CN1229480A - 高耐热照射敏感性抗蚀剂组合物 - Google Patents

高耐热照射敏感性抗蚀剂组合物 Download PDF

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Publication number
CN1229480A
CN1229480A CN98800823A CN98800823A CN1229480A CN 1229480 A CN1229480 A CN 1229480A CN 98800823 A CN98800823 A CN 98800823A CN 98800823 A CN98800823 A CN 98800823A CN 1229480 A CN1229480 A CN 1229480A
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CN
China
Prior art keywords
radiation
resist
group
independently
acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN98800823A
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English (en)
Chinese (zh)
Inventor
伊藤裕美
田中初幸
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Clariant International Ltd
Original Assignee
Clariant International Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Clariant International Ltd filed Critical Clariant International Ltd
Publication of CN1229480A publication Critical patent/CN1229480A/zh
Pending legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • C08G61/02—Macromolecular compounds containing only carbon atoms in the main chain of the macromolecule, e.g. polyxylylenes
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/0045—Photosensitive materials with organic non-macromolecular light-sensitive compounds not otherwise provided for, e.g. dissolution inhibitors
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/022—Quinonediazides
    • G03F7/023—Macromolecular quinonediazides; Macromolecular additives, e.g. binders
    • G03F7/0233—Macromolecular quinonediazides; Macromolecular additives, e.g. binders characterised by the polymeric binders or the macromolecular additives other than the macromolecular quinonediazides
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/039—Macromolecular compounds which are photodegradable, e.g. positive electron resists

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Medicinal Chemistry (AREA)
  • Polymers & Plastics (AREA)
  • Organic Chemistry (AREA)
  • Materials For Photolithography (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
CN98800823A 1997-06-30 1998-06-18 高耐热照射敏感性抗蚀剂组合物 Pending CN1229480A (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP9174578A JPH1124271A (ja) 1997-06-30 1997-06-30 高耐熱性放射線感応性レジスト組成物
JP174578/97 1997-06-30

Publications (1)

Publication Number Publication Date
CN1229480A true CN1229480A (zh) 1999-09-22

Family

ID=15981014

Family Applications (1)

Application Number Title Priority Date Filing Date
CN98800823A Pending CN1229480A (zh) 1997-06-30 1998-06-18 高耐热照射敏感性抗蚀剂组合物

Country Status (6)

Country Link
US (1) US6080522A (enExample)
EP (1) EP0922998A1 (enExample)
JP (1) JPH1124271A (enExample)
KR (1) KR20000068366A (enExample)
CN (1) CN1229480A (enExample)
WO (1) WO1999000704A1 (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102060981B (zh) * 2006-12-20 2012-11-21 第一毛织株式会社 含芳环的聚合物及含有该聚合物的硬掩膜组合物
CN101641390B (zh) * 2007-04-02 2013-05-01 第一毛织株式会社 具有抗反射性能的硬掩模组合物及用其图案化材料的方法
CN101334587B (zh) * 2007-06-29 2014-04-09 株式会社东进世美肯 有机薄膜晶体管用感光性树脂组合物

