CN109488563A - A kind of cold pump installation of high vacuum and method - Google Patents
A kind of cold pump installation of high vacuum and method Download PDFInfo
- Publication number
- CN109488563A CN109488563A CN201811566285.XA CN201811566285A CN109488563A CN 109488563 A CN109488563 A CN 109488563A CN 201811566285 A CN201811566285 A CN 201811566285A CN 109488563 A CN109488563 A CN 109488563A
- Authority
- CN
- China
- Prior art keywords
- cold pump
- tube
- high vacuum
- cold
- pump installation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009434 installation Methods 0.000 title claims abstract description 29
- 238000000034 method Methods 0.000 title claims abstract description 8
- 239000007788 liquid Substances 0.000 claims abstract description 39
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 24
- 238000005086 pumping Methods 0.000 claims abstract description 23
- 239000007789 gas Substances 0.000 claims abstract description 13
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 12
- 238000001816 cooling Methods 0.000 claims description 21
- 238000007789 sealing Methods 0.000 claims description 3
- 230000003447 ipsilateral effect Effects 0.000 claims description 2
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000037361 pathway Effects 0.000 description 1
- 238000004321 preservation Methods 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/06—Cooling; Heating; Prevention of freezing
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B39/00—Component parts, details, or accessories, of pumps or pumping systems specially adapted for elastic fluids, not otherwise provided for in, or of interest apart from, groups F04B25/00 - F04B37/00
- F04B39/06—Cooling; Heating; Prevention of freezing
- F04B39/064—Cooling by a cooling jacket in the pump casing
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
A kind of cold pump installation of high vacuum and method, described device it include housing body components (1), cold pump inner assembly (2), thermal sleeve component (3), inlet tube (4), outlet tube (5), fixed support (6) and insulating layer (7), it is internal that the cold pump inner assembly (2) and fixed support (6) are arranged at housing body components (1), insulating layer (7) setting is on the outside of housing body components (1), inlet tube (4) and outlet tube (5) periphery on the outside of the housing body components (1) are arranged thermal sleeve component (3), after being pumped into certain vacuum degree in shell, it has been difficult to improve again by the vacuum degree of pumping product (C), liquid nitrogen is passed through by inlet tube (4) at this time, reduce rapidly the temperature in space in shell, reduce pressure, keep the residual gas taken out in product (C) rapid Into shell, finally taken away by vacuum pump assembly (A).The present apparatus is substantially increased by the vacuum degree of pumping product, while the time vacuumized being greatly shortened again.
Description
Technical field
The present invention relates to vacuum pumping technology fields, more particularly to a kind of cold pump installation of high vacuum and method.
Background technique
With modern science and technology levels, at present vacuum pumping technology industry, in terms of application range increasingly
Extensively.But for current technology, after being pumped into certain vacuum degree by pumping product, internal vacuum degree is improved just
It can become the limit that is very slow or having had reached vacuum pump assembly, be difficult to improve by the vacuum degree of pumping product.
The Chinese patent of Publication No. CN104832398B at present discloses a kind of vaccum-pumping equipment, it increases strainer valve,
The influence that gas interior residue pumps high pressure vacuum is reduced, Low vacuum gauge and high vacuum gauge is added, essence is carried out to internal system
Really measurement controls equipment precision, while using more valve series systems, guarantees air inlet stability, selects suitable sealing means,
Vacuum system leakproofness is improved, so that system leak rate is reduced, lifting means security performance.But it still has
The technical issues of stating, it is slow reaching certain vacuum degree behind efficiency by pumping product, and can not further increase true in product
Reciprocal of duty cycle.
Therefore, it is desirable to the pumpdown time be greatly shortened, raising vacuumizes while improving by vacuum degree in pumping product
Efficiency, current technology are clearly to be unable to reach.
Summary of the invention
The purpose of the present invention is to solve proposing in above-mentioned background problems, a kind of improving by pumping product is provided
While interior vacuum degree, the pumpdown time is greatly shortened, improves the equipment for vacuumizing efficiency.
