JPH0815082A - Method and device for inspecting parts for leakage - Google Patents

Abstract

PURPOSE:To provide a method and device by which parts fitted to a fuel tank, etc., can be automatically inspected for leakage with high and stable accuracy. CONSTITUTION:An object 10 to be inspected is joined to a gas container 11 having a mounting opening 11a so as to close the opening 11a. Then a gas for detection is injected into a closed chamber formed in the container 11 from a gas device 20 under a prescribed pressure at a prescribed concentration. Then a measuring chamber is formed by joining a measuring container 12 to the container 11 so as to cover the object exposed on the external surface of the the container 11. A concentration measuring instrument 50 is connected to the measuring chamber and the gas in the chamber is sucked out by operating a vacuum pump 53. When a leaking hole exists in the object, the gas for detection leaks out through the hole and the concentration of the gas for detection rises against the gas in the measuring chamber. By measuring the concentration of the gas for detection with the instrument 50, the presence/absence of fluid leakage from the object is discriminated based on the results of the measurement.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a leakage inspection method and device, and more particularly to a leakage inspection method and device suitable for leakage inspection of parts mounted on a container such as a fuel tank of an automobile.

[0002]

2. Description of the Related Art Various methods have been proposed and adopted as a test method for inspecting a leak of a fluid for a container containing a fluid (liquid and gas). For example, “Vacuum technology that is easy to understand” edited by the Japan Vacuum Association Kansai Branch (19
Published the first edition on July 10, 1991. Published by Nikkan Kogyo Shimbun. ), Pp. 147 to 151, various leak test methods are listed, and main test methods are described. As described in the same book, it is classified into various methods based on the characteristics of the operating principle, etc., and the pressure state at the time of the test inside and outside the DUT is pressurized and atmospheric pressure or vacuum. It is based on the combination of atmospheric pressure or pressure.

Further, based on the features of jigs and parts, for example, as a leak test using a helium leak detector, a spraying method, an outer covering method (a hood method, an envelope method), a sniffer method (a suction method) and an internal pressurization-an external vacuum. Laws are listed (page 153 of the same book). In addition to the atmosphere, halogen gas, helium, etc. are listed as probe substances or fluids to be used, and methods using alcohol, hydrogen, etc. are also shown, but these fluids are the operating principle of each test method and the detection means. The fluid to be selected differs depending on the features of the jig and parts. As such, they are classified into various leak test methods based on various factors.

By the way, as a leak inspection method for a fuel tank of an automobile, an underwater foaming method, a so-called submersion method, is generally adopted. However, the leakage inspection method by the water submersion method has a problem that the inspection accuracy is low because the visual inspection is basic, and the water spatters on the floor, resulting in deterioration of the working environment. In view of this point, in Japanese Patent Laid-Open No. 4-89542, a hollow container to be inspected is arranged and sealed in the inspection chamber so that the inside of the inspection chamber has a higher degree of vacuum than the inside of the hollow container. The inspection chamber and the hollow container are simultaneously evacuated to a predetermined vacuum degree, a specific gas is supplied into the hollow container kept at the predetermined vacuum degree, and the inspection chamber is connected to the inspection chamber from the hollow container by a gas measuring means. A method for inspecting the airtightness of a hollow container has been proposed which measures the amount of gas leaking into the chamber.

Helium (He) is used as a gas used for the inspection, and a helium detector is used as a gas measuring means to detect the presence or absence of helium leaking from the hollow container and its leak amount by mass spectrometry. , Examples of which are disclosed. In addition, for example, Japanese Patent Application Laid-Open No. 2-40519 also proposes a gas leak inspection device using helium gas as a device for inspecting a gas leak of a car heater, a condenser and the like.

[0006]

In the internal pressurization-external vacuum method using helium described in the above-mentioned book, the container of the object to be tested is preliminarily filled with helium at atmospheric pressure or higher, and Since the chamber surrounding the test object is evacuated and the gas from the leak hole of the test object is detected by the leak detector, the airtightness of the jig is required. In particular, the helium leak detector requires strict measurement conditions, so if there is a problem with the airtightness, it will be difficult to distinguish it from noise, and the leak judgment will be unstable.

