CN209261756U - A kind of cold pump installation of high vacuum - Google Patents
A kind of cold pump installation of high vacuum Download PDFInfo
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- CN209261756U CN209261756U CN201822150305.7U CN201822150305U CN209261756U CN 209261756 U CN209261756 U CN 209261756U CN 201822150305 U CN201822150305 U CN 201822150305U CN 209261756 U CN209261756 U CN 209261756U
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- cold pump
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- high vacuum
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Abstract
A kind of cold pump installation of high vacuum, it includes housing body components (1), cold pump inner assembly (2), thermal sleeve component (3), inlet tube (4), outlet tube (5), fixed support (6) and insulating layer (7), it is internal that the cold pump inner assembly (2) and fixed support (6) are arranged at housing body components (1), insulating layer (7) setting is on the outside of housing body components (1), inlet tube (4) and outlet tube (5) periphery on the outside of the housing body components (1) are arranged thermal sleeve component (3), after being pumped into certain vacuum degree in shell, it has been difficult to improve again by the vacuum degree of pumping product (C), liquid nitrogen is passed through by inlet tube (4) at this time, reduce rapidly the temperature in space in shell, reduce pressure, the residual gas taken out in product (C) is set to quickly enter shell, finally It is taken away by vacuum pump assembly (A).The present apparatus is substantially increased by the vacuum degree of pumping product, while the time vacuumized being greatly shortened again.
Description
Technical field
The utility model relates to vacuum pumping technology fields, more particularly to a kind of cold pump installation of high vacuum.
Background technique
With modern science and technology levels, at present vacuum pumping technology industry, in terms of application range increasingly
Extensively.But for current technology, after being pumped into certain vacuum degree by pumping product, internal vacuum degree is improved just
It can become the limit that is very slow or having had reached vacuum pump assembly, be difficult to improve by the vacuum degree of pumping product.
The Chinese patent of Publication No. CN104832398B at present discloses a kind of vaccum-pumping equipment, it increases strainer valve,
The influence that gas interior residue pumps high pressure vacuum is reduced, Low vacuum gauge and high vacuum gauge is added, essence is carried out to internal system
Really measurement controls equipment precision, while using more valve series systems, guarantees air inlet stability, selects suitable sealing means,
Vacuum system leakproofness is improved, so that system leak rate is reduced, lifting means security performance.But it still has
The technical issues of stating, it is slow reaching certain vacuum degree behind efficiency by pumping product, and can not further increase true in product
Reciprocal of duty cycle.
Therefore, it is desirable to the pumpdown time be greatly shortened, raising vacuumizes while improving by vacuum degree in pumping product
Efficiency, current technology are clearly to be unable to reach.
Utility model content
Purpose of the utility model is to solve being proposed in above-mentioned background problems, provides and a kind of taken out improving
In product while vacuum degree, the pumpdown time is greatly shortened, improves the equipment for vacuumizing efficiency.
The utility model is that technical solution used by realizing above-mentioned function is as follows: a kind of cold pump installation of high vacuum, it is wrapped
Include housing body components, cold pump inner assembly, inlet tube and outlet tube；
The housing body components include cold pump case；
The cold pump inner assembly is set in cold pump case, and the cold pump inner assembly is connected to inlet tube and outlet tube；
The cold pump inner assembly includes multiple liquid storage packets and multistage cooling coil, and liquid storage packet and cooling coil are cross-linked, adjacent
Support tube is provided between two liquid storage packets；
Air inlet and air outlet are provided in the cold pump case；It is used for connecting vacuum pump assembly, air inlet gas outlet
In connection by pumping product.
The inlet tube is connected to by three-way connection with the cooling coil of cold pump inner assembly input end, the inlet tube connection three
It is divided into two coil pipes after pass joint.
The outlet tube is connected to by three-way connection with the cooling coil of cold pump inner assembly outlet end, the outlet tube connection three
It is divided into two coil pipes after pass joint.
The air inlet is one or more.
The cold pump inner assembly two sides are fixed by fixed support.
The outlet tube is set to the ipsilateral of cold pump case with inlet tube.
