CN218207258U

CN218207258U - Diffusion pump device and vacuum system

Info

Publication number: CN218207258U
Application number: CN202222598825.0U
Authority: CN
Inventors: 张殷; 李景会; 徐胜; 刘智山
Original assignee: Suzhou Lanchuang Technology Co ltd
Current assignee: Suzhou Lanchuang Technology Co ltd
Priority date: 2022-09-29
Filing date: 2022-09-29
Publication date: 2023-01-03
Anticipated expiration: 2032-09-29

Abstract

The utility model relates to a diffusion pump device and vacuum system, the diffusion pump device includes: the inner cylinder body is provided with an opening and a diffusion cavity, the opening is communicated with the diffusion cavity, and the diffusion cavity is communicated with the vacuum cavity through the opening; the outer cylinder body, the outer cylinder body cover is located outside the inner cylinder body, and forms the interval space between outer cylinder body and the inner cylinder body, the interval space is vacuum state. Above-mentioned diffusion pump device, at the course of the work, the heating member of diffusion intracavity becomes steam to the medium heating, because there is vacuum state's interval space between outer cylinder body and the inner cylinder body, consequently can play isolated effect to the inner cylinder body, is favorable to restricting the conduction of inner cylinder body intermediate temperature to reduce the radiating rate of diffusion intracavity medium, be favorable to reducing the heat energy loss, and then reduce diffusion pump device's whole energy consumption and manufacturing cost.

Description

Diffusion pump device and vacuum system

Technical Field

The utility model relates to a vacuum pump technical field especially relates to a diffusion pump device and vacuum system.

Background

Diffusion pumps are one of the most widespread and leading tools currently used to obtain high vacuum, commonly referred to as oil diffusion pumps. The vacuum coating device is widely applied to the field of vacuum coating, and mainly comprises a pump body, pump oil, a pump core, an evaporation system, a cooling system, an injection system, a control system and the like, wherein under the low vacuum condition formed by a front-stage vacuum pump, the evaporation system enables the pump oil to be boiled and evaporated, generated steam is sprayed out through the injection system at an extremely high speed, gas molecules at the upper part in the pump are compressed to a suction port of the front-stage pump in a grading manner, the gas molecules are captured by the oil molecules, the oil steam is condensed at the lower part of the pump through the cooling system, the released gas molecules are pumped away by the front-stage pump, and the condensed pump oil returns to the evaporation system to be heated again, so that the purpose of air suction is achieved through the cyclic operation.

In the prior art, when the oil temperature is heated to a preset temperature in the operation of the oil diffusion pump, a large amount of heat is dissipated and taken away by the shell to be wasted, the heat energy loss is large, and therefore the overall energy consumption is high.

SUMMERY OF THE UTILITY MODEL

Accordingly, there is a need for a diffusion pump device and a vacuum system that can effectively reduce thermal energy loss.

The technical scheme is as follows: a diffusion pump apparatus, comprising: the inner cylinder body is provided with an opening and a diffusion cavity, the opening is communicated with the diffusion cavity, and the diffusion cavity is communicated with the vacuum cavity through the opening; the outer cylinder body, the outer cylinder body cover is located outside the inner cylinder body, and forms the interval space between outer cylinder body and the inner cylinder body, the interval space is vacuum state.

Above-mentioned diffusion pump device, at the course of the work, the heating member of diffusion intracavity becomes steam to the medium heating, because there is vacuum state's interval space between outer cylinder body and the inner cylinder body, consequently can play isolated effect to the inner cylinder body, is favorable to restricting the conduction of inner cylinder body intermediate temperature to reduce the radiating rate of diffusion intracavity medium, be favorable to reducing the heat energy loss, and then reduce diffusion pump device's whole energy consumption and manufacturing cost.

In one embodiment, the separation space includes a first sub-chamber and a second sub-chamber, the first sub-chamber is disposed at an interval along a circumferential side wall of the inner cylinder, the second sub-chamber is disposed corresponding to a bottom wall of the inner cylinder, and both the first sub-chamber and the second sub-chamber are in a vacuum state.

In one embodiment, the diffusion pump device further comprises a partition plate, the partition plate is arranged between the first split cavity and the second split cavity, and two opposite ends of the partition plate are respectively in supporting fit with the inner wall of the outer cylinder body and the outer wall of the inner cylinder body.

In one embodiment, the outer cylinder includes a sleeve and a base, the sleeve is sleeved outside the inner cylinder along the circumferential direction of the inner cylinder and encloses the first split cavity, the base is disposed corresponding to the bottom wall of the inner cylinder, the base is connected to the sleeve, the isolation plate is disposed between the base and the sleeve, and the base, the inner cylinder and the isolation plate together enclose the second split cavity.

