CN202091229U - Angle valve of vacuum chamber - Google Patents
Angle valve of vacuum chamber Download PDFInfo
- Publication number
- CN202091229U CN202091229U CN2011202083250U CN201120208325U CN202091229U CN 202091229 U CN202091229 U CN 202091229U CN 2011202083250 U CN2011202083250 U CN 2011202083250U CN 201120208325 U CN201120208325 U CN 201120208325U CN 202091229 U CN202091229 U CN 202091229U
- Authority
- CN
- China
- Prior art keywords
- angle valve
- vacuum chamber
- cylinder
- piston rod
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
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- Reciprocating Pumps (AREA)
Abstract
The utility model discloses an angle valve of a vacuum chamber, which comprises a cylinder, an air inlet, a first air exhaust opening, a second air exhaust opening and a sealing plate. The cylinder can automatically control opening and closing of a molecular pump in the angle valve. Besides, a piston rod of the cylinder extends into the angel valve via an oilless bearing, the oilless bearing can guarantee linear reciprocating motion of the piston rod of the cylinder during operation, so that position deviation of the sealing plate can be avoided when the sealing plate seals the air inlet of the molecular pump, and the sealing plate has better sealing property and stability. Finally, the angle valve of the vacuum chamber can vacuumize the vacuum chamber by the aid of matching relationship among the air inlet, the first air exhaust opening and the second air exhaust opening.
Description
Technical field
The utility model relates to a kind of vacuum chamber angle valve, particularly relates to a kind of vacuum chamber angle valve that vacuum chamber is vacuumized of being used for.
Background technique
In the last few years
,The vacuum industry development is very rapid, traces it to its cause, and mainly be to utilize this physical condition of vacuum to finish the various brand-new technology that under atmospheric pressure can't realize.At present, other industrial technology fields particularly high-technology field to the demand of vacuum technique also in continuous increase, such as in field of nanometer technology, need utilize vacuum environment to realize nanometer processing.Yet the prerequisite of using vacuum technique is that the environment that will create a vacuum promptly produces, improves and keep vacuum by certain vaccum-pumping equipment in a certain enclosed space.When vacuumizing, vacuum pumping device often needs to be connected and sealed by angle valve and the vacuum chamber enclosed space of promptly being bled, this angle valve needs that also whole vacuum is played assist control and does in order to satisfy in the actual production vacuum requirements in the enclosed space except playing the effect of being tightly connected.But at the demand, existing the common angle valve with simple switch function can not be competent at again.
In sum, problem demanding prompt solution is at the specific (special) requirements in the vacuum, to design corresponding angle valve to satisfy the actual production requirement.
Summary of the invention
Technical problem to be solved in the utility model is, a kind of vacuum chamber angle valve is provided, it can also be controlled automatically to the Push And Release of molecular pump in the angle valve except having better sealing and stability, and then can satisfy in the vacuum requirement to angle valve.
For solving the problems of the technologies described above, the technical solution adopted in the utility model is: a kind of vacuum chamber angle valve, and this angle valve comprises: cylinder, it is fixed on the angle valve body, and the piston rod of this cylinder stretches into described angle valve body inside by oilless bearing; Suction port, it is used for being tightly connected with vacuum chamber; Bleeding point one, it is connected with the exterior mechanical pump seal; Bleeding point two, it is as the air outlet of molecular pump; And diaphragm seal, it is installed on the top of described piston rod, and the sealing sheet can seal up the suction port of described molecular pump by the pressure of described piston rod.
In the described vacuum chamber angle valve, described suction port, bleeding point one and bleeding point two are tightly connected by flange and outer tube.
The utility model has the advantages that, be fixed with a cylinder on the utility model vacuum chamber angle valve, can realize the Push And Release of molecular pump in the angle valve is controlled automatically by cylinder; In addition, the piston rod of described cylinder stretches into described angle valve inside by oilless bearing, this oilless bearing can guarantee cylinder piston rod the time do straight reciprocating motion in work, and then its position can not produce deviation when guaranteeing that diaphragm seal seals the suction port of described molecular pump, makes diaphragm seal have better sealing and stability; At last, the utility model vacuum chamber angle valve vacuumizes vacuum chamber by cooperating between described suction port, bleeding point one and the bleeding point two.