The present invention is that technical solution used by realizing above-mentioned function is as follows: a kind of cold pump installation of high vacuum, it includes outer
Housing unit, cold pump inner assembly, inlet tube and outlet tube；
The housing body components include cold pump case；
The cold pump inner assembly is set in cold pump case, and the cold pump inner assembly is connected to inlet tube and outlet tube；
The cold pump inner assembly includes multiple liquid storage packets and multistage cooling coil, and liquid storage packet and cooling coil are cross-linked, two neighboring
Support tube is provided between liquid storage packet；
Air inlet and air outlet are provided in the cold pump case；Gas outlet is for connecting vacuum pump assembly, and air inlet is for connecting
It connects by pumping product.
The inlet tube is connected to by three-way connection with the cooling coil of cold pump inner assembly input end, the inlet tube connection three
It is divided into two coil pipes after pass joint.
The outlet tube is connected to by three-way connection with the cooling coil of cold pump inner assembly outlet end, the outlet tube connection three
It is divided into two coil pipes after pass joint.
The air inlet is one or more.
The cold pump inner assembly two sides are fixed by fixed support.
The outlet tube is set to the ipsilateral of cold pump case with inlet tube.
The liquid storage packet includes shell ring, is provided with end socket at left and right sides of the shell ring；In the liquid storage Bao Leng pump case
Laterally setting.
The outer wall of the housing body components is provided with insulating layer；Inlet tube and outlet tube periphery on the outside of the cold pump case
It is arranged with thermal sleeve component.
The thermal sleeve component includes the inner tube set gradually from the inside to the outside, and middle pipe and outer tube, said inner tube are set in
On inlet tube or outlet tube, end face outside is sealed by connection ring I, and said inner tube and middle pipe inner side end pass through connection ring II
Sealing, the outer tube and middle pipe end face outside are sealed by connection ring III.
A kind of cold pump installation application method of high vacuum, it is characterised in that: firstly, by the exhaust outlet of the cold pump installation of high vacuum with
The above-mentioned cold pump installation connection of high vacuum；
Then, the air inlet in the cold pump installation lower end of high vacuum is to vacuumize connector, for connecting with by pumping product；It opens true
Empty pump assembly starts to work, after being pumped into certain vacuum degree in housing body components, is passed through liquid nitrogen, liquid nitrogen by inlet tube
Into the liquid storage packet and cooling coil of enclosure interior, space temperature in cold pump case is reduced, so that it is intracorporal to reduce cold pump case
Pressure, so that the position that gas feed enters cold pump case is run through by the residual gas in pumping product, finally by vacuum pump
Unit is taken away.
Compared with the prior art, the advantages of the present invention are as follows:
After being pumped into certain vacuum degree in housing body components, the raising of vacuum degree can become very slow or have arrived at true
The limit of empty pump assembly is difficult to further increase by the vacuum degree of pumping product, is slowly introducing liquid nitrogen by inlet tube at this time, rapidly
Space temperature in shell is reduced, pressure is reduced, so that quickly enter cold pump case by the residual gas in pumping product, final quilt
Vacuum pump assembly is taken away, and the time vacuumized has been greatly shortened while improving by pumping product vacuum degree.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the cold pump installation of high vacuum of the present invention, in which:
1, housing body components；2, cold pump inner assembly；3, thermal sleeve component；4, inlet tube；5, outlet tube；6, fixed support；7,
Insulating layer；11, flange assembly I；12, flange assembly II；13, flange assembly III；14, flange assembly IV；15, cold pump case；21,
Liquid storage packet；22, support tube；23, three-way connection；24, cooling coil；A, vacuum pump assembly；B, vacuum valve；C, by pumping product；
Fig. 2 is the structural schematic diagram of thermal sleeve component in the present invention, in which:
31, connection ring I；32, inner tube；33, connection ring II；34, middle pipe；35, outer tube；36, connection ring III；
Fig. 3 is the structural schematic diagram of liquid storage packet in the present invention, in which:
211, left head；212, shell ring；213, right end socket.
Fig. 4 is the structural schematic diagram that inlet tube is connect with cooling coil in a kind of cold pump installation of high vacuum of the present invention.
Fig. 5 is the structural schematic diagram that outlet tube is connect with cooling coil in a kind of cold pump installation of high vacuum of the present invention.
