CN204405270U - One is dammed sampling method helium mass spectrum leak detection device - Google Patents
One is dammed sampling method helium mass spectrum leak detection device Download PDFInfo
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- CN204405270U CN204405270U CN201520073296.XU CN201520073296U CN204405270U CN 204405270 U CN204405270 U CN 204405270U CN 201520073296 U CN201520073296 U CN 201520073296U CN 204405270 U CN204405270 U CN 204405270U
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Abstract
The utility model discloses one to dam sampling method helium mass spectrum leak detection device, comprise for the vacuum sealing chamber of accommodating examined product, for vacuumizing the vaccum-pumping equipment of closed chamber, the vacuum lead connecting vacuum sealing chamber and vaccum-pumping equipment and helium mass spectrometer leak detector, vacuum lead is provided with the first intercepting valve and the second intercepting valve, vacuum pipe between first intercepting valve and the second intercepting valve forms the section of damming, and helium mass spectrometer leak detector connects the section of damming.By installing the first intercepting valve and the second intercepting valve on vacuum lead, the vacuum lead between the first intercepting valve and the second intercepting valve is made to form the section of damming, by closing the first intercepting valve and the second intercepting valve, the gas that vacuumizes of vacuum seal indoor is dammed and is captured in the section of damming, take examined product away, hunt leak to the gas that vacuumizes of sampling, during leak detection, examined product departs from detection system, enhance productivity, achieve the high speed on-line checkingi on production line.
Description
Technical field
The utility model relates to the technical field of helium mass spectrum leak detection, particularly relates to one and to dam sampling method helium mass spectrum leak detection device.
Background technology
Along with the development of science and technology, vacuum leak hunting technical requirement is more and more higher, and at home and abroad most widely used general, that precision is the highest vacuum leak hunting method is exactly Helium Leak Test at present.
Helium mass spectrum leak detection method is the helium partial pressure measurement principle utilizing helium mass spectrometer leak detector, realizes the helium leak measurement amount of examined product.When there is small opening in examined product sealing surface, the gas of probe gas helium and other composition all can leak from small opening, after the gas leaked enters helium mass spectrometer leak detector, due to the Selective recognition ability of helium mass spectrometer leak detector, only provide the helium partial pressure signal value in gas.On the basis obtaining helium signal value, just can obtain the leakage rate of small opening to helium by the method for referance leak comparison.
What current helium mass spectrum leak detection method adopted is the leak detection of vacuum tank method, examined product entirety is needed to put into vacuum seal indoor, helium (can hit the person containing the gases at high pressure of helium) is filled with in examined product inside, vacuum seal indoor vacuumize, and vacuum sealing chamber is connected with helium mass spectrometer leak detector.When there is small opening on examined product surface, gas flows from high pressure to the direction of vacuum low-pressure power, the minimum helium molecule of volume will enter vacuum seal indoor from examined product inside by micro-small opening, then is hunted leak by helium mass spectrometer leak detector, realizes the measurement of examined product integral leakage.
But, the method of this kind of vacuum tank method leak detection needs the production line suspending examined product, after treating that helium mass spectrometer leak detector detects, restart the production line of examined product again, production system and detection system are intervened mutually, reduce the production efficiency of product, be not suitable for the automatic high-speed leak detection of actual production line.
Utility model content
Technical problem to be solved in the utility model be to provide a kind ofly to enhance productivity, the sampling method helium mass spectrum leak detection device that dams that the high speed realized on production line formerly detects.
For realizing above-mentioned technique effect, the utility model discloses one to dam sampling method helium mass spectrum leak detection device, comprise for the vacuum sealing chamber of accommodating examined product, for vacuumizing the vaccum-pumping equipment of described vacuum sealing chamber, the vacuum lead connecting described vacuum sealing chamber and described vaccum-pumping equipment and helium mass spectrometer leak detector, described vacuum lead is provided with the first intercepting valve and the second intercepting valve, vacuum pipe between described first intercepting valve and described second intercepting valve forms the section of damming, the section of damming described in described helium mass spectrometer leak detector connects.
The described sampling method helium mass spectrum leak detection device that dams further improves and is, described in the section of damming be provided with one first vacuum meter.
The described sampling method helium mass spectrum leak detection device that dams further improves and is, the position of described vacuum lead near described vacuum sealing chamber side be located at by described first intercepting valve, the position of described vacuum lead near described vaccum-pumping equipment side be located at by described second intercepting valve, and the described vacuum lead between described vacuum sealing chamber and described first intercepting valve is provided with one second vacuum meter.
