CN103291586B - Vacuum furnace extract system and air aspiration process thereof - Google Patents
Vacuum furnace extract system and air aspiration process thereof Download PDFInfo
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- CN103291586B CN103291586B CN201310241954.7A CN201310241954A CN103291586B CN 103291586 B CN103291586 B CN 103291586B CN 201310241954 A CN201310241954 A CN 201310241954A CN 103291586 B CN103291586 B CN 103291586B
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- electric arc
- molecular drag
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Abstract
A kind of vacuum furnace extract system and air aspiration process thereof, its electric arc titanium pump+molecular drag pump+fore pump unit adopting parallel connection to bleed, replace prior art to connect the high vacuum diffusion pump+middle Vacuum Roots pump machine+roughing vacuum pump unit of bleeding, wherein, electric arc titanium pump of the present invention is used for the reactive gas extracting high vacuum fast, and molecular drag pump+fore pump is used for the inert gas extracting middle vacuum gas and high vacuum fast.Because electric arc titanium pump and molecular drag pump are all low energy consumption pumps, add that electric arc titanium pump mainly takes out stage running in essence, working time accounts for about 70% of whole pumpdown time usually, and therefore the present invention significantly can reduce air exhaust energy consumption; Add that electric arc titanium pump+molecular drag pump+fore pump unit pollutes without oil vapor, the oil vapor that therefore present invention also eliminates traditional vacuum stove extract system pollutes.
Description
Technical field
The present invention relates to a kind of vacuum furnace, particularly relate to a kind of vacuum furnace extract system and air aspiration process thereof.
Background technique
Traditional vacuum furnace extract system volume is large, the high vacuum diffusion pump generally adopting large-scale series connection to bleed+middle Vacuum Roots pump machine+roughing vacuum pump group is bled, have that vacuum pumping system is huge, energy consumption is high, operating cost is high, oil vapor is seriously polluted, affect the shortcomings such as vacuum products quality.
Summary of the invention
The object of the present invention is to provide a kind of vacuum furnace extract system, its electric arc titanium pump+molecular drag pump+fore pump unit adopting parallel connection to bleed, replace diffusion pump+Roots pump unit that existing series connection is bled, realize simplifying extract system structure, reduce air exhaust energy consumption, elimination oil vapor pollutes, and improves the object of vacuum products quality.
The present invention realizes like this, a kind of vacuum furnace extract system, comprise vacuum chamber, described vacuum chamber is connected to electric arc titanium pump, molecular drag pump and roughing vacuum pump, described molecular drag pump is connected with a fore pump, be provided with one first vacuum valve between described vacuum chamber and molecular drag pump, between described molecular drag pump and fore pump, be provided with one second vacuum valve, between described vacuum chamber and roughing vacuum pump, be provided with one the 3rd vacuum valve;
The cathode arc source pedestal that described electric arc titanium pump comprises titanium target and is connected with described titanium target, described titanium target is located within described vacuum chamber, described cathode arc source pedestal is located at outside described vacuum chamber, described cathode arc source pedestal is fixedly connected with described vacuum chamber by a felt pad, described cathode arc source pedestal is provided with a permanent magnet, a bosh is provided with in described cathode arc source pedestal, described cathode arc source pedestal offers a water intake be communicated with described bosh and a water outlet be communicated with described bosh, described titanium target and/or cathode arc source pedestal offer the pore of at least one and described vacuum chamber.
Further, the remaining void of described titanium target and cathode arc source pedestal joint is also provided with an elastic conducting thermosphere.
Particularly, described elastic conducting thermosphere is made up of metal heat-conducting material.
Particularly, described elastic conducting thermosphere is made up of nonmetallic heat conductive material.
Particularly, the internal diameter of described pore is 2 ~ 3mm, and the quantity of described pore is 1 ~ 3.