In one embodiment, the diffusion pump device further comprises a connecting flange, the outer wall of the opening is connected with the connecting flange, one end of the sleeve, close to the opening, is connected with the connecting flange, and the connecting flange is used for connecting a vacuum cavity.

In one embodiment, the diffusion pump device further comprises a cooling pipe disposed in the first split cavity around a circumferential side wall of the inner cylinder, the cooling pipe being used for introducing a cooling medium.

In one embodiment, the diffusion pump device further comprises an exhaust pipe, one end of the exhaust pipe penetrates through the outer cylinder body to be communicated with the diffusion cavity, and the other end of the exhaust pipe is used for pre-pump exhaust.

In one embodiment, the diffusion pump device further comprises a filling medium, the filling medium is arranged in the space, and the filling medium is used for heat preservation.

In one embodiment, the diffusion pump device further comprises a spraying tower component and a heating element, the heating element is arranged on the bottom wall of the inner cylinder body, the spraying tower component is located in the diffusion cavity, and the heating element is used for heating the diffusion medium in the diffusion cavity.

A vacuum system comprises a vacuum cavity and the diffusion pump device, wherein the inner cylinder and the outer cylinder are communicated with the vacuum cavity through the opening.

Above-mentioned vacuum system, in the course of the work, the heating member of diffusion intracavity becomes steam to the medium heating, because there is vacuum state's interval space between outer cylinder body and the inner cylinder body, consequently can play isolated effect to the inner cylinder body, is favorable to restricting the conduction of inner cylinder body intermediate temperature to reduce the radiating rate of diffusion intracavity medium, be favorable to reducing the heat energy loss, and then reduce diffusion pump device's whole energy consumption and manufacturing cost.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this application, are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification.

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.

FIG. 1 is a schematic diagram of an overall structure of a diffusion pump apparatus according to an embodiment;

fig. 2 is a schematic diagram of an internal structure of the diffusion pump apparatus according to an embodiment.

Description of reference numerals:

100. a diffusion pump device; 110. an inner cylinder body; 111. a diffusion chamber; 120. an outer cylinder body; 121. a separator plate; 122. a sleeve; 123. a base; 130. an intervening space; 131. a first split cavity; 132. a second body lumen; 140. a connecting flange; 150. a cooling pipe; 160. an exhaust pipe; 170. a spray tower assembly; 180. a heating member.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, as those skilled in the art will be able to make similar modifications without departing from the spirit and scope of the present invention.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.

In the present application, unless expressly stated or limited otherwise, a first feature "on" or "under" a second feature may be directly contacting the second feature or the first and second features may be indirectly contacting the second feature through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. As used herein, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are for purposes of illustration only and do not denote a single embodiment.

Referring to fig. 1 and 2, fig. 1 is a schematic diagram illustrating an overall structure of a diffusion pump device 100 according to an embodiment of the present invention; fig. 2 shows a schematic diagram of the internal structure of the diffusion pump apparatus 100 according to an embodiment of the present invention. An embodiment of the present invention provides a diffusion pump device 100, the diffusion pump device 100 includes: the vacuum cylinder comprises an inner cylinder body 110 and an outer cylinder body 120, wherein the inner cylinder body 110 is provided with an opening and a diffusion cavity 111, the opening is communicated with the diffusion cavity 111, and the diffusion cavity 111 is communicated with a vacuum cavity through the opening. The outer cylinder 120 is sleeved outside the inner cylinder 110, and an interval space 130 is formed between the outer cylinder 120 and the inner cylinder 110, and the interval space 130 is in a vacuum state.

In the working process of the diffusion pump device 100, the medium is heated by the heating element 180 in the diffusion cavity 111 to become steam, and the vacuum space 130 exists between the outer cylinder body 120 and the inner cylinder body 110, so that the inner cylinder body 110 can be isolated, the conduction of the temperature in the inner cylinder body 110 can be limited, the heat dissipation rate of the medium in the diffusion cavity 111 can be reduced, the heat energy loss can be reduced, and the overall energy consumption and the production cost of the diffusion pump device 100 can be reduced.

In one embodiment, referring to fig. 2, the spacing space 130 includes a first sub-chamber 131 and a second sub-chamber 132, the first sub-chamber 131 is disposed at an interval along a circumferential sidewall of the inner cylinder 110, the second sub-chamber 132 is disposed corresponding to a bottom wall of the inner cylinder 110, and both the first sub-chamber 131 and the second sub-chamber 132 are in a vacuum state. In this way, the first and second sub-chambers 131 and 132 can insulate different positions such as the side wall and the bottom wall of the inner cylinder 110, thereby improving the vacuum insulation effect.