The described sampling method helium mass spectrum leak detection device that dams further improves and is, described vaccum-pumping equipment comprises main vacuum pump and connects the auxiliary forepump of described main vacuum pump.
The described sampling method helium mass spectrum leak detection device that dams further improves and is, described vacuum sealing chamber is provided with for the broken vacant duct to described vacuum sealing chamber depressurization, and described broken vacant duct is provided with air valve.
The utility model, owing to have employed above technical scheme, makes it have following beneficial effect:
By installing the first intercepting valve and the second intercepting valve on the vacuum lead between the vacuum sealing chamber and vaccum-pumping equipment of accommodating examined product, the vacuum lead between the first intercepting valve and the second intercepting valve is made to form the section of damming, when vacuum sealing chamber reaches detection vacuum tightness, by closing the first intercepting valve and the second intercepting valve, the gas that vacuumizes of vacuum seal indoor is dammed and is captured in the section of damming, complete sampling, then examined product is removed, examined product is enable to get back to production line rapidly, recycling helium mass spectrometer leak detector is hunted leak to the gas that vacuumizes in the section of damming, if there is small opening in examined product, just can from vacuumizing gas leakage rate helium being detected, simultaneously, during leak detection, examined product departs from detection system, enhance productivity, achieve the high speed on-line checkingi on production line, helium mass spectrometer leak detector detection sensitivity is high, the leak rate that can realize any working pressure detects, the actual leakage amount of reflection examined product.
Accompanying drawing explanation
Fig. 1 is the schematic diagram of a kind of sampling method helium mass spectrum leak detection device that dams of the present utility model.
Fig. 2 is the process flow diagram of the leak hunting method of a kind of sampling method helium mass spectrum leak detection device that dams of the present utility model.
Embodiment
Below in conjunction with the drawings and the specific embodiments, the utility model is described in further detail.
What the sampling method Helium Leak Test that dams of the present utility model mainly utilized up-to-date development dams sampling method helium mass spectrum leak detection device in vacuum tank method helium mass spectrum leak detection process, add the step of sampling of damming, first vacuum tank method is utilized to vacuumize the sampling of gas rapidly to the examined product on production line, then, examined product is dropped into rapidly next production line, utilize the vacuumize gas of helium mass spectrometer leak detector to sampling to hunt leak simultaneously, during leak detection, examined product departs from detection system, thus enhance productivity, achieve the high speed on-line checkingi on production line.
First consult shown in Fig. 1, of the present utility model dam sampling method helium mass spectrum leak detection device primarily of for accommodating examined product 20 vacuum sealing chamber 11, for vacuumize this vacuum sealing chamber 11 vaccum-pumping equipment 12, connect vacuum sealing chamber 11 and form with the vacuum lead 13 of vaccum-pumping equipment 12 and the helium mass spectrometer leak detector 14 for detecting helium leakage amount.
Wherein, vacuum lead 13 is provided with one first intercepting valve 131 and one second intercepting valve 132, first intercepting valve 131 and the second intercepting valve 132 are solenoid valve, the position of vacuum lead 13 near vacuum sealing chamber 11 side be located at by first intercepting valve 131, and the position of vacuum lead 13 near vaccum-pumping equipment 12 side be located at by the second intercepting valve 132, make the vacuum lead 13 between the first intercepting valve 131 and the second intercepting valve 132 form one section of section of damming 15, helium mass spectrometer leak detector 14 is just connected in this section section of damming 15.
By without the airtight examined product 20 of the vacuum sealing chamber 11 under helium environment, helium is injected to examined product 20 inside, vaccum-pumping equipment 12 is then utilized to be evacuated in vacuum lead 13 by the gas in vacuum sealing chamber 11, if there is small opening in examined product 20, in vacuum, the minimum helium molecule of volume will enter in vacuum sealing chamber 11 by small opening, afterwards with air pressure change, and flowing in the vacuum lead 13 less by vacuum sealing chamber 11 inward pressure that pressure is higher.Then closedown first intercepting valve 131 and the second intercepting valve 132 is utilized, by vacuumize obtain vacuumize in the section of damming 15 of gas collecting between the first intercepting valve 131 and the second intercepting valve 132, the helium mass spectrometer leak detector 14 that finally section of utilizing and dam 15 is connected is hunted leak to the gas that vacuumizes collected, just can from vacuumizing gas leakage rate helium being detected, simultaneously, during leak detection, examined product departs from detection system, thus improve production efficiency, achieve the high speed on-line checkingi on production line.The section of damming 15 between the first intercepting valve 131 and the second intercepting valve 132 is also provided with one first vacuum meter 161, vacuumizing of collecting the section of damming 15 utilizing helium mass spectrometer leak detector 14 is after gas carries out helium mass spectrum leak detection, utilize the vacuum tightness in the first vacuum meter 161 monitoring section of damming 15, the vacuum tightness <0.2 ~ 1mbar in the section of damming 15 must be made.
