CN204788857U - High -purity metal organic compound steel bottle stoving leak hunting device - Google Patents
High -purity metal organic compound steel bottle stoving leak hunting device Download PDFInfo
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- CN204788857U CN204788857U CN201520517571.2U CN201520517571U CN204788857U CN 204788857 U CN204788857 U CN 204788857U CN 201520517571 U CN201520517571 U CN 201520517571U CN 204788857 U CN204788857 U CN 204788857U
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- drying tube
- leak
- leak hunting
- organic compound
- metal organic
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Abstract
The utility model discloses a high -purity metal organic compound steel bottle stoving leak hunting device, including oven and leak hunting drying tube, be provided with the helium entry on the oven, inside the leak hunting drying tube ran through the oven, leak hunting drying tube one end was provided with the leakage detector, and the leak hunting drying tube other end is provided with the vacuum pump, was provided with the nitrogen gas inlet tube on being close to the leak hunting drying tube of leakage detector one end, be close to to have set gradually dry post, water oxygen detector and interior hourglass on the leak hunting drying tube of vacuum pump one end and detect mouthful, interior hourglass detects the mouth and is located inside the oven. The utility model discloses rational in infrastructure, can dry and hunt leak high -purity metal organic compound steel bottle in the device one, have avoided having guaranteed MO because of process join introduces new pollution sources " the quality of source steel bottle.
Description
Technical field
The utility model relates to a kind of high-purity metal organic compound steel cylinder dries leakage detection apparatus, belongs to field of chemical equipment.
Background technology
High-purity metal organic compound (referred to as " MO " source) is one of core starting materials manufacturing LED, solar cell of new generation, phase transition storage, semiconductor laser, rfic chip etc.
The characteristic of the restriction-chance water oxygen generation vigorous reaction of the chemical property of " MO " source series matter own, thus for the leakproofness of packing container (steel cylinder) and the requirement of water oxygen content very high.Once be mixed with the water oxygen higher than 1PPm in steel cylinder, then can have a strong impact on the quality of " MO " source series matter, if the bottle of steel cylinder or valve exist higher than 4*10
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3the leak rate of/s, also can have a strong impact on the kind of " MO " source series matter, if seriously more can bring very large dangerous situation.
The leak detection mode normally helium mass spectrum leak detection mainly taked at present, but require higher, so equipment all can carry out thick cleaning, drying before carrying out helium mass spectrum leak detection for the liquid water content in equipment.Equally because helium mass spectrum leak detection also can bring impurity in leak detection process, make " MO " source steel cylinder can contaminated, so current steel cylinder first through slightly washing, drying, then can be hunted leak before use, to be confirmed no problem after carry out cleaning, drying again.Existing technique all exists very very much not local easily on time, cycle, and due to each step be all self-contained process, very likely new pollution source can be imported in convergence process, thus have influence on the quality of " MO " source steel cylinder, and then affect the quality in high-purity " MO " source and the use on MOCVD thereof.
Utility model content
For the problems of the prior art, the purpose of this utility model to provide a kind of high-purity metal organic compound steel cylinder to dry leakage detection apparatus.
In order to achieve the above object, the technical solution of the utility model is: a kind of high-purity metal organic compound steel cylinder dries leakage detection apparatus, comprise baking oven and leak detection drying tube, described baking oven is provided with helium entrance, described leak detection drying tube runs through oven interior, leak detection drying tube one end is provided with leak locator, the leak detection drying tube other end is provided with vacuum pump, nitrogen inlet tube is provided with on the leak detection drying tube of leak locator one end, dry post is disposed with on the leak detection drying tube of vacuum pump one end, water oxygen detection and inner hexagon mouth, described inner hexagon mouth is positioned at oven interior.
Further, described leak detection drying tube is provided with some leak detector valves, each leak detector valve is between two valves of each steel cylinder upper end.
The utility model is rational in infrastructure, can dry high-purity metal organic compound steel cylinder and hunt leak, avoid and introduce new pollution source because of procedure connection, ensure that MO in a device " quality of source steel cylinder.
Accompanying drawing explanation
Fig. 1 is the utility model schematic diagram.
Embodiment
Below in conjunction with drawings and Examples, the utility model is further described.