Further, in the inspection method described in the above-mentioned JP-A-4-89542, both the hollow container and the inspection chamber are evacuated, and referring to the classification in the leakage inspection method described in the above-mentioned book, As it is clear from the fact that the pressure inside the inspection chamber is set to be higher than that inside the hollow container and the differential pressure is measured as a concrete means, it is clear that the internal pressure of the helium leak detector is increased. -Included in the external vacuum envelope method,
In addition to this, it is required to evacuate the hollow container at the same time. Therefore, strict airtightness is required even in the inspection method described in the publication, and the structure and arrangement of the vacuuming means are complicated.

By the way, in a fuel tank of an automobile, an opening for attachment is formed for accommodating a fuel pump and the like in addition to a fuel inlet, and an attachment plate is closely fixed to this opening. A bracket for supporting the fuel pump is fixed to the mounting plate by welding or the like, and a fuel tube, a return tube or the like is inserted and supported. These tubes are joined to the mounting plate by brazing, welding, etc., but if the joining is incomplete, fluid may leak from the joint. However, if a leak test is performed with the mounting plate attached to the fuel tank, even if a fluid leak is detected, it may be due to a defect in the fuel tank body or due to a defect in the joint between the mounting plate and the tube. I can't tell what it is.

Therefore, it is confirmed in advance that there are no leak points in these parts including the joint portion between the mounting plate and the tube, and only the parts confirmed to have no fluid leakage are attached to the fuel tank body. It is desirable to conduct a leak inspection. In addition, with the automation of leak inspection of fuel tanks, it is necessary to be able to continuously and automatically perform leak inspection of components mounted on fuel tanks.

Therefore, the present invention provides a leakage inspection method and apparatus for subjecting a component mounted in a fuel tank or the like to a test and capable of automatically performing a leakage inspection with good and stable accuracy. To aim.

[0011]

In order to achieve the above object, a leakage inspection method according to a first aspect of the present invention is to join a component to be tested to a gas container having a mounting opening so as to close the mounting opening. A closed chamber is defined in the gas container, a detection gas is injected into the closed chamber at a predetermined concentration and a predetermined pressure, and a measurement container is provided so as to cover the test target component exposed on the outer surface of the gas container. The measurement chamber is joined to form a measurement chamber, and while the gas in the measurement chamber is sucked, the concentration of the detection gas mixed in the gas with respect to the gas is measured, and the test target component is used according to the measurement result. The purpose is to determine the presence or absence of fluid leakage.

According to a second aspect of the present invention, there is provided a leakage inspection method, in which a component to be tested is joined to a gas container having a mounting opening so as to close the mounting opening, and a sealing chamber is enclosed in the gas container. A step, an injection step of injecting a detection gas into the closed chamber at a predetermined concentration and a predetermined pressure, and a measurement chamber by joining the measurement container so as to cover the test target part exposed on the outer surface of the gas container. A measuring step of measuring the concentration of the detection gas mixed in the gas with respect to the gas while suctioning the gas in the measurement chamber, and discharging the detection gas in the gas container after the measurement step. An exhaust process,
The presence or absence of fluid leakage through the test subject component may be determined according to the measurement result of the measurement process, and the test subject component may be selected according to the determination result and carried out from the gas container.

The leakage inspection device of the present invention is as follows:
As described in claim 3, a gas container that defines a sealed chamber when the test target component is joined to the mounting opening, and a detection gas that is supplied to the sealed chamber at a predetermined concentration and a predetermined pressure. A gas supply device, a measurement container that joins so as to cover the test target component exposed on the outer surface of the gas container to form a measurement chamber, and a vacuum that is connected to the measurement container and draws gas in the measurement chamber. A gas measuring apparatus is provided with a concentration measuring device that has a pump and measures the concentration of the detection gas mixed in the gas with respect to the gas while sucking the gas in the measurement chamber by the vacuum pump. Connected in communication with the container, injecting the detection gas into the gas container,
Desirably, the presence or absence of fluid leakage through the component under test is determined according to the measurement result of the concentration measuring device.

A flammable gas can be used as the detection gas, and for example, alcohol gas or hydrogen is preferably used. That is, since a gas in which alcohol is vaporized has a mild reaction and is easy to handle, if a diluted gas having a predetermined concentration obtained by diluting such a gas that is easy to handle with the atmosphere is used as a detection gas, automation is further facilitated.

