CN110954281B - Chamber leak hunting system - Google Patents
Chamber leak hunting system Download PDFInfo
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- CN110954281B CN110954281B CN201811132299.0A CN201811132299A CN110954281B CN 110954281 B CN110954281 B CN 110954281B CN 201811132299 A CN201811132299 A CN 201811132299A CN 110954281 B CN110954281 B CN 110954281B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/226—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for containers, e.g. radiators
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- Examining Or Testing Airtightness (AREA)
Abstract
The present disclosure provides a chamber leak detection system, comprising: the device comprises a structural member connected with a chamber to be detected, a detection device and a vacuumizing device; the chamber to be detected and the structural member enclose a closed space; the vacuumizing equipment is used for vacuumizing the closed space; the leakage detection device is used for judging the position of an actual leakage point by injecting detection gas into at least one suspected leakage point of the closed space after the closed space reaches a first preset pressure value and detecting whether the closed space overflows the detection gas. The chamber leak detection system disclosed by the disclosure is provided with the structural part matched with the chamber to be detected of the coating equipment, so that the chambers with various sizes can be matched, and the system is economical and convenient to use; moreover, leak hunting equipment combines together with evacuating equipment, can realize carrying out the leak hunting to different volume cavities, is particularly useful for the leak hunting of bulky cavity, and leak hunting time is short, can accurately judge actual leakage point's quantity and specific position again, and leak hunting precision is high.
Description
Technical Field
The disclosure relates to the technical field of detection, in particular to a chamber leak detection system.
Background
The chamber is a core component of the coating equipment, so the leakage detection of the chamber is particularly important. The purpose of leak detection is to determine whether the chamber is leaking, i.e. whether the leak rate meets specifications (i.e. leak rate less than 10 -9 torr@1atm)。
Currently, conventional leak detection methods include a blowing method, a suction method, a bell jar method, and a back pressure method.
The blowing method is to connect the detected part to the leak detecting port of the leak detector, vacuum the detected part with the vacuum system of the leak detector to connect the detected part with the mass spectrum tube, and then to blow helium to the suspicious leak hole with the spray gun. Helium gas is detected through the leak into the mass spectrometer tube when the leak is present. The sensitivity of the injection method for detecting leakage is high, and a mass spectrum tube is not easy to pollute, but can not detect leakage of a large-volume detected piece.
The suction method is also called as suction gun leak detection method, in which a special suction gun is connected to a leak detector of an instrument, and a detected piece is filled with helium gas (pure helium gas or mixed gas containing helium in a certain proportion) with a specified pressure. When leak detection is carried out, the suction gun is allowed to slowly move along the suspicious leak hole, if a leak hole is formed in a detected piece, helium gas can leak out of the leak hole, and the helium gas is sucked by the suction gun and sent to a mass spectrum tube of an instrument to be detected.
The bell jar method is to connect the detected part with the leakage detecting port of the instrument and then to vacuumize the inside, and to cover the outer surface of the detected part with helium filled container, if the detected part has leakage holes, helium enters the detected part through the leakage holes and finally reaches the detection in the mass spectrum tube. The leak rate measured by the bell method is the total leak rate of the detected piece, and several leak points and the accurate position of each leak point cannot be determined.
The back pressure method is to press helium into the detected part with special pressurized container, then take out the detected part, blow off the surface adsorbed helium, put into special leakage detecting tank, connect the leakage detecting tank to the leakage detecting port of the leakage detector, vacuum the leakage detecting tank, and implement leakage detection. If the device has leakage, helium pressed in through the leakage hole is released again to enter the leakage detection tank, and finally reaches the mass spectrum tube.
When the suction method, the bell jar method and the back pressure method leak the large-volume detected piece, the volume of the corresponding leak detection device is larger in order to match with the volume of the detected piece, and the leak detection device is required to be more highly, so that the leak detection device is not economical and inconvenient to use; moreover, leak detection accuracy is low.
Disclosure of Invention
The present disclosure has been made in order to at least partially solve the technical problems occurring in the prior art.