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3974718B2 (ja) * 1998-11-09 2007-09-12 Ａｚエレクトロニックマテリアルズ株式会社 感放射線性樹脂組成物
DE10033111A1 (de) * 2000-07-07 2002-01-24 Siemens Ag Copolymere halbleitende Materialien auf der Basis von Oligo-Phenylen
EP1260868A3 (en) * 2001-05-18 2003-12-10 Nitto Denko Corporation Method for removing resist material
US7303855B2 (en) 2003-10-03 2007-12-04 Shin-Etsu Chemical Co., Ltd. Photoresist undercoat-forming material and patterning process
TWI338816B (en) * 2005-03-11 2011-03-11 Shinetsu Chemical Co Photoresist undercoat-forming material and patterning process
JP4586039B2 (ja) * 2007-04-06 2010-11-24 大阪瓦斯株式会社 フェノール樹脂およびその製造方法
KR100913058B1 (ko) 2008-08-25 2009-08-20 금호석유화학 주식회사 포지티브형 감광성 수지 조성물, 패턴 형성 방법 및 반도체소자
KR101582462B1 (ko) 2013-08-23 2016-01-06 (주)디엔에프 신규한 중합체 및 이를 포함하는 조성물
WO2015026194A1 (ko) * 2013-08-23 2015-02-26 (주)디엔에프 신규한 중합체 및 이를 포함하는 조성물
JP6778989B2 (ja) * 2015-03-31 2020-11-04 東京応化工業株式会社 化学増幅型ポジ型感光性樹脂組成物
SG11201903455QA (en) 2016-11-10 2019-05-30 Toray Industries Di-Amine Compound, And Heat Resistant Resin And Resin Composition Using The Same
US11905356B2 (en) 2021-03-16 2024-02-20 Nippon Kayaku Kabushiki Kaisha Bismaleimide compound, composition containing same, polybenzoxazole, and semiconductor device
CN119095899A (zh) 2022-04-25 2024-12-06 日本化药株式会社 双马来酰亚胺化合物、使用其的树脂组合物、其硬化物及半导体元件
KR20250087531A (ko) 2022-10-14 2025-06-16 니폰 가야꾸 가부시끼가이샤 수지 조성물, 경화물, 반도체 소자 및 드라이 필름 레지스트
CN119866353A (zh) 2022-10-14 2025-04-22 日本化药株式会社 树脂组合物、硬化物、半导体元件及干膜抗蚀剂
KR20250088484A (ko) 2022-10-14 2025-06-17 니폰 가야꾸 가부시끼가이샤 수지 조성물, 경화물, 반도체 소자 및 드라이 필름 레지스트

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3039048B2 (ja) * 1991-11-01 2000-05-08 住友化学工業株式会社 ポジ型感放射線性レジスト組成物
JP3192548B2 (ja) * 1994-04-22 2001-07-30 東京応化工業株式会社 ポジ型ホトレジスト組成物
US5798422A (en) * 1994-08-25 1998-08-25 Mitsui Toatsu Chemicals, Inc. Aromatic hydroxycarboxylic acid resins and their use
JP3573535B2 (ja) * 1994-08-25 2004-10-06 三井化学株式会社 芳香族ヒドロキシカルボン酸樹脂およびその用途
KR19980701463A (ko) * 1995-01-17 1998-05-15 나까노 가쓰히꼬 포지티브형 레지스트 조성물
JPH0990624A (ja) * 1995-09-27 1997-04-04 Nippon Zeon Co Ltd ポジ型レジスト組成物
KR0164962B1 (ko) * 1995-10-14 1999-01-15 김흥기 포지티브형 포토레지스트 조성물
JP3654714B2 (ja) * 1996-07-03 2005-06-02 三井化学株式会社 サリチル酸系アラルキル樹脂、その製造方法、およびそれを用いたフォトレジスト用樹脂組成物
JP3499088B2 (ja) * 1996-08-01 2004-02-23 三井化学株式会社 サリチル酸系アラルキル樹脂、その製造方法、およびそれを用いたフォトレジスト用樹脂組成物

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102060981B (zh) * 2006-12-20 2012-11-21 第一毛织株式会社 含芳环的聚合物及含有该聚合物的硬掩膜组合物
CN101641390B (zh) * 2007-04-02 2013-05-01 第一毛织株式会社 具有抗反射性能的硬掩模组合物及用其图案化材料的方法
CN101334587B (zh) * 2007-06-29 2014-04-09 株式会社东进世美肯 有机薄膜晶体管用感光性树脂组合物

Also Published As

Publication number Publication date
US6080522A (en) 2000-06-27
EP0922998A1 (en) 1999-06-16
EP0922998A4 (enExample) 1999-07-14
WO1999000704A1 (fr) 1999-01-07
JPH1124271A (ja) 1999-01-29
KR20000068366A (ko) 2000-11-25

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Legal Events

Date Code Title Description
C06 Publication
PB01 Publication
CI01 Publication of corrected invention patent application

Correction item: The eleventh row, the last third rows

Correct: ... And quinone two azide...

False: ... And quinone two azide...

Number: 38

Volume: 15

CI02 Correction of invention patent application

Correction item: The eleventh row, the last third rows

Correct: ... And quinone two azide...

False: ... And quinone two azide...

Number: 38

Page: The title page

Volume: 15

C01 Deemed withdrawal of patent application (patent law 1993)
WD01 Invention patent application deemed withdrawn after publication