[0015]

According to the leakage inspection method of the first aspect of the present invention, first, the test object component is joined to the gas container having the mounting opening so as to close the mounting opening, and a closed chamber is formed in the gas container. . Next, the detection gas is injected into the closed chamber at a predetermined concentration and a predetermined pressure. In addition, the measurement container is joined so as to cover the test target component exposed on the outer surface of the gas container, and the measurement chamber is defined. Then, while sucking the gas in the measurement chamber, the concentration of the detection gas mixed in this gas with respect to the gas is measured, and the presence or absence of fluid leakage through the test target component is determined according to the measurement result.

According to the leakage inspection method of claim 2,
First, in a mounting step, a test object component is joined to a gas container having a mounting opening so as to close the mounting opening, and a sealed chamber is defined in the gas container. Next, in the injection step, the detection gas is injected into the closed chamber at a predetermined concentration and a predetermined pressure. Then, in the measurement process, the measurement container is joined to cover the test target component exposed on the outer surface of the gas container to form a measurement chamber, and while sucking the gas in the measurement chamber, the detection container is mixed with the gas. The concentration of gas relative to that gas is measured. After this measurement process, after the detection gas in the gas container is exhausted in the exhaust process, in the carry-out process, the presence or absence of fluid leakage through the test object component is determined according to the measurement result of the measurement process. The parts to be tested are selected according to the result and are carried out from the gas container.

According to the leakage inspection apparatus of the third aspect, the component to be tested is joined to the gas container having the mounting opening so as to close the mounting opening. As a result, a closed chamber is defined inside the gas container, and the detection gas is injected into the closed chamber from the detection gas supply device at a predetermined concentration and a predetermined pressure. Then, the measurement container is joined so as to cover the test target component exposed on the outer surface of the gas container, and the measurement chamber is defined. A concentration measuring instrument is connected to this measuring chamber, and the gas in the measuring chamber is sucked by the vacuum pump. At this time, if the test target component has a leak hole, the detection gas leaks from the leak hole, and the concentration of the detection gas with respect to the gas in the measurement chamber increases. This concentration is measured by a concentration measuring device, and the presence or absence of fluid leakage of the component under test is determined according to the measurement result.

[0018]

Embodiments of the present invention will be described below with reference to the drawings. 1 to 8 relate to an embodiment of a leakage inspection apparatus of the present invention, and FIG. 1 is an outline of a leakage inspection apparatus having a fuel pump support bracket mounted in an opening of a fuel tank and its mounting plate as a test target component. FIG. 2 shows the external appearance of the specific configuration of the device. In FIG. 1, this device has a gas container 11 and a measurement container 12 arranged so as to close a mounting opening 11a formed in the upper portion thereof, and the mounting plate 1 is arranged in the mounting opening 11a of the gas container 11. . A bracket 2 for supporting a fuel pump (not shown) is joined to the mounting plate 1 by welding or the like, and a fuel tube 3 and a return tube 4 pass through and are joined by brazing or the like. The constructed sub-assembly is provided as the test target component 10 of the present embodiment.

Lids 13 and 14 are provided at positions facing the open ends of the fuel tube 3 and the return tube 4, respectively.
Is supported so as to be able to move forward and backward, and the respective lids 13 and 14 are driven by the respective drive devices 43 and 44 so as to close the fuel tube 3 and the return tube 4, respectively. The drive devices 43 and 44 are supported by the gas container 11, and the toggle mechanisms 43t and 44t are driven according to the switching control of the air pressure to the air cylinders 43a and 44a, as shown in FIG.
The lids 13 and 14 provided at the tips are configured to move forward and backward with respect to the test target component 10. In addition, a clamp device 15 for holding the test object component 10 in the gas container 11 is arranged near the attachment opening 11a, and this is also controlled between the two positions of holding and releasing by the air pressure switching control for an air cylinder (not shown). It is configured to move.

The gas container 11 includes a detection gas supply device 20.
Is connected. In FIG. 1, the detection gas supply device 20 is connected to a supply port 11g formed on the side wall of the gas container 11.
Shows the state of being directly attached, but specifically, FIG.
It is connected via the communication pipe 16 shown in FIG. In the detection gas supply device 20, as shown in FIG. 1, the liquid alcohol in the alcohol tank 22 is supplied to the dispenser 24 through the communication pipe 23, and the driving device 45 that drives the liquid alcohol switches the air pressure by the air pressure switching device 41. In addition to being controlled according to the control, air is jetted through the electromagnetic opening / closing valve 25, and the mixing portion 26 forms a diluted gas of alcohol having a predetermined concentration. Then, this diluted gas is supplied as the detection gas from the mixing section 26 into the gas container 11 through the supply port 11g. A fan 29 is provided in the gas container 11 as needed, whereby the inside of the gas container 11 is agitated and the dilution gas is made uniform.