The technical scheme adopted for solving the technical problems of the present disclosure is as follows:
the present disclosure provides a chamber leak detection system, comprising: the device comprises a structural member connected with a chamber to be detected, a detection device and a vacuumizing device; the cavity to be detected and the structural member enclose a closed space; the vacuumizing equipment is used for vacuumizing the closed space; the leakage detection equipment is used for judging the position of an actual leakage point by injecting detection gas into at least one suspected leakage point of the closed space after the closed space reaches a first preset pressure value and detecting whether the closed space overflows the detection gas.
In the method, the structural member matched with the cavity to be detected of the coating equipment is arranged, so that the cavities with various sizes can be matched, the volume of the leak detection system is not excessively increased even if the method is applied to the cavity with large volume, and the method is economical and convenient to use; moreover, leak hunting equipment combines together with evacuating equipment, can realize carrying out the leak hunting to different volume cavities, is particularly useful for the leak hunting of bulky cavity, and leak hunting time is short, can accurately judge actual leakage point's quantity and specific position again, and leak hunting precision is high.
Optionally, the structural member comprises: a hollow connecting frame with one end connected with the cavity to be detected and a blind plate connected with the other end of the connecting frame; the cavity to be detected, the connecting frame and the blind plate enclose a closed space.
Optionally, an inner ring and an outer ring of annular grooves are arranged at the position where the to-be-detected leakage chamber contacts with one end of the connecting frame, an inner sealing ring is arranged in the inner ring of annular grooves, and an outer sealing ring is arranged in the outer ring of annular grooves.
Optionally, the inner ring annular groove is communicated with the outer ring annular groove; the leakage detection equipment comprises a leakage detector, a gas cylinder and a gas pipe embedded in the connecting frame, wherein a through hole is formed in the position, where the blind plate is in contact with the connecting frame, of the gas pipe, one end of the gas pipe is communicated with the area between the inner ring annular groove and the outer ring annular groove, and the other end of the gas pipe is communicated with the through hole in the blind plate; the gas cylinder is filled with detection gas, is communicated with the gas pipe through a through hole on the blind plate and is used for injecting the detection gas into the area between the inner ring annular groove and the outer ring annular groove; the leak detector is communicated with the closed space and is used for judging whether an actual leakage point exists at the inner sealing ring by detecting whether the closed space overflows with detection gas or not.
Optionally, the vacuumizing device is further used for vacuumizing detection gas in the area between the inner ring annular groove and the outer ring annular groove, and enabling the closed space to recover a first preset pressure value; the leakage detection equipment further comprises a spray gun, wherein a passage between the gas cylinder and the gas pipe is disconnected and communicated with the spray gun, and the spray gun is used for moving outside the cavity to be detected along the area between the cavity to be detected and the connecting frame and spraying detection gas; the passage between the leak detector and the closed space is disconnected and communicated with the air pipe, and the leak detector is used for judging whether an actual leakage point exists at the outer sealing ring by detecting whether the air pipe overflows detection gas or not.
Optionally, the vacuumizing device is further used for vacuumizing detection gas in the area between the inner ring annular groove and the outer ring annular groove, and enabling the closed space to recover a first preset pressure value; the leak detection device further comprises a suction gun, wherein a passage between the leak detector and the closed space is disconnected and communicated with the suction gun, and the suction gun is used for moving outside the cavity to be detected along the area between the cavity to be detected and the connecting frame and absorbing detection gas; the leak detector is used for judging whether an actual leakage point exists at the outer sealing ring by detecting whether the area between the cavity to be detected and the connecting frame overflows with detection gas.
Optionally, the vacuum-pumping device comprises a dry pump and a molecular pump which are respectively connected into the closed space through pipelines; the dry pump is used for carrying out preliminary vacuumizing treatment on the closed space until the closed space reaches a second preset pressure value; and the molecular pump is used for carrying out further vacuumizing treatment on the closed space together with the dry pump after the closed space reaches a preset pressure value until the closed space reaches a first preset pressure value.