Present invention also offers a kind of air aspiration process of foregoing vacuum furnace extract system, comprise the steps:
(1) slightly take out the stage: bled by roughing vacuum pump, the pressure of vacuum chamber is evacuated to 50 ~ 200Pa from barometric pressure;
(2) vacuum stages in: bled by molecular drag pump+fore pump, pressure in vacuum tank is evacuated to 0.1Pa by 50 ~ 200Pa;
(3) essence takes out the stage: bled by electric arc titanium pump+molecular drag pump+fore pump, pressure in vacuum tank is evacuated to 10 by 0.1Pa
-2~ 10
-4pa, wherein, the reactive gas of high vacuum is extracted out by electric arc titanium pump, and the inert gas of high vacuum and middle vacuum gas are extracted out by molecular drag pump and fore pump.
Particularly, in described step (3), after described electric arc titanium pump is bled and terminated, before being exposed to air, described titanium target is made to cool 3 ~ 15min.
Vacuum furnace extract system of the present invention and air aspiration process thereof, adopt electric arc titanium pump+molecular drag pump+fore pump unit of bleeding in parallel, replace prior art to connect the high vacuum diffusion pump+middle Vacuum Roots pump machine+roughing vacuum pump machine unit of bleeding, wherein, electric arc titanium pump of the present invention is used for the reactive gas extracting high vacuum fast, molecular drag pump+fore pump is used for the inert gas extracting middle vacuum gas and high vacuum fast, and the present invention has following remarkable advantage:
(1) electric arc titanium pump and molecular drag pump are all low energy consumption pumps, add that electric arc titanium pump mainly takes out stage running in essence, and working time accounts for about 70% of whole pumpdown time usually, and therefore the present invention significantly can reduce air exhaust energy consumption;
(2) electric arc titanium pump and molecular drag pump are all the clean vacuum pumps polluted without oil vapor, and the oil vapor eliminating traditional vacuum stove extract system pollutes.
(3) electric arc titanium pump of the present invention is directly communicated with vacuum chamber, eliminates the vacuum valve between electric arc titanium pump and vacuum chamber, simplifies the structure of vacuum system, reduces the cost of vacuum system.
(4) roughing vacuum pump is only slightly taking out stage running, working time accounts for about 1/10 of whole pumpdown time usually, and the roughing vacuum pump of traditional air aspiration process need run always, therefore save considerably the energy consumption of slightly taking out the stage, and a set of roughing vacuum pump can also share for 3 ~ 10 vacuum furnace extract systems, save equipment and fund, decrease and take up an area space.
Accompanying drawing explanation
In order to be illustrated more clearly in technological scheme of the present invention, be briefly described to the accompanying drawing used required in embodiment below, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawing can also be obtained according to these accompanying drawings.
Fig. 1 is the schematic diagram of the vacuum furnace extract system that the embodiment of the present invention one provides;
Fig. 2 is the schematic diagram of the electric arc titanium pump that the embodiment of the present invention one provides.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, the technological scheme in the embodiment of the present invention is clearly and completely described.
Embodiment one
As depicted in figs. 1 and 2, a kind of vacuum furnace extract system that the embodiment of the present invention one provides, for vacuumizing, comprise vacuum chamber 11, vacuum chamber 11 is connected to electric arc titanium pump 12, molecular drag pump 13 and roughing vacuum pump 14, and molecular drag pump 13 is connected with a fore pump 15, is provided with one first vacuum valve 16 between vacuum chamber 11 and molecular drag pump 13, be provided with one second vacuum valve 17 between molecular drag pump 13 and fore pump 15, between vacuum chamber 11 and roughing vacuum pump 14, be provided with one the 3rd vacuum valve 18; Wherein, roughing vacuum pump 14 is only for slightly taking out bleeding of stage, and electric arc titanium pump 12 is mainly used in essence and takes out bleeding of stage, and molecular drag pump 13 and fore pump 15 take out bleeding of stage for middle vacuum stages and essence.
Further, described vacuum chamber is also connected with one first bleed valve 19 and a vacuum gauge 110 respectively, and wherein, the first bleed valve 19 injects air to vacuum chamber 11 after completing for vacuum furnace work; Vacuum gauge 110 is for detecting the degree of vacuum of vacuum chamber 11.Described roughing vacuum pump 14 is connected with one second bleed valve 111, and the second bleed valve 111 is for roughing vacuum pump 14 rear injection air out of service.
Particularly, described electric arc titanium pump 12 comprises titanium target 121, and the cathode arc source pedestal 122 to be connected with titanium target 121, titanium target 121 is located within vacuum chamber 11, cathode arc source pedestal 122 is located at outside vacuum chamber 11, cathode arc source pedestal 122 is fixedly connected with vacuum chamber 11 by a felt pad 123, and felt pad 123 can make to insulate between cathode arc source pedestal 122 and vacuum chamber; Cathode arc source pedestal 122 is provided with a permanent magnet 124, and permanent magnet 124 is for magnetic controlled plasma arc discharge; A bosh 125 is provided with in cathode arc source pedestal 122, cathode arc source pedestal 122 offers the water intake be communicated with bosh 125 126 and the water outlet 127 be communicated with bosh 125, cooling water can enter in bosh 125 from water intake 123, after cooling water cools titanium target 121, discharge from water outlet 127, circulate and so forth, thus realize the cooling of cooling water to titanium target 121, solve the problem causing the loss of titanium target 121 surface oxidising because titanium target 121 temperature is too high; Further, titanium target 121 and/or cathode arc source pedestal 122 offer at least one pore 128 be communicated with vacuum chamber 11, the optimum value of pore 128 internal diameter is 2 ~ 3mm, the quantity optimum value of pore 128 is 2, by this pore 128, be convenient to the gas in the remaining void 129 of titanium target 121 and cathode arc source pedestal 122 joint to extract rapidly, thus improve the stability of cathode arc source when high-vacuum discharge.
The electric arc titanium pump 12 of the present embodiment one adopts cathode arc source, the cathode target of cathode arc source adopts titanium target 121 (or other active material), cathode arc source utilizes arc discharge that titanium target 121 is evapotranspired into titanium film, the harsh chemical absorption of recycling titanium film, realizes the object extracting the reactive gas of high vacuum fast.In addition, the molecular drag pump 13+ fore pump 15 of the present embodiment one is for extracting the gas of middle vacuum, and the inert gas of high vacuum.
The present embodiment one additionally provides a kind of air aspiration process of vacuum furnace extract system, comprises the steps:
(1) initial state: close vacuum chamber 11 and all vacuum valves, all vacuum pumps are in halted state, open all bleed valves;
(2) preparatory stage: start fore pump 15, open the second vacuum valve 17, molecular drag pump 13 is started;
(3) slightly the stage is taken out: first bleed valve 19 of closing vacuum chamber 11, close the second bleed valve 111, start roughing vacuum pump 14, open the 3rd vacuum valve 18, vacuum chamber 11 is bled by roughing vacuum pump 14, and the pressure of vacuum chamber 11 is evacuated to 50 ~ 200Pa from barometric pressure, this is adopted slightly to take out technique, slightly take out pressure to significantly improve, and pressure improves the diffusion velocity of oil vapor can be made significantly to reduce, the oil vapor of roughing vacuum pump 14 can be polluted that be down to can below detection limit;
(4) vacuum stages in: close the 3rd vacuum valve 18, stop roughing vacuum pump 14, open the first vacuum valve 16, vacuum chamber 11 is bled by molecular drag pump 13+ fore pump 15, and vacuum chamber 11 pressure is evacuated to 0.1Pa by 50 ~ 200Pa;
(5) essence takes out the stage: start electric arc titanium pump 12, vacuum chamber 11 is bled by electric arc titanium pump 12 and the parallel connection of molecular drag pump 13+ fore pump 15, vacuum chamber 11 pressure is evacuated to essence by 0.1Pa and takes out pressure and (be generally 10
-2~ 10
-4pa), wherein, the reactive gas of high vacuum is extracted out by electric arc titanium pump 12, and the inert gas of high vacuum and middle vacuum gas are extracted out by molecular drag pump 13+ fore pump 15, essence take out that phases-time accounts for whole pumpdown time usually about 1/10,
Particularly, in above-mentioned steps (5), described electric arc titanium pump 12 before being exposed to air, makes titanium target 121 cool 3 ~ 15min after bleeding and terminating.