Specific embodiment
The present invention is illustrated in the following with reference to the drawings and specific embodiments:
As shown in Fig. 1 ~ Fig. 3, a kind of cold pump installation of high vacuum, it includes housing body components 1, cold pump inner assembly 2, thermal sleeve group
Part 3, inlet tube 4, outlet tube 5, fixed support 6 and insulating layer 7, the cold pump inner assembly 2 and fixed support 6 are arranged at shell
Inside body component 1；
The cold pump inner assembly 2 includes liquid storage packet 21, and support tube 22, three-way connection 23, cooling coil 24, the liquid storage packet 21 includes
Shell ring 212 is fixed with left head 211 on the left of the shell ring 212, right end socket 213, the storage is fixed on the right side of the shell ring 212
21 each section of liquid packet is by group weldering connection, and the liquid storage packet 21 has multiple, and cold pump case is arranged in multiple liquid storage packets 21 laterally side by side
In body 15, each 21 side wall of liquid storage packet is respectively connected with cooling coil 24, is provided with branch between the every two liquid storage packet 21
It is not connected to inside stay tube 22, the liquid storage packet 21 and support tube 22, the liquid storage packet 21 is laterally setting, and the inlet tube 4 is logical
It crosses three-way connection to be connected to the cooling coil 24 of cold pump 2 input end of inner assembly, the inlet tube 4 is divided into two after connecting three-way connection
Coil pipe, the outlet tube 5 are connected to by three-way connection with the cooling coil 24 of cold pump 2 outlet end of inner assembly, and the outlet tube 5 connects
It is divided into two coil pipes after three-way connection, the left or right of cold pump case 15 is arranged in the outlet tube 5, in the present embodiment,
Outlet tube 5 is arranged in shell left end, increases cooling effect, reduces liquid nitrogen loss, meanwhile, multiple groups cooling coil 24 and storage are set
Liquid packet 21 can guarantee that efficiency is higher when cooling in cold pump case 15, and temperature die-offs, and the left and right ends of the housing body components 1 are equal
It is provided with fixed support 6,6 one end of the fixed support are connected on outermost liquid storage packet 21；
The housing body components 1 include cold pump case 15, and described cold 15 one end of pump case is provided with flange assembly I 11, described cold
The other end of pump case 15 is provided with flange assembly III 13, and side wall one end of the cold pump case 15 is provided with flange assembly II
12, II 12 upper end of flange assembly is connected with gas vent c, and the side wall other end of the cold pump case 15 is provided with flange group
Part IV 14, IV 14 lower end of flange assembly are connected with air inlet d, and the air inlet d is one or more, and more flange groups are arranged
Part makes the detachable flanged joint of the cold pump installation of the high vacuum；
The inlet tube 4 in 15 outside of cold pump case and 5 periphery of outlet tube are arranged with thermal sleeve component 3, the collet
Tube assembly 3 include connection ring I 31, inner tube 32, connection ring II 33, middle pipe 34, outer tube 35 and connection ring III 36,32 sets of said inner tube
It is located on the inlet tube 4 and outlet tube 5 in cold 15 outside of pump case, is connected between said inner tube 32 and inlet tube 4 by connection ring I 31
It connects, is connected between said inner tube 32 and outlet tube 5 by connection ring I 31,32 periphery of said inner tube is arranged with middle pipe 34, said inner tube
It is connected between 32 and middle pipe 34 by connection ring II 33, middle 34 periphery of pipe is arranged with outer tube 35, the outer tube 35 and middle pipe 34
Between by connection ring III 36 connect, described 3 each section of thermal sleeve component by group weldering connection；It is interior in thermal sleeve component 3
Pipe 14, outer tube 15 and middle pipe 17 considerably increase thermally conductive pathways, reduce the evaporation of liquid nitrogen, to reduce the loss of liquid nitrogen；
The outer wall of the housing body components 1 is additionally provided with one layer of heat preservation layer 7, and insulating layer 7 keeps the temperature shell, greatly reduces
Liquid nitrogen vaporization reduces loss.