Optionally, the second preset pressure value ranges from 10Pa to 50Pa.
Optionally, the first preset pressure value ranges from 10 -5 Pa～10 -4 Pa。
Optionally, the detection gas is helium.
Drawings
Fig. 1 is a schematic structural diagram of a chamber leak detection system provided in embodiment 1 of the disclosure;
FIG. 2a is a schematic diagram of the operation of only the dry pump during primary vacuum pumping of the chamber leak detection system of FIG. 1;
FIG. 2b is a schematic diagram of the molecular pump and dry pump together operating during a primary vacuum pump of the chamber leak detection system of FIG. 1;
FIG. 3 is a schematic diagram of the leak detection principle of the inner seal ring in the chamber leak detection system of FIG. 1;
FIG. 4 is a schematic diagram of the chamber leak detection system of FIG. 1 again with a vacuum applied;
FIG. 5 is a schematic diagram of the leak detection principle of the outside seal ring in the chamber leak detection system of FIG. 1;
fig. 6 is a schematic structural diagram of a chamber leak detection system provided in embodiment 2 of the disclosure;
FIG. 7a is a schematic diagram of the operation of only the dry pump during primary vacuum pumping of the chamber leak detection system of FIG. 6;
FIG. 7b is a schematic diagram of the molecular pump and dry pump together operating during a primary vacuum of the chamber leak detection system of FIG. 6;
FIG. 8 is a schematic diagram of the leak detection principle of the inner seal ring in the chamber leak detection system of FIG. 6;
FIG. 9 is a schematic diagram of the chamber leak detection system of FIG. 6 again with a vacuum applied;
fig. 10 is a schematic diagram of the leak detection principle of the outside seal ring in the chamber leak detection system of fig. 6.
In the figure: 1-a chamber to be detected; 2-connecting frames; 3-blind plates; 4-molecular pump; 5-a dry pump; 6-leak detector; 7-a gas cylinder; 8-trachea; 9-a spray gun; 10. 11, 12, 13, 16, 18-valves; 14-an inner seal ring; 15-an outer sealing ring; 17-suction gun.
Detailed Description
In order that those skilled in the art will better understand the technical solutions of the present disclosure, the present disclosure will be described in further detail with reference to the accompanying drawings and examples.
Example 1:
as shown in fig. 1, the present embodiment provides a chamber leak detection system, which includes: the device comprises a structural part connected with the chamber 1 to be detected, a detection device and a vacuum pumping device; wherein, the chamber 1 to be detected is matched with the structural member, and the chamber 1 to be detected and the structural member enclose a closed space.
The vacuumizing equipment is used for vacuumizing the closed space.
The leakage detection device is used for judging the position of an actual leakage point by injecting detection gas into at least one suspected leakage point of the closed space after the closed space reaches a first preset pressure value and detecting whether the closed space overflows the detection gas. Wherein the range of the first preset pressure value is 10 -5 Pa～10 -4 Pa, i.e. the first preset pressure value may be at 10 -5 Pa～10 -4 And Pa is arbitrarily taken in the range.
Specifically, after the detection gas is injected into a suspected leakage point at a certain position, if the detection gas overflows, the suspected leakage point at the certain position is indicated as an actual leakage point, so that the specific position of the actual leakage point is judged; if the detected gas overflows, the suspected leakage point is not leaked, and the next suspected leakage point needs to be searched continuously.
In the embodiment, as the structural member matched with the to-be-detected leakage chamber of the coating equipment is arranged, the to-be-detected leakage chamber can be matched with chambers with various sizes, and the volume of a leakage detection system is not excessively increased even if the to-be-detected leakage chamber is applied to a chamber with a large volume, so that the to-be-detected leakage chamber is economical and convenient to use; moreover, leak hunting equipment combines together with evacuating equipment, can realize carrying out the leak hunting to different volume cavities, is particularly useful for the leak hunting of bulky cavity, and leak hunting time is short, can accurately judge actual leakage point's quantity and specific position again, and leak hunting precision is high.