Vaccum-pumping equipment 12 is by a main vacuum pump 121 and connect the two or more auxiliary forepump 122 of main vacuum pump 121 and form, and jointly realizes vacuumizing operation to vacuum sealing chamber 11.And the vacuum lead 13 between the first intercepting valve 131 and vacuum sealing chamber 11 is installed one second vacuum meter 162; for the vacuum tightness of Real-Time Monitoring vacuum sealing chamber 11; when the vacuum tightness of vacuum sealing chamber 11 is extracted into <0.1 ~ 0.2mbar; close the first intercepting valve 131 and the second intercepting valve 132 simultaneously; carry out the sampling vacuumizing gas; utilize the vacuum tightness of the second vacuum meter 162 Real-Time Monitoring vacuum sealing chamber 11 and vacuum lead 13 simultaneously; the effect of protective device can also be played, the serviceable life of extension fixture.
Shown in composition graphs 2, the leak hunting method damming sampling method helium mass spectrum leak detection device of the present utility model specifically comprises the steps:
S001, examined product inserted vacuum seal indoor seal:
Vacuum sealing chamber 11 is provided with the vacuum orifice for vacuumizing and the vacuum breaker mouth for depressurization, vacuum orifice connects one end of vacuum lead 13, the other end of vacuum lead 13 connects vaccum-pumping equipment 12, the improvement vaccum-pumping equipment that vaccum-pumping equipment 12 adopts main vacuum pump 121 to be connected with auxiliary forepump 122, have larger vacuuming force, the vacuumizing effect of realization is better.The vacuum breaker mouth being located at vacuum sealing chamber 11 top is provided with brokenly vacant duct 111, and broken vacant duct 111 is provided with an air valve 112, controls broken sky and the sealing state of vacuum sealing chamber 11 with the keying of air valve 112.
S002, be filled with helium in described examined product inside:
Examined product 20 is placed in vacuum sealing chamber 11 and seals, vacuum sealing chamber 11 inside is without helium environment, examined product 20 connects an injection pipeline 201, be used for injecting helium (gases at high pressure containing helium can be injected) to examined product 20 inside, injection pipeline 201 requires with vacuum sealing chamber 11 mutually isolated, avoids helium to enter vacuum sealing chamber 11 inner.
S003, described vacuum sealing chamber to be vacuumized:
Vaccum-pumping equipment 12 pairs of vacuum sealing chamber 11 are utilized to vacuumize, gas in vacuum sealing chamber 11 is evacuated in vacuum lead 13, if there is small opening in examined product 20, in vacuum, the minimum helium gas molecules of volume will enter in vacuum sealing chamber 11 by small opening, afterwards with air pressure change, flowing in the vacuum lead 13 less by vacuum sealing chamber 11 inward pressure that pressure is higher.
S004, gather described vacuum seal indoor vacuumize gas:
In vacuum, utilize the second vacuum meter 162 to detect vacuum tightness in vacuum sealing chamber 11 in real time, and when in vacuum sealing chamber 11, vacuum tightness is extracted into <0.1 ~ 0.2mbar, close the first intercepting valve 131 and the second intercepting valve 132 simultaneously, vacuumizing in the section of damming 15 of gas collecting between the first intercepting valve 131 and the second intercepting valve 132 of obtaining will be vacuumized.
S005, described examined product is shifted out described vacuum sealing chamber:
After treating gas collecting, open the air valve 112 bottom vacuum sealing chamber 11, broken vacant duct 111 is utilized to be communicated with the inside of air and vacuum sealing chamber 11, carry out brokenly sky, remove the sealing of vacuum sealing chamber 11, examined product 20 is taken out in the vacuum sealing chamber 11 after broken sky, make examined product 20 can enter rapidly next production line, and need not wait for hunted leak after carry out the operation of next production line again, improve the production efficiency of examined product 20, leak detection system and production system can be separated, do not cause mutual interference, the leak rate that can realize any working pressure detects, be applicable to production line automation leak detection at a high speed.
S006, utilizing helium mass spectrometer leak detector to carry out helium mass spectrum leak detection to vacuumizing gas described in collecting, obtaining the helium leakage amount of described examined product.