The gas container 11 and the measurement container 12 are connected to the exhaust device 30 via a switching valve 33.
The exhaust device 30 includes a pump 31 and an air cleaning device 32. When the switching valve 33 is switched, the pump 31 sucks the residual gas in the gas container 11 and the measurement container 12 and discharges it to the atmosphere via the air cleaning device 32. Is configured to. Further, a sensor 27 for detecting the pressure inside the container is attached to the gas container 11, and a sensor 28 for detecting the concentration is arranged in the vicinity of the supply port 11g of the detection gas supply device 20. A detection signal indicating the pressure in the container 11 and the concentration of the detection gas supplied from the detection gas supply device 20 is output to the control device 40 so that the detection gas is supplied at a predetermined concentration and a predetermined pressure. It is configured. still,
The electromagnetic opening / closing valve 25, the switching valve 33, and the air pressure switching device 41 described above are also electrically connected to the control device 40.

On the other hand, a concentration measuring instrument 50 is connected via a communication pipe 51 which opens at the upper part of the measuring container 12. The concentration measuring device 50 has a sensor 52 connected to a communication pipe 51 as shown in FIG. 1, and the sensor 52 is the vacuum pump 5
3 and is configured to suck the gas in the measurement container 12 through the sensor 52. The detection signal of the sensor 52 is output to the display device 54, where the detection result is displayed and is output to the control device 40. Although a combustible gas detection element is used for the sensor 52 of the present embodiment, other detection elements may be used. For example, if a hot wire semiconductor type gas detection element is used, detection is performed with higher sensitivity. be able to.

As shown in FIG. 2, a coupler 46 (not shown in FIG. 1) is attached to the gas container 11, and the coupler 46 is connected to drive devices 43, 44, 45, a clamp device 15 and the like. A coupler 47 that can be attached to and detached from the coupler 46 is arranged at a predetermined position.
That is, when the coupler 47 is joined to the coupler 46, the coupler 47 is communicatively connected to the detection gas supply device 20 and the switching valve 33, and thus to the exhaust device 30, and also to the air pressure switching device 41 that supplies air to each air cylinder. , Sensor 2
7, 28 are configured to be electrically connected to the control device 40. When the couplers 46 and 47 are separated, the drive devices 43, 44 and 45 and the clamp device 15 are maintained in the state immediately before that, and the communication pipes 16 that communicate with the detection gas supply device 20 and the exhaust device 30.
34 is configured to be closed.

As described above, the drive devices 43 and 44 and the clamp device 15 are attached to the gas container 11, and
As shown in FIG. 2, the communication pipes 16 for supplying the detection gas, including the communication pipes for the air cylinders 43a and 44a.
And the communication pipe 34 for exhaust and lead wires to the sensors 27 and 28 are gathered in the coupler 46.
On the other hand, a coupler 47 that is mechanically and electrically removable is disposed at a predetermined position. Then, in a state where the coupler 47 is not joined to the coupler 46, each communication pipe is closed, and the coupler 47 is configured to communicate with each other when the coupler 47 is joined.

FIG. 3 shows a system for automatically and continuously performing a leak test using the gas container 11 and the like.
A plurality of gas containers 11 are prepared and stored in the chute 71, and are arranged so as to sequentially move on the transport path 72. Further, a coupler 47 is arranged so as to be able to move forward and backward with respect to the coupler 46 mounted on the gas container 11. The measuring container 12 is supported by the supporting device 60 and the gas container 11
It is supported above and is arranged so as to move up and down according to the drive of the lifting device 42. At the final end of the transport path 72,
A carry-out device 73 is provided for selecting and carrying out the non-defective product in the NM direction and the defective product in the AB direction according to the result of the determination of the quality of the test target component 10. In the present embodiment, the process of attaching the test object component 10 to the attachment opening 11a of the gas container 11 is automatically performed, but the attaching device is similar to the unloading device 73, so the illustration is omitted. It should be noted that this attaching step may be performed manually. Further, in the system of FIG. 3, each stage of S1 to S4 is independent, and the number of stages can be increased or decreased as necessary.