As shown in fig. 1, the structural member specifically includes: a hollow connecting frame 2 with one end connected with the cavity 1 to be detected and a blind plate 3 connected with the other end of the connecting frame 2. The chamber 1 to be detected, the connecting frame 2 and the blind plate 3 enclose a closed space.
In the embodiment, the structural member is composed of the connecting frame and the blind plate, and has the advantages of simple structure, reliable connection and easy processing and assembly.
In order to ensure that a certain vacuum degree can be maintained in the cavity during leak detection, a sealing element is required to be arranged for the cavity, and the sealing effect of the sealing element directly influences the leak detection precision. For this reason, in this embodiment, the position where the leak detection chamber 1 contacts with one end of the connecting frame 2 is provided with an inner ring-shaped groove and an outer ring-shaped groove, the inner ring-shaped groove is provided with an inner sealing ring 14, and the outer ring-shaped groove is provided with an outer sealing ring 15.
In this embodiment, because the position department that waits for leak hunting cavity and link contacts has set up inside and outside round annular groove to set up inside sealing washer in the inside round annular groove, set up outside sealing washer in the outer lane annular groove, thereby fully guaranteed the sealed effect between cavity and the link, and then can maintain certain vacuum in the cavity when guaranteeing the leak hunting.
Next, the leak detection schemes of the inner seal ring and the outer seal ring are described respectively in combination with the structures and actions of the structural member, the leak detection device and the vacuumizing device.
As shown in fig. 1, the inner ring annular groove communicates with the outer ring annular groove, in other words, a passage exists between the inner and outer ring annular grooves.
The leak detection apparatus comprises a leak detector 6, a gas cylinder 7, a lance 9, and a gas pipe 8 embedded in the connection frame 2, and of course, a pipeline for communicating these components and a valve provided on the pipeline. Wherein, a through hole is arranged at the position where the blind plate 3 contacts with the connecting frame 2, one end of the air pipe 8 is communicated with the area between the inner ring annular groove and the outer ring annular groove, and the other end is communicated with the through hole on the blind plate 3; the spray gun 9 is provided with a switch.
In this embodiment, the connection frame 2 adopts a ring-shaped tubular structure, and the cross section of the ring-shaped tube is rectangular (including rectangle and square), that is, the ring-shaped tube is made of rectangular tube. Moreover, in order to ensure the tightness between the connecting frame 2 and the to-be-detected cavity 1 and the blind plate 3 respectively, sealing gaskets can be arranged on two sides of the annular pipe, namely, sealing gaskets are arranged at the positions where the connecting frame 2 contacts with the to-be-detected cavity 1, and sealing gaskets are also arranged at the positions where the connecting frame 2 contacts with the blind plate 3. As for the air pipe 8 embedded in the connection frame 2, it is provided in a rectangular pipe, and both ends respectively pass through opposite walls of the rectangular pipe and the gasket.
Specifically, leak detector 6 is in communication with said enclosed space and gas pipe 8, respectively, by means of lines, and for the lines between leak detector 6 and gas pipe 8 and between leak detector 6 and said enclosed space, the portions of both close to leak detector 6 share a length of line, which is referred to as the first common line, while the portion of the line between leak detector 6 and gas pipe 8 excluding the first common line is provided with a valve 10, and the portion of the line between leak detector 6 and said enclosed space excluding the first common line is provided with a valve 12. The gas cylinder 7 is respectively communicated with the gas pipe 8 and the spray gun 9 through pipelines communicated with the through holes on the blind plate 3, and a section of pipeline is shared by the pipeline between the gas cylinder 7 and the gas pipe 8 and the pipeline between the gas cylinder 7 and the spray gun 9, the section of pipeline close to the gas cylinder 7 is called a second shared pipeline, and a valve 11 is arranged in the part of the pipeline between the gas cylinder 7 and the gas pipe 8 except the second shared pipeline; for the line between the leak detector 6 and the gas pipe 8 and the line between the gas cylinder 7 and the gas pipe 8, the portions of both near the gas pipe 8 share a line, which is referred to as a third shared line, and the valve 10 is provided in the line between the leak detector 6 and the gas pipe 8 except for portions of the first shared line and the third shared line, and the valve 11 is provided in the line between the gas cylinder 7 and the gas pipe 8 except for portions of the second shared line and the third shared line.