As shown in Figure 1, a kind of high-purity metal organic compound steel cylinder dries leakage detection apparatus, comprise baking oven 1 and leak detection drying tube 2, described baking oven 1 is provided with helium entrance 10, it is inner that described leak detection drying tube 2 runs through baking oven 1, leak detection drying tube 2 one end is provided with leak locator 7, leak detection drying tube 2 other end is provided with vacuum pump 5, nitrogen inlet tube 6 is provided with on the leak detection drying tube 2 of leak locator 7 one end, dry post 4 is disposed with on the leak detection drying tube 2 of vacuum pump 5 one end, water oxygen detection 11 and inner hexagon mouth 3, it is inner that described inner hexagon mouth 3 is positioned at baking oven 1, described leak detection drying tube 2 is provided with some leak detector valves 8, each leak detector valve 8 is between two valves of each steel cylinder 9 upper end.
Dry: the steel cylinder transfer after having cleaned is entered this equipment system, is connected with oven dry leak detection tube by two, steel cylinder upper end valve interface.First steel cylinder oven dry is carried out, opening two, steel cylinder upper end valve makes interior of steel bottle space be connected with whole vacuum systems, water oxygen content is detected to determine the oven dry degree of steel cylinder by the water oxygen detection of baking oven tail end-dry post leading portion, when in water oxygen detection display system, water oxygen content is all lower than 1PPM, steel cylinder is then described, and drying is up to standard, can carry out leak detection program.
Leak detection: close nitrogen inlet and vacuum system after normal temperature replied by baking oven and pipeline.First steel cylinder bottle and valve outside are hunted leak, open all pipelines that steel cylinder connects, be communicated with leak locator, open helium entrance, in baking oven, purge helium, if find that leak rate is lower than 4*10
-9pam
3/ s, then close the valve of steel cylinder connecting tube, one by one to investigate problem steel cylinder.If no problem, change pipeline, carry out inner hexagon.Connect the pipeline of inner hexagon mouth and helium air inlet, open all leak detector valves, close two valves of all steel cylinder upper ends, then open two valves of each steel cylinder upper end in order one by one, if record leak rate lower than 4*10
-9pam
3/ s, then illustrate that another valve on the same steel cylinder of the valve opened at that time has problem, need to recheck separately, if leak rate is still lower than standard value, then this valves leakage is described.
All simple distortion of making when not departing from the utility model core or amendment all fall into protection domain of the present utility model.
Claims (2)
1. a high-purity metal organic compound steel cylinder dries leakage detection apparatus, it is characterized in that, comprise baking oven and leak detection drying tube, described baking oven is provided with helium entrance, described leak detection drying tube runs through oven interior, leak detection drying tube one end is provided with leak locator, the leak detection drying tube other end is provided with vacuum pump, nitrogen inlet tube is provided with on the leak detection drying tube of leak locator one end, on the leak detection drying tube of vacuum pump one end, be disposed with dry post, water oxygen detection and inner hexagon mouth, described inner hexagon mouth is positioned at oven interior.
2. a kind of high-purity metal organic compound steel cylinder according to claim 1 dries leakage detection apparatus, and it is characterized in that, described leak detection drying tube is provided with some leak detector valves, each leak detector valve is between two valves of each steel cylinder upper end.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520517571.2U CN204788857U (en) | 2015-07-16 | 2015-07-16 | High -purity metal organic compound steel bottle stoving leak hunting device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201520517571.2U CN204788857U (en) | 2015-07-16 | 2015-07-16 | High -purity metal organic compound steel bottle stoving leak hunting device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN204788857U true CN204788857U (en) | 2015-11-18 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201520517571.2U Active CN204788857U (en) | 2015-07-16 | 2015-07-16 | High -purity metal organic compound steel bottle stoving leak hunting device |
Country Status (1)
| Country | Link |
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| CN (1) | CN204788857U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112051008A (en) * | 2020-09-14 | 2020-12-08 | 珠海许继电气有限公司 | Single-interval cabinet body parallel vacuum leak detection device and method thereof |
| US20220316976A1 (en) * | 2021-03-31 | 2022-10-06 | Abocom Systems, Inc. | Real-time gas leakage monitoring system |
-
2015
- 2015-07-16 CN CN201520517571.2U patent/CN204788857U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112051008A (en) * | 2020-09-14 | 2020-12-08 | 珠海许继电气有限公司 | Single-interval cabinet body parallel vacuum leak detection device and method thereof |
| US20220316976A1 (en) * | 2021-03-31 | 2022-10-06 | Abocom Systems, Inc. | Real-time gas leakage monitoring system |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant |