CN205297861U - High -efficient vacuum pumping system of low temperature entrapment pump has been used - Google Patents
High -efficient vacuum pumping system of low temperature entrapment pump has been used Download PDFInfo
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- CN205297861U CN205297861U CN201521134430.9U CN201521134430U CN205297861U CN 205297861 U CN205297861 U CN 205297861U CN 201521134430 U CN201521134430 U CN 201521134430U CN 205297861 U CN205297861 U CN 205297861U
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- catcher
- trap
- pump
- oil diffusion
- empty room
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The utility model particularly relates to a high -efficient vacuum pumping system of low temperature entrapment pump has been used, including oil diffusion pump, real empty room, low temperature entrapment pump, first trap, second trap and cryo -trap, oil diffusion pump and real empty room are connected in order to form vacuum environment in real empty room, and the pump mouth at oil diffusion pump is fixed to the cryo -trap, and the aspirating hole department at real empty room is installed to first trap, and the bottom at real empty room is installed to the second trap, low temperature entrapment pump is connected with first trap, second trap and cryo -trap respectively. The utility model discloses having set up first trap in real empty room's aspirating hole department, having set up the second trap in real empty room's bottom, two traps are through the low temperature condensation effect on surface, and the residual gas among the entrapment vacuum system rapidly shortens time of evacuation, obtains uncontaminated vacuum environment, pump mouth at oil diffusion pump has set up the cryo -trap, can prevent that oil diffusion pump from returning oil, accelerates evacuation speed simultaneously and improve ultimate vacuum degree.
Description
Technical field
This utility model relates to art of refrigeration units, particularly relates to a kind of high-efficient vacuumizing system applying cryogenic trapping pump.
Background technology
Use in the high vacuum environment of oil diffusion pump and all there is certain residual gas, 80% is above steam, oil vapour and other high boiling steam, pumped vacuum systems of the prior art is more weak to the disposal ability of above-mentioned residual gas, concrete manifestation is both ways, one is that to extract time of residual gas long, and two is that the process to residual gas is thorough not. Residual gas not only can have a strong impact on the efficiency of evacuation, but also is the polluter of workpiece, so that the yield of product and quality are affected.
Therefore, prior art need one can efficiently remove residual gas, to realize putting forward high efficiency pumped vacuum systems.
Utility model content
The purpose of this utility model is in that to provide one can efficiently remove residual gas, to realize putting forward high efficiency pumped vacuum systems.
For achieving the above object, this utility model provides a kind of high-efficient vacuumizing system applying cryogenic trapping pump, including oil diffusion pump, vacuum chamber, cryogenic trapping pump, the first catcher, the second catcher and cryotrap; Described oil diffusion pump is connected to be formed in a vacuum chamber vacuum environment with vacuum chamber, and described cryotrap is fixed on the pumping hole of oil diffusion pump, and described first catcher is arranged on the aspirating hole place of vacuum chamber, and described second catcher is arranged on the bottom of vacuum chamber; Described cryogenic trapping pump is connected with the first catcher, the second catcher and cryotrap respectively.
Preferably, this high-efficient vacuumizing system also includes the first heating defroster and the second heating defroster, described first heating defroster and the thermo-contact of the first catcher, described second heating defroster and the thermo-contact of the second catcher.
Preferably, this high-efficient vacuumizing system has two groups of oil diffusion pumps, vacuum chamber, the first catcher, the second catcher and cryotrap, and described cryogenic trapping pump is connected with the first catcher often organized, the second catcher and cryotrap respectively.
Preferably, described first catcher, the second catcher and cryotrap are coil-like.
The beneficial effects of the utility model are: the high-efficient vacuumizing system applying cryogenic trapping pump that this utility model provides, and have the advantage that and are provided with the first catcher at the aspirating hole place of vacuum chamber, are provided with the second catcher in the bottom of vacuum chamber; Two catchers pass through the condensation at low temperature effect on surface, rapidly the residual gas in trapping vacuum system, thus being greatly shortened the time of evacuation, it is thus achieved that clean vacuum environment; Pumping hole at oil diffusion pump is provided with cryotrap, it is possible to prevents oil diffusion pump from returning oil, can also accelerate vacuum pumping rate simultaneously, and improve final vacuum.
Accompanying drawing explanation
The structure chart of the high-efficient vacuumizing system applying cryogenic trapping pump that Fig. 1 provides for this utility model.
Main element symbol description is as follows:
11, oil diffusion pump 12, vacuum chamber
13, cryogenic trapping pump the 14, first catcher
15, the second catcher 16, cryotrap.
Detailed description of the invention
In order to more clearly state the present invention, below in conjunction with accompanying drawing, the present invention is further described.
Consulting Fig. 1, the high-efficient vacuumizing system applying cryogenic trapping pump that this utility model provides, including oil diffusion pump 11, vacuum chamber 12, cryogenic trapping pump the 13, first catcher the 14, second catcher 15 and cryotrap 16; Oil diffusion pump 11 is connected with vacuum chamber 12 to form vacuum environment in vacuum chamber 12, and cryotrap 16 is fixed on the pumping hole of oil diffusion pump 11, and the first catcher 14 is arranged on the aspirating hole place of vacuum chamber 12, and the second catcher 15 is arranged on the bottom of vacuum chamber 12; Cryogenic trapping pump 13 is connected with first catcher the 14, second catcher 15 and cryotrap 16 respectively.
Compared to prior art, the high-efficient vacuumizing system applying cryogenic trapping pump that this utility model provides, it is provided with the first catcher 14 at the aspirating hole place of vacuum chamber 12, is provided with the second catcher 15 in the bottom of vacuum chamber 12; Two catchers pass through the condensation at low temperature effect on surface, rapidly the residual gas in trapping vacuum system, thus being greatly shortened the time of evacuation, it is thus achieved that clean vacuum environment; Pumping hole at oil diffusion pump 11 is provided with cryotrap 16, it is possible to prevents oil diffusion pump 11 from returning oil, can also accelerate vacuum pumping rate simultaneously, and improve final vacuum.
In the present embodiment, this high-efficient vacuumizing system also includes the first heating defroster and the second heating defroster, and the first heating defroster and the first catcher 14 thermally contact, and the second heating defroster and the second catcher 15 thermally contact.
First heating defroster and the second heating defroster can make the first catcher 14 and the second catcher 15 return to room temperature before opening the door, it is to avoid catcher absorbs substantial amounts of steam and frosting from air, and impact uses next time.
In the present embodiment, this high-efficient vacuumizing system has two groups of oil diffusion pumps 11, vacuum chamber the 12, first catcher the 14, second catcher 15 and cryotrap 16, and cryogenic trapping pump 13 is connected with first catcher the 14, second catcher 15 often organized and cryotrap 16 respectively.
One cryogenic trapping pump 13 arranges two-way output, is respectively used to two groups of oil diffusion pumps 11, vacuum chamber the 12, first catcher the 14, second catcher 15 and cryotrap 16, it is possible to reduce equipment investment. Certainly, this is only a specific embodiment of the present utility model, and cryogenic trapping pump 13 of the present utility model also can arrange multiple-channel output.
In the present embodiment, first catcher the 14, second catcher 15 and cryotrap 16 are coil-like. The coil-like contact area that can increase with gas, is conducive to improving condensation effect, improves the efficiency of remove impurity gas.
These are only preferred implementation of the present utility model; it should be pointed out that, for those skilled in the art, under the premise without departing from this utility model know-why; can also making some improvements and modifications, these improvements and modifications also should be regarded as protection domain of the present utility model.
Claims (4)
1. the high-efficient vacuumizing system applying cryogenic trapping pump, it is characterised in that include oil diffusion pump, vacuum chamber, cryogenic trapping pump, the first catcher, the second catcher and cryotrap; Described oil diffusion pump is connected to be formed in a vacuum chamber vacuum environment with vacuum chamber, and described cryotrap is fixed on the pumping hole of oil diffusion pump, and described first catcher is arranged on the aspirating hole place of vacuum chamber, and described second catcher is arranged on the bottom of vacuum chamber; Described cryogenic trapping pump is connected with the first catcher, the second catcher and cryotrap respectively.
2. the high-efficient vacuumizing system applying cryogenic trapping pump according to claim 1, it is characterized in that, this high-efficient vacuumizing system also includes the first heating defroster and the second heating defroster, described first heating defroster and the thermo-contact of the first catcher, described second heating defroster and the thermo-contact of the second catcher.
3. the high-efficient vacuumizing system applying cryogenic trapping pump according to claim 1, it is characterized in that, this high-efficient vacuumizing system has two groups of oil diffusion pumps, vacuum chamber, the first catcher, the second catcher and cryotrap, and described cryogenic trapping pump is connected with the first catcher often organized, the second catcher and cryotrap respectively.
4. the high-efficient vacuumizing system applying cryogenic trapping pump according to claim 1, it is characterised in that described first catcher, the second catcher and cryotrap are coil-like.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521134430.9U CN205297861U (en) | 2015-12-30 | 2015-12-30 | High -efficient vacuum pumping system of low temperature entrapment pump has been used |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201521134430.9U CN205297861U (en) | 2015-12-30 | 2015-12-30 | High -efficient vacuum pumping system of low temperature entrapment pump has been used |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN205297861U true CN205297861U (en) | 2016-06-08 |
Family
ID=56469442
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201521134430.9U Expired - Fee Related CN205297861U (en) | 2015-12-30 | 2015-12-30 | High -efficient vacuum pumping system of low temperature entrapment pump has been used |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN205297861U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108579310A (en) * | 2018-07-09 | 2018-09-28 | 宁波恒普真空技术有限公司 | A kind of binder wet trap and its system |
| CN108815875A (en) * | 2018-07-24 | 2018-11-16 | 北京铂阳顶荣光伏科技有限公司 | Cold-trap and vacuum-pumping system |
| CN109488563A (en) * | 2018-12-21 | 2019-03-19 | 江苏深绿新能源科技有限公司 | A kind of cold pump installation of high vacuum and method |
| CN116721904A (en) * | 2023-08-04 | 2023-09-08 | 盛吉盛半导体科技(北京)有限公司 | Cavity and method for rapidly obtaining high vacuum degree for integrated circuit equipment |
-
2015
- 2015-12-30 CN CN201521134430.9U patent/CN205297861U/en not_active Expired - Fee Related
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108579310A (en) * | 2018-07-09 | 2018-09-28 | 宁波恒普真空技术有限公司 | A kind of binder wet trap and its system |
| CN108579310B (en) * | 2018-07-09 | 2023-12-19 | 宁波恒普技术股份有限公司 | Adhesive wet-type catcher and system thereof |
| CN108815875A (en) * | 2018-07-24 | 2018-11-16 | 北京铂阳顶荣光伏科技有限公司 | Cold-trap and vacuum-pumping system |
| CN109488563A (en) * | 2018-12-21 | 2019-03-19 | 江苏深绿新能源科技有限公司 | A kind of cold pump installation of high vacuum and method |
| CN109488563B (en) * | 2018-12-21 | 2024-04-02 | 江苏深绿新能源科技有限公司 | High-vacuum air-cooling pump device and method |
| CN116721904A (en) * | 2023-08-04 | 2023-09-08 | 盛吉盛半导体科技(北京)有限公司 | Cavity and method for rapidly obtaining high vacuum degree for integrated circuit equipment |
| CN116721904B (en) * | 2023-08-04 | 2024-04-05 | 盛吉盛半导体科技(北京)有限公司 | Cavity and method for rapidly obtaining high vacuum degree for integrated circuit equipment |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20160608 Termination date: 20181230 |