The application method of the present apparatus is as follows:
Firstly, the exhaust outlet c of the cold pump installation of high vacuum is connect with vacuum pump assembly；
Then, one or more air inlet d are set in the cold pump installation lower end of high vacuum, setting is taken out true below each air inlet d
Empty connector, for being connect with by pumping products C；
Later, the vacuum pump assembly A for opening pumped vacuum systems starts to work, when being pumped into certain vacuum in housing body components 1
After degree, the vacuum degree in device improves the limit that will become slowly even to have had arrived at very much vacuum pump assembly A, so by
The vacuum degree for taking out products C has also been difficult to be improved again；
At this point, being slowly introducing liquid nitrogen by inlet tube 4, liquid nitrogen enters the liquid storage packet 21 and cooling coil 24 of enclosure interior, drops rapidly
Space temperature in low cold pump case 15, so that the pressure in cold pump case 15 is reduced, so that by the residual gas in pumping products C
Body runs through the position that gas feed d enters cold pump case 15, is finally taken away by vacuum pump assembly A.
Therefore, substantially increased using the present apparatus by the vacuum degree of pumping product, and be greatly shortened vacuumize when
Between, it improves work efficiency.
In addition to the implementation, all to use equivalent transformation or equivalent replacement the invention also includes there is an other embodiments
The technical solution that mode is formed should all be fallen within the scope of the hereto appended claims.
Claims (10)
1. a kind of cold pump installation of high vacuum, it is characterised in that: described device includes housing body components (1), cold pump inner assembly (2),
Inlet tube (4) and outlet tube (5)；
The housing body components (1) include cold pump case (15)；
The cold pump inner assembly (2) is set in cold pump case (15), the cold pump inner assembly (2) liquid with inlet tube (4) and out
Manage (5) connection；
The cold pump inner assembly (2) includes multiple liquid storage packets (21) and multistage cooling coil (24), liquid storage packet (21) and cooling coil
(24) it is cross-linked, is provided with support tube (22) between two neighboring liquid storage packet (21)；
Air inlet (d) and gas outlet are provided on the cold pump case (15)；Gas outlet is for connecting vacuum pump assembly, air inlet
(d) for connecting by pumping product.
2. the cold pump installation of a kind of high vacuum according to claim 1, it is characterised in that: the inlet tube (4) passes through threeway
Connector is connected to the cooling coil (24) of cold pump inner assembly (2) input end, is divided into two after inlet tube (4) the connection three-way connection
Coil pipe.
3. the cold pump installation of a kind of high vacuum according to claim 1, it is characterised in that: the outlet tube (5) passes through threeway
Connector is connected to the cooling coil (24) of cold pump inner assembly (2) outlet end, is divided into two after outlet tube (5) the connection three-way connection
Coil pipe.
4. the cold pump installation of a kind of high vacuum according to claim 1, it is characterised in that: the air inlet (d) be one or
It is multiple.
5. the cold pump installation of a kind of high vacuum according to claim 1, it is characterised in that: cold pump inner assembly (2) two sides
It is fixed by fixed support (6).
6. the cold pump installation of a kind of high vacuum according to claim 1, it is characterised in that: the outlet tube (5) and inlet tube
(4) it is set to the ipsilateral of cold pump case (15).
7. the cold pump installation of a kind of high vacuum according to claim 1, it is characterised in that: the liquid storage packet (21) includes shell ring
(212), end socket is provided at left and right sides of the shell ring (212)；The liquid storage packet (21) is laterally arranged in cold pump case (15).
8. a kind of cold pump installation of high vacuum described in one of -7 according to claim 1, it is characterised in that: the housing body components
(1) outer wall is provided with insulating layer (7)；Inlet tube (4) and outlet tube (5) periphery on the outside of the cold pump case (15) are arranged
There are thermal sleeve component (3).
9. the cold pump installation of a kind of high vacuum according to claim 8, it is characterised in that: thermal sleeve component (3) packet
Include the inner tube (32) set gradually from the inside to the outside, middle pipe (34) and outer tube (35), said inner tube (32) be set in inlet tube (4) or
On outlet tube (5), end face outside is sealed by connection ring I (31), and said inner tube (32) He Zhongguan (34) inner side end passes through
Connection ring II (33) sealing, outer tube (35) He Zhongguan (34) end face outside are sealed by connection ring III (36).