Further, referring to fig. 2, the diffusion pump device 100 further includes a partition plate 121, the partition plate 121 is disposed between the first chamber 131 and the second chamber 132, and opposite ends of the partition plate 121 are respectively supported and matched with the inner wall of the outer cylinder 120 and the outer wall of the inner cylinder 110. So, on the one hand can make things convenient for the installation and the dismantlement of sleeve 122, guarantee the structural stability between interior cylinder body 110 and the outer cylinder body 120, avoid outer cylinder body 120 and interior cylinder body 110 to take place deformation and lead to the contact.

Specifically, the partition plate 121 has an annular structure and is disposed between the circumferential side walls of the inner cylinder 110 and the outer cylinder 120 by welding, clamping, bonding, or the like.

Alternatively, the material of the isolation plate 121 may be teflon, ceramic, aluminum alloy or other materials.

Specifically, referring to fig. 2, the isolation plate 121 is made of ceramic. So, it is effectual to insulate against heat, and stable in structure is favorable to reducing the heat conduction of inner cylinder body 110 to reduce the heat loss. The present embodiment provides only a specific material selection for the isolation plate 121, but not limited thereto.

In one embodiment, referring to fig. 2, the outer cylinder 120 includes a sleeve 122 and a base 123, the sleeve 122 is sleeved outside the inner cylinder 110 along the circumference of the inner cylinder 110 and surrounds a first split cavity 131, the base 123 is disposed corresponding to the bottom wall of the inner cylinder 110, the base 123 is connected to the sleeve 122, the isolation plate 121 is disposed between the base 123 and the sleeve 122, and the base 123, the inner cylinder 110 and the isolation plate 121 together surround a second split cavity 132. In this manner, the base 123 can be provided as a separate structure, thereby facilitating assembly and maintenance of the diffusion pump assembly 100.

In one embodiment, referring to fig. 1 and 2, the diffusion pump apparatus 100 further includes a connecting flange 140, an outer wall of the opening is connected to the connecting flange 140, and an end of the sleeve 122 near the opening is connected to the connecting flange 140, wherein the connecting flange 140 is used for connecting the vacuum chamber. Thus, the connection flange 140 is beneficial to being tightly matched with the vacuum cavity, and the outer cylinder body 120 and the connection flange 140 are welded to improve the sealing performance in the first sub-cavity 131, so that the heat insulation effect of the first sub-cavity 131 on the inner cylinder body 110 is ensured.

In one embodiment, referring to fig. 2, the diffusion pump apparatus 100 further includes a cooling conduit 150, the cooling conduit 150 is disposed in the first split cavity 131 around the circumferential sidewall of the inner cylinder 110, and the cooling conduit 150 is used for introducing a cooling medium. For example, the cooling medium is a coolant. In this way, the gaseous high-temperature medium in the diffusion cavity 111 can be cooled by the cooling liquid, and the gaseous high-temperature medium is condensed into a liquid state and flows back to the oil pan along the wall of the pump. The oil is heated again in the oil pan to become oil vapor, and the work is repeated in this way, so that the normal air pumping process of the diffusion pump device 100 is formed.

In one embodiment, referring to fig. 1 and 2, the diffusion pump assembly 100 further includes an exhaust pipe 160, one end of the exhaust pipe 160 is connected to the diffusion chamber 111 through the outer cylinder 120, and the other end of the exhaust pipe 160 is used for backing pump exhaust. Thus, the electric heater in the diffusion chamber 111 heats the oil (or other medium) dedicated to the diffusion pump in the diffusion chamber 111 to change the oil into steam, the steam is ejected at high speed through the pump core nozzle installed in the diffusion chamber 111 to form a low-density high-speed steam jet, and the pumped fluid is diffused into the steam jet through staged compression, is carried away by the next-stage steam jet, and is finally discharged by the backing pump communicated with the exhaust pipe 160.

In one embodiment, the diffusion pump assembly 100 further comprises a filling medium (not shown) disposed in the spacing space 130, the filling medium being used for insulation. So, except that the vacuum insulation temperature, can also keep warm to interior cylinder body 110 through the heat preservation medium to further improve the heat preservation effect, reduce the heat loss.