The gas bottle 7 contains a detection gas, which is inert gas, such as helium, nitrogen, etc. Since helium is a monoatomic gas, is chemically inert, and is not normally combined with other elements or compounds, helium is preferably used in this embodiment, and leak detector 6 is a helium leak detector and gas cylinder 7 is a helium gas cylinder.
The vacuum pumping equipment comprises a dry pump 5 and a molecular pump 4 which are respectively connected into the closed space through pipelines, wherein a valve 16 is arranged on the pipeline between the dry pump 5 and the closed space, a valve 13 is arranged on the pipeline between the molecular pump 4 and the closed space, and the molecular pump 4 and the dry pump 5 are communicated through the pipelines. The dry pump 5 is used for carrying out preliminary vacuumizing treatment on the closed space until the closed space reaches a second preset pressure value; the molecular pump 4 is used for carrying out further vacuumizing treatment on the closed space together with the dry pump after the closed space reaches a second preset pressure value until the closed space reaches a first preset pressure value.
The molecular pump is a vacuum pump which works in a molecular flow state and uses mechanical kinetic energy to directionally compress and flow gas molecules. The rotation speed of the turbine in the pump is high when the molecular pump runs, the rotation speed of the rotor in the pump is 10000-60000 rpm when the rotor in the pump works, the maximum speed can reach 90000rpm, and the linear speed of the top ends of the blades of the pump is generally above 200 m/s; the vacuum pressure of the molecular pump can reach 10 -3 ～10 -9 Pa, in a vacuum system, the molecular pump must typically be combined with an auxiliary pump to operate. In this embodiment, the auxiliary pump is a dry pump. The dry pump is a mechanical vacuum pump which can start pumping air from the atmospheric pressure and can directly discharge the pumped air into the atmosphere, oil or other working media are not contained in the pump cavity, and the limit pressure of the pump is the same magnitude as or close to that of the oil-sealed vacuum pump.
The range of the first preset pressure value is 10 -5 Pa～10 -4 Pa, i.e. the first preset pressure value may be at 10 -5 Pa～10 -4 Arbitrarily taking a value in the Pa range; the range of the second preset pressure value is 10 Pa-50 Pa, namely the second preset pressure value can take any value within the range of 10 Pa-50 Pa.
It should be noted that, the valves 10, 11, 12, 13 and 16 may be controlled automatically by the controller or manually by an operator, which is not limited in this disclosure.
As shown in fig. 2a and 2b, the enclosed space is subjected to a primary vacuum treatment prior to leak detection.
Specifically, as shown in fig. 2a, the valve 16 is opened, and the dry pump 5 is started first until the internal pressure of the closed space reaches a second preset pressure value; as shown in fig. 2b, valve 13 is opened, molecular pump 4 is again opened, and valve 16 is closed until the pressure inside the enclosed space stabilizes and reaches a first preset pressure value.
As shown in fig. 3, after the enclosure is initially evacuated, the inner seal ring 14 may be leak-tested.
Specifically, the valve 11 is opened to communicate the gas cylinder 7 with the gas pipe 8, and the gas cylinder 7 starts to inject the detection gas into the region between the inner ring annular groove and the outer ring annular groove. Valve 12 is then opened and valve 10 is closed to place leak detector 6 in communication with the enclosed space. The leak detector 6 judges whether an actual leakage point exists at the inner seal ring 14 by detecting whether the closed space overflows the detection gas, specifically, if the detector 6 detects that the closed space overflows the detection gas, the leak point exists at the inner seal ring 14; if the detector 6 does not detect the overflow of the detection gas from the closed space, it indicates that no leak point exists in the inner seal ring 14.
As shown in fig. 4, after the leak detection of the inner seal ring 14 is completed, the enclosed space needs to be evacuated again.
