifunctional school Barebone 200 does not reach school inspection requirement, verification requirement is reached in order to make the dynamic limit vacuum tightness of described vacuum and leak rate Multifunctional school Barebone 200, in the present embodiment, described molecular pump 202 and the oily trap 213 of described gear are furnished with heating arrangement respectively.
As shown in Figure 1, the tank wall of described casing 100 is provided with power switch, and described power switch comprises mechanical pump power switch 103, electromagnetism shutdown valve V
15power switch 104, molecular pump power source switch 105, quadrupole mass spectrometer M power switch 106, keep off oily trap heating arrangement power switch 107, molecular pump heating arrangement power switch 108 and total power switch 101.
During vacuum correction, will be contained on described vacuum correction incoming end 221 by school vacuum gauge, and make describedly to be communicated with by the snorkel of the instrument of school vacuum gauge with described vacuum correction incoming end; Then all valves are closed; Then connect described total power switch 101 and described molecular pump 202 chilled water water source, then open described mechanical pump 201, then open described electromagnetism shutdown valve V successively
17212 and described manual shutdown valve V
4225, and then to described manual shutdown valve V
3206 are bled to described by the wireway between the vacuum gauge of school, are turning off described manual shutdown valve V after bleeding about 5 minutes
4225, then open described electromagnetism shutdown valve V successively
15210, described manual shutdown valve V
1205 and described manual shutdown valve V
3206, then described vacuum chamber 216 is bled; As described Pirani gauge G
5when numerical value is less than 20Pa indicated by 224, start described molecular pump 202; After described molecular pump 202 normally work, (715Hz) is after about 5 minutes, connects described detection ionization vacuum ga(u)ge G
1214, if described monitoring ionization vacuum ga(u)ge G
1numerical value indicated by 214 is less than or equal to 1 × 10
-2during Pa, connect described standard ionization vacuum ga(u)ge G
2215 and by the power supply of school regulations; Then described monitoring ionization vacuum ga(u)ge G is closed
1214, then with described standard ionization vacuum ga(u)ge G
2the 215 dynamic limit vacuum tightness p recording described vacuum correction subsystem 203
0dynamic limit vacuum tightness p is recorded with by school vacuum gauge
0'; Then by described micrometering valve V
16the adjustment of 211 pairs of described vacuum chambers 216 obtains the vacuum correction point of series of stable, and the numerical value then recorded by these vacuum correction points draws calibration factor, can complete calibration; After calibration, close described micrometering valve V
16211, then close by school vacuum gauge power supply and described manual shutdown valve V
3206.When making the air pressure of described vacuum chamber 216 less than or equal to systemic presupposition value, then close described standard ionization vacuum ga(u)ge G
2the power supply of 215; Then described manual shutdown valve V is closed
1205, then close down described molecular pump 202, then close described electromagnetism shutdown valve V
15210; Then disconnect described mechanical pump 201, described molecular pump 202 and described total power switch 101, and close described molecular pump 202 chilled water water source; Then will be taken off by school vacuum gauge, and cover blind plate on the snorkel mouth of pipe of described vacuum correction incoming end 221.
In the present embodiment, the calibration of vacuum gauge and leak rate completes all under nitrogen atmosphere, the while that its reason being that high pure nitrogen obtains comparatively easily and character is comparatively stable, density is also close to the density of air, thus the drop avoiding post liquefaction in air floating is on the impact of verification result.The oily trap of described gear 213 effectively can stop the small organic molecule evaporated at low pressure in described mechanical pump 201 simultaneously, avoids described small organic molecule to be entered in described molecular pump 202 by described signal piping and causes damage to described molecular pump 202.
Above-described embodiment is only for clearly illustrating that the utility model creates example, and not the utility model is created to the restriction of embodiment.For those of ordinary skill in the field, can also make other changes in different forms on the basis of the above description.Here exhaustive without the need to also giving all embodiments.All within spirit of the present utility model and principle any apparent change of extending out or variation be still in the utility model and create among the protection domain of claim.
Claims (8)
1. vacuum and leak rate Multifunctional school standard apparatus, it is characterized in that, comprise casing (100) and vacuum and leak rate Multifunctional school Barebone (200), described vacuum and leak rate Multifunctional school Barebone (200) are located in described casing (100); Described vacuum and leak rate Multifunctional school Barebone (200) comprise signal piping, vacuum correction subsystem (203), leak rate calibration subsystem (204), mechanical pump (201) and molecular pump (202); Described signal piping comprises wireway, manual shutdown valve V
9(207), manual shutdown valve V
10(208), manual shutdown valve V
2(222), manual shutdown valve V
1(205), electromagnetism shutdown valve V
15and Pirani gauge G (210)
5(224); Described manual shutdown valve V
9(207), described manual shutdown valve V
10(208), described manual shutdown valve V
2(222), described manual shutdown valve V
1(205), described molecular pump (202), described electromagnetism shutdown valve V
15and described Pirani gauge G (210)
5(224) connected successively by wireway; Described mechanical pump (201) is successively through electromagnetic release valve V
17(212) and gear oily trap (213) be positioned at described manual shutdown valve V
9and described Pirani gauge G (207)
5(224) the described signal piping between connects conducting, and described leak rate is calibrated subsystem (204) and is positioned at described manual shutdown valve V
9and described manual shutdown valve V (207)
2(222) the described signal piping between connects conducting, described vacuum correction subsystem (203) be positioned at described manual shutdown valve V
2and described manual shutdown valve V (222)
1(205) the described signal piping between connects conducting, is positioned at described manual shutdown valve V
1(205) the described signal piping and between described molecular pump (202) is through micrometering valve V
16(211) conducting is connected with nitrogen memory storage (226).
