CN216349410U - Vacuum leak detection equipment - Google Patents

Vacuum leak detection equipment Download PDF

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Publication number
CN216349410U
CN216349410U CN202122655210.2U CN202122655210U CN216349410U CN 216349410 U CN216349410 U CN 216349410U CN 202122655210 U CN202122655210 U CN 202122655210U CN 216349410 U CN216349410 U CN 216349410U
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leak detection
space
workpiece
vacuum
pressure
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CN202122655210.2U
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林琦武
张应均
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Guangzhou Know How Industry & Equipment Co ltd
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Guangzhou Know How Industry & Equipment Co ltd
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Abstract

The utility model provides a vacuum leak detection device, comprising: the device comprises a flexible cover body, a supporting plate, an outer cover, a pressure adjusting device, a leakage detecting device and a controller; the flexible cover body is arranged on the supporting plate and surrounds the supporting plate together to form an accommodating space for accommodating a workpiece, and when the workpiece is placed in the accommodating space, a leakage detecting space is formed between the outer wall of the workpiece and the inner wall of the accommodating space; the pressure adjusting device is used for adjusting the size of the leakage detecting space; the leak detection device comprises a second vacuum generating device, a leak detector and a trace gas source. The vacuum leak detection equipment can manage the concentration of the tracer gas in the leak detection space, manage the outward leakage speed of the workpiece under the action of the pressure difference and improve the partial pressure ratio of the leaked detection gas, thereby greatly improving the detection efficiency and precision and protecting the workpiece which cannot bear pressure from being damaged by the internal and external pressure difference in the detection process.