Specifically, the valve 13, the valve 12 and the valve 10 are opened, the valve 11 and the valve 16 are closed, so that the evacuation device evacuates the detection gas in the region between the inner ring annular groove and the outer ring annular groove, and the closed space is restored to the first preset pressure value.
As shown in fig. 5, after the closed space is vacuumized again, the leakage detection of the outer seal ring 15 can be performed.
Specifically, the valve 11 is closed to disconnect the passage between the gas cylinder 7 and the gas pipe 8 and communicate with the lance 9 with a switch, so that the lance 9 moves outside the chamber 1 to be leak-detected along the area between the chamber 1 to be leak-detected and the connection frame 2 and blows the detection gas. Valve 12 is then closed and valve 10 is opened to disconnect the passage between leak detector 6 and the enclosed space and communicate with gas line 8. The detector 6 judges whether an actual leakage point exists at the outer sealing ring 15 by detecting whether the air pipe 8 overflows the detection air, specifically, if the detector 6 detects that the air pipe 8 overflows the detection air, the existence of the leakage point of the outer sealing ring 15 is indicated, and the number and the specific positions of the leakage point can be accurately judged; if the detector 6 does not detect that the air pipe 8 overflows the detection air, the outside sealing ring 15 has no leakage point.
In summary, in this embodiment, the structural member, the leak detection device and the vacuumizing device are combined, so that the purpose of performing rapid and accurate leak detection on the chamber in the film plating device can be satisfied, and the leak detection device is particularly suitable for leak detection of a large-volume chamber, and compared with other leak detection schemes with the same volume, the leak detection time is shorter, and the inventor has found through experiments that the leak detection time only needs 15 minutes for a chamber with a volume of 200 liters; the leak detection system has high leak detection precision, can accurately distinguish leak points, and can accurately detect leak on the inner sealing ring and the outer sealing ring; moreover, the leak detection system is simple and reliable in structure and reasonable in tooling.
Example 2:
as shown in fig. 6, the present embodiment provides a chamber leak detection system, which is different from the chamber leak detection system described in embodiment 1 only in that: the leak detection apparatus does not include a lance 9, but includes a suction lance 17.
Next, the leak detection schemes of the inner seal ring and the outer seal ring are described respectively in combination with the structures and actions of the structural member, the leak detection device and the vacuumizing device.
As shown in fig. 6, the leak detection apparatus includes: leak detector 6, gas cylinder 7, suction gun 17, and gas tube 8 embedded in connection frame 2, of course, also include lines for communication of these components and valves provided on the lines. Wherein, the blind plate 3 is provided with the through hole in the position that contacts with link 2, and the one end of trachea 8 communicates with each other with the region between inner circle annular groove and the outer lane annular groove, and the other end communicates with each other with the through hole on the blind plate 3.
Specifically, leak detector 6 is respectively communicated with the closed space, gas pipe 8 and suction gun 17 through pipelines, and for the pipeline between leak detector 6 and gas pipe 8, the pipeline between leak detector 6 and the closed space, and the pipeline between leak detector 6 and suction gun 17, the part of the three near leak detector 6 shares a section of pipeline, which is called a fourth shared pipeline, and the part of the pipeline between leak detector 6 and gas pipe 8 excluding the fourth shared pipeline is provided with valve 10, the part of the pipeline between leak detector 6 and the closed space excluding the fourth shared pipeline is provided with valve 12, and the part of the pipeline between leak detector 6 and suction gun 17 excluding the fourth shared pipeline is provided with valve 18. The gas cylinder 7 is communicated with the gas pipe 8 through a pipeline, a valve 11 is arranged on the pipeline between the gas cylinder 7 and the gas pipe 8, and for the pipeline between the gas cylinder 7 and the gas pipe 8 and the pipeline between the leak detector 6 and the gas pipe 8, the part of the pipeline close to the gas pipe 8 is shared by a section of pipeline, the section of pipeline is called a fifth shared pipeline, a valve 10 is arranged in the pipeline between the leak detector 6 and the gas pipe 8, the fourth shared pipeline and the fifth shared pipeline are removed, and the valve 11 is arranged in the pipeline between the gas cylinder 7 and the gas pipe 8, and the fifth shared pipeline is removed.