2. vacuum according to claim 1 and leak rate Multifunctional school standard apparatus, is characterized in that, described vacuum correction subsystem (203) comprises vacuum chamber (216), monitoring ionization vacuum ga(u)ge G
1(214), standard ionization vacuum ga(u)ge G
2(215) and vacuum correction incoming end (221), described monitoring ionization vacuum ga(u)ge G
1(214) conducting is connected with described vacuum chamber (216), described standard ionization vacuum ga(u)ge G
2(215) be connected conducting with described vacuum chamber (216), described vacuum chamber (216) be positioned at described manual shutdown valve V
2and described manual shutdown valve V (222)
1(205) the described signal piping between connects conducting, described vacuum chamber (216) manually shutdown valve V
3(206) be connected conducting with described vacuum correction incoming end (221), be positioned at described vacuum correction incoming end and described manual shutdown valve V
3(206) wireway between by wireway through manual shutdown valve V
4(225) be positioned at described manual shutdown valve V
1(205) wireway and between described molecular pump (202) connects conducting.
3. vacuum according to claim 1 and leak rate Multifunctional school standard apparatus, is characterized in that, described leak rate calibration subsystem (204) comprises by school small opening L
1(217), with reference to small opening L
2(218), with reference to small opening L
3(219) and quadrupole mass spectrometer M (220), described by school small opening L
1(217) described manual shutdown valve V is positioned at by wireway access
9(207) with described manual shutdown valve V
10(208) signal piping between, described with reference to small opening L
2(218) through manual shutdown valve V
11(209) be positioned at described manual shutdown valve V
10and described manual shutdown valve V (208)
2(222) signal piping between connects conducting, described with reference to small opening L
3(219) through manual shutdown valve V
12(223) be positioned at described manual shutdown valve V
10and described manual shutdown valve V (208)
2(222) signal piping between connects conducting, described quadrupole mass spectrometer M (220) be positioned at described manual shutdown valve V
10and described manual shutdown valve V (208)
2(222) signal piping between connects conducting.
4. vacuum according to claim 2 and leak rate Multifunctional school standard apparatus, is characterized in that, described vacuum correction incoming end (221) is provided with blind plate.
5. vacuum according to claim 1 and leak rate Multifunctional school standard apparatus, is characterized in that, also comprises microcomputer, standard ionization gauge and compound vacuum gauge, and described microcomputer communicates to connect with described standard ionization gauge and described compound vacuum gauge respectively.
6. vacuum according to claim 5 and leak rate Multifunctional school standard apparatus, is characterized in that, described microcomputer is furnished with display screen (109).
7. vacuum according to claim 1 and leak rate Multifunctional school standard apparatus, is characterized in that, described molecular pump (202) and the oily trap of described gear (213) are furnished with heating arrangement respectively.
8. vacuum according to claim 1 and leak rate Multifunctional school standard apparatus, it is characterized in that, the tank wall of described casing (100) is provided with power switch, and described power switch comprises mechanical pump power switch (103), electromagnetism shutdown valve V15 power switch (104), molecular pump power source switch (105), quadrupole mass spectrometer M power switch (106), keeps off oily trap heating arrangement power switch (107), molecular pump heating arrangement power switch (108) and total power switch (101).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420627900.4U CN204142420U (en) | 2014-10-27 | 2014-10-27 | Vacuum and leak rate Multifunctional school standard apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201420627900.4U CN204142420U (en) | 2014-10-27 | 2014-10-27 | Vacuum and leak rate Multifunctional school standard apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204142420U true CN204142420U (en) | 2015-02-04 |
Family
ID=52419100
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201420627900.4U Expired - Fee Related CN204142420U (en) | 2014-10-27 | 2014-10-27 | Vacuum and leak rate Multifunctional school standard apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN204142420U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104635090A (en) * | 2015-02-11 | 2015-05-20 | 中国科学院长春光学精密机械与物理研究所 | Evaluation experiment platform for vacuum compatibility of components |
| CN109827718A (en) * | 2019-03-14 | 2019-05-31 | 北京卫星环境工程研究所 | The verifying device and verification method of the pressure maintaining leak detection scheme in spacecraft launching site channel |
| US10782070B2 (en) | 2016-09-09 | 2020-09-22 | Sp Industries, Inc. | Energy recovery in a freeze-drying system |
-
2014
- 2014-10-27 CN CN201420627900.4U patent/CN204142420U/en not_active Expired - Fee Related
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104635090A (en) * | 2015-02-11 | 2015-05-20 | 中国科学院长春光学精密机械与物理研究所 | Evaluation experiment platform for vacuum compatibility of components |
| US10782070B2 (en) | 2016-09-09 | 2020-09-22 | Sp Industries, Inc. | Energy recovery in a freeze-drying system |
| US11181320B2 (en) | 2016-09-09 | 2021-11-23 | Sp Industries, Inc. | Energy recovery in a freeze-drying system |
| CN109827718A (en) * | 2019-03-14 | 2019-05-31 | 北京卫星环境工程研究所 | The verifying device and verification method of the pressure maintaining leak detection scheme in spacecraft launching site channel |
| CN109827718B (en) * | 2019-03-14 | 2019-11-08 | 北京卫星环境工程研究所 | The verifying device and verification method of the pressure maintaining leak detection scheme in spacecraft launching site channel |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150204 Termination date: 20181027 |
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| CF01 | Termination of patent right due to non-payment of annual fee |