The liquid storage packet includes shell ring, is provided with end socket at left and right sides of the shell ring；In the liquid storage Bao Leng pump case
Laterally setting.
The outer wall of the housing body components is provided with insulating layer；Inlet tube and outlet tube periphery on the outside of the cold pump case
It is arranged with thermal sleeve component.
The thermal sleeve component includes the inner tube set gradually from the inside to the outside, and middle pipe and outer tube, said inner tube are set in
On inlet tube or outlet tube, end face outside is sealed by connection ring I, and said inner tube and middle pipe inner side end pass through connection ring II
Sealing, the outer tube and middle pipe end face outside are sealed by connection ring III.
Compared with the prior art, the advantages of the utility model are:
After being pumped into certain vacuum degree in housing body components, the raising of vacuum degree can become very slow or have arrived at
The limit of vacuum pump assembly, is difficult to further increase, is slowly introducing liquid nitrogen by inlet tube at this time by the vacuum degree of pumping product,
Space temperature in shell is reduced rapidly, pressure is reduced, so that quickly entering cold pump case by the residual gas in pumping product, most
It is taken away eventually by vacuum pump assembly, the time vacuumized has been greatly shortened while improving by pumping product vacuum degree.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of the cold pump installation of high vacuum of the utility model, in which:
1, housing body components；2, cold pump inner assembly；3, thermal sleeve component；4, inlet tube；5, outlet tube；6, fixed branch
Support；7, insulating layer；11, flange assembly I；12, flange assembly II；13, flange assembly III；14, flange assembly IV；15, cold pump case
Body；21, liquid storage packet；22, support tube；23, three-way connection；24, cooling coil；A, vacuum pump assembly；B, vacuum valve；C, it is taken out and is produced
Product；
Fig. 2 is the structural schematic diagram of thermal sleeve component in a kind of cold pump installation of high vacuum of the utility model, in which:
31, connection ring I；32, inner tube；33, connection ring II；34, middle pipe；35, outer tube；36, connection ring III；
Fig. 3 is the structural schematic diagram of liquid storage packet in a kind of cold pump installation of high vacuum of the utility model, in which:
211, left head；212, shell ring；213, right end socket.
Fig. 4 is the structural schematic diagram that inlet tube is connect with cooling coil in a kind of cold pump installation of high vacuum of the utility model.
Fig. 5 is the structural schematic diagram that outlet tube is connect with cooling coil in a kind of cold pump installation of high vacuum of the utility model.
Specific embodiment
The utility model is illustrated in the following with reference to the drawings and specific embodiments:
As shown in Fig. 1 ~ Fig. 5, a kind of cold pump installation of high vacuum, it includes housing body components 1, cold pump inner assembly 2, collet
Tube assembly 3, inlet tube 4, outlet tube 5, fixed support 6 and insulating layer 7, the cold pump inner assembly 2 and fixed support 6 are arranged at
Inside housing body components 1；
The cold pump inner assembly 2 includes liquid storage packet 21, support tube 22, three-way connection 23, cooling coil 24, the liquid storage packet 21
Including shell ring 212, it is fixed with left head 211 on the left of the shell ring 212, right end socket 213, institute are fixed on the right side of the shell ring 212
21 each section of liquid storage packet is stated by group weldering connection, the liquid storage packet 21 has multiple, and multiple liquid storage packets 21 are arranged in cold laterally side by side
In pump case 15, each 21 side wall of liquid storage packet is respectively connected with cooling coil 24, is respectively provided between the every two liquid storage packet 21
There is support tube 22, be not connected to inside the liquid storage packet 21 and support tube 22, the liquid storage packet 21 is laterally setting, the inlet tube
4 are connected to by three-way connection with the cooling coil 24 of cold pump 2 input end of inner assembly, and the inlet tube 4 is divided into after connecting three-way connection
Two coil pipes, the outlet tube 5 are connected to by three-way connection with the cooling coil 24 of cold pump 2 outlet end of inner assembly, the outlet tube 5
It is divided into two coil pipes after connection three-way connection, the left or right of cold pump case 15 is arranged in the outlet tube 5, in the present embodiment
In, outlet tube 5 is arranged in shell left end, and cooling effect is increased, liquid nitrogen loss is reduced, meanwhile, multiple groups cooling coil 24 is set