Description

Vacuum leak detection equipment
Technical Field
The utility model relates to the technical field of leak detection, in particular to vacuum leak detection equipment.
Background
For some large-scale workpieces, the size is large, so that the accommodating space for accommodating the workpieces in the leakage detection device is configured to be large, the volume of the leakage detection space formed between the workpieces and the accommodating space is large, the leakage detection time is prolonged, and the leakage detection efficiency is slowed.
SUMMERY OF THE UTILITY MODEL
The utility model aims to overcome the defects in the prior art and provide vacuum leak detection equipment.
One embodiment of the present invention provides a vacuum leak detection apparatus, comprising: the device comprises a flexible cover body, a supporting plate, an outer cover, a pressure adjusting device, a leakage detecting device and a controller;
the flexible cover body is arranged on the supporting plate and surrounds the supporting plate together to form an accommodating space for accommodating a workpiece, and when the workpiece is placed in the accommodating space, a leakage detecting space is formed between the outer wall of the workpiece and the inner wall of the accommodating space;
the outer cover is arranged on the flexible cover body, and the outer cover and the supporting plate are matched to clamp the flexible cover body;
the pressure regulating device is used for regulating the size of the leak detection space by regulating the pressure of the leak detection space and comprises a first vacuum generating assembly and an inflating assembly, and the first vacuum generating assembly and the inflating assembly are both communicated with the leak detection space;
the leak detection device comprises a second vacuum generation device, a leak detector and a tracing gas source, wherein the second vacuum generation device and the leak detector are communicated with the leak detection space, and the tracing gas source is communicated to the inside of the workpiece;
the controller is respectively connected with the first vacuum generating assembly, the inflating assembly, the second vacuum generating device, the leak detector and the leakage gas source.
Compared with the prior art, the vacuum leak detection equipment can manage the concentration of the tracer gas in the leak detection space by regulating the pressure of the leak detection space, manage the outward leakage speed of the workpiece under the action of the pressure difference, and improve the partial pressure ratio of the leaked detection gas, so that the detection efficiency and precision are greatly improved, and the workpiece which cannot bear pressure can be protected from being damaged by the internal and external pressure difference in the detection process.
In one embodiment, the vacuum leak detection device further comprises a flange, the flange is arranged on the supporting plate and detachably connected with the supporting plate, and the outer cover and the flange are matched to clamp the flexible cover body.
In one embodiment, a sealing gasket is provided between the flange and the carrier.
In one embodiment, a pressure regulating space is formed between the housing and the flexible cover;
the first vacuum generating assembly and the inflating assembly are communicated with the pressure regulating space.
In one embodiment, the leak detection apparatus further includes two pressure sensors, the two pressure sensors being in communication with the workpiece interior and the leak detection space, respectively.
In one embodiment, the leak detection device further comprises two air release pipelines, wherein valves are arranged in the air release pipelines, one air release pipeline is used for communicating the interior of the workpiece, and the other air release pipeline is communicated with the leak detection space.
In one embodiment, the leak detection apparatus further comprises a trace gas recoverer in communication with the vent conduit.
In order that the utility model may be more clearly understood, specific embodiments thereof will be described hereinafter with reference to the accompanying drawings.
Drawings
Fig. 1 is a schematic diagram of the structure of vacuum leak detection apparatus in accordance with one embodiment of the present invention.
Description of reference numerals:
10. a flexible cover; 11. detecting a leakage space; 20. a support plate; 21. a flange; 22. a sealing gasket; 30. a housing; 31. a pressure regulating space; 41. a first vacuum generating assembly; 42. an inflation assembly; 51. a second vacuum generating device; 52. a leak detector; 53. A source of trace gas; 54. a pressure sensor; 55. an air bleed duct; 56. a valve; 60. and (5) a workpiece.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1, a schematic diagram of a vacuum leak detection apparatus according to an embodiment of the utility model is shown, the vacuum leak detection apparatus including: flexible cover 10, support plate 20, cover 30, pressure regulating means, leak detection means, and a controller.
The flexible cover body 10 is arranged on the supporting plate 20, and forms an accommodating space for accommodating a workpiece 60 together with the supporting plate 20 in a surrounding manner, and when the workpiece 60 is placed in the accommodating space, a leak detection space 11 is formed between the outer wall of the workpiece 60 and the inner wall of the accommodating space. It should be noted that, some margins may be preset in the flexible cover 10, and the size of the accommodating space between the flexible cover 10 and the supporting plate 20 is adjusted by adjusting the area of the flexible cover 10 in the outer cover 30, so as to implement the leak detection suitable for workpieces 60 with different sizes and different shapes.