The examination criteria damming sampling method Helium Leak Test of the present utility model meets the helium mass spectrum leak detection method of international GB/T15823-2009 " helium leak inspection " Vacuum Pressure force method, be mainly used in production line automation leak detection at a high speed, such as: large oil drum production line automation leak detection, hub production line automatic high-speed helium leak detection device and other production line automation high speed helium leak detection devices etc. at a high speed, detection sensitivity is high, the leak rate that can realize any working pressure detects, the actual leakage amount of reflection examined product.
Simultaneously, also utilize the vacuum tightness in the first vacuum meter 161 monitoring section of damming 15 in the section of damming 15 be arranged between the first intercepting valve 131 and the second intercepting valve 132, necessary <0.2 ~ the 1mbar of vacuum tightness in the section of damming 15 at the end of guaranteeing to hunt leak, to guarantee accuracy of detection and service equipment.
Below by reference to the accompanying drawings and embodiment the utility model has been described in detail, those skilled in the art can make many variations example to the utility model according to the above description.Thus, some details in embodiment should not formed restriction of the present utility model, the utility model by the scope that defines using appended claims as protection domain of the present utility model.
Claims (5)
1. the sampling method helium mass spectrum leak detection device that dams, it is characterized in that: comprise for the vacuum sealing chamber of accommodating examined product, for vacuumizing the vaccum-pumping equipment of described vacuum sealing chamber, the vacuum lead connecting described vacuum sealing chamber and described vaccum-pumping equipment and helium mass spectrometer leak detector, described vacuum lead is provided with the first intercepting valve and the second intercepting valve, vacuum pipe between described first intercepting valve and described second intercepting valve forms the section of damming, the section of damming described in described helium mass spectrometer leak detector connects.
2. dam sampling method helium mass spectrum leak detection device as claimed in claim 1, it is characterized in that: described in the section of damming be provided with one first vacuum meter.
3. dam sampling method helium mass spectrum leak detection device as claimed in claim 2, it is characterized in that: the position of described vacuum lead near described vacuum sealing chamber side be located at by described first intercepting valve, the position of described vacuum lead near described vaccum-pumping equipment side be located at by described second intercepting valve, and the described vacuum lead between described vacuum sealing chamber and described first intercepting valve is provided with one second vacuum meter.
4. dam sampling method helium mass spectrum leak detection device as claimed in claim 3, it is characterized in that: described vaccum-pumping equipment comprises main vacuum pump and connects the auxiliary forepump of described main vacuum pump.
5. the sampling method helium mass spectrum leak detection device that dams according to any one of claims 1 to 3, is characterized in that: described vacuum sealing chamber is provided with for the broken vacant duct to described vacuum sealing chamber depressurization, and described broken vacant duct is provided with air valve.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520073296.XU CN204405270U (en) | 2015-02-02 | 2015-02-02 | One is dammed sampling method helium mass spectrum leak detection device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201520073296.XU CN204405270U (en) | 2015-02-02 | 2015-02-02 | One is dammed sampling method helium mass spectrum leak detection device |
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| CN204405270U true CN204405270U (en) | 2015-06-17 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104568337A (en) * | 2015-02-02 | 2015-04-29 | 上海贤日自动化设备有限公司 | Method and device for interception sampling type helium mass spectrometer leak detection |
| CN109323812A (en) * | 2017-07-31 | 2019-02-12 | 深圳市远望工业自动化设备有限公司 | Mass spectrum leak detection equipment and mass spectrum leak detection method with classification extraction sector |
| CN109632214A (en) * | 2018-11-30 | 2019-04-16 | 中国辐射防护研究院 | A kind of radioactive substance shipping container package containment properties detection system and method |
| CN112697354A (en) * | 2020-12-03 | 2021-04-23 | 四川航天长征装备制造有限公司 | Valve helium leak detection tool and leak detection method |
-
2015
- 2015-02-02 CN CN201520073296.XU patent/CN204405270U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104568337A (en) * | 2015-02-02 | 2015-04-29 | 上海贤日自动化设备有限公司 | Method and device for interception sampling type helium mass spectrometer leak detection |
| CN109323812A (en) * | 2017-07-31 | 2019-02-12 | 深圳市远望工业自动化设备有限公司 | Mass spectrum leak detection equipment and mass spectrum leak detection method with classification extraction sector |
| CN109632214A (en) * | 2018-11-30 | 2019-04-16 | 中国辐射防护研究院 | A kind of radioactive substance shipping container package containment properties detection system and method |
| CN112697354A (en) * | 2020-12-03 | 2021-04-23 | 四川航天长征装备制造有限公司 | Valve helium leak detection tool and leak detection method |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20150617 Termination date: 20210202 |