Description of drawings
Fig. 1 is the overall structure schematic representation of the utility model vacuum chamber angle valve.
Embodiment
For further disclosing the technical solution of the utility model, be described with reference to the accompanying drawings mode of execution of the present utility model now.
Fig. 1 is the overall structure schematic representation of the utility model vacuum chamber angle valve, among the figure, comprising: cylinder 11, it is fixed on the angle valve body 10, the piston rod 12 of this cylinder 11 stretches into described angle valve body 10 inside by oilless bearing 13, and this oilless bearing 13 can guarantee that piston rod 12 is reciprocating along straight line; Suction port 19, it is used for being tightly connected with the vacuum chamber enclosed space of promptly being bled; Bleeding point 1, it is connected with the exterior mechanical pump seal by the exterior mechanical pump vacuum chamber is slightly bled; Bleeding point 2 18, it is as the air outlet of molecular pump 17, and this molecular pump 17 can further be bled to vacuum chamber after above-mentioned mechanical pump is slightly bled by one 14 pairs of vacuum chambers of bleeding point; And diaphragm seal 15, it is installed on the top of described piston rod 12 by joint 16, and sealing sheet 15 can seal up the suction port of described molecular pump 17 by the pressure of described piston rod 12; In addition, described suction port 19, bleeding point 1 and bleeding point 2 18 are tightly connected by flange and outer tube.
Below in conjunction with the action situation of description of drawings the utility model vacuum chamber angle valve when working.
At first, described suction port 19, bleeding point 1 and bleeding point 2 18 are tightly connected by flange and vacuum chamber, mechanical pump and outlet pipe respectively, and described diaphragm seal 15 is stated the suction port of molecular pump 17 by the wiper seal residence of described piston rod 12; Then, by mechanical pump vacuum chamber is slightly vacuumized; At last, after slightly vacuumizing, the motion by piston rod 12 in the control cylinder 11 makes diaphragm seal 15 leave the suction port of molecular pump 17, and continues vacuum chamber is vacuumized until reaching production requirement by this molecular pump 12.Simultaneously, in above process, described cylinder 11 can receive outside control, has realized the automatic control to the Push And Release of molecular pump in the angle valve.
More than, basic design of the present utility model and basic principle have been set forth by description of listed embodiment.But the utility model never is limited to above-mentioned listed mode of execution, and every equivalent variations, improvement and deliberately of inferior quality behavior of doing based on the technical solution of the utility model of change all should belong to protection domain of the present utility model.
Claims (2)
1. a vacuum chamber angle valve is characterized in that, this angle valve comprises: cylinder (11), and it is fixed on the angle valve body (10), and the piston rod (12) of this cylinder (11) stretches into described angle valve body (10) inside by oilless bearing (13); Suction port (19), it is used for being tightly connected with vacuum chamber; Bleeding point one (14), it is connected with the exterior mechanical pump seal; Bleeding point two (18), it is as the air outlet of molecular pump (17); And diaphragm seal (15), it is installed on the top of described piston rod (12), and sealing sheet (15) can seal up the suction port of described molecular pump (17) by the pressure of described piston rod (12).
2. vacuum chamber angle valve according to claim 1 is characterized in that, described suction port (19), bleeding point one (14) and bleeding point two (18) are tightly connected by flange and outer tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202083250U CN202091229U (en) | 2011-06-20 | 2011-06-20 | Angle valve of vacuum chamber |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2011202083250U CN202091229U (en) | 2011-06-20 | 2011-06-20 | Angle valve of vacuum chamber |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN202091229U true CN202091229U (en) | 2011-12-28 |
Family
ID=45366298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2011202083250U Expired - Fee Related CN202091229U (en) | 2011-06-20 | 2011-06-20 | Angle valve of vacuum chamber |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN202091229U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102220994A (en) * | 2011-06-20 | 2011-10-19 | 昆山振昆纳米科技有限公司 | Angle valve of vacuum chamber |
-
2011
- 2011-06-20 CN CN2011202083250U patent/CN202091229U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102220994A (en) * | 2011-06-20 | 2011-10-19 | 昆山振昆纳米科技有限公司 | Angle valve of vacuum chamber |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20111228 Termination date: 20180620 |
|
| CF01 | Termination of patent right due to non-payment of annual fee |