A leak inspection method for a fuel tank using the leak inspection apparatus having the above structure will be described below.
As shown in FIG. 4, it is roughly divided into five steps. First, in the mounting step, the bracket 2 of the test target component 10 is housed in the gas container 11, and the mounting plate 1 is mounted so as to close the mounting opening 11a (this is performed in the S1 stage of FIG. (See Figure 5). After this, the lid 1
3, 14 are driven by the drive devices 43, 44, and the fuel tube 3 and the return tube 4 are closed (this is performed in the S2 stage of FIG. 3, which is shown in FIG. 6). Next, in the injection step, the detection gas supplied from the detection gas supply device 20 is injected into the gas container 11 via the supply port 11g at a predetermined concentration and a predetermined pressure.

After a lapse of a predetermined time, the injection of the detection gas from the detection gas supply device 20 is stopped, and in this state, the measurement process is started, and the elevating device 42 moves the measurement container 12 into the gas container 1.
It is driven downward until it contacts 1 (this is performed in the S3 stage of FIG. 3, and the state shown in FIG. 7 is obtained). continue,
In the concentration measuring device 50, the alcohol concentration is measured while sucking the gas in the measuring container 12 by the vacuum pump 53, and the measurement result is output to the control device 40. Here, whether the detection gas is mixed in the gas or not. Whether or not it is determined, and the degree of leakage is determined according to the mixed alcohol concentration.

After that, in the exhaust process, the switching valve 33 is switched to the exhaust side and the residual gas in the gas container 11 and the measurement container 12 is discharged (S4 stage in FIG. 3). After evacuation, the measurement container 12 is driven to rise in the carry-out step, the test target component 10 is sorted into, for example, a good product and a defective product according to the determination result, and as shown in FIG. 8, the good product is in the NM direction according to the selection result. The defective product is conveyed in the AB direction. As described above, in the leakage inspection apparatus of the present embodiment, the inspection system is configured by the four stages S1 to S4 shown in FIG. 3 and the carry-out device 73 with the process shown in FIG. 4 as a component.

Next, the automatic leakage inspection operation of the article 10 under test in the leakage inspection device of this embodiment will be described in detail.
In this leakage inspection device, the control device 40 automatically performs a leakage inspection as follows according to a predetermined inspection procedure set in advance. First, initialization is performed in step 101, and a timer (tc, ti, t
e) and the density measurement value Q are cleared (0), and the inspection flag DF for starting the inspection is set (1).
Next, the routine proceeds to step 102, where it is judged whether or not the inspection flag DF is set, and if the inspection flag DF is not set after the second processing of this routine (DF
= 0), the process waits until the inspection flag DF is set without proceeding to the next step 103.

If the inspection flag DF is set, the routine proceeds to step 103, where the parts 10 to be tested are placed in the gas container 11. Then, in step 104, the drive device 43,
44 operates to move the lids 13 and 14 forward and the test target component 1
The test object component 10 is held by the clamp device 15 while being in close contact with the fuel tube 3 and the return tube 4 of No. 0.

Then, in step 105, the timer tc for confirming the internal pressure is started, and at the same time, the detection gas supplied from the detection gas supply device 20, that is, the alcohol dilution gas is controlled to a predetermined concentration, and the gas container 11 is controlled. Injected inside. Next, in steps 107 and 108, it is determined whether the pressure Pi in the gas container 11 has reached the predetermined pressure Kp within a predetermined time t1 after the start of injection, and the predetermined pressure Kp is reached even after the predetermined time t1 has elapsed. If not, step 109
Then, it is determined that the equipment is abnormal, and this inspection routine is ended (step 110).

On the other hand, when the pressure Pi in the gas container 11 reaches the predetermined pressure Kp within the predetermined time t1, the process proceeds to step 111, and after the detection gas injection operation is stopped, the measurement container 12 descends. The measurement container 12 is pressed against the gas container 11 so as to cover the test target component 10. In this state, the timer for measurement ti is started in step 112, and the concentration in the measurement container 12 is measured in step 113. For example, when there is a leak hole (not shown) in the test object component 10, the detection gas flows out into the measurement container 10 through this leak hole, and it is determined that the concentration Q of the measurement result is equal to or higher than the predetermined concentration Kq. In step 115, a signal indicating an abnormal state is output. If the concentration Q is lower than the predetermined concentration Kq until the predetermined time t2 elapses after the timer ti starts, the routine proceeds to step 117, where a signal representing a normal state is output.