It can guarantee that efficiency is higher when cooling down in cold pump case 15 with liquid storage packet 21, temperature die-offs, the left and right two of the housing body components 1
End is provided with fixed support 6, and 6 one end of the fixed support are connected on outermost liquid storage packet 21；
The housing body components 1 include cold pump case 15, and described cold 15 one end of pump case is provided with flange assembly I 11, institute
The other end for stating cold pump case 15 is provided with flange assembly III 13, and side wall one end of the cold pump case 15 is provided with flange assembly
II 12, II 12 upper end of flange assembly is connected with gas vent c, and the side wall other end of the cold pump case 15 is provided with flange
Component IV 14, IV 14 lower end of flange assembly are connected with air inlet d, and the air inlet d is one or more, and more flanges are arranged
Component makes the detachable flanged joint of the cold pump installation of the high vacuum；
The inlet tube 4 in 15 outside of the cold pump case and 5 periphery of outlet tube are arranged with thermal sleeve component 3, it is described every
Hot jacket tube assembly 3 includes connection ring I 31, inner tube 32, connection ring II 33, middle pipe 34, outer tube 35 and connection ring III 36, said inner tube
32 are set on the inlet tube 4 and outlet tube 5 in cold 15 outside of pump case, pass through connection ring I 31 between said inner tube 32 and inlet tube 4
Connection is connected between said inner tube 32 and outlet tube 5 by connection ring I 31, and 32 periphery of said inner tube is arranged with middle pipe 34, described interior
It is connected between pipe 32 and middle pipe 34 by connection ring II 33, middle 34 periphery of pipe is arranged with outer tube 35, the outer tube 35 and middle pipe
It is connected between 34 by connection ring III 36, described 3 each section of thermal sleeve component passes through group weldering connection；In thermal sleeve component 3
Inner tube 14, outer tube 15 and middle pipe 17 considerably increase thermally conductive pathways, reduce the evaporation of liquid nitrogen, to reduce the loss of liquid nitrogen；
The outer wall of the housing body components 1 is additionally provided with one layer of heat preservation layer 7, and insulating layer 7 keeps the temperature shell, subtracts significantly
Lack liquid nitrogen vaporization, reduces loss.
The control method of the present apparatus is as follows:
Firstly, the exhaust outlet c of the cold pump installation of high vacuum is connect with vacuum pump assembly；
Then, one or more air inlet d are set in the cold pump installation lower end of high vacuum, are arranged below each air inlet d
Connector is vacuumized, for connecting with by pumping products C；
Later, the vacuum pump assembly A for opening pumped vacuum systems starts to work, certain when being pumped into housing body components 1
After vacuum degree, the vacuum degree in device improves the limit that will become slowly even to have had arrived at very much vacuum pump assembly A, institute
To be also difficult to be improved again by the vacuum degree of pumping products C；
At this point, being slowly introducing liquid nitrogen by inlet tube 4, liquid nitrogen enters the liquid storage packet 21 and cooling coil 24 of enclosure interior, fast
Speed reduces space temperature in cold pump case 15, so that the pressure in cold pump case 15 is reduced, so that by residual in pumping products C
Residual air body runs through the position that gas feed d enters cold pump case 15, is finally taken away by vacuum pump assembly A.
Therefore, substantially increased using the present apparatus by the vacuum degree of pumping product, and be greatly shortened vacuumize when
Between, it improves work efficiency.
In addition to the implementation, the utility model further includes having other embodiments, all to use equivalents or equivalent
The technical solution that alternative is formed, should all fall within the protection scope of the utility model claims.
Claims (9)
1. a kind of cold pump installation of high vacuum, it is characterised in that: described device includes housing body components (1), cold pump inner assembly (2),
Inlet tube (4) and outlet tube (5)；
The housing body components (1) include cold pump case (15)；
The cold pump inner assembly (2) is set in cold pump case (15), the cold pump inner assembly (2) liquid with inlet tube (4) and out
Manage (5) connection；
The cold pump inner assembly (2) includes multiple liquid storage packets (21) and multistage cooling coil (24), liquid storage packet (21) and cooling coil
(24) it is cross-linked, is provided with support tube (22) between two neighboring liquid storage packet (21)；
Air inlet (d) and gas outlet are provided on the cold pump case (15)；Gas outlet is for connecting vacuum pump assembly, air inlet
(d) for connecting by pumping product.