The outer cover 30 is arranged on the flexible cover body 10, the outer cover 30 is matched with the supporting plate 20 to clamp the flexible cover body 10, the outer cover 30 is arranged around the accommodating space and presses the flexible cover body 10 to the supporting plate 20, and therefore the accommodating space is sealed; the pressure regulating device comprises a first vacuum generating assembly 41 and an air charging assembly 42, wherein the first vacuum generating assembly 41 and the air charging assembly 42 are both communicated with the leakage detection space 11, and the size of the leakage detection space is regulated by regulating the pressure of the leakage detection space 11. The leak detection device comprises a second vacuum generating device 51, a leak detector 52 and a trace gas source 53, wherein the second vacuum generating device 51 and the leak detector 52 are communicated with the leak detection space 11, and the trace gas source 53 is used for communicating the interior of the workpiece 60. First vacuum generation component 41 can evacuate leak detection space 11 to reduce the pressure in leak detection space 11, make leak detection space 11 shrink, inflation component 42 can improve the pressure in leak detection space 11, thereby increase the pressure in leak detection space 11, and then enlarge leak detection space 11 within a certain range, and combination first vacuum generation component 41 and inflation component 42 can regulate and control the atmospheric pressure and the size in leak detection space 11. The leak detection is performed by evacuating the inside of the workpiece 60 by the second vacuum generating apparatus 51, then filling the workpiece 60 with a trace gas by the trace gas source 53, and detecting that the trace gas exceeds a predetermined concentration by the leak detector 52, which indicates that there is a gap in the workpiece 60 and that the trace gas leaks from the workpiece 60 into the leak detection space 11.
Before the leak hunting, can take place subassembly 41 through first vacuum in advance and can evacuate to leak hunting space 11, because flexible cover body 10 is flexible, after reducing the atmospheric pressure in leak hunting space 11, make the atmospheric pressure outside the accommodation space of flexible cover body 10 press to work piece 60, and then reduced the volume in leak hunting space 11, even work piece 60's gap is less, because leak hunting space 11 has also been reduced, make tracer gas can improve the accumulation speed in leak hunting space 11 more fast, and then manage the tracer gas concentration in leak hunting space 11, make tracer gas reach preset concentration fast, shorten the leak hunting time, improve leak hunting efficiency. The pressure difference between the inside and the outside of the workpiece 60 is adjusted by combining a pressure adjusting device and a leakage detecting device, so that the outward leakage speed of the workpiece 60 under the action of the pressure difference can be managed, the partial pressure ratio of the leaked detection gas is improved, and the detection efficiency and the detection precision are greatly improved
Moreover, for some workpieces 60 with different shapes, since the accommodating space in the leak detection device is generally flat, various workpieces 60 with different shapes often cause the leak detection space 11 between the workpiece 60 and the accommodating space to be enlarged, so that the accumulation of trace gases is slowed down, and the leak detection space 11 is evacuated, so that after the flexible enclosure 10 is pressed against the workpiece 60, the flexible enclosure 10 can adapt to the shape of the workpiece 60 to compress the leak detection space 11.
In addition, in the prior art, in order to avoid that the gas in the accommodating space of the leak detection device affects the detection of the trace gas, the gas in the leak detection space 11 is often evacuated, so that the gas pressure in the accommodating space is very low, the pressure difference between the inside and the outside of the workpiece 60 is large, the workpiece 60 which cannot bear large pressure is easily damaged, and even if the gas is subsequently filled into the leak detection space 11, the workpiece 60 can also be damaged due to the large pressure difference in a specific time period. In the present application, after the gas in the leak detection space 11 is pumped out, since the flexible shield body 10 reduces the leak detection space 11, the pressure in the leak detection space 11 is not too low, which is beneficial to protecting the workpiece 60, and then the subsequent inflation assembly 42 can inflate some gas which does not affect the detection into the leak detection space 11, so as to reduce the pressure difference between the inside and the outside of the workpiece 60.
In order to facilitate installation of the flexible cover 10 and sealing of the accommodating space, in some alternative embodiments, the vacuum leak detection apparatus further includes a flange 21, the flange 21 is disposed on the supporting plate 20 and detachably connected to the supporting plate 20, and the cover 30 is detachably connected to the flange 21 and cooperates with the flange 21 to clamp the flexible cover 10. In this embodiment, the flexible shield 10 and the flange 21 are fixed to the support plate 20 by sequentially passing through the flexible shield 10, the flexible shield 10 and the flange 21 by using locking members and then connecting the flexible shield 10, the flexible shield 10 and the flange 21 to the support plate 20. Of course, in order to avoid the flexible cover 10 from being penetrated by the locking member, the arrangement of the housing 30 is not limited thereto, and those skilled in the art can also select other suitable arrangements according to the teachings of the present invention, for example, by providing a telescopic structure such as a cylinder on the housing 30, pressing the housing 30 to the support plate 20 by the cylinder, and further fixing the flexible cover 10 and sealing the accommodating space.
In order to improve the tightness of the receiving space, in some alternative embodiments, a sealing gasket 22 is disposed between the flange 21 and the supporting plate 20.