Other parts of the chamber leak detection system, such as the structural member and the vacuum pumping device, are the same as those in embodiment 1, and will not be described in detail in this embodiment.
It should be noted that, the valves 10, 11, 12, 13 and 18 may be controlled automatically by the controller or manually by an operator, which is not limited in this disclosure.
As shown in fig. 7a and 7b, the enclosed space is subjected to a primary vacuum treatment prior to leak detection.
Specifically, as shown in fig. 7a, the valve 16 is opened, and the dry pump 5 is started first until the internal pressure of the closed space reaches a second preset pressure value; as shown in fig. 7b, valve 13 is opened, molecular pump 4 is again opened, and valve 16 is closed until the pressure inside the enclosed space stabilizes and reaches a first preset pressure value.
As shown in fig. 8, after the enclosure is first evacuated, the inner seal ring 14 may be leak-tested.
Specifically, the valve 11 is opened to communicate the gas cylinder 7 with the gas pipe 8, and the gas cylinder 7 starts to inject the detection gas into the region between the inner ring annular groove and the outer ring annular groove. Valve 12 is then opened and valve 10 and valve 18 are closed to place leak detector 6 in communication with the enclosed space. The leak detector 6 judges whether an actual leakage point exists at the inner seal ring 14 by detecting whether the closed space overflows the detection gas, specifically, if the detector 6 detects that the closed space overflows the detection gas, the leak point exists at the inner seal ring 14; if the detector 6 does not detect the overflow of the detection gas from the closed space, it indicates that no leak point exists in the inner seal ring 14.
As shown in fig. 9, after the leak detection of the inner seal ring 14 is completed, the enclosed space needs to be evacuated again.
Specifically, the valves 13, 12 and 10 are opened, and the valves 11, 16 and 18 are closed, so that the evacuation device evacuates the detection gas in the region between the inner ring annular groove and the outer ring annular groove, and the closed space is restored to the first preset pressure value.
As shown in fig. 10, after the closed space is again vacuumized, the leakage detection of the outer seal ring 15 can be performed.
Specifically, the valve 11 is opened, the valve 10 and the valve 12 are closed so that the gas cylinder 7 communicates with the gas pipe 8, and the gas cylinder 7 starts to inject the detection gas into the region between the inner ring annular groove and the outer ring annular groove. Valve 18 is then opened to open the path between leak detector 6 and the enclosed space and to communicate with suction gun 17, causing suction gun 17 to move outside of chamber 1 to be leak-detected along the area between chamber 1 to be leak-detected and connection frame 2 and to absorb the detection gas. The leak detector 6 judges whether an actual leakage point exists at the outer sealing ring 15 by detecting whether the area between the to-be-detected leakage chamber 1 and the connecting frame overflows detection gas, specifically, if the detector 6 detects that the area between the to-be-detected leakage chamber 1 and the connecting frame 2 overflows detection gas, the existence of the leakage point of the outer sealing ring 15 is indicated, and the number and the specific position of the leakage point can be accurately judged; if the detector 6 does not detect that the area between the chamber 1 to be leak-detected and the connecting frame 2 overflows with detection gas, it is indicated that no leak point exists on the outer sealing ring 15.
In summary, in this embodiment, the structural member, the leak detection device and the vacuumizing device are combined, so that the purpose of performing rapid and accurate leak detection on the chamber in the film plating device can be satisfied, and the leak detection device is particularly suitable for leak detection of a large-volume chamber, and compared with other leak detection schemes with the same volume, the leak detection time is shorter, and the inventor has found through experiments that the leak detection time only needs 15 minutes for a chamber with a volume of 200 liters; the leak detection system has high leak detection precision, can accurately distinguish leak points, and can accurately detect leak on the inner sealing ring and the outer sealing ring; moreover, the leak detection system is simple and reliable in structure and reasonable in tooling.