Then, at step 118, the exhausting timer te is started, and at the same time, at step 119, the detection gas and the measurement container 12 injected into the gas container 11 are discharged.
When the evacuation operation of the detection gas leaked inside has started and the predetermined time t3 or more has passed (step 120), the evacuation operation has stopped (step 121), and the test object component 10 is clamped to the gas container 11 in step 122. The holding by 15 is released, and the lids 13 and 14 are driven backward.

Then, the process proceeds to step 123, in which the parts 10 to be tested are sorted into normal parts and abnormal parts and are carried out in a predetermined direction. At this time, the selection result is Step 11
5 and 117, it is determined whether or not they match the signals output (step 124), and if they match, step 1
After the inspection flag DF is set at 25, step 1
At 26, the test target component 10 is transported, but if they do not match, it means that there was an error in the selection of the transport direction, so the inspection flag DF is reset at step 128, and at step 128. An alarm is issued and /
Alternatively, after the conveyance is stopped, a standby state is set in step 102. After that, the above operation is repeated until the measurement work is completed.

As described above, according to the leakage inspection apparatus of this embodiment, the gas container 11 is used and its mounting opening 11a is provided.
After the test target component 10 is attached to the measurement container 12, the measurement container 12 is configured to define the measurement chamber.
By using the gas container 11 that is compatible with the test target component 10, it is possible to easily perform the leak inspection of the test target component having various shapes. That is, if the shape of the gas container and the mounting opening are formed according to the shape of the test target component, the leak test of the test target component of various shapes and structures can be performed. Therefore, if gas containers suitable for various parts to be tested are prepared in advance, it is possible to continuously perform leak inspection on various parts to be tested. In this embodiment, a gas obtained by diluting alcohol with the atmosphere is used as the detection gas, but a gas obtained by diluting a combustible gas such as hydrogen with the atmosphere may be used.

Further, according to the leakage inspection apparatus of this embodiment,
The leak inspection is divided into the steps shown in FIG. 4, and the step S1 to S4 stages and the like as shown in FIG. 3 is used as a component of each step, so that the leak inspection can be automatically performed. Moreover, for example, S2
In the stage, it is possible to change to a leak inspection device using hydrogen gas without changing other stages by merely changing the hydrogen gas to be injected instead of the alcohol gas as the detection gas. Alternatively, the measurement container 12 may be driven to descend in the S3 stage, and then the measurement chamber may be evacuated to perform the measurement. Furthermore,
The layout can be easily changed, for example, the serial arrangement of the S1 stage and the S2 stage can be changed to the parallel arrangement, and the cost of the facility and the inspection time can be shortened.

In this embodiment, the injection step of injecting the detection gas and the measurement step are separated, and the detection gas is injected in the S2 stage in the system of FIG. 3 as well.
Although the concentration is set to be measured in three stages, these steps may be performed substantially at the same time. That is, the measurement container 12 may be driven to descend while injecting the detection gas into the gas container 11 in the S3 stage of FIG. 3, or after the measurement container 12 is driven to descend (state of FIG. 7). A detection gas may be injected into 11. With this setting, the coupler 46 does not need to close each communication pipe even when it is not joined to the coupler 47, so that the coupler 46 can have a simple configuration. The above-described object 10 to be tested is provided with the fuel tube 3 and the return tube 4, but the above-mentioned lids 13 and 14 are of course necessary for the object to be tested such as these tubes where there is no communication part. Therefore, the configuration is simpler.

[0038]

Since the present invention is constructed as described above, it has the following effects. That is, in the leakage inspection method and the leakage inspection device of the present invention, the measurement container is joined so as to cover the test target component exposed on the outer surface of the gas container to form the measurement chamber, and the detection in the gas inside the measurement chamber is detected. Since the concentration of the working gas with respect to the gas is measured and the presence or absence of fluid leakage of the test target component is determined according to the measurement result, it is possible to perform a leak inspection with good and stable accuracy, and various By using a gas container corresponding to each test target component, the leak test can be easily performed on the test target component having a shape.

Particularly, in the case where the leakage inspection is performed by dividing each process as in claim 2, the inspection system can be configured by using each process as a component, so that each component can be implemented as a device. It is possible to change the layout of the specific device easily, and it is possible to reduce the cost of the equipment used for leakage inspection and shorten the inspection time. For example, even if the detection gas is set to alcohol gas or hydrogen in the injection step, it can be easily adapted to this. Further, since the parts to be tested are selected and carried out from the measurement container according to the fluid leakage determination result, the leakage inspection can be continuously and automatically performed.