In sum, the vacuum furnace extract system that the present embodiment one provides and air aspiration process thereof, adopt electric arc titanium pump 12+ molecular drag pump 13+ fore pump 15 unit of bleeding in parallel, replace prior art to connect the high vacuum diffusion pump+middle Vacuum Roots pump machine+roughing vacuum pump unit of bleeding, wherein, electric arc titanium pump 12 of the present invention is for extracting the reactive gas of high vacuum fast, molecular drag pump 13+ fore pump 15 is for extracting the inert gas of middle vacuum gas and high vacuum fast, and the present invention has following remarkable advantage:
(1) electric arc titanium pump 12 and molecular drag pump 13 are all low energy consumption pumps, add that electric arc titanium pump 12 mainly takes out stage running in essence, and working time accounts for about 70% of whole pumpdown time usually, and therefore the present invention significantly can reduce air exhaust energy consumption;
(2) electric arc titanium pump 12 and molecular drag pump 13 are all the clean vacuum pumps polluted without oil vapor, and the oil vapor eliminating traditional vacuum stove extract system pollutes.
(3) electric arc titanium pump 12 of the present invention is directly communicated with vacuum chamber 11, eliminates the vacuum valve between electric arc titanium pump 11 and vacuum chamber 12, simplifies the structure of vacuum system, reduces the cost of vacuum system.
(4) roughing vacuum pump 14 is only slightly taking out stage running, working time accounts for about 1/10 of whole pumpdown time usually, and the roughing vacuum pump of traditional air aspiration process need run always, therefore save considerably the energy consumption of slightly taking out the stage, and a set of roughing vacuum pump can also share for 3 ~ 10 vacuum furnace extract systems, save equipment and fund, decrease and take up an area space.
Embodiment two
The present embodiment two is roughly the same with embodiment one, its difference is: the titanium target of the present embodiment two and the remaining void of cathode arc source pedestal joint are also provided with an elastic conducting thermosphere, this elastic conducting thermosphere preferred metal materials (as copper or Cuprum alloy etc.), elastic conducting thermosphere also can be made up of nonmetallic heat conductive material (as graphite, carbon fiber etc.).When passing into cooling water to the bosh in cathode arc source pedestal and cooling titanium target, this elastic conducting thermosphere can improve the heat transfer speed between titanium target and cathode arc source pedestal, can further improve the cooling effectiveness to titanium target.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications are also considered as protection scope of the present invention.
Claims (7)
1. a vacuum furnace extract system, for vacuumizing, it is characterized in that, comprise vacuum chamber, described vacuum chamber is connected to electric arc titanium pump, molecular drag pump and roughing vacuum pump, and described molecular drag pump is connected with a fore pump, is provided with one first vacuum valve between described vacuum chamber and molecular drag pump, be provided with one second vacuum valve between described molecular drag pump and fore pump, between described vacuum chamber and roughing vacuum pump, be provided with one the 3rd vacuum valve;
The cathode arc source pedestal that described electric arc titanium pump comprises titanium target and is connected with described titanium target, described titanium target is located within described vacuum chamber, described cathode arc source pedestal is located at outside described vacuum chamber, described cathode arc source pedestal is fixedly connected with described vacuum chamber by a felt pad, described cathode arc source pedestal is provided with a permanent magnet, a bosh is provided with in described cathode arc source pedestal, described cathode arc source pedestal offers a water intake be communicated with described bosh and a water outlet be communicated with described bosh, described titanium target and/or cathode arc source pedestal offer the pore of at least one and described vacuum chamber.
2. vacuum furnace extract system according to claim 1, is characterized in that, the remaining void of described titanium target and cathode arc source pedestal joint is also provided with an elastic conducting thermosphere.
3. vacuum furnace extract system according to claim 2, is characterized in that, described elastic conducting thermosphere is made up of metal heat-conducting material.
4. vacuum furnace extract system according to claim 2, is characterized in that, described elastic conducting thermosphere is made up of nonmetallic heat conductive material.
5. vacuum furnace extract system according to claim 1, is characterized in that, the internal diameter of described pore is 2 ~ 3mm, and the quantity of described pore is 1 ~ 3.