It is to be understood that the above embodiments are merely exemplary embodiments employed to illustrate the principles of the present disclosure, however, the present disclosure is not limited thereto. Various modifications and improvements may be made by those skilled in the art without departing from the spirit and substance of the disclosure, and are also considered to be within the scope of the disclosure.
Claims (5)
1. A chamber leak detection system, comprising:
the device comprises a structural member connected with a chamber to be detected, a detection device and a vacuumizing device; the cavity to be detected and the structural member enclose a closed space; the vacuumizing equipment is used for vacuumizing the closed space; the leakage detection equipment is used for judging the position of an actual leakage point by injecting detection gas into at least one suspected leakage point of the closed space after the closed space reaches a first preset pressure value and detecting whether the closed space overflows the detection gas or not;
the structural member includes: a hollow connecting frame with one end connected with the cavity to be detected and a blind plate connected with the other end of the connecting frame; the cavity to be detected, the connecting frame and the blind plate enclose a closed space;
an inner ring and an outer ring of annular grooves are formed in the position, where the to-be-detected leakage chamber is in contact with one end of the connecting frame, of the to-be-detected leakage chamber, an inner sealing ring is arranged in the inner ring of annular grooves, and an outer sealing ring is arranged in the outer ring of annular grooves;
the inner ring annular groove is communicated with the outer ring annular groove; the leakage detection equipment comprises a leakage detector, a gas cylinder and a gas pipe embedded in the connecting frame, wherein a through hole is formed in the position, where the blind plate is in contact with the connecting frame, of the gas pipe, one end of the gas pipe is communicated with the area between the inner ring annular groove and the outer ring annular groove, and the other end of the gas pipe is communicated with the through hole in the blind plate; the gas cylinder is filled with detection gas, is communicated with the gas pipe through a through hole on the blind plate and is used for injecting the detection gas into the area between the inner ring annular groove and the outer ring annular groove; the leak detector is communicated with the closed space and is used for judging whether an actual leakage point exists at the inner sealing ring by detecting whether the closed space overflows with detection gas or not;
the vacuumizing equipment is also used for pumping detection gas in the area between the inner ring annular groove and the outer ring annular groove and recovering the closed space to a first preset pressure value; the leakage detection equipment further comprises a spray gun, wherein a passage between the gas cylinder and the gas pipe is disconnected and communicated with the spray gun, and the spray gun is used for moving outside the cavity to be detected along the area between the cavity to be detected and the connecting frame and spraying detection gas; the passage between the leak detector and the closed space is disconnected and communicated with the air pipe, and the leak detector is used for judging whether an actual leakage point exists at the outer sealing ring by detecting whether the air pipe overflows with detection gas or not;
the vacuumizing equipment is also used for pumping detection gas in the area between the inner ring annular groove and the outer ring annular groove and recovering the closed space to a first preset pressure value; the leak detection device further comprises a suction gun, wherein a passage between the leak detector and the closed space is disconnected and communicated with the suction gun, and the suction gun is used for moving outside the cavity to be detected along the area between the cavity to be detected and the connecting frame and absorbing detection gas; the leak detector is used for judging whether an actual leakage point exists at the outer sealing ring by detecting whether the area between the cavity to be detected and the connecting frame overflows with detection gas.
2. The chamber leak detection system of claim 1, wherein,
the vacuum pumping equipment comprises a dry pump and a molecular pump which are respectively connected into the closed space through pipelines; the dry pump is used for carrying out preliminary vacuumizing treatment on the closed space until the closed space reaches a second preset pressure value; and the molecular pump is used for carrying out further vacuumizing treatment on the closed space together with the dry pump after the closed space reaches a second preset pressure value until the closed space reaches a first preset pressure value.
3. The chamber leak detection system as defined in claim 2, wherein,
the range of the second preset pressure value is 10 Pa-50 Pa.
4. The chamber leak detection system of claim 1, wherein,
the range of the first preset pressure value is 10 -5 Pa～10 -4 Pa。
5. The chamber leak detection system of claim 1, wherein,
the detection gas is helium.
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