According to the leakage inspection apparatus of the third aspect, not only can the componentization of the inspection process described above be realized, but the attachment of the test object component can be switched to the manual operation to form a simple leakage inspection apparatus. You can also

[Brief description of drawings]

FIG. 1 is a configuration diagram showing an outline of a leakage inspection device according to an embodiment of the present invention.

FIG. 2 is a perspective view showing a main configuration of a leakage inspection device according to an embodiment of the present invention.

FIG. 3 is a perspective view showing an entire leakage inspection device according to an embodiment of the present invention.

FIG. 4 is a process drawing showing an embodiment of the leakage inspection method of the present invention.

FIG. 5 is a perspective view showing a state of a mounting step in one embodiment of the present invention.

FIG. 6 is a perspective view showing a state from an attaching step to an injecting step in one embodiment of the present invention.

FIG. 7 is a perspective view showing states of an injection process, a measurement process, and an exhaust process in one embodiment of the present invention.

FIG. 8 is a perspective view showing a state of a carry-out process in one embodiment of the present invention.

FIG. 9 is a flowchart showing a leakage inspection of a test target component by the leakage inspection device according to the embodiment of the present invention.

FIG. 10 is a flowchart showing a leakage inspection of a test target component by the leakage inspection device according to the embodiment of the present invention.

[Explanation of symbols]

 10 parts to be tested 11 gas container 12 measurement container 13, 14 lid 15 clamp device 20 gas supply device for detection 30 exhaust device 40 control device 50 concentration measuring device 60 support device 71 chute 72 transport path 73 carry-out device

 ─────────────────────────────────────────────────── ─── Continuation of the front page (72) Yoshinori Omori 2-26, Kounosu-cho, Toyota-shi, Aichi Horie Metal Industry Co., Ltd. (72) Toshihiro Sato 2-26, Kounosu-cho, Toyota-shi, Aichi Horie Metal Industry Co., Ltd. Incorporated (72) Inventor Yuji Hasumoto 2-5-4 Mitsuyachu, Yodogawa-ku, Osaka-shi New Cosmos Electric Co., Ltd. (72) Inventor Atsushi Sugiura 2-5-5, Mitsuya-chu, Yodogawa-ku, Osaka-shi, Osaka No. 4 inside New Cosmos Electric Co., Ltd.

Claims (3)

[Claims] 1. A gas chamber having a mounting opening is joined to a test object component so as to close the mounting opening to form a closed chamber in the gas container, and a detection gas has a predetermined concentration and a predetermined concentration. The gas is injected into the closed chamber by pressure, the measurement chamber is joined to join the measurement container so as to cover the test target component exposed on the outer surface of the gas container, and the gas in the measurement chamber is sucked while the gas is sucked. A leak inspection method, comprising: measuring a concentration of the detection gas mixed in the gas with respect to the gas, and determining whether or not a fluid leaks through the test target component according to a measurement result. 2. A mounting step of joining a test object component to a gas container having a mounting opening so as to close the mounting opening to form a closed chamber in the gas container, and a detection gas having a predetermined concentration. And an injecting step of injecting into the closed chamber at a predetermined pressure, and a measurement chamber is formed by joining the measurement container so as to cover the test target component exposed on the outer surface of the gas container,
While sucking the gas in the measurement chamber, a measurement step of measuring the concentration of the detection gas mixed in the gas with respect to the gas, an exhaust step of discharging the detection gas in the gas container after the measurement step, A leakage inspection method comprising a carrying-out step of judging the presence or absence of fluid leakage through the test target component according to the measurement result of the measurement step, selecting the test target component according to the determination result, and carrying it out from the gas container . 3. A gas container that defines a closed chamber when a test target component is joined to a mounting opening, and a detection gas supply device that supplies a detection gas at a predetermined concentration and a predetermined pressure to the closed chamber. A measurement container that is joined to cover the test target component exposed on the outer surface of the gas container to define a measurement chamber, and a vacuum pump that is connected to the measurement container and that sucks the gas in the measurement chamber. A concentration measuring device for measuring the concentration of the detection gas mixed in the gas with respect to the gas while sucking the gas in the measurement chamber with the vacuum pump, and connecting the detection gas supply device to the gas container Then, the detection gas is injected into the gas container, and the presence or absence of fluid leakage through the test target component is determined according to the measurement result of the concentration measuring device.