In order to avoid that the flexible enclosure 10 is excessively tightly attached to the workpiece 60, so that a plurality of disconnected air cavities are formed on the surfaces of the flexible enclosure 10 and the workpiece 60, and trace gas of the workpiece 60 is accumulated in the air cavities and cannot be detected by the leak detector 52, in some alternative embodiments, a pressure regulating space 31 is formed between the outer cover 30 and the flexible enclosure 10; the first vacuum generating assembly 41 and the inflating assembly 42 are communicated with the pressure regulating space 31, and the air pressure of the pressure regulating space 31 can be adjusted through the first vacuum generating assembly 41 and the inflating assembly 42, so that the pressure difference between the pressure regulating space 31 and the leakage detecting space 11 is reduced, the phenomenon that the flexible cover body 10 is excessively pressed to the workpiece 60 by the air pressure of the pressure regulating space 31 is avoided, and the flexible cover body 10 is excessively tightly attached to the workpiece 60 is caused. And the leakage detection can be carried out under the safe air pressure difference of the workpiece 60 by combining the regulation and control of the air pressure of the pressure regulating space 31 and the leakage detection space 11. In addition, some convex parts can be arranged on the inner surface of the flexible cover body 10, the shape of the convex parts can be in the shape of a semicircle, a cone and the like which gradually reduces from the root to the top, after the flexible cover body 10 presses the workpiece 60, the top of the convex parts can be pressed against the workpiece 60, and the flexible cover body 10 is supported between the convex parts, so that the trace gas can flow between the convex parts, and the trace gas is prevented from being accumulated locally to cause the failure in detection. In addition, it should be noted that the illustration does not show the way in which the first vacuum generating assembly 41 and the inflation assembly 42 communicate with the pressure-regulating space 31, and the way in which the first vacuum generating assembly 41 and the inflation assembly 42 communicate with the pressure-regulating space 31 can be referred to the way in which the first vacuum generating assembly 41 and the inflation assembly 42 communicate with the leak detection space 11, or other suitable designs can be selected.
In some embodiments, the leak detection apparatus further includes two pressure sensors 54, with the two pressure sensors 54 being in communication with the interior of the workpiece 60 and the leak detection space 11, respectively. The pressure in the leak detection space 11 and the workpiece 60 can be detected by the pressure sensor 54, thereby facilitating knowledge of the actual pressure in the leak detection space 11 and the workpiece 60 for ease of adjustment. Of course, when the pressure adjusting space 31 is provided, a pressure sensor communicating with the pressure adjusting space 31 may be provided, and the pressure sensor may be provided on the housing or may be mounted as shown in the drawings, but not limited thereto.
In addition, if the workpiece 60 has a large leakage, a large amount of gas in the workpiece 60 flows into the leakage detecting space 11, so that the form of the flexible cover 10 is changed, and the workpiece 60 can be seen whether the large leakage exists or not by observing the form of the flexible cover 10.
In some alternative embodiments, the leak detection apparatus further includes two air release pipes 55, a valve 56 is disposed in the air release pipe 55, one of the air release pipes 55 is used for communicating with the inside of the workpiece 60, the other air release pipe 55 is communicated with the leak detection space 11, and when the pressure regulating space 31 is disposed, the air release pipe 55 communicated with the leak detection space 11 is also communicated with the pressure regulating space 31. After the leak detection is completed, the trace gas can be discharged through the vent pipe 55, and the atmospheric pressure can be restored inside the leak detection space 11, the pressure adjustment space 31, and the workpiece 60. The end of the bleed duct 55 may be provided with a silencer. Of course, in order to avoid the trace gas from affecting the working environment, in some alternative embodiments, the leak detection apparatus further includes a trace gas recoverer, the trace gas recoverer is communicated with the gas release pipe 55 so as to recover the trace gas, and the trace gas recoverer can be communicated with the interior of the workpiece 60 only through the gas release pipe 55, so that the useful trace gas can be recovered for subsequent detection.
It should be noted that, in order to implement the leak detection process, the first vacuum generating assembly 41 can be opened and closed in communication with the pressure regulating space 31 and the leak detection space 11, and can be independently communicated with each other; the communication between the inflation assembly 42 and the pressure regulating space 31 and the leakage detecting space 11 can be opened and closed and can be mutually and independently communicated; the second vacuum generator 51 is also openable and closable in communication with the workpiece 60; the trace gas source 53 is also openable and closable in communication with the workpiece 60. How to specifically realize the opening and closing of the communication belongs to the technology known by those skilled in the art, for example, as shown in the figure, the communication can be realized through a pipeline network and a valve 56 group, so that the cost can be reduced; of course, the first vacuum generating assembly 41 can be communicated with the pressure regulating space 31 and the leak detection space 11 through two connecting pipes, and then the valve 56 for controlling communication is arranged in the connecting pipe, so that the first vacuum generating assembly 41 can be communicated with the pressure regulating space 31 and the leak detection space 11 in an openable and closable manner and can be communicated with each other independently. The inflation assembly 42, the second vacuum generating device 51 and the trace gas source 53 are similar.
In this embodiment, the vacuum leak detection apparatus further includes a controller, and the controller is respectively connected to the first vacuum generating assembly 41, the inflation assembly 42, the second vacuum generating device 51, the leak detector 52, the trace gas source 53, and the valve 56, and can control the operations of the first vacuum generating assembly 41, the inflation assembly 42, the second vacuum generating device 51, the leak detector 52, and the trace gas source 53 and control the opening and closing of the valve 56.
The controller is respectively connected with the first vacuum generating assembly 41, the inflation assembly 42, the second vacuum generating device 51, the leak detector 52, the trace gas source 53 and the valve 56, and can control the operation of the first vacuum generating assembly 41, the inflation assembly 42, the second vacuum generating device 51, the leak detector 52 and the trace gas source 53 and control the opening and closing of the valve 56.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (7)