6. an air aspiration process for the vacuum furnace extract system according to any one of Claims 1 to 5, is characterized in that comprising the steps:
(1) slightly take out the stage: bled by roughing vacuum pump, the pressure of vacuum chamber is evacuated to 50 ~ 200Pa from barometric pressure;
(2) vacuum stages in: bled by molecular drag pump+fore pump, pressure in vacuum tank is evacuated to 0.1Pa by 50 ~ 200Pa;
(3) essence takes out the stage: bled by electric arc titanium pump+molecular drag pump+fore pump, pressure in vacuum tank is evacuated to 10 by 0.1Pa
-2~ 10
-4pa, wherein, the reactive gas of high vacuum is extracted out by electric arc titanium pump, and the inert gas of high vacuum and middle vacuum gas are extracted out by molecular drag pump and fore pump.
7. the air aspiration process of vacuum furnace extract system according to claim 6, is characterized in that, in described step (3), after described electric arc titanium pump is bled and terminated, before being exposed to air, makes described titanium target cool 3 ~ 15min.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310241954.7A CN103291586B (en) | 2013-06-19 | 2013-06-19 | Vacuum furnace extract system and air aspiration process thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310241954.7A CN103291586B (en) | 2013-06-19 | 2013-06-19 | Vacuum furnace extract system and air aspiration process thereof |
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| Publication Number | Publication Date |
|---|---|
| CN103291586A CN103291586A (en) | 2013-09-11 |
| CN103291586B true CN103291586B (en) | 2016-03-30 |
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|---|---|---|---|
| CN201310241954.7A Expired - Fee Related CN103291586B (en) | 2013-06-19 | 2013-06-19 | Vacuum furnace extract system and air aspiration process thereof |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN104751902A (en) * | 2013-12-25 | 2015-07-01 | 核工业西南物理研究院 | Forceful inspiratory mixed wire for nuclear fusion vacuum system |
| CN103758733A (en) * | 2014-01-29 | 2014-04-30 | 储继国 | Large medium/high vacuum gas-bleeding unit and pumping process thereof |
| CN109545420B (en) * | 2018-11-21 | 2021-01-26 | 中国科学院合肥物质科学研究院 | Ion beam biological irradiation device and method |
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| JP4717186B2 (en) * | 2000-07-25 | 2011-07-06 | 株式会社アルバック | Sputtering equipment |
| CN100564582C (en) * | 2006-09-19 | 2009-12-02 | 中国科学院合肥物质科学研究院 | For 10-8Sealing device of Pa ultrahigh vacuum circular plane magnetron sputtering target |
| CN101363116B (en) * | 2008-03-26 | 2010-06-09 | 中国科学院金属研究所 | Multi-mode programmable modulated arc ion plating apparatus controlled by rotary lateral magnetic field |
| CN201190180Y (en) * | 2008-05-23 | 2009-02-04 | 中国科学院金属研究所 | Arc spot control device of ion plating |
| CN201942743U (en) * | 2010-12-13 | 2011-08-24 | 中国科学院沈阳科学仪器研制中心有限公司 | Magnetic control target air-distribution structure |
| CN202221386U (en) * | 2011-08-17 | 2012-05-16 | 中国核动力研究设计院 | Sputtering device for preparation of radiated nuclear fuel and material samples for scanning electron microscope |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6257835B1 (en) * | 1999-03-22 | 2001-07-10 | Quantachrome Corporation | Dry vacuum pump system for gas sorption analyzer |
| CN101776063A (en) * | 2010-01-21 | 2010-07-14 | 储继国 | Large high-vacuum air pumping set |
| CN101936278A (en) * | 2010-09-13 | 2011-01-05 | 储继国 | Electric arc titanium pump and vacuum air pump group comprising same |
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| CN102691640A (en) * | 2012-05-29 | 2012-09-26 | 储琦 | Suction system and suction technology |
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Effective date of registration: 20180910 Address after: 215400 38 Qingdao West Road, Taicang Economic Development Zone, Suzhou, Jiangsu Patentee after: SUZHOU MOXING VACUUM TECHNOLOGY Co.,Ltd. Address before: 518000 Room 502, 1 new deep Village, Huanggang Middle Road, Shenzhen, Guangdong, Futian District Patentee before: Chu Jiguo |
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