10. a kind of cold pump installation application method of high vacuum, it is characterised in that: firstly, by the exhaust outlet (c) of the cold pump installation of high vacuum
It is connect with the cold pump installation of high vacuum described in claim 1；
Then, the air inlet (d) in the cold pump installation lower end of high vacuum is to vacuumize connector, for connecting with by pumping product (C)；
Vacuum pump assembly is opened, starts to work, after being pumped into certain vacuum degree in housing body components, liquid is passed through by inlet tube
Nitrogen, liquid nitrogen enters the liquid storage packet and cooling coil of enclosure interior, reduces space temperature in cold pump case, to reduce cold pump case
Intracorporal pressure, so that the position that gas feed (d) enters cold pump case is run through by the residual gas in pumping product (C),
Finally taken away by vacuum pump assembly.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811566285.XA CN109488563B (en) | 2018-12-21 | 2018-12-21 | High-vacuum air-cooling pump device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811566285.XA CN109488563B (en) | 2018-12-21 | 2018-12-21 | High-vacuum air-cooling pump device and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109488563A true CN109488563A (en) | 2019-03-19 |
| CN109488563B CN109488563B (en) | 2024-04-02 |
Family
ID=65711099
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811566285.XA Active CN109488563B (en) | 2018-12-21 | 2018-12-21 | High-vacuum air-cooling pump device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109488563B (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006080416A1 (en) * | 2005-01-28 | 2006-08-03 | Matsushita Electric Industrial Co., Ltd. | Thermal insulator |
| CN202707433U (en) * | 2012-08-07 | 2013-01-30 | 北京和华腾真空泵压缩机有限公司 | Vacuum air removing system |
| CN103017561A (en) * | 2012-12-13 | 2013-04-03 | 常州博朗低温设备有限公司 | Vacuumizing condenser |
| CN203047815U (en) * | 2012-12-13 | 2013-07-10 | 常州博朗低温设备有限公司 | Vacuumizing device of vacuum insulation container |
| CN203710732U (en) * | 2014-02-20 | 2014-07-16 | 武汉大学 | Cold trap capable of externally connecting coolant |
| CN205297861U (en) * | 2015-12-30 | 2016-06-08 | 深圳市富达冷冻设备有限公司 | High -efficient vacuum pumping system of low temperature entrapment pump has been used |
| CN206874452U (en) * | 2017-06-06 | 2018-01-12 | 苏州罗旭真空科技有限公司 | A kind of low-temperature coil trap |
| CN209261756U (en) * | 2018-12-21 | 2019-08-16 | 江苏深绿新能源科技有限公司 | A kind of cold pump installation of high vacuum |
-
2018
- 2018-12-21 CN CN201811566285.XA patent/CN109488563B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006080416A1 (en) * | 2005-01-28 | 2006-08-03 | Matsushita Electric Industrial Co., Ltd. | Thermal insulator |
| CN202707433U (en) * | 2012-08-07 | 2013-01-30 | 北京和华腾真空泵压缩机有限公司 | Vacuum air removing system |
| CN103017561A (en) * | 2012-12-13 | 2013-04-03 | 常州博朗低温设备有限公司 | Vacuumizing condenser |
| CN203047815U (en) * | 2012-12-13 | 2013-07-10 | 常州博朗低温设备有限公司 | Vacuumizing device of vacuum insulation container |
| CN203710732U (en) * | 2014-02-20 | 2014-07-16 | 武汉大学 | Cold trap capable of externally connecting coolant |
| CN205297861U (en) * | 2015-12-30 | 2016-06-08 | 深圳市富达冷冻设备有限公司 | High -efficient vacuum pumping system of low temperature entrapment pump has been used |
| CN206874452U (en) * | 2017-06-06 | 2018-01-12 | 苏州罗旭真空科技有限公司 | A kind of low-temperature coil trap |
| CN209261756U (en) * | 2018-12-21 | 2019-08-16 | 江苏深绿新能源科技有限公司 | A kind of cold pump installation of high vacuum |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109488563B (en) | 2024-04-02 |
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