In one embodiment, referring to fig. 2, the diffusion pump device 100 further includes a spraying tower assembly 170 and a heating member 180, the heating member 180 is disposed on the bottom wall of the inner cylinder 110, the spraying tower assembly 170 is located in the diffusion chamber 111, and the heating member 180 is used for heating the diffusion medium in the diffusion chamber 111. Specifically, the heating member 180 is an electric heater. In this way, the oil (or other medium) dedicated to the diffusion pump installed in the diffusion chamber 111 is heated by the electric heater to be changed into steam, and the steam is ejected at high speed through the nozzle of the spray tower assembly 170 installed in the diffusion chamber 111 to form a low-density high-speed steam jet; the pumped fluid enters the steam jet flow through stage compression and diffusion, is taken away by the next stage of steam jet flow, is finally discharged by the backing pump, and the working steam reaches the water-cooled pump wall and is condensed into liquid state to flow back to the oil pan along the inner wall of the inner cylinder body 110. Is reheated in the oil pan to become oil vapor. This repeated operation forms the normal pumping process of the diffusion pump apparatus 100.

In one embodiment, a vacuum system (not shown) comprises a vacuum chamber and a diffusion pump apparatus 100 as described above, wherein the inner cylinder 110 and the outer cylinder 120 are connected to the vacuum chamber through an opening.

In the working process of the vacuum system, the heating element 180 in the diffusion cavity 111 heats the medium to become steam, and the space 130 in a vacuum state exists between the outer cylinder body 120 and the inner cylinder body 110, so that the vacuum system can isolate the inner cylinder body 110, is beneficial to limiting the temperature conduction in the inner cylinder body 110, reduces the heat dissipation rate of the medium in the diffusion cavity 111, is beneficial to reducing the heat energy loss, and further reduces the overall energy consumption and the production cost of the diffusion pump device 100.

All possible combinations of the technical features of the above embodiments may not be described for the sake of brevity, but should be considered as within the scope of the present disclosure as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only represent several embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the invention. It should be noted that, for those skilled in the art, without departing from the spirit of the present invention, several variations and modifications can be made, which are within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims

1. A diffusion pump apparatus, comprising:

the inner cylinder body is provided with an opening and a diffusion cavity, the opening is communicated with the diffusion cavity, and the diffusion cavity is communicated with the vacuum cavity through the opening;

the outer cylinder body, the outer cylinder body cover is located outside the inner cylinder body, and forms the interval space between outer cylinder body and the inner cylinder body, the interval space is vacuum state.

2. The diffusion pump apparatus according to claim 1, wherein the space includes a first split chamber and a second split chamber, the first split chamber is provided at an interval along a circumferential side wall of the inner cylinder, the second split chamber is provided corresponding to a bottom wall of the inner cylinder, and both the first split chamber and the second split chamber are in a vacuum state.

3. The diffusion pump apparatus of claim 2, further comprising a spacer plate disposed between the first and second split chambers, opposite ends of the spacer plate being in supporting engagement with the inner wall of the outer cylinder and the outer wall of the inner cylinder, respectively.

4. The diffusion pump device of claim 3, wherein the outer cylinder includes a sleeve and a base, the sleeve is sleeved outside the inner cylinder along a circumferential direction of the inner cylinder and encloses the first split cavity, the base is disposed corresponding to a bottom wall of the inner cylinder, the base is connected to the sleeve, the isolation plate is disposed between the base and the sleeve, and the base, the inner cylinder and the isolation plate together enclose the second split cavity.

5. The diffusion pump assembly of claim 4, further comprising a coupling flange, wherein an outer wall of the opening is coupled to the coupling flange, and wherein an end of the sleeve proximate the opening is coupled to the coupling flange, the coupling flange being configured to couple to a vacuum chamber.

6. The diffusion pump apparatus of claim 2, further comprising a cooling conduit disposed within the first split cavity around the circumferential sidewall of the inner cylinder, the cooling conduit for passing a cooling medium.

7. The diffusion pump assembly of claim 1 further comprising an exhaust pipe having one end communicating with the diffusion chamber through the external cylinder and the other end for backing pump exhaust.

8. The diffusion pump apparatus of claim 1, further comprising a fill medium disposed within the spacing space, the fill medium for insulating.

9. The diffusion pump apparatus of any one of claims 1-8, further comprising a spray tower assembly and a heating element, wherein the heating element is disposed on the bottom wall of the inner cylinder, the spray tower assembly is located in the diffusion chamber, and the heating element is used for heating the diffusion medium in the diffusion chamber.

10. A vacuum system comprising a vacuum chamber and a diffusion pump assembly as claimed in any one of claims 1 to 9, wherein said inner cylinder and said outer cylinder communicate with said vacuum chamber through said opening.