2. the cold pump installation of a kind of high vacuum according to claim 1, it is characterised in that: the inlet tube (4) passes through threeway
Connector is connected to the cooling coil (24) of cold pump inner assembly (2) input end, is divided into two after inlet tube (4) the connection three-way connection
Coil pipe.
3. the cold pump installation of a kind of high vacuum according to claim 1, it is characterised in that: the outlet tube (5) passes through threeway
Connector is connected to the cooling coil (24) of cold pump inner assembly (2) outlet end, is divided into two after outlet tube (5) the connection three-way connection
Coil pipe.
4. the cold pump installation of a kind of high vacuum according to claim 1, it is characterised in that: the air inlet (d) be one or
It is multiple.
5. the cold pump installation of a kind of high vacuum according to claim 1, it is characterised in that: cold pump inner assembly (2) two sides
It is fixed by fixed support (6).
6. the cold pump installation of a kind of high vacuum according to claim 1, it is characterised in that: the outlet tube (5) and inlet tube
(4) it is set to the ipsilateral of cold pump case (15).
7. the cold pump installation of a kind of high vacuum according to claim 1, it is characterised in that: the liquid storage packet (21) includes shell ring
(212), end socket is provided at left and right sides of the shell ring (212)；The liquid storage packet (21) is laterally arranged in cold pump case (15).
8. a kind of cold pump installation of high vacuum described in one of -7 according to claim 1, it is characterised in that: the housing body components
(1) outer wall is provided with insulating layer (7)；Inlet tube (4) and outlet tube (5) periphery on the outside of the cold pump case (15) are arranged
There are thermal sleeve component (3).
9. the cold pump installation of a kind of high vacuum according to claim 8, it is characterised in that: thermal sleeve component (3) packet
Include the inner tube (32) set gradually from the inside to the outside, middle pipe (34) and outer tube (35), said inner tube (32) be set in inlet tube (4) or
On outlet tube (5), end face outside is sealed by connection ring I (31), and said inner tube (32) He Zhongguan (34) inner side end passes through
Connection ring II (33) sealing, outer tube (35) He Zhongguan (34) end face outside are sealed by connection ring III (36).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822150305.7U CN209261756U (en) | 2018-12-21 | 2018-12-21 | A kind of cold pump installation of high vacuum |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201822150305.7U CN209261756U (en) | 2018-12-21 | 2018-12-21 | A kind of cold pump installation of high vacuum |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209261756U true CN209261756U (en) | 2019-08-16 |
Family
ID=67560558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201822150305.7U Active CN209261756U (en) | 2018-12-21 | 2018-12-21 | A kind of cold pump installation of high vacuum |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209261756U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109488563A (en) * | 2018-12-21 | 2019-03-19 | 江苏深绿新能源科技有限公司 | A kind of cold pump installation of high vacuum and method |
| CN117329105A (en) * | 2023-11-22 | 2024-01-02 | 烟台东德氢能技术有限公司 | Vacuum heat insulation method of liquid hydrogen pump |
-
2018
- 2018-12-21 CN CN201822150305.7U patent/CN209261756U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109488563A (en) * | 2018-12-21 | 2019-03-19 | 江苏深绿新能源科技有限公司 | A kind of cold pump installation of high vacuum and method |
| CN109488563B (en) * | 2018-12-21 | 2024-04-02 | 江苏深绿新能源科技有限公司 | High-vacuum air-cooling pump device and method |
| CN117329105A (en) * | 2023-11-22 | 2024-01-02 | 烟台东德氢能技术有限公司 | Vacuum heat insulation method of liquid hydrogen pump |
| CN117329105B (en) * | 2023-11-22 | 2024-05-07 | 烟台东德氢能技术有限公司 | Vacuum heat insulation method of liquid hydrogen pump |
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