1. A vacuum leak detection apparatus, comprising: the device comprises a flexible cover body, a supporting plate, an outer cover, a pressure adjusting device, a leakage detecting device and a controller;
the flexible cover body is arranged on the supporting plate and surrounds the supporting plate together to form an accommodating space for accommodating a workpiece, and when the workpiece is placed in the accommodating space, a leakage detecting space is formed between the outer wall of the workpiece and the inner wall of the accommodating space;
the outer cover is arranged on the flexible cover body, and the outer cover and the supporting plate are matched to clamp the flexible cover body;
the pressure regulating device is used for regulating the size of the leak detection space by regulating the pressure of the leak detection space and comprises a first vacuum generating assembly and an inflating assembly, and the first vacuum generating assembly and the inflating assembly are both communicated with the leak detection space;
the leak detection device comprises a second vacuum generation device, a leak detector and a tracing gas source, wherein the second vacuum generation device and the leak detector are communicated with the leak detection space, and the tracing gas source is communicated to the inside of the workpiece;
the controller is respectively connected with the first vacuum generating assembly, the inflating assembly, the second vacuum generating device, the leak detector and the leakage gas source.
2. Vacuum leak detection apparatus according to claim 1, wherein: the vacuum leak detection equipment further comprises a flange, the flange is arranged on the supporting plate and detachably connected with the supporting plate, and the outer cover is matched with the flange to clamp the flexible cover body.
3. A vacuum leak detection apparatus according to claim 2, wherein: and a sealing gasket is arranged between the flange and the supporting plate.
4. Vacuum leak detection apparatus according to claim 1, wherein: a pressure regulating space is formed between the outer cover and the flexible cover body;
the first vacuum generating assembly and the inflating assembly are communicated with the pressure regulating space.
5. Vacuum leak detection apparatus according to any one of claims 1 to 4, wherein: the leak detection device further comprises two pressure sensors, and the two pressure sensors are respectively communicated with the inside of the workpiece and the leak detection space.
6. Vacuum leak detection apparatus according to any one of claims 1 to 4, wherein: the leak detection device further comprises two air discharge pipelines, valves are arranged in the air discharge pipelines, one air discharge pipeline is used for communicating the interior of the workpiece, and the other air discharge pipeline is communicated with the leak detection space.
7. Vacuum leak detection apparatus according to claim 6, wherein: the leak detection device further comprises a trace gas recoverer, and the trace gas recoverer is communicated with the gas discharge pipeline.
CN202122655210.2U 2021-11-01 2021-11-01 Vacuum leak detection equipment Active CN216349410U (en)

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CN202122655210.2U CN216349410U (en) 2021-11-01 2021-11-01 Vacuum leak detection equipment

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CN216349410U true CN216349410U (en) 2022-04-19

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113932986A (en) * 2021-11-01 2022-01-14 广州新龙浩工业设备有限公司 Vacuum leak detection equipment

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113932986A (en) * 2021-11-01 2022-01-14 广州新龙浩工业设备有限公司 Vacuum leak detection equipment

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